Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2013
03/13/2013CN101673764B Semiconductor device having vertical charge-compensated structure and sub-surface connecting layer and method
03/13/2013CN101644725B Mems probe fabricating a probe card on a reusable substrate
03/13/2013CN101640222B Semiconductor device and method of fabricating the same
03/13/2013CN101635263B Method of manufacturing display device
03/13/2013CN101611043B Material for forming silicon-containing film, and silicon-containing insulating film and method for forming the same
03/13/2013CN101593731B Liquid crystal display, active element array substrate and method for manufacturing active element array substrate
03/13/2013CN101584025B Method of producing highly strained pecvd silicon nitride thin films at low temperature
03/13/2013CN101583439B Method for cleaning a surface
03/13/2013CN101566771B Display apparatus and manufacture method thereof
03/13/2013CN101552222B Method and apparatus for conveying wafer
03/13/2013CN101552185B Reaction tube and heat processing apparatus for a semiconductor process
03/13/2013CN101521233B Thin film transisotr and display device
03/13/2013CN101521229B Self-aligned slotted accumulation-mode field effect transistor (ACCUFET) structure and method
03/13/2013CN101506967B Semiconductor devices including fine pitch arrays with staggered contacts and methods for designing and fabricating the same
03/13/2013CN101493650B Method for manufacturing microlens and method for manufacturing solid-state image sensor
03/13/2013CN101416317B Etched nanofin transistors
03/13/2013CN101399271B Half-permeation TFT-LCD array substrate and method for manufacturing same
03/13/2013CN101395973B Plasma generator and method of generating plasma using the same
03/13/2013CN101373722B Semiconductor device and manufacturing method for the same
03/13/2013CN101351868B Method for atomizing material for coating processes
03/13/2013CN101304046B Thin film transistor and method for forming the same
03/13/2013CN101304012B Semiconductor substrate with metal contact layer and corresponding production method
03/13/2013CN101299436B Device structure and manufacturing method using HDP deposited source-body implant block
03/13/2013CN101276792B Semicoductor epitaxy substrate, compound semiconductor device and manufacturing method thereof
03/13/2013CN101253617B Semiconductor constructions, memory arrays, electronic systems, and methods of forming semiconductor constructions
03/13/2013CN101064274B Method of dividing an adhesive film bonded to a wafer
03/13/2013CN101044220B Metal ion-containing CMP composition and method for using the same
03/12/2013USRE44071 Method for patterning a multilayered conductor/substrate structure
03/12/2013US8397182 Pattern verifying method, pattern verifying device, program, and manufacturing method of semiconductor device
03/12/2013US8396735 Method and system to connect consumers to information
03/12/2013US8395932 Semiconductor storage device and method of fabricating the same
03/12/2013US8395757 Optimized polarization illumination
03/12/2013US8395755 Lithographic apparatus and device manufacturing method
03/12/2013US8395735 Liquid crystal display device and method of manufacturing the same
03/12/2013US8395270 Etching composition for an under-bump metallurgy layer
03/12/2013US8395269 Method of stacking semiconductor chips including forming an interconnect member and a through electrode
03/12/2013US8395260 Semiconductor device and manufacturing method thereof
03/12/2013US8395250 Plasma processing apparatus with an exhaust port above the substrate
03/12/2013US8395249 Sealed cavity
03/12/2013US8395244 Fast recovery diode
03/12/2013US8395242 Semiconductor device having backside redistribution layers
03/12/2013US8395239 Grounded seal ring structure in semiconductor devices
03/12/2013US8395238 Method of manufacturing semiconductor device, and semiconductor device
03/12/2013US8395236 MIM capacitor structure having penetrating vias
03/12/2013US8395231 Semiconductor device supplying charging current to element to be charged
03/12/2013US8395230 Semiconductor device and method of manufacturing the same
03/12/2013US8395228 Integration process to improve focus leveling within a lot process variation
03/12/2013US8395227 MEMS device having a movable electrode
03/12/2013US8395225 Semiconductor device, an electronic device and an electronic apparatus
03/12/2013US8395222 MOS transistor, manufacturing method thereof, and semiconductor device
03/12/2013US8395221 Depletion-free MOS using atomic-layer doping
03/12/2013US8395219 Semiconductor device and fabrication method for the same
03/12/2013US8395218 Gate-all-around type semiconductor device and method of manufacturing the same
03/12/2013US8395217 Isolation in CMOSFET devices utilizing buried air bags
03/12/2013US8395213 Strained semiconductor using elastic edge relaxation of a stressor combined with buried insulating layer
03/12/2013US8395210 DMOS transistor and method of manufacturing the same
03/12/2013US8395203 Semiconductor device and a manufacturing method thereof
03/12/2013US8395202 Nanoscale floating gate
03/12/2013US8395200 Method and system for manufacturing copper-based capacitor
03/12/2013US8395196 Hydrogen barrier liner for ferro-electric random access memory (FRAM) chip
03/12/2013US8395194 Solid-state imaging device
03/12/2013US8395191 Semiconductor device and structure
03/12/2013US8395187 Compound semiconductor epitaxial substrate and manufacturing method thereof
03/12/2013US8395186 Implementing vertical signal repeater transistors utilizing wire vias as gate nodes
03/12/2013US8395176 Top-emitting nitride-based light-emitting device with ohmic characteristics and luminous efficiency
03/12/2013US8395161 Display device
03/12/2013US8395157 Double gate thin-film transistor and OLED display apparatus including the same
03/12/2013US8395137 Memory cell constructions
03/12/2013US8395057 Substrate-penetrating electrical connections
03/12/2013US8394877 Method for manufacturing porous structure and method for forming pattern
03/12/2013US8394729 Increasing the seebeck coefficient of semiconductors by HPHT sintering
03/12/2013US8394728 Film deposition method and manufacturing method of semiconductor device
03/12/2013US8394727 High density selective deposition of carbon nanotubes onto a substrate
03/12/2013US8394726 Method for manufacturing semiconductor device, and substrate processing apparatus
03/12/2013US8394725 Systems and methods for forming metal oxide layers
03/12/2013US8394724 Processing with reduced line end shortening ratio
03/12/2013US8394723 Aspect ratio adjustment of mask pattern using trimming to alter geometry of photoresist features
03/12/2013US8394722 Bi-layer, tri-layer mask CD control
03/12/2013US8394721 Method for obtaining a layout design for an existing integrated circuit
03/12/2013US8394720 Plasma processing method and resist pattern modifying method
03/12/2013US8394719 System and method for implementing multi-resolution advanced process control
03/12/2013US8394718 Methods of forming self-aligned through silicon via
03/12/2013US8394717 Semiconductor package with a reduced volume and thickness and capable of high speed operation and method for fabricating the same
03/12/2013US8394716 Methods of manufacturing three-dimensional semiconductor devices and related devices
03/12/2013US8394715 Method of fabricating coaxial through-silicon via
03/12/2013US8394714 Anti-reflective coatings for micro-fluid applications
03/12/2013US8394713 Method of improving adhesion of bond pad over pad metallization with a neighboring passivation layer by depositing a palladium layer
03/12/2013US8394712 Cavity-free interface between extension regions and embedded silicon-carbon alloy source/drain regions
03/12/2013US8394711 Systems and methods for co-doping wide band gap materials
03/12/2013US8394710 Semiconductor devices fabricated by doped material layer as dopant source
03/12/2013US8394709 Process for producing photovoltaic device and deposition apparatus
03/12/2013US8394708 Assembly of quasicrystalline photonic heterostructures
03/12/2013US8394707 Method of splitting of brittle materials with trenching technology
03/12/2013US8394706 Printable semiconductor structures and related methods of making and assembling
03/12/2013US8394705 Method of manufacturing semiconductor device having optical devices
03/12/2013US8394704 Method for fabricating a dual-orientation group-IV semiconductor substrate
03/12/2013US8394703 Manufacturing method of SOI substrate and manufacturing method of semiconductor device
03/12/2013US8394702 Method for making dual gate oxide trench MOSFET with channel stop using three or four masks process
03/12/2013US8394701 Dielectric spacers for metal interconnects and method to form the same
03/12/2013US8394700 Device including memory array and method thereof