Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2005
07/19/2005US6919219 Photon-blocking layer
07/19/2005US6919218 Manufacturing method for sealing a semiconductor device
07/19/2005US6919216 Method for manufacturing semiconductor laser apparatus
07/19/2005US6919214 Apparatus for analyzing a substrate employing a copper decoration
07/19/2005US6919212 Method for fabricating ferroelectric random access memory device with merged-top electrode-plateline capacitor
07/19/2005US6919168 Etching noble metal electrode using plasma etchant
07/19/2005US6919160 Acrylic compounds for sub-200 nm photoresist compositions and methods for making and using same
07/19/2005US6919153 Illuminating a mask with illumination light, which is disposed in projection exposure apparatus and in which a dose monitor pattern is formed, passing only a 0th-order diffracted light through a pupil surface of projection exposure apparatus
07/19/2005US6919152 Template is aligned with the substrate by the use of alignment marks disposed on both the tmplate and substrate, the alignment is then determined and corrected for before the layer is processed
07/19/2005US6919149 Substrate transparent to light from an exposure light source and a waveguide pattern formed on the substrate to define a plurality of transparent regions that are regularly arranged. The transparent regions defined by the waveguide pattern with
07/19/2005US6919137 Can be applied to a wiring structure, a circuit
07/19/2005US6919124 Ceramic substrate
07/19/2005US6919106 Acid hydrolysis of organosilicon compound; heat treatment inpresence of surfactant
07/19/2005US6919101 Method to deposit an impermeable film on porous low-k dielectric film
07/19/2005US6919013 Apparatus and method for electrolytically depositing copper on a workpiece
07/19/2005US6919007 Apparatus for mounting chips
07/19/2005US6919001 Disk coating system
07/19/2005US6918984 Photocurable adhesive compositions, reaction products of which have low halide ion content
07/19/2005US6918983 Adhesion method and electronic component
07/19/2005US6918961 Group III nitride compound semiconductor device and producing method therefor
07/19/2005US6918960 CVD of PtRh with good adhesion and morphology
07/19/2005US6918946 Improved chemical stability/crystal structure; light emitting diodes
07/19/2005US6918864 Roller that avoids substrate slippage
07/19/2005US6918819 Method for defect reduction
07/19/2005US6918735 Holding device for wafers
07/19/2005US6918731 Fast swap dual substrate transport for load lock
07/19/2005US6918437 Heatsink buffer configuration
07/19/2005US6918429 Dual-layer heat dissipating structure
07/19/2005US6918421 Thin film forming apparatus and thin film forming method
07/19/2005US6918406 Chemical supply apparatus
07/19/2005US6918352 Method for producing coated workpieces, uses and installation for the method
07/19/2005US6918284 Interconnected networks of single-walled carbon nanotubes
07/19/2005US6918192 Substrate drying system
07/19/2005US6918178 Method of attaching a heat sink to an IC package
07/19/2005CA2275298C Semiconductor component, in particular a solar cell, and process for manufacture of same
07/14/2005WO2005064998A1 Plasma processing apparatus
07/14/2005WO2005064705A1 Increasing the wettability of polymer solutions to be deposited on hydrophobic ferroelecric polymerb layers
07/14/2005WO2005064687A1 Semiconductor device comprising a pn-heterojunction
07/14/2005WO2005064685A1 Semiconductor device and its manufacturing method
07/14/2005WO2005064684A1 Semiconductor device manufacturing method and semiconductor device
07/14/2005WO2005064683A1 Transistor with silicon and carbon layer in the channel region
07/14/2005WO2005064682A1 Semiconductor memory device with increased node capacitance
07/14/2005WO2005064681A2 Non-volatile ferroelectric memory device and manufacturing method
07/14/2005WO2005064680A1 Semiconductor device and semiconductor integrated circuit device
07/14/2005WO2005064679A1 Wafer with optical control modules in ic fields
07/14/2005WO2005064678A1 Wafer with optical control modules in dicing paths
07/14/2005WO2005064676A1 Assembly of a component mounted on a transfer surface
07/14/2005WO2005064672A2 Integrated circuit memory cells and methods of forming
07/14/2005WO2005064671A1 Method to fabricate interconnect structures
07/14/2005WO2005064670A1 A pedestal for an etch processing apparatus
07/14/2005WO2005064669A1 System and method for process degradation and problematic tool identification
07/14/2005WO2005064668A1 Wafer level super stretch solder
07/14/2005WO2005064667A1 Ic chip mounting body manufacturing method and manufacturing device
07/14/2005WO2005064666A1 Highly efficient gallium nitride based light emitting diodes via surface roughening
07/14/2005WO2005064665A1 REDUCTION OF BORON DIFFUSIVITY IN pFETs
07/14/2005WO2005064664A1 Semiconductor device comprising a heterojunction
07/14/2005WO2005064663A1 Ultraviolet ray cleaning device and cleaning method
07/14/2005WO2005064662A2 A semiconductor substrate with solid phase epitaxial regrowth with reduced depth of doping profile and method of producing same
07/14/2005WO2005064661A1 Method for producing group iii nitride crystal, group iii nitride crystal obtained by such method, and group iii nitride substrate using same
07/14/2005WO2005064660A1 Microwave plasma processing method, microwave plasma processing apparatus, and its plasma head
07/14/2005WO2005064659A1 Temperature regulating method for substrate treating system and substrate treating system
07/14/2005WO2005064658A1 Semiconductor member, manufacturing method thereof, and semiconductor device
07/14/2005WO2005064657A1 Method of sealing two plates with the formation of an ohmic contact therebetween
07/14/2005WO2005064656A1 Development device and development method
07/14/2005WO2005064655A1 Developing device and developing method
07/14/2005WO2005064654A1 Semiconductor substrate, manufacturing method thereof, and semiconductor device
07/14/2005WO2005064653A1 Method for patterning a ferroelectric polymer layer
07/14/2005WO2005064652A1 Apparatuses and methods for cleaning a substrate
07/14/2005WO2005064651A2 Improved gap-fill techniques
07/14/2005WO2005064650A2 Method and apparatus for performing a limited area spectral analysis
07/14/2005WO2005064649A2 Exhaust conditioning system for semiconductor reactor
07/14/2005WO2005064648A1 Edge wheel dry manifold
07/14/2005WO2005064647A1 Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids
07/14/2005WO2005064645A1 Proximity brush unit apparatus and method
07/14/2005WO2005064644A2 Strained silicon mosfets having reduced diffusion of n-type dopants
07/14/2005WO2005064643A1 NON-POLAR (A1,B,In,Ga)N QUANTUM WELLS
07/14/2005WO2005064642A1 Substrate holding apparatus, substrate holding method, and substrate processing apparatus
07/14/2005WO2005064640A1 Electronic part mounting apparatus
07/14/2005WO2005064403A1 Composition for forming nitride coating film for hard mask
07/14/2005WO2005064400A2 Chuck system, lithographic apparatus using the same and device manufacturing method
07/14/2005WO2005064382A1 Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
07/14/2005WO2005064351A1 Conductive contact holder, conductive contact unit and process for producing conductive contact holder
07/14/2005WO2005064320A1 Device and method for observing a bonding interface
07/14/2005WO2005064254A1 Vertical heat treatment device and method of controlling the same
07/14/2005WO2005064041A1 Deposition of titanium nitride film
07/14/2005WO2005064040A1 Method for the organised growth of nanostructures
07/14/2005WO2005063612A1 Fine metal structure, process for producing the same, fine metal mold and device
07/14/2005WO2005063456A1 Handling device
07/14/2005WO2005063435A1 Laser processing protection sheet and production methodfor laser processed article
07/14/2005WO2005063434A1 Method, device and diffraction grating for separating semiconductor elements formed on a substrate by altering said diffraction grating
07/14/2005WO2005063431A1 Method of and arrangement for separating semiconductor elements formed in a wafer of semiconductor material, and semiconductor element separated therewith
07/14/2005WO2005062998A2 Metal interconnect system and method for direct die attachment
07/14/2005WO2005062944A2 Method of manufacturing self-aligned non-volatile memory device
07/14/2005WO2005062905A2 Laser lift-off of sapphire from a nitride flip-chip
07/14/2005WO2005062885A2 Selectivity control in a plasma processing system
07/14/2005WO2005062752A2 Metal carbide gate structure and method of fabrication
07/14/2005WO2005062745A2 GaN/AlGaN/GaN DISPERSION-FREE HIGH ELECTRON MOBILITY TRANSISTORS
07/14/2005WO2005041252A3 SPLIT POLY-SiGe/POLY-Si ALLOY GATE STACK
07/14/2005WO2005036567A3 Stand-alone organic-based passive devices
07/14/2005WO2005033352A3 Deposition and patterning process