Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2012
05/31/2012WO2012071341A2 Method for reducing the range in resistivities of semiconductor crystalline sheets grown in a multi-lane furnace
05/31/2012WO2012071325A1 Lead structures with vertical offsets
05/31/2012WO2012071302A2 Interchangeable pumping rings to control path of process gas flow
05/31/2012WO2012071301A1 Using low pressure epi to enable low rdson fet
05/31/2012WO2012071299A2 Ultra thin die to improve series resistance of a fet
05/31/2012WO2012071296A2 An -nh- terminated silicon surface and a method for its preparation
05/31/2012WO2012071288A1 Semiconductor inks, films, coated substrates and methods of preparation
05/31/2012WO2012071272A2 Layer structures for controlling stress of heteroepitaxially grown iii-nitride layers
05/31/2012WO2012071193A2 Double patterning with inline critical dimension slimming
05/31/2012WO2012071192A2 Sidewall image transfer pitch doubling and inline critical dimension slimming
05/31/2012WO2012071163A2 Composite removable hardmask
05/31/2012WO2012071130A2 Dual-bulb lamphead control methodology
05/31/2012WO2012071091A1 Method of forming e-fuse in replacement metal gate manufacturing process
05/31/2012WO2012071002A1 A method and an apparatus for forming electrically conductive vias in a substrate, an automated robot-based manufacturing system, a component comprising a substrate with via holes, and an interposer device
05/31/2012WO2012070926A1 Semiconductor device with minimal pattern distortion and processes for fabricating semiconductor devices thereof
05/31/2012WO2012070821A2 Layout library of flip-flop circuit
05/31/2012WO2012070676A1 Oxide for semiconductor layer of thin-film transistor, spattering target, and thin-film transistor
05/31/2012WO2012070675A1 Oxide for semiconductor layer of thin-film transistor, spattering target, and thin-film transistor
05/31/2012WO2012070651A1 Exposure equipment
05/31/2012WO2012070612A1 Method for producing electronic device, electronic device, method for producing electronic device package, electronic device package, and method for producing semiconductor device
05/31/2012WO2012070590A1 Resin composition, insulating film, film forming method, and electronic component
05/31/2012WO2012070551A1 Device for manufacturing and method for manufacturing memory element
05/31/2012WO2012070549A1 Global alignment using multiple alignment pattern candidates
05/31/2012WO2012070548A1 Radiation-sensitive composition and compound
05/31/2012WO2012070546A1 Transfer device and method for producing resin pattern
05/31/2012WO2012070544A1 Method for producing abrasive grains, method for producing slurry, and method for producing polishing liquid
05/31/2012WO2012070542A1 Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate
05/31/2012WO2012070541A1 Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate
05/31/2012WO2012070521A1 Semiconductor device and method for manufacturing same
05/31/2012WO2012070496A1 Substrate transport device
05/31/2012WO2012070483A1 Flexible device, method for manufacturing same, and display device
05/31/2012WO2012070480A1 Transfer substrate for forming metal wiring and method for forming metal wiring using said transfer substrate
05/31/2012WO2012070403A1 Disiloxane derivative having silacycloalkane structure, method for producing disiloxane derivative, film produced using disiloxane derivative, method for producing this film, and material and electronic device using this film
05/31/2012WO2012070387A1 Epoxy resin and resin composition
05/31/2012WO2012070385A1 Conductive thin film containing graphene, and transparent conductive film
05/31/2012WO2012070368A1 Method for manufacturing silicon carbide semiconductor device and apparatus for manufacturing silicon carbide semiconductor device
05/31/2012WO2012070262A1 Binding material, binding body, and binding method
05/31/2012WO2012070168A1 Semiconductor chip and semiconductor device
05/31/2012WO2012070163A1 Semiconductor device and process for production thereof
05/31/2012WO2012070151A1 Semiconductor device and method of producing semiconductor device
05/31/2012WO2012070096A1 Non-volatile memory device and production method thereof
05/31/2012WO2012069606A2 Process for fabricating a field-effect transistor device implemented on a network of vertical nanowires, the resulting transistor device, an electronic device comprising such transistor devices and a processor comprising at least one such device
05/31/2012WO2012069521A1 Improved template layers for heteroepitaxial deposition of iii nitride semiconductor materials using hvpe processes
05/31/2012WO2012069520A1 Methods of forming bulk iii-nitride materials on metal-nitride growth template layers, and structures formed by such methods
05/31/2012WO2012069244A1 Method for curing an electrically-conductive adhesive and a contact point between two joining partners
05/31/2012WO2012069208A1 Substrate holder for the surface treatment of substrates, and use of the substrate holder
05/31/2012WO2012069189A1 Conductor track arrangement for portable data storage medium
05/31/2012WO2012069078A1 Eutectic bonding of thin chips on a carrier substrate
05/31/2012WO2012068928A1 Composite-source structure low-power consumption mos transistor and preparation method thereof
05/31/2012WO2012068825A1 Shallow trench isolation structure and method thereof
05/31/2012WO2012068797A1 Semiconductor device and manufacturing method thereof
05/31/2012WO2012068777A1 Method of fabricating semiconductor substrate for fabricating high power device
05/31/2012WO2012068763A1 Gird-array ic chip package without carrier and manufacturing method thereof
05/31/2012WO2012068762A1 Ic chip package of sip system integration level and manufacturing method thereof
05/31/2012WO2012068754A1 Method for manufacturing pixel array of liquid crystal display
05/31/2012WO2012068752A1 Methods for manufacturing passivation layer and thin film transistor array substrate
05/31/2012WO2012068751A1 Absorption device for rotatable heating
05/31/2012WO2012068748A1 Liquid crystal display panel and manufacturing method thereof
05/31/2012WO2012068745A1 Double arm type mechanical arm and method for conveying plate thereof
05/31/2012WO2012047458A3 Integrated circuit and interconnect, and method of fabricating same
05/31/2012WO2012040743A3 Electrolytic gold or gold palladium surface finish application in coreless substrate processing
05/31/2012WO2012040078A3 Transistor structure for improved static control during formation of the transistor
05/31/2012WO2012039885A3 System and method for current-based plasma excursion detection
05/31/2012WO2012037140A3 Integrated circuits with through-substrate vias
05/31/2012WO2012036963A3 Integrated platform for in-situ doping and activation of substrates
05/31/2012WO2012036923A3 Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same
05/31/2012WO2012036808A3 Smooth silicon-containing films
05/31/2012WO2012033922A3 High conductivity electrostatic chuck
05/31/2012WO2012033301A3 Wafer inspection device and wafer inspection system comprising same
05/31/2012WO2012030830A3 Reticle defect inspection with model-based thin line approaches
05/31/2012WO2012030825A3 Wafer plane detection of lithographically significant contamination photomask defects
05/31/2012WO2012030143A3 Susceptor and method for manufacturing the same
05/31/2012WO2012027377A3 Double-sided multi-layer adhesive
05/31/2012WO2012024374A3 Cmp slurry recycling system and methods
05/31/2012WO2012023764A3 Method of manufacturing an led module
05/31/2012WO2012019017A3 Electrostatic chuck and methods of use thereof
05/31/2012WO2012017796A9 Semiconductor device and process for production thereof
05/31/2012WO2012016231A3 Systems, apparatuses, and methods for chemically processing substrates using the coanda effect
05/31/2012WO2012016084A3 Substrate processing apparatuses and systems
05/31/2012WO2012015550A9 Semiconductor device and structure
05/31/2012WO2012006991A3 Semiconductor element and method for producing the same
05/31/2012WO2012003148A3 Thermoformed ic trays of poly(phenylene ether) compositions
05/31/2012WO2011163455A3 Pre-clean chamber with reduced ion current
05/31/2012WO2011130014A3 Pulsed plasma to affect conformal processing
05/31/2012WO2011127907A3 Method and device for forming solder deposits on raised contact metallization structures
05/31/2012WO2011056531A3 Manufacture of n-type chalcogenide compositions and their uses in photovoltaic devices
05/31/2012US20120136601 Method and System of Improved Uniformity Testing
05/31/2012US20120136476 Damaged substrate handling apparatus and method for substrate processing systems
05/31/2012US20120136471 Substrate apparatus calibration and synchronization procedure
05/31/2012US20120135612 Film forming method, pretreatment device, and processing system
05/31/2012US20120135611 Method of manufacturing porous insulating film
05/31/2012US20120135610 System and method for processing substrate
05/31/2012US20120135609 Apparatus and Process for Atomic Layer Deposition
05/31/2012US20120135608 Substrate processing method
05/31/2012US20120135607 Substrate processing method
05/31/2012US20120135606 Laser processing method
05/31/2012US20120135605 Method for forming side-contact region in semiconductor device
05/31/2012US20120135604 Processing liquid for suppressing pattern collapse of fine metal structure, and method for producing fine metal structure using same
05/31/2012US20120135603 Methods for increased array feature density
05/31/2012US20120135602 Method for manufacturing semiconductor device
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