Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2012
12/27/2012WO2012176106A2 Method and apparatus for inspection of light emitting semiconductor devices using photoluminescence imaging
12/27/2012WO2012176060A1 Semiconductor cleaner systems and methods
12/27/2012WO2012176044A1 Method of fabrication of a semiconductor substrate comprising porous silicon
12/27/2012WO2012176031A1 Method of fabrication of a semiconductor substrate and a semiconductor substrate
12/27/2012WO2012176030A1 Method for manufacturing a semiconductor substrate, and a semiconductor substrate
12/27/2012WO2012175718A1 Method of manufacturing a spectrum analyzing sensor
12/27/2012WO2012175561A1 Method for transferring a layer of semiconductor, and substrate comprising a confinement structure
12/27/2012WO2012175473A2 Method for calibrating a robot mounted on active magnetic bearings
12/27/2012WO2012174872A1 Germanium-based nmos device and preparation method therefor
12/27/2012WO2012174871A1 A germanium-based nmos device and a manufacturing method thereof
12/27/2012WO2012174850A1 Semiconductor structure and manufacturing method thereof
12/27/2012WO2012174833A1 Plastic packaged chip and manufacturing method thereof
12/27/2012WO2012174822A1 Method for manufacturing semiconductor field effect transistor
12/27/2012WO2012174791A1 Semiconductor structure and method for manufacturing the same
12/27/2012WO2012174771A1 Mosfet and manufacturing method thereof
12/27/2012WO2012174770A1 Semiconductor structure and manufacturing method thereof
12/27/2012WO2012174769A1 Mosfet and manufacturing method thereof
12/27/2012WO2012174707A1 Dies prepeeling apparatus and method
12/27/2012WO2012174696A1 Semiconductor device and the manufacturing method thereof
12/27/2012WO2012174695A1 Monitoring method after removing polycrystalline silicon dummy gate
12/27/2012WO2012174694A1 Semiconductor device and fabricating method thereof
12/27/2012WO2012174689A1 Method for forming strained semiconductor channel
12/27/2012WO2012154468A3 Deep ultra-violet light sources for wafer and reticle inspection systems
12/27/2012WO2012150323A3 Bipolar punch-through semiconductor device and method for manufacturing such a semiconductor device
12/27/2012WO2012149029A3 Optically absorptive material for alignment marks
12/27/2012WO2012148862A3 Eddy current monitoring of metal residue or metal pillars
12/27/2012WO2012148606A3 Method and system for forming non-manhattan patterns using variable shaped beam lithography
12/27/2012WO2012145219A3 Improved lamphead atmosphere
12/27/2012WO2012145148A3 Low temperature silicon oxide conversion
12/27/2012WO2012145097A3 Independently voltage controlled volume of silicon on a silicon on insulator chip
12/27/2012WO2012143858A3 Thin-film photovoltaic device and fabrication method
12/27/2012WO2012138615A3 Oxic germanium-antimony-tellurium material and phase change memory comprising same
12/27/2012WO2012135863A3 Substrate shipper with locking device
12/27/2012WO2012135706A3 Alignment system for electronic device testing
12/27/2012WO2012134867A3 Design-based inspection using repeating structures
12/27/2012WO2012134092A3 Method of manufacturing single crystal ingot, and single crystal ingot and wafer manufactured thereby
12/27/2012WO2012129454A3 Cluster ion implantation of arsenic and phosphorus
12/27/2012WO2012129153A3 Solder in cavity interconnection structures
12/27/2012WO2012128593A3 Sensor having an embedded electrode, and method for manufacturing same
12/27/2012WO2012125654A3 Methods for etch of metal and metal-oxide films
12/27/2012WO2012125647A3 Euv actinic reticle inspection system using imaging sensor with thin film spectral purity filter coating
12/27/2012WO2012125469A3 Off-angled heating of the underside of a substrate using a lamp assembly
12/27/2012WO2012125009A3 Chemically amplified positive photosensitive composition for an organic insulation film, and method for forming an organic insulation film using same
12/27/2012WO2012124909A9 Curing system and method for manufacturing method thereofsame
12/27/2012WO2012122283A3 Surface scanning inspection system with independently adjustable scan pitch
12/27/2012WO2012122054A3 Hybrid ceramic showerhead
12/27/2012WO2012121563A3 Method for recycling spent cmp pad conditioner and cmp pad recycled thereby
12/27/2012WO2012121548A3 Conditioner for fragile pad and method for manufacturing same
12/27/2012WO2012115913A3 Methods and apparatus for a multi-zone pedestal heater
12/27/2012WO2012110465A4 System for magnetic shielding
12/27/2012WO2012103091A3 Abrasive free silicon chemical mechanical planarization
12/27/2012WO2012099928A3 Structure and method for reduction of vt-w effect in high-k metal gate devices
12/27/2012WO2012099685A3 Arrays of nonvolatile memory cells and methods of forming arrays of nonvolatile memory cells
12/27/2012WO2012099635A3 Electron beam processing with condensed ice
12/27/2012WO2012094156A3 Methods and apparatus for data analysis
12/27/2012WO2012083230A3 High efficiency rectifier
12/27/2012US20120329373 Double-side polishing apparatus
12/27/2012US20120329369 Substrate processing method and substrate processing apparatus
12/27/2012US20120329291 Heat treatment method and heat treatment apparatus
12/27/2012US20120329290 Substrate Placement Stage, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
12/27/2012US20120329289 Method and System for Forming Patterns with Charged Particle Beam Lithography
12/27/2012US20120329288 Method and System for Pre-heating of Semiconductor Material for Laser Annealing and Gas Immersion Laser Doping
12/27/2012US20120329287 LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT
12/27/2012US20120329286 Semiconductor device manufacturing method, substrate processing method, substrate processing apparatus and recording medium
12/27/2012US20120329285 Gate dielectric layer forming method
12/27/2012US20120329284 Semiconductor device manufacturing method and method for reducing microroughness of semiconductor surface
12/27/2012US20120329283 Multiple gas plasma forming method and icp source
12/27/2012US20120329282 Method and material for forming a double exposure lithography pattern
12/27/2012US20120329281 Method of manufacturing semiconductor device
12/27/2012US20120329280 Method for forming photoresist patterns
12/27/2012US20120329279 CMP Slurry/Method for Polishing Ruthenium and Other Films
12/27/2012US20120329278 Dispenser for chemical-mechanical polishing (cmp) apparatus, cmp apparatus having the dispenser, and cmp process using the cmp apparatus
12/27/2012US20120329277 Two-sided semiconductor structure
12/27/2012US20120329276 Method for manufacturing a through hole electrode substrate
12/27/2012US20120329275 Borderless interconnect line structure self-aligned to upper and lower level contact vias
12/27/2012US20120329274 Method of fabricating a cell contact and a digit line for a semiconductor device
12/27/2012US20120329273 Homogeneous porous low dielectric constant materials
12/27/2012US20120329272 Method for forming small dimension openings in the organic masking layer of tri-layer lithography
12/27/2012US20120329271 Discontinuous/non-uniform metal cap structure and process for interconnect integration
12/27/2012US20120329270 Surface repair structure and process for interconnect applications
12/27/2012US20120329269 Methods to mitigate plasma damage in organosilicate dielectrics
12/27/2012US20120329268 Method of making a semiconductor device
12/27/2012US20120329267 Interconnect structures and methods for back end of the line integration
12/27/2012US20120329266 Layout method and method of manufacturing semiconductor device
12/27/2012US20120329265 Methods and structures for controlling wafer curvature
12/27/2012US20120329264 Reflow System and Method for Conductive Connections
12/27/2012US20120329263 Method of forming a bond pad design for improved routing and reduced package stress
12/27/2012US20120329262 Methods for manufacturing semiconductor devices using etch stop dielectric layers and related devices
12/27/2012US20120329261 Manufacturing method for metal gate
12/27/2012US20120329260 Graphene transistor with a self-aligned gate
12/27/2012US20120329259 Method for fabricating metal-oxide- semiconductor field-effect transistor
12/27/2012US20120329258 Methods of forming semiconductor devices having diffusion regions of reduced width
12/27/2012US20120329257 Method for manufacturing semiconductor device
12/27/2012US20120329256 Method of manufacturing semiconductor device and ion implanter
12/27/2012US20120329255 Out-of-plane mems resonator with static out-of-plane deflection
12/27/2012US20120329254 Method for Forming Antimony-Based FETs Monolithically
12/27/2012US20120329253 Method of manufacturing semiconductor device
12/27/2012US20120329252 Semiconductor device and method of fabricating the same
12/27/2012US20120329251 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices
12/27/2012US20120329250 Method of manufacturing semiconductor device
1 ... 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 ... 6590