| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/22/2005 | US20050205114 Method for the removal of airborne molecular contaminants using water gas mixtures |
| 09/22/2005 | US20050205113 Processing solution supply nozzle is moved relatively from one end to the opposite end of a semiconductor wafer having undergone a developing operation while discharging an antistatic cleaning solution in a discharge width equal to or greater than the width of the wafer; defect prevention |
| 09/22/2005 | US20050205111 Method and apparatus for processing a microfeature workpiece with multiple fluid streams |
| 09/22/2005 | US20050205110 Removing native oxides from a substrate surface (semiconductor) in a vacuum chamber by generating reactive species from a gas mixture(NH3 + NF3), cooling surface and reacting with gas to form a film (ammonium hexafluorosilicate), and annealing to vaporize film; dry etching |
| 09/22/2005 | US20050205109 Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device |
| 09/22/2005 | US20050205016 Plasma treatment apparatus and plasma treatment method |
| 09/22/2005 | US20050205015 Insulating film forming method, insulating film forming apparatus, and plasma film forming apparatus |
| 09/22/2005 | US20050205013 Plasma processing apparatus and plasma processing method |
| 09/22/2005 | US20050205012 Transfer chamber for cluster system |
| 09/22/2005 | US20050205010 In situ growth of oxide and silicon layers |
| 09/22/2005 | US20050205007 Apparatus for uniformly baking substrates such as photomasks |
| 09/22/2005 | US20050205003 Silicon carbide single crystal and method and apparatus for producing the same |
| 09/22/2005 | US20050205000 Low defect density silicon |
| 09/22/2005 | US20050204848 Multi-joint robot and control device thereof |
| 09/22/2005 | US20050204639 Polishing composition and polishing method |
| 09/22/2005 | US20050204638 Polishing composition and polishing method |
| 09/22/2005 | US20050204637 Polishing composition and polishing method |
| 09/22/2005 | US20050204554 Method for processing electrical components, especially semiconductor chips, and device for carrying out the method |
| 09/22/2005 | DE4329838B4 Festkörper-Bildsensor Solid-state image sensor |
| 09/22/2005 | DE19983426B4 Verfahren zum Herstellen einer Halbleitervorrichtung mit getrennten Schaltungselementausbildungsschichten unterschiedlicher Dicken A method of manufacturing a semiconductor device having separate circuit element formation layers of different thicknesses |
| 09/22/2005 | DE19932959B4 Halbleitervorrichtung und diese verwendende Halbleiterschaltung Semiconductor device and this use semiconductor circuit |
| 09/22/2005 | DE19909815B4 Halbleitervorrichtung und Herstellungsverfahren einer Halbleitervorrichtung A semiconductor device and manufacturing method of a semiconductor device |
| 09/22/2005 | DE19901002B4 Verfahren zum Strukturieren einer Schicht A method for patterning a layer |
| 09/22/2005 | DE19900313B4 Halbleitervorrichtung und Herstellungsverfahren einer Halbleitervorrichtung A semiconductor device and manufacturing method of a semiconductor device |
| 09/22/2005 | DE19813741B4 Halbleitervorrichtung mit einer oberen und einer unteren Leitungsschicht A semiconductor device having an upper and a lower conductive layer |
| 09/22/2005 | DE10335063B4 Automatisches Aufkitten von Si-Stäben auf die Sägeunterlage Automatic cementing of Si rods on the Sägeunterlage |
| 09/22/2005 | DE10251247B4 Halbleiterbaugruppe mit Halbleiterchip, gebildet unter Verwendung eines Halbleiters mit breitem Bandabstand als Basismaterial A semiconductor package with semiconductor chip formed using a semiconductor with a wide band gap as a base material |
| 09/22/2005 | DE10249897B4 Selbstjustierendes Verfahren zur Herstellung eines Transistors Self-aligning method of manufacturing a transistor |
| 09/22/2005 | DE10230696B4 Verfahren zur Herstellung eines Kurzkanal-Feldeffekttransistors A process for producing a short-channel field effect transistor |
| 09/22/2005 | DE102005011300A1 Vorspannungsschaltung, Festkörper-Abbildungssystem und zugehöriges Herstellungsverfahren Bias, solid-state imaging system and manufacturing method thereof |
| 09/22/2005 | DE102005005732A1 Verfahren zur Herstellung von Flaschengrabenkondensatoren unter Verwendung eines elektrochemischen Ätzens mit elektrochemischem Ätzstop A process for the production of bottles grave capacitors using an electrochemical etching with electrochemical etch stop |
| 09/22/2005 | DE102005005290A1 Konstantstromquellen-Vorrichtung mit zwei seriellen Verarmungs-MOS-Transistoren Constant current source device with two serial depletion MOS transistors |
| 09/22/2005 | DE102005002537A1 System für geladene Teilchen und Verfahren zum Messen der Abbildungsvergrösserung System for charged particles and methods for measuring the imaging magnification |
| 09/22/2005 | DE102005001434A1 Verfahren zur Herstellung einer Wedge-Wedge Drahtverbindung A process for the preparation of a wedge-wedge wire bond |
| 09/22/2005 | DE102004063702A1 Fabrication of semiconductor device involves forming via hole in protective insulating layer to expose portion of copper line, forming hafnium-containing layer in via hole to cover exposed portion, and forming conductive layer |
| 09/22/2005 | DE102004063523A1 Halbleitervorrichtung Semiconductor device |
| 09/22/2005 | DE102004062860A1 Fabrication of copper interconnect of semiconductor device, by depositing barrier layer along bottom and sidewalls of trench and via hole, and depositing tantalum/tantalum nitride layer over substrate including copper interconnect |
| 09/22/2005 | DE102004053559A1 Drahtloses, berührungsloses Testen von integrierten Schaltungen Wireless, contactless testing of integrated circuits |
| 09/22/2005 | DE102004053557A1 Verfahren und Vorrichtungen zum Drucken leitfähiger Dickfilme über Dickfilmdielektrika Methods and apparatus for printing conductive thick films on Dickfilmdielektrika |
| 09/22/2005 | DE102004032014A1 Circuit module, has passive component with contact areas, and elastic mechanical connection provided between component and one of semiconductor chips, where one contact area is electrically connected with contact areas of chips |
| 09/22/2005 | DE102004019015A1 Mobile, manual, electrostatic holder for semiconductor wafers, thin conductive, disc-shaped substrates etc. in semiconductor industry, with holder integrated in support of wafer, or substrate holder |
| 09/22/2005 | DE102004012013A1 Connecting two wafers, comprises placing one on top of the other and then heating the contact region locally for a limited time |
| 09/22/2005 | DE102004011234A1 Thyristor ignition sensitivity adjusting method, involves sequently arranging p-doped emitter, n-doped base, p-doped base and n-doped main emitter in semiconductor body |
| 09/22/2005 | DE102004011035A1 Verfahren zur Prüfung der Dichtigkeit von Scheibenbondverbindungen und Anordnung zur Durchführung des Verfahrens Method for testing the tightness of bonding connections and disc arrangement for performing the method |
| 09/22/2005 | DE102004010956A1 Halbleiterbauteil mit einem dünnen Halbleiterchip und einem steifen Verdrahtungssubstrat sowie Verfahren zur Herstellung und Weiterverarbeitung von dünnen Halbleiterchips A semiconductor device comprising a thin semiconductor chip and a rigid wiring substrate and methods of making and further processing of thin semiconductor chips |
| 09/22/2005 | DE102004010399A1 Metallic components e.g. copper bumps, and semiconductor substrate connecting device, has pressing equipment with supporting plate and press die with plate including mounting ring that holds pressing mat |
| 09/22/2005 | DE102004010379A1 Verfahren zur Herstellung von Wafern mit defektarmen Oberflächen, die Verwendung solcher Wafer und damit erhaltene elektronische Bauteile A process for the production of wafers with low defect surfaces, the use of such wafers and electronic parts thus obtained |
| 09/22/2005 | DE102004010377A1 Herstellung von Substratwafern für defektarme Halbleiterbauteile, ihre Verwendung, sowie damit erhaltene Bauteile Preparation of substrate wafers for low-defect semiconductor devices, their use, and thus obtained components |
| 09/22/2005 | DE102004009601A1 Verfahren zur Herstellung eines Feldeffekttransistors A process for producing a field effect transistor |
| 09/22/2005 | DE102004009600A1 Selbstorganisierende organische Dielektrikumsschichten auf der Basis von Phosphonsäure-Derivaten Self-organizing organic dielectric layers on the basis of phosphonic acid derivatives |
| 09/22/2005 | DE102004009516A1 Verfahren und System zum Steuern eines Produktparameters eines Schaltungselements A method and system for controlling a parameter of a product circuit element |
| 09/22/2005 | DE102004009337A1 Kontaktplatte zur Verwendung bei einer Kalibrierung von Testerkanälen eines Testersystems sowie ein Kalibriersystem mit einer solchen Kontaktplatte Contact plate for use in calibration of tester channels of a tester system and a calibration system with such a contact plate |
| 09/22/2005 | DE102004009323A1 Vertical diffusion metal oxide semiconductor transistor, as a power transistor cell structure, has trenches to give an avalanche flow below them and a flow path through the trench centers |
| 09/22/2005 | DE102004009296A1 Anordnung eines elektrischen Bauelements und einer elektrischen Verbindungsleitung des Bauelements sowie Verfahren zum Herstellen der Anordnung Arrangement of an electrical component and an electrical connection line of the device and method of manufacturing the arrangement |
| 09/22/2005 | DE102004009174A1 Method for implanting semiconductor wafer used in production of integrated circuit involves applying amorphous layer on substrate, applying antireflection layer and resist layer, structuring resist layer and implanting ions |
| 09/22/2005 | DE102004009083A1 MOS power transistor device, has vertical transistor structures with body zone that includes implantation body enhancement zone and having doping concentration greater than concentration of body zone and smaller than body-contact zone |
| 09/22/2005 | DE102004008919A1 Method for characterizing deep trench capacitors on a semiconductor substrate comprises preparing a semiconductor substrate sample, applying a sinusoidal voltage, determining the impedance values and characterizing the capacitor |
| 09/22/2005 | DE102004007244A1 Formation of wire line involves forming bit line after forming second contact used as storage node contact so that electrical connection between second contact and lower semiconductor substrate can be reliably formed |
| 09/22/2005 | DE102004005645A1 Verfahren zur Herstellung von Schichtaufbauten zur Signalverteilung A process for the production of layer structures for signal distribution |
| 09/22/2005 | DE10046012B4 Verfahren zur Bildung eines Kontaktlochs in einer Halbleiterschaltungsanordnung A method of forming a contact hole in a semiconductor circuit arrangement |
| 09/22/2005 | DE10008243B4 Integrierter Speicher mit Plattenleitungssegmenten Built-in memory with the plate line segments |
| 09/22/2005 | CA2596961A1 Buried-contact solar cells with self-doping contacts |
| 09/21/2005 | EP1578174A1 Organic electroluminescence element and organic electroluminescence display |
| 09/21/2005 | EP1577965A1 A p-type OFET with channels of fluorinated organic compounds |
| 09/21/2005 | EP1577964A1 Method for the production of an organic vertical field effect transistor |
| 09/21/2005 | EP1577963A2 Flat panel display device |
| 09/21/2005 | EP1577954A1 Method for transporting solid particles |
| 09/21/2005 | EP1577953A2 Semiconductor memory device and manufacturing method for the same |
| 09/21/2005 | EP1577952A1 High voltage insulated gate field-effect transistor and method of making the same |
| 09/21/2005 | EP1577951A2 A semiconductor device and method of its manufacture |
| 09/21/2005 | EP1577948A1 Stacked microelectric module with vertical interconnect vias |
| 09/21/2005 | EP1577943A2 Semiconductor substrate, manufacturing method therefor, and semiconductor device |
| 09/21/2005 | EP1577942A2 Device with through-hole interconnection and method for manufacturing the same |
| 09/21/2005 | EP1577941A2 Method for creating a pattern in a material and semiconductor structure processed therewith |
| 09/21/2005 | EP1577940A2 Method of manufacturing a semiconductor device having damascene structures with air gaps |
| 09/21/2005 | EP1577939A2 Method of manufacturing a semiconductor device having damascene structures with air gaps |
| 09/21/2005 | EP1577938A1 Semiconductor device, dram integrated circuit device, and its manufacturing method |
| 09/21/2005 | EP1577937A1 Electrostatic chuck |
| 09/21/2005 | EP1577935A2 Compositions for preparing low dielectric materials containing solvents |
| 09/21/2005 | EP1577934A1 Alkaline post-chemical mechanical planarization cleaning compositions |
| 09/21/2005 | EP1577933A2 Method of manufacturing single-crystal GaN substrate, and single-crystal GaN substrate |
| 09/21/2005 | EP1577932A2 Method of manufacturing a semiconductor on a silicon on insulator (SOI) substrate using solid epitaxial regrowth (SPER) and semiconductor device made thereby |
| 09/21/2005 | EP1577931A2 Heat resistant ohmic electrode and method of manufacturing the same |
| 09/21/2005 | EP1577930A1 Coating device and coating film forming method |
| 09/21/2005 | EP1577929A2 Electron beam exposure apparatus |
| 09/21/2005 | EP1577927A2 Charged particle beam system |
| 09/21/2005 | EP1577912A1 Thin film capacitor and method for manufacturing same |
| 09/21/2005 | EP1577803A2 Interference analysis method, interference analysis device, interference analysis program and recording medium with interference analysis program recorded thereon |
| 09/21/2005 | EP1577789A2 Reconfigurable circuit with connection unit |
| 09/21/2005 | EP1577709A2 Illumination apparatus exposure apparatus and device manufacturing method |
| 09/21/2005 | EP1577708A2 Photosensitive resin composition and use of the same |
| 09/21/2005 | EP1577662A2 System and method for controlling composition for lithography process in real-time using near-infrared spectrometer |
| 09/21/2005 | EP1577656A1 Method for manufacturing a semiconductor pressure sensor |
| 09/21/2005 | EP1577636A1 Method and apparatus for measuring thickness of thin film formed on substrate |
| 09/21/2005 | EP1577425A1 LOW-RESISTANCE n TYPE SEMICONDUCTOR DIAMOND AND PROCESS FOR PRODUCING THE SAME |
| 09/21/2005 | EP1577421A1 Substrate processing apparatus and method for processing substrate |
| 09/21/2005 | EP1577420A1 Vacuum processing apparatus with showerhead |
| 09/21/2005 | EP1577357A1 Polishing composition and polishing method |
| 09/21/2005 | EP1577026A2 Method and device for removing dust from surface of support |
| 09/21/2005 | EP1576716A2 Apparatus for processing an object with high position accuracy |