Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2012
06/07/2012WO2012073918A1 Semiconductor device and method for manufacturing semiconductor device
06/07/2012WO2012073913A1 Coating liquid for forming metal oxide thin film, metal oxide thin film, field effect transistor, and method for producing the field effect transistor
06/07/2012WO2012073909A1 Substrate cleaner for copper wiring, and method for cleaning copper wiring semiconductor substrate
06/07/2012WO2012073862A1 Semiconductor device, tft substrate, and method for manufacturing semiconductor device and tft substrate
06/07/2012WO2012073844A1 Oxide semiconductor film and semiconductor device
06/07/2012WO2012073765A1 Semiconductor manufacturing apparatus
06/07/2012WO2012073743A1 Liquid supply device and resist developing device
06/07/2012WO2012073739A1 Substrate module
06/07/2012WO2012073695A1 Application apparatus, application method and storage medium
06/07/2012WO2012073673A1 Defect inspection device and defect inspection method
06/07/2012WO2012073609A1 Semiconductor device
06/07/2012WO2012073583A1 Method of forming an inpurity implantation layer
06/07/2012WO2012073574A1 Method for removal of photoresist
06/07/2012WO2012073572A1 Semiconductor device, and process for manufacture of semiconductor device
06/07/2012WO2012073558A1 Substrate for evaluation, defect inspection method and defect inspection apparatus
06/07/2012WO2012073545A1 Method of manufacturing an x-ray diffraction grating microstructure for imaging apparatus
06/07/2012WO2012073522A1 Substrate processing apparatus and substrate processing method
06/07/2012WO2012073489A1 Semiconductor substrate, process for producing semiconductor substrate, and vertical resonator surface emitting laser
06/07/2012WO2012073483A1 Mark detection method, light exposure method and light exposure device, and method for manufacturing device
06/07/2012WO2012073471A1 Nonvolatile memory element and method for manufacturing method same
06/07/2012WO2012073455A1 Process for production of semiconductor thin film, semiconductor device, and display device
06/07/2012WO2012073449A1 Plasma processing device
06/07/2012WO2012073428A1 Ingot cutting method
06/07/2012WO2012073425A1 Defect inspection method and defect inspection device
06/07/2012WO2012073422A1 Inspection apparatus and inspection system
06/07/2012WO2012073417A1 Electronic-component mounted body, electronic component, and circuit board
06/07/2012WO2012073377A1 Spin-coat device
06/07/2012WO2012073317A1 Method of manufacturing recycled semiconductor wafer
06/07/2012WO2012073307A1 Semiconductor device
06/07/2012WO2012073302A1 Semiconductor device
06/07/2012WO2012073286A1 Electronic component classification device
06/07/2012WO2012073282A1 Electronic component holding device, electronic component inspecting device provided therewith, and electronic component classification device
06/07/2012WO2012073196A1 Conveying roller
06/07/2012WO2012073139A1 Method and apparatus for wafer wet processing
06/07/2012WO2012072818A1 Method for measuring a microelectromechanical semiconductor component
06/07/2012WO2012072706A1 Method for treating wafers and dies
06/07/2012WO2012072702A1 Process for fabricating supported thin films
06/07/2012WO2012072646A1 A field effect transistor
06/07/2012WO2012072459A1 A method of high temperature layer transfer
06/07/2012WO2012072406A1 Method for converting semiconductor layers
06/07/2012WO2012072403A1 Method for the hydrogen passivation of semiconductor layers
06/07/2012WO2012072401A1 Method for converting semiconductor layers
06/07/2012WO2012072347A1 Method and device for measuring a microelectromechanical semiconductor component
06/07/2012WO2012072266A1 Device and method for handling workpieces
06/07/2012WO2012072020A1 Metal-oxide-semiconductor field-effect transistor (mosfet) and method for fabricating the same
06/07/2012WO2012071990A1 Method for manufacturing metal-oxide-semiconduct or field-effect transistors
06/07/2012WO2012071988A1 Metal-oxide-semiconductor field-effect transistor and method for manufacturing the same
06/07/2012WO2012071987A1 Semiconductor device and method for manufacturing the same
06/07/2012WO2012071986A1 Method for manufacturing dual-gate oxide semiconductor devices
06/07/2012WO2012071940A1 Method for fabricating fine line
06/07/2012WO2012071878A1 Manufacturing method of a transistor
06/07/2012WO2012071843A1 Semiconductor structure and method of manufacturing the same
06/07/2012WO2012071841A1 Methods for chemical mechanical planarization and fabricating gate last
06/07/2012WO2012071823A1 Semiconductor structure and manufacturing method for the same
06/07/2012WO2012071822A1 Mosfet and manufacturing method for the same
06/07/2012WO2012071814A1 Semiconductor device and manufacturing method thereof
06/07/2012WO2012071813A1 Semiconductor structure and manufacturing method thereof
06/07/2012WO2012071769A1 Mosfet device and manufacturing method thereof
06/07/2012WO2012071763A1 Substrate for integrated circuit and forming method thereof
06/07/2012WO2012071759A1 High density sim card package module and producing method thereof
06/07/2012WO2012071753A1 Method for etching metal, control method for etching metal and apparatus thereof
06/07/2012WO2012071661A1 Epitaxial deposition apparatus, gas injectors, and chemical vapor management system associated therewith
06/07/2012WO2012054155A3 Integrated circuitry comprising nonvolatile memory cells and methods of forming a nonvolatile memory cell
06/07/2012WO2012054032A8 Embedded wells merged pn/schottky diode
06/07/2012WO2012050770A3 Method of mitigating substrate damage during deposition processes
06/07/2012WO2012050684A3 Sti-aligned ldmos drift implant to enhance manufacturability while optimizing rdson and safe operating area
06/07/2012WO2012050307A3 Apparatus and method for sawing single crystal ingot
06/07/2012WO2012047913A3 Subtractive patterning to define circuit components
06/07/2012WO2012047742A3 Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
06/07/2012WO2012047459A3 Selective etch process for silicon nitride
06/07/2012WO2012046991A3 Patterning method of semiconductor and semiconductor device that contains pattern formed by patterning method
06/07/2012WO2012043995A3 Wafer alignment-rear surface test device
06/07/2012WO2012040734A3 Barrier layers
06/07/2012WO2012040075A3 Non-planar device having uniaxially strained fin and method of making same
06/07/2012WO2012039932A3 Methods for forming layers on a substrate
06/07/2012WO2012039850A3 Method of improving mechanical properties of semiconductor interconnects with nanoparticles
06/07/2012WO2012037216A3 Staged via formation from both sides of chip
06/07/2012WO2012037136A3 Improved lateral uniformity in silicon recess etch
06/07/2012WO2012036491A3 Plasma treatment device using leakage current transformer
06/07/2012WO2012033717A3 Embedded catalyst for atomic layer deposition of silicon oxide
06/07/2012WO2012031818A3 Lithography using self-assembled polymers
06/07/2012WO2012031238A3 Uniform multilayer graphene by chemical vapor deposition
06/07/2012WO2012028793A3 Treatment, before the bonding of a mixed copper oxide surface, by a plasma containing nitrogen and hydrogen
06/07/2012WO2012024544A3 Variable resistance memory element and fabrication methods
06/07/2012WO2012021498A3 Multiple exposure with image reversal in a single photoresist layer
06/07/2012WO2012020355A3 Methods for preventing corrosion of plasma-exposed yttria coated constituents
06/07/2012WO2012019144A3 Substrate edge tuning with retaining ring
06/07/2012WO2012017378A3 Methods for stabilizing contact surfaces of electrostatic chucks
06/07/2012WO2012016258A3 Adhesive for fixing and/or embedding an electronic component and method and use
06/07/2012WO2012010139A4 Precision machine tool
06/07/2012WO2011149215A9 Method for preparing polycrystalline silicon thin film
06/07/2012WO2011058106A3 Method for forming thin semiconductor substrates for producing solar cells
06/07/2012US20120142515 Dielectric composition for thin-film transistors
06/07/2012US20120142258 Polishing Composition and Polishing Method Using The Same
06/07/2012US20120142198 Wet oxidation process performed on a dielectric material formed from a flowable cvd process
06/07/2012US20120142197 Combinatorial process system
06/07/2012US20120142196 Processing assembly for semiconductor workpiece and methods of processing same
06/07/2012US20120142195 Composition for forming resist underlayer film for lithography including resin containing alicyclic ring and aromatic ring
06/07/2012US20120142194 Method of forming semiconductor memory device
06/07/2012US20120142193 Resist underlayer film composition and patterning process using the same