Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2005
04/19/2005US6881641 Semiconductor device having a retrograde dopant profile in a channel region and method for fabricating the same
04/19/2005US6881640 Fabrication method for heterojunction bipolar transistor
04/19/2005US6881639 Method of manufacturing semiconductor device
04/19/2005US6881638 Method of fabricating a bipolar junction transistor
04/19/2005US6881637 Method of forming a gate electrode, method of manufacturing a semiconductor device having the gate electrode, and method of oxidizing a substrate
04/19/2005US6881636 Methods of forming deuterated silicon nitride-containing materials
04/19/2005US6881635 Strained silicon NMOS devices with embedded source/drain
04/19/2005US6881633 Method of manufacturing a semiconductor device with an L-shaped/reversed L-shaped gate side-wall insulating film
04/19/2005US6881632 Method of fabricating CMOS inverter and integrated circuits utilizing strained surface channel MOSFETS
04/19/2005US6881631 Method of manufacturing semiconductor device
04/19/2005US6881630 Methods for fabricating field effect transistors having elevated source/drain regions
04/19/2005US6881629 Method to make minimal spacing between floating gates in split gate flash
04/19/2005US6881627 Flash memory with ultra thin vertical body transistors
04/19/2005US6881626 Method of fabricating a non-volatile memory device with a string select gate
04/19/2005US6881624 P-channel dynamic flash memory cells with ultrathin tunnel oxides
04/19/2005US6881622 Aqueous ammonium hydroxide amorphous silicon etch method for forming microelectronic capacitor structure
04/19/2005US6881621 Method of fabricating SOI substrate having an etch stop layer, and method of fabricating SOI integrated circuit using the same
04/19/2005US6881620 Method of fabricating deep trench capacitor
04/19/2005US6881619 Method for fabricating a non-volatile memory and metal interconnect process
04/19/2005US6881618 Method of manufacturing a dual gate semiconductor device with a poly-metal electrode
04/19/2005US6881617 Manufacturing method for bipolar gate CMOS semiconductor device
04/19/2005US6881616 System for forming a semiconductor device and method thereof including implanting through a L shaped spacer to form source and drain regions
04/19/2005US6881615 Method for crystallizing semiconductor material without exposing it to air
04/19/2005US6881614 Shared contact for high-density memory cell design
04/19/2005US6881612 Method of bonding a semiconductor element to a substrate
04/19/2005US6881611 Method and mold for manufacturing semiconductor device, semiconductor device and method for mounting the device
04/19/2005US6881610 Method and apparatus for preparing a plurality of dice in wafers
04/19/2005US6881607 Underfill and encapsulation of carrier substrate-mounted flip-chip components using stereolithography
04/19/2005US6881606 Method for forming a protective layer for use in packaging a semiconductor die
04/19/2005US6881599 Transferring semiconductor crystal from a substrate to a resin
04/19/2005US6881597 Method of manufacturing a semiconductor device to provide a plurality of test element groups (TEGs) in a scribe region
04/19/2005US6881596 Method for automatically determining the surface quality of a bonding interface between two wafers
04/19/2005US6881594 Method of using scatterometry for analysis of electromigration, and structures for performing same
04/19/2005US6881591 Underfilling material for semiconductor package
04/19/2005US6881590 Re-performable spin-on process
04/19/2005US6881535 Method for producing liquid crystal display apparatus
04/19/2005US6881534 Method of forming mask, method of forming patterned thin film, and method of fabricating micro device
04/19/2005US6881531 Resist material and exposure method
04/19/2005US6881529 Positive photoresist transfer material and method for processing surface of substrate using the transfer material
04/19/2005US6881523 Photolithography mask for optically transferring a pattern formed in mask onto a substrate and for negating optical proximity effects
04/19/2005US6881502 Blue organic electroluminescent devices having a non-hole-blocking layer
04/19/2005US6881447 For producing integrated circuits
04/19/2005US6881444 Prespinning; hydrogen bonding
04/19/2005US6881437 Methods and system for processing a microelectronic topography
04/19/2005US6881369 Microelectroforming mold using a preformed metal as the substrate and the fabrication method of the same
04/19/2005US6881352 Disturbance-free, recipe-controlled plasma processing method
04/19/2005US6881351 Methods for contacting conducting layers overlying magnetoelectronic elements of MRAM devices
04/19/2005US6881305 Heated and cooled vacuum chamber shield
04/19/2005US6881295 Air-tight vessel equipped with gas feeder uniformly supplying gaseous component around plural wafers
04/19/2005US6881276 Detecting the endpoint of a chamber cleaning
04/19/2005US6881268 Method and apparatus for forming required gas atmosphere
04/19/2005US6881267 Photoresist supply apparatus for preventing photoresist loss through drain line
04/19/2005US6881264 Configuration and a method for reducing contamination with particles on a substrate in a process tool
04/19/2005US6881261 Method for fabricating semiconductor device
04/19/2005US6881130 Edge grinding
04/19/2005US6881129 Fixed-abrasive chemical-mechanical planarization of titanium nitride
04/19/2005US6881127 Substrate assemblies on fixed-abrasive polishing pads with non- abrasive lubricating planarizing solutions. One aspect of the invention is to deposit a lubricating planarizing solution without abrasive particles onto a fixed-abrasive
04/19/2005US6881073 Electrical connector
04/19/2005US6881058 Apparatus for processing substrate and method of processing the same
04/19/2005US6881020 Pod transfer system having retractable mast and rotatable and vertically movable hoist
04/19/2005US6880920 Electromechanical transducer with an adhesive layer and an anti-diffusion layer
04/19/2005US6880727 Precision liquid mixing apparatus and method
04/19/2005US6880718 Wafer carrier door and spring biased latching mechanism
04/19/2005US6880563 Apparatus and method of cleaning a substrate
04/19/2005US6880561 Molecular fluorine is decomposed in a plasma to produce atomic fluorine; air pollution control; global warming prevention
04/19/2005US6880560 Producing sonic energy perpendicularly to substrate inside of processing chamber using sonic box comprising transducer coupled to membrane; dense phase gases such as supercritical fluids can be used in combination with sonic energy
04/19/2005US6880382 Leakage detecting method for use in oxidizing system of forming oxide layer
04/19/2005US6880264 Vacuum processing apparatus and operating method therefor
04/19/2005US6880244 Circuit board having simultaneously and unitarily formed wiring patterns and protrusions
04/14/2005WO2005034598A1 High reliability multilayer circuit substrates and methods for their formation
04/14/2005WO2005034344A1 A method to make a weight compensating/tuning layer on a substrate
04/14/2005WO2005034301A1 Nitride semiconductor device and method for manufacturing same
04/14/2005WO2005034293A1 Electrical connection component
04/14/2005WO2005034254A1 Light emitting diode with porous sic substrate and method for fabricating
04/14/2005WO2005034246A1 Silicon carbide semiconductor device
04/14/2005WO2005034245A1 Semiconductor device including band-engineered superlattice
04/14/2005WO2005034238A1 Electrical shielding in stacked dies by using conductive die attach adhesive
04/14/2005WO2005034237A1 Pillar bumps for high power chip interconnection
04/14/2005WO2005034234A1 Semiconductor device and method for manufacturing same
04/14/2005WO2005034233A1 Electro-static chuck with non-sintered aln and a method of preparing the same
04/14/2005WO2005034232A1 Back-light block for semiconductor vision system
04/14/2005WO2005034231A1 Electronic device and its manufacturing method
04/14/2005WO2005034230A1 Semiconductor structure with different lattice constant materials and method for forming the same
04/14/2005WO2005034229A1 Transparent amorphous carbon structure in semiconductor devices
04/14/2005WO2005034228A1 Coating film forming apparatus and coating film forming method
04/14/2005WO2005034227A1 Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility
04/14/2005WO2005034226A1 Metal polishing composition
04/14/2005WO2005034225A1 A semiconductor device having a nickel/cobalt silicide region formed in a silicon region
04/14/2005WO2005034224A1 Method of forming a metal layer using an intermittent precursor gas flow process
04/14/2005WO2005034223A1 Method of depositing metal layers from metal-carbonyl precursors
04/14/2005WO2005034222A1 Method for depositing metal layers using sequential flow deposition
04/14/2005WO2005034221A1 Substrate and its production method
04/14/2005WO2005034220A1 Method of vapor phase growth and vapor phase growth apparatus
04/14/2005WO2005034219A1 Production method for silicon epitaxial wafer, and silicon epitaxial wafer
04/14/2005WO2005034218A2 Method of producing a plate-shaped structure, in particular, from silicon, use of said method and plate-shaped structure thus produced, in particular from silicon
04/14/2005WO2005034216A1 Masking structure including an amorphous carbon layer
04/14/2005WO2005034215A1 Method for the production of a hard mask and hard mask arrangement
04/14/2005WO2005034214A2 Protective layer during scribing
04/14/2005WO2005034212A2 6t finfet cmos sram cell with an increased cell ratio
04/14/2005WO2005034210A1 Method and processing system for monitoring status of system components
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