Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2005
07/07/2005US20050147833 Dissolving polyalkoxysilane in alcohol, admixing solution with basic compound and water to hydrolyze polyalkoxysilane to give polysiloxane, replacing alcohol solvent with aprotic polar organic solvent to form coating solution
07/07/2005US20050147762 Method to fabricate amorphous electroless metal layers
07/07/2005US20050147752 Small particle size, narrow size distribution and a spherical morphology; spray pyrolysis
07/07/2005US20050147748 e.g. coating a semiconductor wafer with photoresist; controls the rate of evaporation of solvent from the polymer solution during the coating process to give a uniform thickness coating; includes rotatable chuck support, dispenser, vapor distributor, and solvent remover
07/07/2005US20050147741 Fabrication of array PH sensitive EGFET and its readout circuit
07/07/2005US20050147530 Method and detector for identifying effective lifetime of gas scrubber absorbent material, and gas scrubber including the detector
07/07/2005US20050147522 Conductive material and method for filling via-hole
07/07/2005US20050147509 Apparatus and method for control, pumping and abatement for vacuum process chambers
07/07/2005US20050147489 Wafer supporting system for semiconductor wafers
07/07/2005US20050147488 Method of transporting semiconductor device and method of manufacturing semiconductor device
07/07/2005US20050147287 Method and apparatus for inspecting pattern defects
07/07/2005US20050146967 Magnetic random access memory (MRAM) and method of manufacturing the same
07/07/2005US20050146961 Semiconductor integrated circuit device
07/07/2005US20050146955 Resistance change memory having organic semiconductor layer
07/07/2005US20050146953 Semiconductor integrated circuit device
07/07/2005US20050146947 Semiconductor device
07/07/2005US20050146942 Semiconductor switching devices
07/07/2005US20050146940 Flash memory cell and fabrication method
07/07/2005US20050146937 Flash memory with trench select gate and fabrication process
07/07/2005US20050146934 Transistor with variable electron affinity gate and methods of fabrication and use
07/07/2005US20050146930 Semiconductor memory device having row decoder in which high-voltage-applied portion is located adjacent to low-voltage-applied portion
07/07/2005US20050146928 3T1D memory cells using gated diodes and methods of use thereof
07/07/2005US20050146927 Spacer integration scheme in MRAM technology
07/07/2005US20050146926 Magnetic memory device
07/07/2005US20050146925 Thin film magnetic memory device provided with magnetic tunnel junctions
07/07/2005US20050146917 Ferroelectric element and a ferroelectric gate device using the same
07/07/2005US20050146838 Capacitor device and method of manufacturing the same
07/07/2005US20050146835 Storage capacitor having a scattering effect and method of manufacturing the same
07/07/2005US20050146834 Manufacturing method of integrated capacitor, and integrated capacitor
07/07/2005US20050146823 Semiconductor device and semiconductor device module
07/07/2005US20050146793 Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method
07/07/2005US20050146789 Device for polarization-specific examination, an optical imaging system and a calibration method
07/07/2005US20050146729 Method and appratus for measurements of patterned structures
07/07/2005US20050146721 Method of measurement, method for providing alignment marks, and device manufacturing method
07/07/2005US20050146709 Plasma processing method and plasma processing apparatus
07/07/2005US20050146703 Device manufacturing method, device manufactured thereby and a mask for use in the method
07/07/2005US20050146702 Lithographic apparatus and device manufacturing method
07/07/2005US20050146701 Projection method including pupillary filtering and a projection lens therefor
07/07/2005US20050146699 Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby
07/07/2005US20050146698 Lithographic apparatus, device manufacturing method and positioning system
07/07/2005US20050146696 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory
07/07/2005US20050146695 Exposure apparatus and device manufacturing method
07/07/2005US20050146694 Exposure apparatus and device manufacturing method
07/07/2005US20050146693 Exposure apparatus
07/07/2005US20050146662 Liquid crystal display device, fabrication method thereof, and hard mask
07/07/2005US20050146658 Substrate for a display apparatus
07/07/2005US20050146649 Electro-optical device, electronic apparatus, and method of manufacturing electro-optical device
07/07/2005US20050146632 Solid image-pickup device and method for manufacturing the solid image pickup device
07/07/2005US20050146588 Pattern formation method and substrate manufacturing apparatus
07/07/2005US20050146411 Integrated inductor
07/07/2005US20050146380 Analysis apparatus for semiconductor LSI circuit
07/07/2005US20050146374 Semiconductor integrated circuit device
07/07/2005US20050146348 Method and apparatus for determining the dielectric constant of a low permittivity dielectric on a semiconductor wafer
07/07/2005US20050146345 Low-current pogo probe card
07/07/2005US20050146339 Method of manufacturing a probe card
07/07/2005US20050146337 Method of manufacturing and testing semiconductor device using assembly substrate
07/07/2005US20050146277 Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system
07/07/2005US20050146267 Organic light emitting device having a protective barrier
07/07/2005US20050146257 Halogen lamp assembly with integrated heat sink
07/07/2005US20050146169 Alignment device
07/07/2005US20050146059 Method for forming rectangular-shaped spacers for semiconductor devices
07/07/2005US20050146056 Thinned without cracking or chipping while dicing
07/07/2005US20050146055 Preventing cracking and/or chipping both at time of dicing and during handling; using resin protective film on active surface
07/07/2005US20050146054 Electronic package structure and the packaging process thereof
07/07/2005US20050146053 Wafer stacking with anisotropic conductive adhesive
07/07/2005US20050146052 Semiconductor device and semiconductor module
07/07/2005US20050146051 Semiconductor device and method of manufacturing the same
07/07/2005US20050146050 Flip chip package structure and chip structure thereof
07/07/2005US20050146049 RF and MMIC stackable micro-modules
07/07/2005US20050146048 Damascene interconnect structures
07/07/2005US20050146045 Minimizing generation of void defects
07/07/2005US20050146044 Semiconductor devices and method for fabricating the same
07/07/2005US20050146043 Method and structure to form capacitor in copper damascene process for integrated circuit devices
07/07/2005US20050146042 Method of forming a bonding pad structure
07/07/2005US20050146040 Metal spacer in single and dual damascene processing
07/07/2005US20050146039 High reliability multilayer circuit substrates and methods for their formation
07/07/2005US20050146038 Multilayer interconnection board and production method thereof
07/07/2005US20050146037 Semiconductor device having an etch stopper formed of a SiN layer by low temperature ALD and method of fabricating the same
07/07/2005US20050146036 Method of forming a metal silicide layer on non-planar-topography polysilicon
07/07/2005US20050146035 Method for forming a void free via
07/07/2005US20050146034 Method to fabricate interconnect structures
07/07/2005US20050146032 Producing without cracking or chipping; sealing sidewall with protective resin then simultaneously grinding and polishing inactive surface on opposite side
07/07/2005US20050146030 Solder ball pad structure
07/07/2005US20050146029 Semiconductor element having protruded bump electrodes
07/07/2005US20050146026 Semiconductor-mounted device and method for producing same
07/07/2005US20050146023 System and method for self-leveling heat sink for multiple height devices
07/07/2005US20050146020 Single layer configurable logic
07/07/2005US20050146018 Package circuit board and package including a package circuit board and method thereof
07/07/2005US20050146016 Electronic package with improved current carrying capability and method of forming the same
07/07/2005US20050146015 Semiconductor device and method of producing the same
07/07/2005US20050146014 Seal ring for integrated circuits
07/07/2005US20050146005 Semiconductor device and manufacturing method thereof
07/07/2005US20050146003 Microdisplay packaging system
07/07/2005US20050146001 Method of packaging an optical sensor
07/07/2005US20050145999 Semiconductor device
07/07/2005US20050145996 Integrated circuit package for semiconductor devices with improved electric resistance and inductance
07/07/2005US20050145995 Field effect transistor
07/07/2005US20050145993 Semiconductor device and method for manufacturing the same
07/07/2005US20050145992 Method for reduced N+ diffusion in strained Si on SiGe substrate
07/07/2005US20050145991 Optical semiconductor device and method of manufacturing optical semiconductor device