Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2005
07/13/2005EP1553205A1 Sputter target for forming thin film interconnector and thin film interconnector line
07/13/2005EP1552905A2 Contactor cleaning sheet, contactor cleaning sheet manufacturing method, and contactor cleaning method
07/13/2005EP1552735A2 Heat sink made from longer and shorter graphite sheets
07/13/2005EP1552727A1 Inductively coupled plasma generator having lower aspect ratio
07/13/2005EP1552561A2 Integrated circuit arrangement comprising capacitors and preferably planar transistors, and production method
07/13/2005EP1552555A1 An electronic and optoelectronic component packaging technique
07/13/2005EP1552554A2 Semiconductor device with tensile strain silicon introduced by compressive material in a buried oxide layer
07/13/2005EP1552553A1 Rapid annealing process for wafers in semiconductor material
07/13/2005EP1552552A2 Method for eliminating voiding in plated solder
07/13/2005EP1552551A2 Transparent oxide semiconductor thin film transistors
07/13/2005EP1552550A1 Thin film transistor
07/13/2005EP1552549A1 Method of fabricating a self-aligned non-volatile memory cell
07/13/2005EP1552548A2 Method for preparing a device structure having a wafer structure deposited on a composite substrate having a matched coefficient of thermal expansion
07/13/2005EP1552547A2 In-situ formation of metal insulator metal capacitors cross reference to related applications
07/13/2005EP1552546A2 Integrated circuit arrangement comprising a capacitor, and production method
07/13/2005EP1552545A1 Spin-coating methods and apparatuses for spin-coating, including pressure sensor
07/13/2005EP1552529A2 Method and apparatus for erasing flash memory
07/13/2005EP1552526A2 Magnetic element utilizing spin transfer and an mram device using the magnetic element
07/13/2005EP1552439A2 Method for checking an integrated circuit for electrostatic discharge robustness
07/13/2005EP1552344A2 A method for the removal of an imaging layer from a semiconductor substrate stack
07/13/2005EP1552343A1 High-density interconnection of temperature sensitive electronic devices
07/13/2005EP1552342A2 Compositions substrate for removing etching residue and use thereof
07/13/2005EP1552317A1 Reduced chip testing scheme at wafer level
07/13/2005EP1552258A1 Hermetic packaging
07/13/2005EP1552043A1 Fabrication method for crystalline semiconductor films on foreign substrates
07/13/2005EP1552034A1 Apparatus and method for depositing an oxide film
07/13/2005EP1552032A1 Copper sputtering targets and methods of forming copper sputtering targets
07/13/2005EP1551936A1 Composition and process for wet stripping removal of sacrificial anti-reflective material
07/13/2005EP1551887A1 Fluorinated polymers, photoresists and processes for microlithography
07/13/2005EP1551886A1 Fluorinated polymers useful as photoresists, and processes for microlithography
07/13/2005EP1551768A1 Process for manufacturing a gallium rich gallium nitride film
07/13/2005EP1551730A1 Carrier with tacky surfaces
07/13/2005EP1551593A1 Polishing state monitoring apparatus and polishing apparatus and method
07/13/2005EP1340123A4 Systems and methods for exposing substrate periphery
07/13/2005EP1265813B1 Plasma processing for porous silica thin film
07/13/2005EP1125316B1 Component affixing method and apparatus
07/13/2005EP1117506B1 Cmp polishing head with three chambers and method for using the same
07/13/2005EP1091811B1 Selective treatment of the surface of a microelectronic workpiece
07/13/2005EP1085333B1 Method for determining iddq
07/13/2005EP0998756B1 Device and method for producing a chip-substrate connection
07/13/2005EP0932500B1 Method to control cavity dimensions of fired multilayer circuit boards on a support
07/13/2005CN2710164Y Insulation layer covering cilicon chip with multi-position
07/13/2005CN2710163Y Connecting pad structure
07/13/2005CN1640214A Method and apparatus for encapsulating semiconductor device
07/13/2005CN1640210A Inductively coupled plasma generator having lower aspect ratio
07/13/2005CN1639878A GE photodetectors
07/13/2005CN1639877A Monolithic integrated SOI circuit with capacitor
07/13/2005CN1639874A Semiconductor storage device
07/13/2005CN1639872A A method for manufacturing a thin film transistor using poly silicon
07/13/2005CN1639870A Bipolar transistor for avoiding thermal runaway
07/13/2005CN1639869A Laminated substrate, method of manufacturing the substrate, and wafer outer periphery pressing jigs used for the method
07/13/2005CN1639865A Semiconductor device having a wire bond pad and method therefor
07/13/2005CN1639861A Process for making a MIM capacitor
07/13/2005CN1639860A Embedded vertical DRAM cells and dual workfunction logic gates
07/13/2005CN1639859A Process for producing semiconductor device
07/13/2005CN1639858A Method for holding substrate in vacuum, method for manufacturing liquid crystal display device, and device for holding substrate
07/13/2005CN1639857A Port structure in semiconductor processing device
07/13/2005CN1639856A Method of operating substrate processing device
07/13/2005CN1639855A Substrate support mechanism in semiconductor processing system
07/13/2005CN1639854A Correlation of end-of-line data mining with process tool data mining
07/13/2005CN1639853A Electronic circuit device and porduction method therefor
07/13/2005CN1639852A B-stageable underfill encapsulant and method for its application
07/13/2005CN1639851A Method for forming thin film
07/13/2005CN1639850A On-wafer monitoring system
07/13/2005CN1639849A Dehydration drying method and apparatus, and substrate processing apparatus
07/13/2005CN1639847A Polishing composition and method for forming wiring structure using the same
07/13/2005CN1639845A Illuminating method, exposing method, and device for therefor
07/13/2005CN1639843A Device and method for heat treatment
07/13/2005CN1639842A A method for the wet treatment of disk-like objects
07/13/2005CN1639841A Electronic component mounting apparatus and electronic component mounting method
07/13/2005CN1639840A Electroless deposition apparatus
07/13/2005CN1639839A Substrate support
07/13/2005CN1639838A Apparatus and method for thermally isolating a heat chamber
07/13/2005CN1639837A Optical chip packaging via through hole
07/13/2005CN1639836A Angular spin, rinse, and dry module and methods for making and implementing the same
07/13/2005CN1639831A Tunable multi-zone gas injection system
07/13/2005CN1639820A Field emission backplate
07/13/2005CN1639690A 半导体装置 Semiconductor device
07/13/2005CN1639645A Full phase shifting mask in damascene process
07/13/2005CN1639644A Refractive projection objective for immersion lithography
07/13/2005CN1639643A Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements
07/13/2005CN1639642A An image forming method and apparatus
07/13/2005CN1639640A Fluorinated copolymers for microlithography
07/13/2005CN1639638A Mask repair with electron beam-induced chemical etching
07/13/2005CN1639634A Negative photoresists for short wavelength imaging
07/13/2005CN1639581A Integrated circuit with test circuit
07/13/2005CN1639579A Device with board abnormality detecting circuit
07/13/2005CN1639577A Test probe alignment apparatus
07/13/2005CN1639393A Group III nitride semiconductor crystal, production method thereof and group III nitride semiconductor epitaxial wafer
07/13/2005CN1639385A Immersion plating of silver
07/13/2005CN1639383A Method for forming interconnection metal layer, method for selectively forming metal, apparatus for selectively forming metal, and substrate apparatus
07/13/2005CN1639382A Disk-like member holding device
07/13/2005CN1639246A Printing of organic conductive polymers containing additives
07/13/2005CN1639063A Process of producing multicrystalline silicon substrate and solar cell
07/13/2005CN1639034A Reinforced chemical mechanical planarization belt
07/13/2005CN1639029A Wafer container cushion system
07/13/2005CN1638920A 流体混合装置及切削装置 Fluid mixing device and cutting device
07/13/2005CN1638919A Improved method and apparatus for bi-directionally polishing a workpiece
07/13/2005CN1638910A Plasma-resistant, welded aluminum structures for use in semiconductor processing apparatus
07/13/2005CN1638883A Method and device for the decontamination of optical surfaces