| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/19/1988 | US4739438 Integrated circuit with an improved input protective device |
| 04/19/1988 | US4739389 High-frequency circuit arrangement and semiconductor device for use in such an arrangement |
| 04/19/1988 | US4739388 Integrated circuit structure for a quality check of a semiconductor substrate wafer |
| 04/19/1988 | US4739386 Bipolar transistor having improved switching time |
| 04/19/1988 | US4739379 Heterojunction bipolar integrated circuit |
| 04/19/1988 | US4739378 Protection of integrated circuits from electric discharge |
| 04/19/1988 | US4739373 Projection exposure apparatus |
| 04/19/1988 | US4739258 Dynamic testing of thin-film conductor |
| 04/19/1988 | US4739142 Method of producing a wire bonding ball |
| 04/19/1988 | US4738936 Method of fabrication lateral FET structure having a substrate to source contact |
| 04/19/1988 | US4738935 Annealing polished compound substrate surfaces to bond |
| 04/19/1988 | US4738934 Method of making indium phosphide devices |
| 04/19/1988 | US4738916 Intermediate layer material of three-layer resist system |
| 04/19/1988 | US4738915 Positive-working O-quinone diazide photoresist composition with 2,3,4-trihydroxybenzophenone |
| 04/19/1988 | US4738910 Method of applying a resist |
| 04/19/1988 | US4738907 Process for manufacturing a photomask |
| 04/19/1988 | US4738832 Crystal holder |
| 04/19/1988 | US4738761 Shared current loop, multiple field apparatus and process for plasma processing |
| 04/19/1988 | US4738749 Process for producing an active matrix display screen with gate resistance |
| 04/19/1988 | US4738748 Plasma processor and method for IC fabrication |
| 04/19/1988 | US4738683 Etching to form openings in silicon dioxide layer |
| 04/19/1988 | US4738624 Bipolar transistor structure with self-aligned device and isolation and fabrication process therefor |
| 04/19/1988 | US4738618 Vertical thermal processor |
| 04/19/1988 | US4738573 Silicon wafer processing boat carrier slot plunge cutter |
| 04/19/1988 | US4738272 Vessel and system for treating wafers with fluids |
| 04/19/1988 | US4738056 Method and blasting apparatus for preparation of silicon wafer |
| 04/19/1988 | CA1235384A1 Dual ion beam deposition of amorphous semiconductor films |
| 04/14/1988 | DE3733499A1 Verfahren und vorrichtung fuer die ablagerung aus der dampfphase Method and apparatus for the deposition from the vapor phase |
| 04/14/1988 | DE3732418A1 Semiconductor component having a semiconductor region in which a band (energy) gap is continuously stepped |
| 04/13/1988 | EP0263788A1 Process and apparatus for depositing hydrogenated amorphous silicon on a substrate in a plasma environment |
| 04/13/1988 | EP0263756A2 Selective epitaxy BiCMOS process |
| 04/13/1988 | EP0263755A1 Process for manufacturing a P+NN+ diode and a bipolar transistor including this diode, using the neutralization effect of atomic hydrogen on donor atoms |
| 04/13/1988 | EP0263574A1 A method of manufacturing a semiconductor device, and a semiconductor device, having at least one selectively actuable conductive line |
| 04/13/1988 | EP0263542A1 Method of pull-testing wire bonds on a micro-miniature solid-state device |
| 04/13/1988 | EP0263517A2 Lithography apparatus |
| 04/13/1988 | EP0263504A2 Method for manufacturing high-breakdown voltage semiconductor device |
| 04/13/1988 | EP0263374A2 Reactive ion etch chemistry for providing deep vertical trenches in semiconductor substrates |
| 04/13/1988 | EP0263348A2 Process for defining vias through silicon nitride and polyimide |
| 04/13/1988 | EP0263343A2 Power transistor with self-protection against direct secondary breakdown |
| 04/13/1988 | EP0263341A2 An improved process for preparing a charge coupled device with charge transfer direction biasing implants |
| 04/13/1988 | EP0263322A2 Method of making sloped vias |
| 04/13/1988 | EP0263287A2 Forming a capacitor in an integrated circuit |
| 04/13/1988 | EP0263277A2 A flexible electrical connection and method of making same |
| 04/13/1988 | EP0263273A2 Process of laminating |
| 04/13/1988 | EP0263270A2 Process for providing a P-doped semiconducting region in an N-conductivity semiconducting body |
| 04/13/1988 | EP0263222A1 Method of forming solder terminals for a pinless ceramic module |
| 04/13/1988 | EP0263221A1 Method of forming solder bumps on metal contact pads of a substrate |
| 04/13/1988 | EP0263220A1 Method of forming a via-having a desired slope in a photoresist masked composite insulating layer |
| 04/13/1988 | EP0263146A1 Aluminum-backed wafer and chip |
| 04/13/1988 | EP0263141A1 Method for depositing materials containing tellurium. |
| 04/13/1988 | EP0155311B1 Method for repair of buried contacts in mosfet devices |
| 04/13/1988 | EP0082189B1 Masking portions of a substrate |
| 04/13/1988 | CN87106299A Process and device for sepparation and recovery of volatile solvents |
| 04/13/1988 | CN86102417A Gold-diffusing technology in manufacturing high-speed thyristor |
| 04/12/1988 | US4737920 Method and apparatus for correcting rotational errors during inspection of reticles and masks |
| 04/12/1988 | US4737902 Inner potential generating circuit |
| 04/12/1988 | US4737839 Semiconductor chip mounting system |
| 04/12/1988 | US4737838 Capacitor built-in semiconductor integrated circuit and process of fabrication thereof |
| 04/12/1988 | US4737835 Read only memory semiconductor device |
| 04/12/1988 | US4737831 Semiconductor device with self-aligned gate structure and manufacturing process thereof |
| 04/12/1988 | US4737830 Integrated circuit structure having compensating means for self-inductance effects |
| 04/12/1988 | US4737829 Dynamic random access memory device having a plurality of one-transistor type memory cells |
| 04/12/1988 | US4737828 Method for gate electrode fabrication and symmetrical and non-symmetrical self-aligned inlay transistors made therefrom |
| 04/12/1988 | US4737827 Heterojunction-gate field-effect transistor enabling easy control of threshold voltage |
| 04/12/1988 | US4737823 Opto-lithographic device comprising a displaceable lens system and method of controlling the imaging properties of lens system in such a device |
| 04/12/1988 | US4737646 Method of using an electron beam |
| 04/12/1988 | US4737474 Depositing amorphous silicon and silicide layers and sintering |
| 04/12/1988 | US4737472 Process for the simultaneous production of self-aligned bipolar transistors and complementary MOS transistors on a common silicon substrate |
| 04/12/1988 | US4737471 Method for fabricating an insulated-gate FET having a narrow channel width |
| 04/12/1988 | US4737470 Method of making three dimensional structures of active and passive semiconductor components |
| 04/12/1988 | US4737468 Semiconductors |
| 04/12/1988 | US4737438 Negative-working photosensitive composition comprising a diphenylamine-melamine condensate and an azide compound |
| 04/12/1988 | US4737426 Cyclic acetals or ketals of beta-keto esters or amides |
| 04/12/1988 | US4737425 Patterned resist and process |
| 04/12/1988 | US4737387 With composite frame for free-standing, protective membrane |
| 04/12/1988 | US4737379 Plasma deposited coatings, and low temperature plasma method of making same |
| 04/12/1988 | US4737237 Process for producing a buried strip semiconductor laser with or without a defractive network |
| 04/12/1988 | US4737235 Premixing in storage |
| 04/12/1988 | US4737208 Method of fabricating multilayer structures with nonplanar surfaces |
| 04/12/1988 | US4737112 Anisotropically conductive composite medium |
| 04/12/1988 | US4736882 Thermode design for tab and method of use |
| 04/12/1988 | US4736760 Apparatus for cleaning, rinsing and drying substrates |
| 04/12/1988 | US4736759 Apparatus for cleaning rinsing and drying substrates |
| 04/12/1988 | US4736758 Vapor drying apparatus |
| 04/12/1988 | US4736621 Immersion in heated perfluoroperhydrofluorene bubble detection |
| 04/12/1988 | US4736508 Process of manufacturing vacuum tips particularly for vacuum handling systems |
| 04/12/1988 | CA1235234A1 Method of manufacturing a semiconductor device, in which a semiconductor substrate is subjected to a treatment in a reaction gas |
| 04/12/1988 | CA1235233A1 L fast-fabrication process for high speed bipolar analog large scale integrated circuits |
| 04/12/1988 | CA1235219A1 Ccd imager |
| 04/12/1988 | CA1234972A1 Chemical vapor deposition wafer boat |
| 04/07/1988 | WO1988002554A1 High-frequency power transistor with bipolar epitaxial technology |
| 04/07/1988 | WO1988002552A1 Multichip integrated circuit packaging configuration and method |
| 04/07/1988 | WO1988002551A1 Method and apparatus for packaging integrated circuit chips employing a polymer film overlay layer |
| 04/07/1988 | WO1988002550A1 Method to produce via holes in polymer dielectrics for multiple electronic circuit chip packaging |
| 04/07/1988 | WO1988002549A1 Method and configuration for testing electronic circuits and integrated circuit chips using a removable overlay layer |
| 04/07/1988 | WO1987007400A3 Monolithic channeling mask |
| 04/07/1988 | DE3731838A1 X-ray lithographic device |
| 04/06/1988 | EP0263078A2 Logic interface circuit with high stability and low rest current |
| 04/06/1988 | EP0263050A1 Hermetic terminal assembly and method of manufacturing same |
| 04/06/1988 | EP0263032A1 Primary particle beam irradiation apparatus and method of irradiation thereof |