Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2005
08/11/2005US20050176605 polyether surfactants used to reduce surface tension of aqueous or nonaqueous process solutions
08/11/2005US20050176604 Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
08/11/2005US20050176603 cleaning microelectronic substrates, and particularly cleaning compositions useful with and having improved compatibility with microelectronic substrates characterized by silicon dioxide, sensitive low- kappa or high- kappa dielectrics and copper, tungsten, tantalum, nickel, gold, cobalt
08/11/2005US20050176602 Cleaning compositions suitable for cleaning microelectronic structures having silicon dioxide, low-k or high-k di-electrics and copper or aluminum metallizations contain a polar organic solvent selected from amides, sulfones, sulfolenes, selenones and saturated alcohols and a strong alkaline base.
08/11/2005US20050176354 Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same
08/11/2005US20050176348 Treatment condition decision method, treatment condition decision system, treatment system, treatment condition decision calculator program, program recording medium, and semiconductor device manufacturing method
08/11/2005US20050176335 Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
08/11/2005US20050176334 Method for manufacturing plasma display panel
08/11/2005US20050176264 Process of forming silicon-based nanowires
08/11/2005US20050176263 Process for producing materials for electronic device
08/11/2005US20050176262 Process for producing epitaxial silicon wafer and silicon wafer produced by process thereof
08/11/2005US20050176261 Film formation method and apparatus for semiconductor process
08/11/2005US20050176260 Method for removing oxides from a Ge semiconductor substrate surface
08/11/2005US20050176259 Method for removing photoresist
08/11/2005US20050176258 Pressure control method and processing device
08/11/2005US20050176257 Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width
08/11/2005US20050176256 Method for expanding a trench in a semiconductor structure
08/11/2005US20050176255 Electronic package repair process
08/11/2005US20050176254 Pattern forming method and manufacturing method of semiconductor device
08/11/2005US20050176253 Method of manufacturing semiconductor device
08/11/2005US20050176252 Two-stage load for processing both sides of a wafer
08/11/2005US20050176251 Polishing pad with releasable slick particles
08/11/2005US20050176250 Polishig fluid for metallic films and method for producing semiconductor substrate using the same
08/11/2005US20050176249 Controlled growth of gallium nitride nanostructures
08/11/2005US20050176248 Semiconductor device with cobalt silicide contacts
08/11/2005US20050176247 Retarding agglomeration of Ni monosilicide using Ni alloys
08/11/2005US20050176245 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates
08/11/2005US20050176244 Method for manufacturing gate structure of memory
08/11/2005US20050176243 Method of fabricating dual damascene interconnection and etchant for stripping sacrificial layer
08/11/2005US20050176242 Patterning method
08/11/2005US20050176241 Method of forming metal wiring of semiconductor devices
08/11/2005US20050176239 Method for making contact making connections
08/11/2005US20050176238 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
08/11/2005US20050176237 In-situ liner formation during reactive ion etch
08/11/2005US20050176236 Method of forming interconnection lines for semiconductor device
08/11/2005US20050176235 Manufacturing method of semiconductor device
08/11/2005US20050176234 Bumping process of light emitting diode
08/11/2005US20050176232 Methods and apparatus for integrated circuit ball bonding with substantially perpendicular wire bond profiles
08/11/2005US20050176231 Bumping process of light emitting diode
08/11/2005US20050176230 Providing fluorocarbon layers on conductive electrodes in making electronic devices such as OLED devices
08/11/2005US20050176229 Novel deposition method for si-ge epi layer on different intermediate substrates
08/11/2005US20050176228 Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures
08/11/2005US20050176227 Method of forming metal silicide
08/11/2005US20050176226 Electronic devices comprising bottom-gate tfts and their manufacture
08/11/2005US20050176225 Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method
08/11/2005US20050176224 Ion implantation method in semiconductor device
08/11/2005US20050176223 Substrate processing method
08/11/2005US20050176222 Semiconductor substrate manufacturing method and semiconductor device manufacturing method, and semiconductor substrate and semiconductor device manufactured by the methods
08/11/2005US20050176221 Plasma CVD apparatus
08/11/2005US20050176220 Semiconductor device and method for manufacturing thereof
08/11/2005US20050176219 Methods of forming MOSFETs using crystalline sacrificial structures and MOSFETs so formed
08/11/2005US20050176218 Method and apparatus for manufacturing net shape semiconductor wafers
08/11/2005US20050176217 Method to fabricate patterned strain-relaxed sige epitaxial with threading dislocation density control
08/11/2005US20050176216 Ultra low dielectric constant thin film
08/11/2005US20050176215 Trench structure having a void and inductor including the trench structure
08/11/2005US20050176214 Method of forming a shallow trench-deep trench isolation region for a BiCMOS/CMOS technology
08/11/2005US20050176213 Hemi-spherical grain silicon enhancement
08/11/2005US20050176212 MEMS device and method of forming MEMS device
08/11/2005US20050176211 Semiconductor memory device, semiconductor device, and method for production thereof
08/11/2005US20050176210 Fabrication of lean-free stacked capacitors
08/11/2005US20050176208 Semiconductor wafer and manufacturing method thereof
08/11/2005US20050176207 Method of manufacturing a semiconductor device
08/11/2005US20050176206 Method and system for forming a contact in a thin-film device
08/11/2005US20050176205 Method of forming a transistor using selective epitaxial growth
08/11/2005US20050176204 Source and drain elements
08/11/2005US20050176203 [method of fabricating non-volatile memory cell ]
08/11/2005US20050176202 Nonvolatile semiconductor memory and making method thereof
08/11/2005US20050176201 Spacer for a split gate flash memory cell and a memory cell employing the same
08/11/2005US20050176200 [method of fabricating a flash memory]
08/11/2005US20050176199 Semiconductor memory device and method of fabricating the same
08/11/2005US20050176198 Method of fabricating bottle trench capacitors using an electrochemical etch with electrochemical etch stop
08/11/2005US20050176197 Line mask defined active areas for 8F2 dram cells with folded bit lines and deep trench patterns
08/11/2005US20050176195 Decoupling capacitor
08/11/2005US20050176194 Transistor arrray, manufacturing method thereof and image processor
08/11/2005US20050176193 Method of forming a gate of a semiconductor device
08/11/2005US20050176192 Planarization method of manufacturing a superjunction device
08/11/2005US20050176191 Method for fabricating a notched gate structure of a field effect transistor
08/11/2005US20050176190 Alloying method, and wiring forming method, display device forming method, and image unit fabricating method
08/11/2005US20050176189 Method of forming single crystal silicon thin film using sequential lateral solidification (SLS)
08/11/2005US20050176188 Thin film transistor and manufacturing method thereof
08/11/2005US20050176187 Thin film transistor and manufacturing method thereof
08/11/2005US20050176186 Field effect transistor and method for manufacturing the same
08/11/2005US20050176185 Fabrication method of thin-film transistor array with self-organized organic semiconductor
08/11/2005US20050176184 Semiconductor device fabrication method
08/11/2005US20050176183 Method of manufacturing thin film transistor, method of manufacturing display and display
08/11/2005US20050176182 Forming a plurality of thin-film devices
08/11/2005US20050176180 Die encapsulation using a porous carrier
08/11/2005US20050176178 Method for manufacturing semiconductor device
08/11/2005US20050176176 Ball transferring method and apparatus
08/11/2005US20050176175 Method of manufacturing hybrid integrated circuit device
08/11/2005US20050176174 Methodof making an integrated circuit
08/11/2005US20050176173 Chip-on-board module, and method of manufacturing the same
08/11/2005US20050176172 Packaging structure and process of electronic card
08/11/2005US20050176171 Semiconductor device and its manufacturing method
08/11/2005US20050176170 Process for the manufacture of large area arrays of discrete components
08/11/2005US20050176169 Thin semiconductor chip manufacturing method
08/11/2005US20050176168 Package structure of optical device and method for manufacturing the same
08/11/2005US20050176167 Method for fabricating image sensor including isolation layer having trench structure
08/11/2005US20050176165 Semiconductor device, semiconductor laser device, manufacturing method for semiconductor device, manufacturing method for semiconductor laser device, optical disk device and optical transmission system
08/11/2005US20050176164 Back-contact solar cells and methods for fabrication