Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2013
02/27/2013CN102945804A Method for manufacturing trench gate type IGBT (insulated gate bipolar transistor) chip
02/27/2013CN102945803A Method for preparing nitrogen-free medium anti-reflection layer film
02/27/2013CN102945802A Wet etching device and etching method
02/27/2013CN102945801A Integrated method for graphene surface high k gate dielectric
02/27/2013CN102945800A Post-deposition encapsulation of nanostructures: compositions, devices and systems incorporating same
02/27/2013CN102945799A Method for manufacturing longitudinal power semiconductor device
02/27/2013CN102945798A Laser treatment growing method for ultrathin oxide layer and device thereof
02/27/2013CN102945797A Diffusing process with low temperature, low surface concentration and high sheet resistance
02/27/2013CN102945796A Diffusion process channel of diffusion type constant-pressure gas carrying impurity source
02/27/2013CN102945795A Preparation method of wide-forbidden-band semiconductor flexible substrate
02/27/2013CN102945794A Two-dimensional electronic material device and mixed photoetching method thereof
02/27/2013CN102945793A Pre-cleaning method for epitaxial growth of Ge-Si stress layer
02/27/2013CN102945792A Improving method of adverse effect on oxide etch-back of groove side wall
02/27/2013CN102945791A Preparation method of silicon nanowire array
02/27/2013CN102945790A Carrier joint and separation technology of semiconductor wafer
02/27/2013CN102945789A Preparation method of low-temperature polycrystalline silicon film, thin-film transistor and preparation method of thin-film transistor
02/27/2013CN102945788A Shielding device and semiconductor processing equipment using same
02/27/2013CN102945784A Dry etching uniformity optimization device and method
02/27/2013CN102944975A Mask plate and manufacturing method thereof, and array substrate manufacturing method
02/27/2013CN102944974A Mask plate and array substrate manufacturing method
02/27/2013CN102944959A Array substrate, producing method and testing method thereof and display device
02/27/2013CN102944709A Electric meter module structure realized by adopting multi-chip system-level packaging technology and packaging method thereof
02/27/2013CN102942881A Adhesive sheet, and connecting structure for circuit member and semiconductor device which use the adhesive sheet
02/27/2013CN102941530A Polishing apparatus and substrate
02/27/2013CN102941522A Polishing apparatus
02/27/2013CN102941201A Automatic machine transmission part washing method and machine transmission part
02/27/2013CN102354669B Production method of silicon nano-wire device
02/27/2013CN102328827B Graphite boat trolley for plasma enhanced chemical vapor deposition (PECVD) automatic wafer loading and unloading system
02/27/2013CN102299058B Method for manufacturing micro-electronic part by using nanometer materials with multilevel heterostructure
02/27/2013CN102290355B Discharge device for integrated circuit package mold
02/27/2013CN102280400B Wafer aligning method in laser beam processing
02/27/2013CN102227000B Silicon-carbide MOSFET (metal-oxide-semiconductor field-effect transistor) device based on super junctions and manufacturing method thereof
02/27/2013CN102222617B Manufacturing method of high density structure of trench power semiconductor
02/27/2013CN102208339B Silicon-carbide-base compound substrate and manufacturing method thereof
02/27/2013CN102194714B Semiconductor packaging device with resin material loading photoelectric detection device
02/27/2013CN102194684B Grid dielectric layer manufacturing method
02/27/2013CN102171825B Power module and encapsulation and integration method thereof
02/27/2013CN102171821B Waterproof structure for bonding pad, waterproof bonding pad and method for forming waterproof structure
02/27/2013CN102169816B Shielding electrode device in ultra-shallow junction deep ultraviolet laser annealing apparatus
02/27/2013CN102148132B 光学检测装置 Optical detection means
02/27/2013CN102142429B Plasma induced damage (PID) detection structure and manufacture method thereof
02/27/2013CN102104044B Separate gate flash memory and manufacturing method thereof
02/27/2013CN102067295B Method and apparatus for cutting substrate
02/27/2013CN102054779B Method for forming shallow trench isolation structure
02/27/2013CN102044433B Mixed source-drain electrode field effect transistor and manufacturing method thereof
02/27/2013CN102034772B Diamond-bottom semiconductor device and relevant method thereof
02/27/2013CN102027576B Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations
02/27/2013CN102024686B Semiconductor manufacturing process and apparatus used for the same
02/27/2013CN102010669B Method for preparing CMP (Chemically Mechanical Polishing) solution for sapphire substrate material
02/27/2013CN102010664B Method for preparing CMP (Chemical Mechanical Polishing) polishing solution of hard disc indium phosphide substrate
02/27/2013CN101996988B 电子装置及其制造方法 Electronic device and method of manufacturing
02/27/2013CN101996838B 容器 Container
02/27/2013CN101989601B Semiconductor device and method for manufacturing same
02/27/2013CN101952953B Method for formation of siliceous film and siliceous film formed by the method
02/27/2013CN101944499B Support frame for material loading of lead frame
02/27/2013CN101925977B Apparatus for repairing photomask and repairing method using same
02/27/2013CN101924015B Gas input device and semiconductor processing device
02/27/2013CN101924002B Heating device and plasma treatment equipment using same
02/27/2013CN101899715B Plasma processing device and thimble lifting device thereof
02/27/2013CN101894827B Test wafer for gluing and edge cleaning detection
02/27/2013CN101826595B WOx-based resistance type memory and preparation method thereof
02/27/2013CN101826561B Method of forming stacked capacitor dram cells
02/27/2013CN101816064B Method for ethcing silicon
02/27/2013CN101814433B Lateral bipolar junction transistor and method for manufacturing the same
02/27/2013CN101800170B Method for producing group iii nitride semiconductor and template substrate
02/27/2013CN101789439B Resistive random access memory used in flexible circuits and production method thereof
02/27/2013CN101789425B Semiconductor element, electric circuit, display device and light-emitting device
02/27/2013CN101770946B Substrate processing method
02/27/2013CN101767717B Method for transferring a substrate to two or more process modules
02/27/2013CN101755326B Reducing transistor junction capacitance by recessing drain and source regions
02/27/2013CN101752400B Image display device, image display system and manufacturing method thereof
02/27/2013CN101690420B Boron nitride and boron nitride-derived materials deposition method
02/27/2013CN101673673B Method for forming epitaxial wafer and epitaxial wafer formed by using same
02/27/2013CN101673671B Method for manufacturing high-resistance resistors
02/27/2013CN101663733B Method for manufacturing soi substrate and semiconductor device
02/27/2013CN101640201B Method of manufacturing high-integrated semiconductor device and semiconductor device manufactured using the same
02/27/2013CN101604641B Carrying method and carrying device of conductive ball
02/27/2013CN101599463B Method for manufacturing CMOS embedded Schottky diode
02/27/2013CN101577217B Breaking apparatus for membraniform adhesive and breaking method thereof
02/27/2013CN101552313B Magnetic field excitation LED on-line detection method
02/27/2013CN101521246B 成像探测器 Imaging Detectors
02/27/2013CN101512740B Method and apparatus for forming nickel silicide with low defect density in FET devices
02/27/2013CN101471304B Method for fabricating semiconductor device with vertical channel transistor
02/27/2013CN101453822B Nozzle and reaction cavity
02/27/2013CN101432859B An soi transistor having an embedded strain layer and a reduced floating body effect and a method for forming the same
02/27/2013CN101390253B Ceramic antenna module and methods of manufacture thereof
02/27/2013CN101373731B Electrostatic chuck apparatus and temperature control method thereof
02/27/2013CN101290905B Display panel and wire manufacturing method thereof
02/26/2013US8386984 Interconnect routing methods of integrated circuit designs
02/26/2013US8386883 Lengthening life of a limited life memory
02/26/2013US8384888 Mask defect measurement method, mask quality determination and method, and manufacturing method of semiconductor device
02/26/2013US8384809 Solid-state imaging device and method of manufacturing the same, and imaging apparatus
02/26/2013US8384699 Semiconductor device
02/26/2013US8384657 Semiconductor device
02/26/2013US8384508 Method for making high-performance RF integrated circuits
02/26/2013US8384506 Magnetic device having a conductive clip
02/26/2013US8384226 Hybrid bump capacitor
02/26/2013US8384220 Semiconductor integrated circuit device and fabrication process thereof
02/26/2013US8384217 Increasing reliability of copper-based metallization structures in a microstructure device by using aluminum nitride
02/26/2013US8384216 Package structure and manufacturing method thereof