Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2005
08/04/2005US20050170541 Radical processing of a sub-nanometer insulation film
08/04/2005US20050170539 Substrate for semiconductor light-emitting element, semiconductor light-emitting element and semiconductor light-emitting element fabrication method
08/04/2005US20050170538 Process for producing a semiconductor light-emitting device
08/04/2005US20050170537 Manufacture of a semiconductor device
08/04/2005US20050170536 Production method of electron source and image display
08/04/2005US20050170535 Calibration standards for dopants/impurities in silicon and preparation method
08/04/2005US20050170534 Ferroelectric capacitor, method of manufacturing same, and semiconductor memory device
08/04/2005US20050170533 Magnetic tunnel junction device with a compositionally modulated electrode
08/04/2005US20050170532 Novel oxidation method to fabricate low resistance TMR read head
08/04/2005US20050170531 Method for formation of an ultra-thin film and semiconductor device containing such a film
08/04/2005US20050170524 Impurity measuring method for Ge substrates
08/04/2005US20050170307 Heat treatment jig for semiconductor silicon substrate
08/04/2005US20050170306 Method and apparatus for purging seals in a thermal reactor
08/04/2005US20050170296 Lithographic apparatus and device manufacturing method
08/04/2005US20050170294 Exposing a resist film formed on semiconductor substrate to a light using photomask in which patterns are arranged two-dimensionally at a predetermined altitude; development; reducing an opening size; setting a reflow start temperature, heating; coating with water soluble resin; crosslinking; etching
08/04/2005US20050170293 Exposure apparatus
08/04/2005US20050170290 Electrodes; dielectrics; photoresist patterning; dry etching; ashing; color filters; transistors; high luminance and quality
08/04/2005US20050170283 Polymers based on cinnamic acid as a bottom antireflective coating for 157 NM photolithography
08/04/2005US20050170278 Polymer and photoresist compositions
08/04/2005US20050170276 Improved sensitivity and pattern resolution exhibiting high exposure margin and focusing depth latitude; polyvinylphenol; acid generators
08/04/2005US20050170270 Composition for forming wiring protective film and uses thereof
08/04/2005US20050170269 Solidifying flowable film onto which concave and convex portions have been transferred, annealing film with press, then patterning of solidified film burnt by annealing
08/04/2005US20050170268 Circuit patterning substrate, providing mask, collimating incident direction of particles, irradiating
08/04/2005US20050170267 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region
08/04/2005US20050170265 Mask, exposure method and production method of semiconductor device
08/04/2005US20050170264 Projects images of grating pattern and test pattern; photoresists
08/04/2005US20050170263 Mask blank manufacturing method and sputtering target for manufacturing the same
08/04/2005US20050170262 Exposure processing system, exposure processing method and method for manufacturing a semiconductor device
08/04/2005US20050170218 Tunnel junction type includes a magnetic multi-layered film, ferromagnetic film, insulating film such that a current flows between the magnetic multi-layered film and the ferromagnetic film, tunneling through the insulating film; entirety of first magnetic multi-layered film can be rewritten
08/04/2005US20050170199 Aluminum silicophosphate glasses
08/04/2005US20050170198 Includes an intermediate layer that contains at least one element selected from Mo, Cr, Ni, Si, Fe, Al and an oxygen and water barrier film; can enhance the bonding strength between a conductive layer and a polyimide film at high temperatures
08/04/2005US20050170196 Substrate having catalyst layer thereon and method of cleaning reaction chamber using the same
08/04/2005US20050170105 Method for forming compressive alpha-tantalum on substrates and devices including same
08/04/2005US20050170104 Producing thinner films with precisely controlled stress; plasma enhanced chemical vapor deposition employing both high and low radio frequency power input sources
08/04/2005US20050170102 Plasma exposure production of adhesion enhancement layer between low dielectric constant film and underlying layer; peeling and moisture resistance
08/04/2005US20050170093 Simplifying semiconductor substrate planarization; applying plurality of liquids of different viscosities with fewer steps
08/04/2005US20050170092 Alkaline earth metal complexes and their use
08/04/2005US20050170090 By setting the ratio between the amount of the barrier gas supplied from first and second barrier gas supply ports and ratio between amounts of barrier gas and raw material gas enables to form a thin film without particles adhesion on the substrate
08/04/2005US20050170087 Spraying spirally onto rotating wafer; wafer holder, coating nozzle, a fog nozzle to spray solvent on an edge area located outside coated area; rotary mechanism
08/04/2005US20050170084 Manufacturing method of optical devices
08/04/2005US20050170080 single process tool; surface of semiconductor has barrier layer and conductor; two planarization modules, an electroless deposition module; conductor is planarized until a portion of the barrier layer is expose and removed; workpiece moved to electroless plating module, a cap layer is formed
08/04/2005US20050169827 And metal tetrahydroundecaborate salts, and decaborane from isotopically enriched 10B-boric acid or 11B-boric acid; method particularly useful for synthesis of isotopically enriched sodium or lithium borohydride, MB11H14 (where M is Li, Na, K, or alkylammonium), and decaborane
08/04/2005US20050169767 Method for recycling gases used in a lithography tool
08/04/2005US20050169730 Semiconductor processing tool front end interface with sealing capability
08/04/2005US20050169620 Optical device
08/04/2005US20050169515 Surface position measuring method and apparatus
08/04/2005US20050169340 Optically pumped edge-emitting semiconductor laser
08/04/2005US20050169330 Laser annealing apparatus and annealing method of semiconductor thin film
08/04/2005US20050169096 PAA- based etchant, methods of using same, and resultant structures
08/04/2005US20050169085 Nonvolatile semiconductor memory apparatus and method of producing the same
08/04/2005US20050169071 Fuse circuit and semiconductor integrated circuit device
08/04/2005US20050169067 Memory device capable of performing high speed reading while realizing redundancy replacement
08/04/2005US20050169060 Semiconductor integrated circuit device and control method for the semiconductor integrated circuit device
08/04/2005US20050169059 Current threshold detector
08/04/2005US20050169054 SRAM cells with repressed floating gate memory, low tunnel barrier interpoly insulators
08/04/2005US20050169050 Semiconductor device with a metal insulator semiconductor transistor
08/04/2005US20050169048 Single transistor type magnetic random access memory device and method of operating and manufacturing the same
08/04/2005US20050169044 Magnetic memory device having magnetic shield layer, and manufacturing method thereof
08/04/2005US20050169043 Semiconductor memory device and its manufacturing method
08/04/2005US20050169042 Multi-threshold MIS integrated circuit device and circuit design method thereof
08/04/2005US20050169041 Method of forming floating-gate memory cell having trench structure with ballistic-charge injector, and the array of memory cells made thereby
08/04/2005US20050169040 Combination field programmable gate array allowing dynamic reprogrammability
08/04/2005US20050169039 Combination field programmable gate array allowing dynamic reprogrammability and non-volatile programmability based upon transistor gate oxide breakdown
08/04/2005US20050169037 Ferroelectric-type nonvolatile semiconductor memory
08/04/2005US20050169036 Nonvolatile memory device using serial diode cell
08/04/2005US20050169035 Flash memory cell, flash memory cell array and manufacturing method thereof
08/04/2005US20050169032 Memory macro with modular peripheral circuit elements
08/04/2005US20050168960 Module with a built-in component, and electronic device with the same
08/04/2005US20050168915 Semiconductor capacitor with praseodymium oxide as dielectric
08/04/2005US20050168914 Integrated capacitor
08/04/2005US20050168895 Method of manufacturing a semiconductor device having a protection circuit
08/04/2005US20050168887 Magnetoresistive element, magnetic head, magnetic reproducing apparatus, and magnetic memory
08/04/2005US20050168882 Magnetic resistance device and method of manufacturing the same
08/04/2005US20050168851 Image forming method and apparatus
08/04/2005US20050168793 Drive circuit of switch and relay circuit
08/04/2005US20050168790 System and method for calibrating a spatial light modulator
08/04/2005US20050168758 Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
08/04/2005US20050168754 Cyclic error reduction in average interferometric position measurements
08/04/2005US20050168731 Method for analyzing defect data and inspection apparatus and review system
08/04/2005US20050168730 Method and apparatus for inspecting defects
08/04/2005US20050168729 Method for inspecting a wafer
08/04/2005US20050168718 Apparatus for kinematic registration of a reticle
08/04/2005US20050168715 Apparatus and method for processing wafers
08/04/2005US20050168713 Immersion photolithography system and method using microchannel nozzles
08/04/2005US20050168712 Exposure apparatus and device manufacturing method
08/04/2005US20050168672 Liquid crystal display and method for fabricating the same
08/04/2005US20050168666 Liquid crystal display device and a manufacturing method of the same
08/04/2005US20050168415 Light emitting device
08/04/2005US20050168319 Semiconductor resistor
08/04/2005US20050168316 Encapsulation with oxide bond to borosilicate mixture
08/04/2005US20050168264 Integrated circuit
08/04/2005US20050168243 Buffer circuit, buffer tree, and semiconductor device
08/04/2005US20050168242 Control circuits and methods including delay times for multi-threshold CMOS devices
08/04/2005US20050168235 Inspection system, inspection method, and method for manufacturing semiconductor device
08/04/2005US20050168232 Probing method and prober
08/04/2005US20050168224 Receiver electronics proximate antenna
08/04/2005US20050168141 Method for producing an electronic component and a display
08/04/2005US20050168133 Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
08/04/2005US20050168086 Magnetic floating device
08/04/2005US20050167857 Semiconductor wafer and a method for manufacturing a semiconductor wafer
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