Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2013
02/26/2013US8383471 Self aligned sidewall gate GaN HEMT
02/26/2013US8383470 Thin film transistor (TFT) having a protective layer and manufacturing method thereof
02/26/2013US8383469 Producing transistor including reduced channel length
02/26/2013US8383468 Display device and manufacturing method thereof, and semiconductor device and manufacturing method thereof
02/26/2013US8383467 Thin film transistor and method of manufacturing the same
02/26/2013US8383466 Display device and method of manufacturing the same
02/26/2013US8383465 Semiconductor device and manufacturing method thereof
02/26/2013US8383464 Method for producing field effect transistors with a back gate and semiconductor device
02/26/2013US8383463 Semiconductor package having an antenna with reduced area and method for fabricating the same
02/26/2013US8383462 Method of fabricating an integrated circuit package
02/26/2013US8383461 Method for manufacturing semiconductor package having improved bump structures
02/26/2013US8383460 Method for fabricating through substrate vias in semiconductor substrate
02/26/2013US8383459 Methods of processing a thermal interface material
02/26/2013US8383458 Integrated circuit package system employing an offset stacked configuration and method for manufacturing thereof
02/26/2013US8383457 Semiconductor device and method of forming interposer frame over semiconductor die to provide vertical interconnect
02/26/2013US8383456 Semiconductor device and manufacturing method therefor
02/26/2013US8383452 Semiconductor device and method for manufacturing the same
02/26/2013US8383451 Deposition of photovoltaic thin films by plasma spray deposition
02/26/2013US8383450 Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials
02/26/2013US8383449 Method of forming a thin film transistor having openings formed therein
02/26/2013US8383448 Method of fabricating metal oxide semiconductor device
02/26/2013US8383446 Manufracturing method of solid-state imaging device
02/26/2013US8383444 Method for determining color using CMOS image sensor
02/26/2013US8383443 Non-uniform gate dielectric charge for pixel sensor cells and methods of manufacturing
02/26/2013US8383442 Methods for reduced stress anchors
02/26/2013US8383441 Method for manufacturing a micromachined device and the micromachined device made thereof
02/26/2013US8383440 Light shield for CMOS imager
02/26/2013US8383439 Apparatus for manufacturing group-III nitride semiconductor layer, method of manufacturing group-III nitride semiconductor layer, group-III nitride semiconductor light-emitting device, method of manufacturing group-III nitride semiconductor light-emitting device, and lamp
02/26/2013US8383438 Method for fabricating InGaAIN light-emitting diodes with a metal substrate
02/26/2013US8383437 Echtant and method for manufacturing display device using the same
02/26/2013US8383436 Manufacturing method for semiconductor chips, and semiconductor chip
02/26/2013US8383435 Integrated photonic semiconductor devices and methods for making integrated photonic semiconductor devices
02/26/2013US8383434 Thin film transistor and manufacturing method thereof
02/26/2013US8383433 Light emitting diode and method of fabricating the same
02/26/2013US8383432 Colloidal-processed silicon particle device
02/26/2013US8383431 Organic light-emitting diode and method of manufacturing the same
02/26/2013US8383430 Methods of combinatorial processing for screening multiple samples on a semiconductor substrate
02/26/2013US8383429 Method and apparatus for thermal treatment of semiconductor workpieces
02/26/2013US8383428 Exhaust pressure detector
02/26/2013US8383426 Double-masking technique for increasing fabrication yield in superconducting electronics
02/26/2013US8383320 Resist underlayer film forming composition and method of forming resist pattern using the same
02/26/2013US8383298 Substrate processing method, manufacturing method of EUV mask, and EUV mask
02/26/2013US8382942 Method and apparatus for reducing substrate backside deposition during processing
02/26/2013US8382941 Plasma reactor with adjustable plasma electrodes and associated methods
02/26/2013US8382940 Device and method for producing chlorine trifluoride and system for etching semiconductor substrates using this device
02/26/2013US8382939 Plasma processing chamber with enhanced gas delivery
02/26/2013US8382938 Gate valve cleaning method and substrate processing system
02/26/2013US8382895 Silicon single crystal manufacturing method, silicon single crystal, silicon wafer, apparatus for controlling manufacture of silicon single crystal, and program
02/26/2013US8382558 Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method
02/26/2013US8382555 Substrate supporting unit, and apparatus and method for polishing substrate using the same
02/26/2013US8382554 Substrate polishing apparatus and method of polishing substrate using the same
02/26/2013US8381966 Flip chip assembly method employing post-contact differential heating
02/26/2013US8381678 Wide area atmosphere pressure plasma jet apparatus
02/26/2013US8381677 Prevention of film deposition on PECVD process chamber wall
02/26/2013CA2529595C Heterostructure bipolar transistor
02/21/2013WO2013026035A1 Vertical field effect transistor on oxide semiconductor substrate and method of manufacturing the same
02/21/2013WO2013025994A2 Spin hall effect magnetic apparatus, method and applications
02/21/2013WO2013025968A1 Low temperature migration enhanced si-ge epitaxy with plasma assisted surface activation
02/21/2013WO2013025852A1 A system and method for monitoring temperatures of and controlling multiplexed heater array
02/21/2013WO2013025799A2 Quantum dot systems
02/21/2013WO2013025748A1 Method for producing mechanically flexible silicon substrate
02/21/2013WO2013025719A2 Apparatuses and methods comprising a channel region having different minority carrier lifetimes
02/21/2013WO2013025629A2 Wafer carrier
02/21/2013WO2013025619A2 Method and composition for removing resist, etch residue, and copper oxide from substrates having copper, metal hardmask and low-k dielectric material
02/21/2013WO2013025603A1 Multi-die semiconductor package with one or more embedded die pads
02/21/2013WO2013025576A1 Bump-on-leadframe semiconductor package with low thermal resistance
02/21/2013WO2013025575A1 Semiconductor package containing silicon-on-insulator
02/21/2013WO2013025566A1 Methods and apparatus for sensing a substrate in a chamber
02/21/2013WO2013025376A1 Large particle detection for multi-spot surface scanning inspection systems
02/21/2013WO2013025338A1 Multi-chip package and interposer with signal line compression
02/21/2013WO2013025336A1 Dry-etch for silicon-and-nitrogen-containing films
02/21/2013WO2013025333A1 Overlay metrology by pupil phase analysis
02/21/2013WO2013025327A2 Lens array optical coupling to photonic chip
02/21/2013WO2013025205A1 Offset interposers for large-bottom packages and large-die package-on-package structures
02/21/2013WO2013025097A1 Method and system for forming a metallic structure
02/21/2013WO2013025072A2 Device for manufacturing semiconductor or metallic oxide ingot
02/21/2013WO2013025024A2 Ingot growing apparatus and method of manufacturing ingot
02/21/2013WO2013025003A2 Method for etching copper/molybdenum alloy film with increased etching capacity of etchant
02/21/2013WO2013024971A2 Cmp slurry composition for tungsten polishing
02/21/2013WO2013024915A1 Sputtering apparatus and method for forming a transmissive conductive layer of a light emitting device
02/21/2013WO2013024900A1 Resin-coated saw wire and cut body
02/21/2013WO2013024842A1 Semiconductor manufacturing device and processing method
02/21/2013WO2013024837A1 Component manufacturing method and component
02/21/2013WO2013024833A1 Mold release processing method for nanoimprinting molds, production method employing the mold release processing method, nanoimprinting method, and method for producing patterned substrates
02/21/2013WO2013024823A1 Etching method and method for performing surface processing on solid material for solar cell
02/21/2013WO2013024777A1 Cyclic compound, method for producing same, composition, and method for forming resist pattern
02/21/2013WO2013024756A1 Photoresist composition
02/21/2013WO2013024752A1 Nitride semiconductor device
02/21/2013WO2013024746A1 Method for manufacturing semiconductor device, device for manufacturing semiconductor device, semiconductor device, program for manufacturing semiconductor device, treatment agent for semiconductor, and transfer member
02/21/2013WO2013024741A1 Wafer separation device and wafer manufacturing method using same
02/21/2013WO2013024734A1 Method for manufacturing transistor, and transistor
02/21/2013WO2013024678A1 Compound for forming self-assembled mono-molecular film, and organic semiconductor element containing same.
02/21/2013WO2013024677A1 Semiconductor device, manufacturing method thereof, and mobile telephone
02/21/2013WO2013024647A1 Thin film transistor, method for producing same, display device, image sensor, x-ray sensor, and x-ray digital imaging device
02/21/2013WO2013024646A1 Thin film transistor, method for producing same, display device, image sensor, x-ray sensor, and x-ray digital imaging device
02/21/2013WO2013024612A1 Wire bonding device
02/21/2013WO2013024565A1 Stock removal evaluation method and wafer production method
02/21/2013WO2013024502A1 Plate material conveyance device and plate material conveyance method
02/21/2013WO2013024444A1 Microelectronic device
02/21/2013WO2013024315A1 Reaction chamber for deposition of a semiconductor layer on the plurality substrates in batches