Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2012
06/06/2012CN102487035A Deposition method of ILD with ultra low k (ULK) and porous structure
06/06/2012CN102487034A Preparation method of shallow trench isolation structure
06/06/2012CN102487033A Method for forming standard SOI (Silicon On Insulator) structure
06/06/2012CN102487032A Method for forming shallow-trench isolating structure
06/06/2012CN102487031A Method for forming trench isolation
06/06/2012CN102487030A Double-workpiece-platform clamping mechanism
06/06/2012CN102487029A Electrostatic chuck and plasma device therewith
06/06/2012CN102487028A Movable device and method used for controlling crystalline grain joint
06/06/2012CN102487027A Method for determining wet etching process window
06/06/2012CN102487026A Method for detecting defect of through holes
06/06/2012CN102487025A Support for long combined lead
06/06/2012CN102487024A SOI/III-V full wafer bonding method adopting three-dimensional vent-hole device
06/06/2012CN102487023A Salient point and forming method thereof
06/06/2012CN102487022A Packaging protection method of COB (chip on board) module
06/06/2012CN102487021A Semiconductor device and method of forming pad layout for flipchip semiconductor die
06/06/2012CN102487020A Semiconductor device and method of forming bump-on-lead interconnection
06/06/2012CN102487019A Method for manufacturing chip packaging piece
06/06/2012CN102487018A MOS transistor and a formation method thereof
06/06/2012CN102487017A Manufacturing method of strain CMOS device
06/06/2012CN102487016A Preparation method of transistor
06/06/2012CN102487015A Semiconductor structure and manufacturing method thereof
06/06/2012CN102487014A Semiconductor structure and manufacture method thereof
06/06/2012CN102487013A Method for forming grid
06/06/2012CN102487012A Manufacturing method of transistor
06/06/2012CN102487011A Low voltage inverted well implantation method of laterally diffused metal oxide semiconductor device
06/06/2012CN102487010A Method for forming metal grid and MOS (Metal Oxide Semiconductor) transistor
06/06/2012CN102487009A Manufacturing method of source electrode and drain electrode of N metal-oxide semiconductor field effect transistor (MOS) device
06/06/2012CN102487008A Semiconductor device and method for forming the same
06/06/2012CN102487007A Method for forming semiconductor device
06/06/2012CN102487006A Semiconductor device and forming method thereof
06/06/2012CN102487005A Method for enhancing n channel electronic activity
06/06/2012CN102487004A Method for filling isolating groove by utilizing chemical gas deposition
06/06/2012CN102487003A Method for forming auxiliary side wall
06/06/2012CN102487002A Method for manufacturing connecting piece
06/06/2012CN102487001A Method for improving uniformity of dielectric layer
06/06/2012CN102487000A Grid-region etching method and system
06/06/2012CN102486999A Forming method of grid oxidation layer
06/06/2012CN102486998A Method for forming grid
06/06/2012CN102486997A Method for preparing PN (Positive-Negative) junctions by utilizing solid-state phosphorus source for assisting dispersion of phosphorus source gas
06/06/2012CN102486996A Dual patterning method
06/06/2012CN102486995A Dynamic wafer alignment method and exposure scanner system
06/06/2012CN102486994A Silicon wafer cleaning process
06/06/2012CN102486993A Preparation method of doped graphene and application of doped graphene
06/06/2012CN102486992A Manufacturing method of semiconductor device
06/06/2012CN102486991A Method of wafer surface photoresist edge removing
06/06/2012CN102486990A Method for removing residual polymers from protecting layer of semiconductor device
06/06/2012CN102486989A Method and loading plate for degumming cleaning silicon wafer
06/06/2012CN102486988A Vacuum transmission process equipment
06/06/2012CN102486987A Etching method and system
06/06/2012CN102486986A 等离子清洁装置 Plasma cleaning device
06/06/2012CN102486604A Phase shift mask, manufacturing method thereof and haze defect detection method thereof
06/06/2012CN102486587A Pixel structure and formation method of liquid crystal display
06/06/2012CN102486444A Method for detecting film stress
06/06/2012CN102485951A Method for depositing medium oxide between layers of metal front layer
06/06/2012CN102485935A Vapor chamber and substrate processing equipment applied with the vapor chamber
06/06/2012CN102485420A Processing method capable of reducing surface roughness and surface damage of silicon wafer
06/06/2012CN102485358A Wafer cleaning device and method
06/06/2012CN102148215B Interconnection structure for improving reliability of soldering spot of soft soldering of CCGA (Ceramic Column Grid Array) device and implementation method
06/06/2012CN102135672B Hot-pressing sticking mechanism
06/06/2012CN102110605B Method and device for manufacturing insulated gate bipolar transistor (IGBT) chip
06/06/2012CN102097319B Method for manufacturing semiconductor device
06/06/2012CN102054700B Method for manufacturing PMOS (P-channel metal oxide semiconductor) transistor
06/06/2012CN102054683B Rework method of chemically mechanical polishing in copper interconnection process
06/06/2012CN102044448B Method for manufacturing LED (Light-Emitting Diode) device
06/06/2012CN102044428B Method for thinning wafer
06/06/2012CN102044427B Forming method of copper interconnecting wire and electroplating device
06/06/2012CN102013387B Metal disc winding for etching equipment and assembly method thereof
06/06/2012CN101944497B Position deviation preventing device, substrate holding member including the same, substrate transfer apparatus and substrate transfer method
06/06/2012CN101937848B MOS (Metal-oxide Semiconductor) transistor and making method thereof
06/06/2012CN101937839B System for manufacturing a flat panel type display
06/06/2012CN101901739B Substrate cooling method, substrate cooling system and substrate processing device
06/06/2012CN101887186B Array substrate for dislay device and method of fabricating the same
06/06/2012CN101882596B Method for etching metal layer
06/06/2012CN101859800B TFT substrate with higher carrier transmission characteristics and preparation method thereof
06/06/2012CN101855719B Load lock apparatus and substrate cooling method
06/06/2012CN101853830B 半导体装置及其制造方法 Semiconductor device and manufacturing method
06/06/2012CN101853800B Working stage with antistatic treatment
06/06/2012CN101853785B Method for preparing longitudinal high-pressure boron diffusion deep groove semiconductor pipe
06/06/2012CN101853774B Heating cavity and semiconductor processing device
06/06/2012CN101840163B Illumination source and photomask optimization
06/06/2012CN101831247B Adhesive composition, circuit connecting material, connecting structure for circuit member, and semiconductor device
06/06/2012CN101828254B Module, wiring board and module manufacturing method
06/06/2012CN101826539B Solid-state image capturing device, method of manufacturing solid-state image capturing device, and image capturing apparatus
06/06/2012CN101821836B Charge neutralization in plasma processing apparatus
06/06/2012CN101802256B Exhaust system structure of film forming apparatus, film forming apparatus and method of disposing of exhaust gas
06/06/2012CN101770974B Method for fabricating shallow-trench isolation structure
06/06/2012CN101770963B Method of forming conductive layer and semiconductor device
06/06/2012CN101764105B Circuit board with hollow space portion and method for manufacturing the same, manufacture method of circuit device using the circuit board
06/06/2012CN101740610B Reflector, display device and manufacturing method thereof
06/06/2012CN101740379B Method for eliminating surface defect of semiconductor device and semiconductor device
06/06/2012CN101738870B Proximity exposure apparatus, method of delivering a mask of a proximity exposure apparatus and method of manufacturing a display panel substrate
06/06/2012CN101681810B Moving body driving method and apparatus, exposure method and apparatus, pattern forming method and apparatus, and device manufacturing method
06/06/2012CN101673048B Mask pattern inspection method, exposure condition verification method, and manufacturing method of semiconductor device
06/06/2012CN101663348B Polyimide precursor, polyimide, and coating solution for under layer film for image formation
06/06/2012CN101657890B Method for manufacturing chip with adhesive
06/06/2012CN101657883B Method for forming fine patterns
06/06/2012CN101648642B Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
06/06/2012CN101644891B Positively photosensitive insulating resin composition and cured object obtained therefrom
06/06/2012CN101621074B Semiconductor device and method for fabricating the same
06/06/2012CN101611475B System for in-situ reclaim of volatile components, adjacent head and method
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