| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/28/2013 | WO2012166770A3 Heated wafer carrier profiling |
| 02/28/2013 | WO2012166618A3 Capping layer for reduced outgassing |
| 02/28/2013 | WO2012166451A3 Conductive structures, systems and devices including conductive structures and related methods |
| 02/28/2013 | WO2012154428A3 Copper oxide removal techniques |
| 02/28/2013 | WO2012148621A4 Apparatus and methods for microwave processing of semiconductor substrates |
| 02/28/2013 | WO2012145147A3 Vertical junction field effect transistors with improved thermal characteristics and methods of making |
| 02/28/2013 | WO2012142177A3 Selective laser-assisted transfer of discrete components |
| 02/28/2013 | WO2012087620A3 Carbon containing low-k dielectric constant recovery using uv treatment |
| 02/28/2013 | WO2012074439A4 Method of separating surface layer of semiconductor crystal using a laser beam perpendicular to the separating plane |
| 02/28/2013 | WO2010053451A3 System and method for engaging singulated subtrates |
| 02/28/2013 | US20130052917 Polishing apparatus, polishing pad, and polishing information management system |
| 02/28/2013 | US20130052838 Annealing method to reduce defects of epitaxial films and epitaxial films formed therewith |
| 02/28/2013 | US20130052837 Apparatus and Methods for Annealing Wafers |
| 02/28/2013 | US20130052836 Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus |
| 02/28/2013 | US20130052835 Pattern transfer apparatus and method for fabricating semiconductor device |
| 02/28/2013 | US20130052834 Wafer holder and temperature conditioning arrangement and method of manufacturing a wafer |
| 02/28/2013 | US20130052833 Method for etching high-k dielectric using pulsed bias power |
| 02/28/2013 | US20130052832 Producing transistor including single layer reentrant profile |
| 02/28/2013 | US20130052831 Method of patterning hard mask layer for defining deep trench |
| 02/28/2013 | US20130052830 Plasma reactor having dual inductively coupled plasma source |
| 02/28/2013 | US20130052829 Method for producing a deep trench in a microelectronic component substrate |
| 02/28/2013 | US20130052828 Substrate processing method and substrate processing apparatus |
| 02/28/2013 | US20130052827 Selective suppression of dry-etch rate of materials containing both silicon and oxygen |
| 02/28/2013 | US20130052826 High Aspect Ratio Grid for Phase Contrast X-ray Imaging and Method of Making the Same |
| 02/28/2013 | US20130052825 Semiconductor process |
| 02/28/2013 | US20130052824 Manufacturing method of semiconductor device |
| 02/28/2013 | US20130052823 System and method for semiconductor wafer processing with side/bevel protection |
| 02/28/2013 | US20130052822 Techniques for Impeding Reverse Engineering |
| 02/28/2013 | US20130052821 Method for manufacturing semiconductor device |
| 02/28/2013 | US20130052820 Method of forming conductive pattern |
| 02/28/2013 | US20130052819 Methods of Forming Metal Silicide Regions on Semiconductor Devices Using Different Temperatures |
| 02/28/2013 | US20130052818 Methods for Forming Interconnect Structures of Integrated Circuits |
| 02/28/2013 | US20130052817 Method for the fabrication of bonding solder layers on metal bumps with improved coplanarity |
| 02/28/2013 | US20130052816 Method of producing semiconductor transistor |
| 02/28/2013 | US20130052815 Semiconductor device and method for fabricating the same |
| 02/28/2013 | US20130052814 Diffused cap layers for modifying high-k gate dielectrics and interface layers |
| 02/28/2013 | US20130052813 Method and structure for advanced semiconductor channel substrate materials |
| 02/28/2013 | US20130052812 Method of manufacturing semiconductor device |
| 02/28/2013 | US20130052811 Plasma uniformity control using biased array |
| 02/28/2013 | US20130052810 Engineering of porous coatings formed by ion-assisted direct deposition |
| 02/28/2013 | US20130052809 Pre-clean method for epitaxial deposition and applications thereof |
| 02/28/2013 | US20130052808 Method of depositing highly conformal amorphous carbon films over raised features |
| 02/28/2013 | US20130052807 Epitaxial Wafer and Manufacturing Method Thereof |
| 02/28/2013 | US20130052806 Deposition systems having access gates at desirable locations, and related methods |
| 02/28/2013 | US20130052805 Method of producing a three-dimensional integrated circuit |
| 02/28/2013 | US20130052804 Multi-gas centrally cooled showerhead design |
| 02/28/2013 | US20130052803 Method For Generating A Three-Dimensional NAND Memory With Mono-Crystalline Channels Using Sacrificial Material |
| 02/28/2013 | US20130052802 Mold thermophysical properties for thickness uniformity optimization of exocast sheet |
| 02/28/2013 | US20130052801 Method to enable compressively strained pfet channel in a finfet structure by implant and thermal diffusion |
| 02/28/2013 | US20130052800 Actuating transistor including single layer reentrant profile |
| 02/28/2013 | US20130052799 Manufacturing method of soi substrate |
| 02/28/2013 | US20130052798 Fixed curvature force loading of mechanically spalled films |
| 02/28/2013 | US20130052797 Method for Handling a Thin Substrate and for Substrate Capping |
| 02/28/2013 | US20130052796 Method for manufacturing a circuit device |
| 02/28/2013 | US20130052795 Trench filling method and method of manufacturing semiconductor integrated circuit device |
| 02/28/2013 | US20130052794 Semiconductor devices having through electrodes and methods of fabricating the same |
| 02/28/2013 | US20130052793 Layer Alignment in FinFET Fabrication |
| 02/28/2013 | US20130052792 High performance dielectric stack for dram capacitor |
| 02/28/2013 | US20130052791 Doped electrode for dram applications |
| 02/28/2013 | US20130052790 Doping approach of titanium dioxide for dram capacitors |
| 02/28/2013 | US20130052789 Polysilicon Resistor Formation in a Gate-Last Process |
| 02/28/2013 | US20130052788 Semiconductor device having a reduced bit line parasitic capacitance and method for manufacturing the same |
| 02/28/2013 | US20130052787 Method of manufacturing semiconductor device |
| 02/28/2013 | US20130052786 Fabricating method of dram structure |
| 02/28/2013 | US20130052785 Method of manufacturing semiconductor device |
| 02/28/2013 | US20130052784 Method of manufacturing semiconductor device |
| 02/28/2013 | US20130052783 Methods of Forming Stressed Silicon-Carbon Areas in an NMOS Transistor |
| 02/28/2013 | US20130052782 Implantation of Hydrogen to Improve Gate Insulation Layer-Substrate Interface |
| 02/28/2013 | US20130052781 Method of Forming Non-planar FET |
| 02/28/2013 | US20130052780 Semiconductor devices and methods of fabricating the same |
| 02/28/2013 | US20130052779 Fabrication of a semiconductor device with extended epitaxial semiconductor regions |
| 02/28/2013 | US20130052778 Semiconductor process |
| 02/28/2013 | US20130052777 Back side alignment structure and manufacturing method for three-dimensional semiconductor device packages |
| 02/28/2013 | US20130052776 Forming metal filled die back-side film for electromagnetic interference shielding with coreless packages |
| 02/28/2013 | US20130052775 Semiconductor packages and methods of forming the same |
| 02/28/2013 | US20130052767 Method of fabricating vertical type light-emitting diode and method of separating layers from each other |
| 02/28/2013 | US20130052762 Method of forming an array of high aspect ratio semiconductor nanostructures |
| 02/28/2013 | US20130052760 Method of inspecting and manufacturing a stack chip package |
| 02/28/2013 | US20130052759 Vertical solid-state transducers having backside terminals and associated systems and methods |
| 02/28/2013 | US20130052758 Removing aluminum nitride sections |
| 02/28/2013 | US20130052757 Methods for optimizing a plasma process |
| 02/28/2013 | US20130052756 Heating device and semiconductor device manufacturing method |
| 02/28/2013 | US20130052755 Automatically adjusting baking process for low-k dielectric material |
| 02/28/2013 | US20130052754 Vapor growth method and vapor growth apparatus |
| 02/28/2013 | US20130052753 Semiconductor device and method of manufacturing the same |
| 02/28/2013 | US20130052752 Mram etching processes |
| 02/28/2013 | US20130052591 Cleaning nozzle for advanced lithography process |
| 02/28/2013 | US20130051967 Substrate inverting apparatus, substrate handling method, and substrate processing apparatus |
| 02/28/2013 | US20130051966 Loader for substrate storage container |
| 02/28/2013 | US20130051957 Substrate Processing System and Substrate Transferring Method |
| 02/28/2013 | US20130051421 Semiconductor Laser Device and a Method for Manufacturing a Semiconductor Laser Device |
| 02/28/2013 | US20130051179 Electro-acoustic transducer and method of manufacturing the same |
| 02/28/2013 | US20130051117 Integrated circuit with vertically integrated passive variable resistance memory and method for making the same |
| 02/28/2013 | US20130051116 Integrated circuit with face-to-face bonded passive variable resistance memory and method for making the same |
| 02/28/2013 | US20130051115 Integrated circuit with backside passive variable resistance memory and method for making the same |
| 02/28/2013 | US20130050972 Interconnection elements with encased interconnects |
| 02/28/2013 | US20130050892 Measuring and controlling wafer potential in pulsed rf bias processing |
| 02/28/2013 | US20130050883 Integrated advance copper fuse combined with esd/over-voltage/reverse polarity protection |
| 02/28/2013 | US20130050686 Gap distributed bragg reflectors |
| 02/28/2013 | US20130050468 Inspection system and a method for inspecting multiple wafers |