Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2013
03/06/2013CN102956470A Substrate treating apparatus
03/06/2013CN102956469A Method of manufacturing semiconductor device
03/06/2013CN102956468A Semiconductor device and method of manufacturing a semiconductor device including grinding steps
03/06/2013CN102956467A Method for preparing gate medium on surface of graphene
03/06/2013CN102956466A Finned transistor and manufacturing method thereof
03/06/2013CN102956465A Metal gate forming method and MOS (metal oxide semiconductor) transistor forming method
03/06/2013CN102956464A Manufacturing method of semiconductor devices
03/06/2013CN102956463A Method for fabricating a damascene self-aligned ferroelectric random access memory (f-ram) having a ferroelectric capacitor aligned with a three dimensional transistor structure
03/06/2013CN102956462A Double gated flash memory
03/06/2013CN102956461A Forming method of grid electrode
03/06/2013CN102956460A Manufacturing method of semiconductor element with metal gates
03/06/2013CN102956459A Semiconductor device and manufacture method thereof
03/06/2013CN102956458A Semiconductor device structure and manufacturing method for same
03/06/2013CN102956457A Semiconductor device structure, manufacturing method for same and manufacturing method for fin of semiconductor
03/06/2013CN102956456A Manufacturing method of semiconductor devices
03/06/2013CN102956455A Manufacturing method of semiconductor devices
03/06/2013CN102956454A Semiconductor structure and manufacturing method thereof
03/06/2013CN102956453A Semiconductor device and manufacture method thereof
03/06/2013CN102956452A Method for manufacturing metal plugs during manufacturing of metal grids
03/06/2013CN102956451A Semiconductor device manufacture method
03/06/2013CN102956450A Method for manufacturing semiconductor devices
03/06/2013CN102956449A Threshold voltage adjustment in fin transistor by corner implantation
03/06/2013CN102956448A Method for manufacturing semiconductor device e.g. mosfet, involves removing semiconductor body from side up to range defined by foreign substances or pn junction, where pn junction is defined by foreign substances
03/06/2013CN102956447A Film forming method, manufacturing method of semiconductor device using the same, film forming apparatus, and semiconductor device
03/06/2013CN102956446A Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and nitride semiconductor template
03/06/2013CN102956445A Method for growing germanium-silicon epitaxial layers
03/06/2013CN102956444A Manufacturing method for epitaxial layer of high-voltage device
03/06/2013CN102956443A Manufacturing method of semiconductor device
03/06/2013CN102956442A Integrated circuit (IC) wafer edge processing method
03/06/2013CN102956441A Method for producing semiconductor components on substrate and substrate with semiconductor components
03/06/2013CN102956440A Capacitor and method for making same
03/06/2013CN102956439A Metal-insulator-metal capacitor and manufacturing method
03/06/2013CN102956438A Method of forming conductive pattern
03/06/2013CN102956437A Capacitor and method for manufacturing capacitor on semiconductor device with metal grid electrode
03/06/2013CN102956436A Monitoring device and monitoring method for relative position of manipulator and chip to be handled in station adjusting
03/06/2013CN102956435A Intelligent full-automatic cleaning device for semiconductors
03/06/2013CN102956431A Ring-shaped shield member, components thereof and substrate mounting table
03/06/2013CN102956430A Method for replacing helium atoms on film layer
03/06/2013CN102955972A GSM (global system for mobile communications) mobile phone communication card and package method and device therefor
03/06/2013CN102955381A Photoresist strip processes for improved device integrity
03/06/2013CN102955370A Lithography model for 3D topographic wafers
03/06/2013CN102955314A TFT (Thin Film Transistor) array substrate, preparation method and display device
03/06/2013CN102955312A Array substrate and manufacture method thereof and display device
03/06/2013CN102955308A Array substrate for display device and method of fabricating the same
03/06/2013CN102955307A Field sequential color liquid crystal display based on polycrystalline silicon thin film transistor
03/06/2013CN102955301A Array substrate for liquid crystal display device and method of manufacturing the same
03/06/2013CN102954903A Preparation method of germanium-silicon film monitoring sheet, and monitoring method through adopting sheet
03/06/2013CN102954761A Position measurement system, lithographic apparatus and device manufacturing method
03/06/2013CN102954264A Valve body, gate valve and substrate processing system
03/06/2013CN102953099A Method used for forming metallic conductor structure
03/06/2013CN102953052A Film deposition apparatus, substrate processing apparatus, and plasma generating device
03/06/2013CN102953047A Film deposition apparatus
03/06/2013CN102952466A Chemical-mechanical polishing liquid
03/06/2013CN102950536A Chemical-mechanical grinding device and method
03/06/2013CN102950407A Welding line positioning device for power semiconductor device
03/06/2013CN102950133A Cleaning fixture for TO-220 type packaged products of semiconductor triodes
03/06/2013CN102354668B Preparation method of carbon-based nanometer material transistor
03/06/2013CN102339735B Preparation method for graphene transistor
03/06/2013CN102324415B Sequentially etched and plated lead frame structure without island prepacked plastic sealed material and producing method thereof
03/06/2013CN102324413B Sequentially etched and plated lead frame structure with island prepacked plastic sealed material and producing method thereof
03/06/2013CN102324412B Island-free lead frame structure prefilled with plastic encapsulating material, plated firstly and etched later and production method thereof
03/06/2013CN102315113B Solar-battery monocrystalline-silicon floss-making fluid with low volatility and application thereof
03/06/2013CN102231370B High power fin cold plate radiator and manufacturing method thereof
03/06/2013CN102227001B Germanium-based NMOS (N-channel metal oxide semiconductor) device and manufacturing method thereof
03/06/2013CN102214554B Brushing device used for wafer
03/06/2013CN102208390B High-density bump substrate and manufacturing method thereof
03/06/2013CN102201453B Memory unit and nonvolatile memory device and foming method thereof
03/06/2013CN102201336B Method for removing residue of etched oxide layer on semiconductor device layer
03/06/2013CN102148160B Method for preparing P-type SiC nanowire filed-effect tube
03/06/2013CN102144287B Sheet peeling apparatus and sheet peeling method
03/06/2013CN102136419B Method for improving uniformity of sidewall angle
03/06/2013CN102134491B Gallium nitride surface corrosion liquid and corrosion method
03/06/2013CN102110638B Method and structure for overcoming discharge shortcoming of semiconductor device during manufacturing process
03/06/2013CN102097546B Method for cutting LED chip
03/06/2013CN102089872B Film production method
03/06/2013CN102088015B Semiconductor packaging piece and manufacture method thereof
03/06/2013CN102088003B Nonlinear left-handed transmission-line frequency multiplier based on planar technology and preparation method thereof
03/06/2013CN102074577B Vertical channel field effect transistor and preparation method thereof
03/06/2013CN102074504B Method for manufacturing self-alignment thin film transistor (TFT) active matrix
03/06/2013CN102073214B Heat treatment unit of gluing developing machine
03/06/2013CN102067339B Method for fabricating InGaAlN light-emitting diodes with a metal substrate
03/06/2013CN102067286B Crystal growth process for nitride semiconductor, and method for manufacturing semiconductor device
03/06/2013CN102064118B Method and packaging mould for manufacturing semiconductor packaging piece
03/06/2013CN102057076B Coating system and method for coating a substrate
03/06/2013CN102054833B 薄膜晶体管基板及其制造方法 The thin film transistor substrate and a method of manufacturing
03/06/2013CN102044483B Groove forming method
03/06/2013CN102044482B Method for forming groove
03/06/2013CN102044473B Formation method of semiconductor device
03/06/2013CN102044472B Method for reducing thickness of dielectric layer
03/06/2013CN102044415B Method for manufacturing semiconductor structure
03/06/2013CN102043296B Flat panel display device and method of manufacturing the same
03/06/2013CN102037555B Next generation screen printing system
03/06/2013CN102017118B Retainer and substrate storage container provided with same retainer
03/06/2013CN102013427B Avalanche breakdown diode structure and production method thereof
03/06/2013CN102010661B Method for preparing chemical and mechanical polishing liquid in ULSI (Ultra Large Scale Integrated) copper surface high-precision machining process
03/06/2013CN102010660B Preparation method of chemical mechanical tantalum polishing solution
03/06/2013CN102005395B Vacuum mounting method and device
03/06/2013CN101996979B Interposer, module and electronic device including the same
03/06/2013CN101996932B Method for forming interconnection structure
03/06/2013CN101996929B Forming method of dual-damascene structure and semiconductor structure
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