Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1995
11/02/1995EP0680072A2 A method of operating a high density plasma CVD reactor with combined inductive and capacitive coupling
11/02/1995EP0680071A2 Protective collar for a vacuum seal in a plasma etch reactor
11/02/1995EP0680070A1 Apparatus and method for treating substrates
11/02/1995EP0679972A1 An apparatus and method for controlling and scheduling processing machines
11/02/1995EP0679948A2 Dual phase and hybrid phase shifting mask fabrication using a surface etch monitoring technique
11/02/1995EP0679922A1 Electrically isolated pixel element in a low voltage activated active matrix liquid crystal display and method
11/02/1995EP0679897A1 Micromechanical component having a moving dielectric element
11/02/1995EP0679878A2 Microsystem with integrated circuit and micromechanical component and fabrication procedure
11/02/1995EP0679737A1 Method of retaining melt of oxide and method of preparing oxide crystal
11/02/1995EP0679730A1 Shield configuration for vacuum chamber
11/02/1995EP0679262A1 Non-contact current injection apparatus and method for use with linear bipolar circuits.
11/02/1995DE19515564A1 Electrode with semiconductor substrate for semiconductor component
11/02/1995DE19515347A1 High dielectric constant capacitor electrode structure for Gbit or higher integrated DRAM
11/01/1995CN1111036A Method of manufacturing semiconductor device
11/01/1995CN1111035A Altrosonic apparatus for solding guide wire
11/01/1995CN1111033A Vacuum treating apparatus
10/1995
10/31/1995US5463667 Inspection method for soldered joints using x-ray imaging and apparatus therefor
10/31/1995US5463590 Multi-bank semiconductor memory device having common command detection
10/31/1995US5463583 Non-volatile semiconductor memory device
10/31/1995US5463581 Memory in which improvement is made as regards a precharge operation of data readout routes
10/31/1995US5463579 Semiconductor memory device with floating gate and method for driving the same
10/31/1995US5463576 Semiconductor memory device including memory cells connected to a ground line
10/31/1995US5463560 Semiconductor integrated circuit device
10/31/1995US5463526 Hybrid electrostatic chuck
10/31/1995US5463525 Guard ring electrostatic chuck
10/31/1995US5463520 Electrostatic discharge protection with hysteresis trigger circuit
10/31/1995US5463475 Semiconductor delay line driven by an input signal-derived reference signal
10/31/1995US5463460 Particle monitoring sensor
10/31/1995US5463459 Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
10/31/1995US5463255 Semiconductor integrated circuit device having an electrode pad including an extended wire bonding portion
10/31/1995US5463254 Formation of 3-dimensional silicon silicide structures
10/31/1995US5463249 Electronic circuit system unit with wiring substrate
10/31/1995US5463246 Large scale high density semiconductor apparatus
10/31/1995US5463243 Dielectric isolated high voltage semiconductor device
10/31/1995US5463241 Insulated-gate semiconductor device with a buried insulation layer
10/31/1995US5463240 CMIS device with increased gain
10/31/1995US5463239 Integrated semiconductor circuit protected against high voltage breakdown
10/31/1995US5463236 Semiconductor memory device having improved isolation structure among memory cells
10/31/1995US5463235 Semiconductor memory comprising a memory cell without a transistor
10/31/1995US5463227 Method for obtaining three-dimensional data from multiple parts or devices in a multi-pocketed tray
10/31/1995US5463197 Apparatus and method for forming wire bonding ball
10/31/1995US5462900 Method of manufacturing semiconductor elements without burrs
10/31/1995US5462899 Heating substrate, mixing and reacting organosilicon compound gas, oxygen gas containing ozone and second oxygen containing gas
10/31/1995US5462898 Methods for passivating silicon devices at low temperature to achieve low interface state density and low recombination velocity while preserving carrier lifetime
10/31/1995US5462897 Method for forming a thin film layer
10/31/1995US5462896 Method of forming a sidewall on a semiconductor element
10/31/1995US5462895 Method of making semiconductor device comprising a titanium nitride film
10/31/1995US5462894 Method for fabricating a polycrystalline silicon resistive load element in an integrated circuit
10/31/1995US5462893 Method of making a semiconductor device with sidewall etch stopper and wide through-hole having multilayered wiring structure
10/31/1995US5462892 Semiconductor processing method for preventing corrosion of metal film connections
10/31/1995US5462891 Forming a titanium alloy film on glass substrate, dielectric silicon nitride, silicon oxide or an alpha-hydrogen doped silicon film, forming resist pattern, patterning alloy film by etching using ammonium hydroxide, hydrogen peroxide, water
10/31/1995US5462890 Method for making a tungsten plug of a semiconductor device
10/31/1995US5462889 Method of fabricating a semiconductor device with a polycrystalline silicon resistive layer
10/31/1995US5462888 Process for manufacturing semiconductor BICMOS device
10/31/1995US5462887 Process for making a matrix of thin layer transistors with memory capacitors
10/31/1995US5462886 Method of manufacturing a semiconductor element
10/31/1995US5462885 Forming gate electrode, growing gate insulator, semiconductor and protective layers, patterning protective layer using photoresist pattern, developing, doping semiconductor layer to form source and drain electrodes
10/31/1995US5462884 Method of making field effect transistor with T-shaped gate electrode
10/31/1995US5462883 Method of fabricating defect-free silicon on an insulating substrate
10/31/1995US5462839 Covering surfaces of silicon plate with oxide and screening layers, machining by selective oxidation and photolithography to form cavity, oxidizing surfaces to form thick oxide layer, removing screening layer, part of oxide layer, fixing closures
10/31/1995US5462812 Fluorinated silicon nitride films
10/31/1995US5462767 CVD of conformal coatings over a depression using alkylmetal precursors
10/31/1995US5462638 Selective etching of TiW for C4 fabrication
10/31/1995US5462636 Method for chemically scribing wafers
10/31/1995US5462635 Surface processing method and an apparatus for carrying out the same
10/31/1995US5462603 Semiconductor processing apparatus
10/31/1995US5462397 Processing apparatus
10/31/1995US5462012 Substrates and methods for gas phase deposition of semiconductors and other materials
10/31/1995US5462011 Method for pulling single crystals
10/31/1995US5461774 Apparatus and method of elastically bowing a base plate
10/31/1995CA2030825C Method for forming shottky diode
10/26/1995WO1995028820A1 Method of manufacturing a device, by irradiating some parts of the surface of the device directly through a mask, and other parts indirectly through the mask and via a reflecting surface, thereby producing a pattern
10/26/1995WO1995028743A1 Metal-semiconductor diode and methods for producing metal semiconductor diodes
10/26/1995WO1995028741A1 Micro-electronic component and process for making it
10/26/1995WO1995028739A1 Electronic component and process for producing same
10/26/1995WO1995028738A2 Method for making an inverted-type thin-film transistor
10/26/1995WO1995028737A1 Method and apparatus for automatically positioning electronic die within component packages
10/26/1995WO1995028736A1 Process and device for chemically treating substrates
10/26/1995WO1995028735A2 Method of manufacturing a device whereby a support bar is provided with conductor tracks for electrically contacting a semiconductor element
10/26/1995WO1995028256A1 Method and apparatus for cleaning substrates
10/26/1995WO1995023397A3 Method of manufacturing a reflective display
10/26/1995DE4425110C1 Aq. plating bath for electrodeposition of palladium
10/26/1995DE4414263A1 Plasma-induced chemical cleaning of substrates
10/26/1995DE3490595C2 Surface diagnostic analysis
10/26/1995DE19511473A1 Optical refractive index gradient measuring method for e.g. dynamic IGBT behaviour
10/26/1995DE19510564A1 Attenuation type phase shifting mask
10/25/1995EP0678969A2 BiMOS semiconductor integrated circuit having boosted voltage line
10/25/1995EP0678946A1 Quantum wire device and method of making such a device
10/25/1995EP0678921A1 Non-volatile semiconductor memory having programming region for injecting and ejecting carrier into and from floating gate
10/25/1995EP0678920A1 Semiconductor device with mesa structure
10/25/1995EP0678919A1 Semiconductor device having input protection circuit
10/25/1995EP0678918A2 Multilayer printed wiring board
10/25/1995EP0678917A1 Supporting member for cooling means and electronic package using the same
10/25/1995EP0678915A2 Integrated semiconductor device with an EEPROM, semiconductor substrate with such integrated circuits and method for use of such a semiconductor substrate
10/25/1995EP0678914A2 Method for planarizing an integrated circuit topography
10/25/1995EP0678913A1 Multilevel metallization forming method
10/25/1995EP0678912A2 Isolation of transistors using trenches filled with dielectrics having low dielectric constant K
10/25/1995EP0678911A2 System and method for inspecting semiconducter wafers
10/25/1995EP0678910A2 Inspection system for semiconductor wafers
10/25/1995EP0678909A1 Monitoring of rf-plasma induced potential on a gate dielectric inside a plasma etcher
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