Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2006
01/31/2006US6992343 Semiconductor memory device
01/31/2006US6992342 Magnetic memory device having a non-volatile magnetic section and manufacturing thereof
01/31/2006US6992340 Semiconductor device
01/31/2006US6992339 Asymmetric memory cell
01/31/2006US6992338 CMOS transistor spacers formed in a BiCMOS process
01/31/2006US6992337 Gallium arsenide antimonide (GaAsSB)/indium phosphide (InP) heterojunction bipolar transistor (HBT) having reduced tunneling probability
01/31/2006US6992332 Light emitting device and method for manufacturing the same
01/31/2006US6992328 Semiconductor device and manufacturing method thereof
01/31/2006US6992327 Monitor pattern of semiconductor device and method of manufacturing semiconductor device
01/31/2006US6992322 Photo-responsive organic field effect transistor
01/31/2006US6992321 Structure and method for fabricating semiconductor structures and devices utilizing piezoelectric materials
01/31/2006US6992320 Semiconductor optical device with quantum dots having internal tensile or compressive strain
01/31/2006US6992316 Angled sensors for detecting substrates
01/31/2006US6992307 Electron beam source and electron beam exposure apparatus employing the electron beam source
01/31/2006US6992298 Coated spherical silicon nanoparticle thin film UV detector with UV response and method of making
01/31/2006US6992297 Image sensor and manufacturing method thereof
01/31/2006US6992276 Semiconductor photodetector with internal reflector
01/31/2006US6992270 Wafer bake system and method for operating the same
01/31/2006US6992123 Polishing pad
01/31/2006US6992115 Preparation of crosslinked particles from polymers having activatible crosslinking groups
01/31/2006US6992050 Stripping agent composition and method of stripping
01/31/2006US6992026 Laser processing method and laser processing apparatus
01/31/2006US6992025 Strained silicon on insulator from film transfer and relaxation by hydrogen implantation
01/31/2006US6992024 Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
01/31/2006US6992023 Method and system for drying semiconductor wafers in a spin coating process
01/31/2006US6992022 Fabrication method for semiconductor integrated devices
01/31/2006US6992021 Method for forming a silicon nitride layer
01/31/2006US6992020 Method of fabricating semiconductor device
01/31/2006US6992019 Methods for forming silicon dioxide layers on substrates using atomic layer deposition
01/31/2006US6992018 Chemical fluid deposition for the formation of metal and metal alloy films on patterned and unpatterned substrates
01/31/2006US6992017 Process for cleaning silicon surface and fabrication of thin film transistor by the process
01/31/2006US6992016 Chemical processing method, and method of manufacturing semiconductor device
01/31/2006US6992015 Pattern formation method
01/31/2006US6992014 Method and apparatus for etch rate uniformity control
01/31/2006US6992013 Method of forming a fine pattern using a silicon-oxide-based film, semiconductor device with a silicon-oxide-based film and method of manufacture thereof
01/31/2006US6992012 Method and apparatus for forming improved metal interconnects
01/31/2006US6992011 Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma
01/31/2006US6992010 Gate structure and method of manufacture
01/31/2006US6992009 Method of manufacturing a semiconductor device
01/31/2006US6992008 Method of making a substrate having buried structure and method for fabricating a display device including the substrate
01/31/2006US6992007 Method of cleaning damascene structure of semiconductor wafer during fabrication of semiconductor device
01/31/2006US6992006 Method for fabricating semiconductor device
01/31/2006US6992005 Semiconductor device and method of manufacturing the same
01/31/2006US6992004 Implanted barrier layer to improve line reliability and method of forming same
01/31/2006US6992003 Integration of ultra low K dielectric in a semiconductor fabrication process
01/31/2006US6992002 Shapes-based migration of aluminum designs to copper damascence
01/31/2006US6992001 Screen print under-bump metalization (UBM) to produce low cost flip chip substrate
01/31/2006US6992000 Method of plating nonconductor product
01/31/2006US6991999 Bi-layer silicon film and method of fabrication
01/31/2006US6991998 Ultra-thin, high quality strained silicon-on-insulator formed by elastic strain transfer
01/31/2006US6991997 Semiconductor film, semiconductor device and method for manufacturing same
01/31/2006US6991996 Manufacturing method of semiconductor device and semiconductor chip using SOI substrate, facilitating cleaving
01/31/2006US6991995 Method of producing a semiconductor structure having at least one support substrate and an ultrathin layer
01/31/2006US6991994 Method of forming rounded corner in trench
01/31/2006US6991993 Method of fabricating trench isolation structure of a semiconductor device
01/31/2006US6991992 Method for forming inductor in semiconductor device
01/31/2006US6991991 Method for preventing to form a spacer undercut in SEG pre-clean process
01/31/2006US6991990 Method for forming a field effect transistor having a high-k gate dielectric
01/31/2006US6991989 Process of forming high-k gate dielectric layer for metal oxide semiconductor transistor
01/31/2006US6991988 Static pass transistor logic with transistors with multiple vertical gates
01/31/2006US6991987 Method for producing a low defect homogeneous oxynitride
01/31/2006US6991986 Nonvolatile memory devices and methods of fabricating the same
01/31/2006US6991985 Method of manufacturing a semiconductor device
01/31/2006US6991984 Method for forming a memory structure using a modified surface topography and structure thereof
01/31/2006US6991983 Method of manufacturing high voltage transistor in flash memory device
01/31/2006US6991982 Method of manufacturing a semiconductor non-volatile memory
01/31/2006US6991981 Processing methods of forming an electrically conductive plug to a node location
01/31/2006US6991980 Methods of manufacturing multi-layer integrated circuit capacitor electrodes
01/31/2006US6991979 Method for avoiding oxide undercut during pre-silicide clean for thin spacer FETs
01/31/2006US6991978 World line structure with single-sided partially recessed gate structure
01/31/2006US6991977 Method for forming a semiconductor structure with improved smaller forward voltage loss and higher blocking capability
01/31/2006US6991976 Method for manufacturing a semiconductor thin film
01/31/2006US6991975 Laser process
01/31/2006US6991974 Method for fabricating a low temperature polysilicon thin film transistor
01/31/2006US6991973 Manufacturing method of thin film transistor
01/31/2006US6991972 Gate material for semiconductor device fabrication
01/31/2006US6991971 Method for fabricating a triple damascene fuse
01/31/2006US6991970 Method and apparatus for circuit completion through the use of ball bonds or other connections during the formation of semiconductor device
01/31/2006US6991969 Methods and apparatus for addition of electrical conductors to previously fabricated device
01/31/2006US6991968 Method of fabricating a device for cooling a hot spot in micro system
01/31/2006US6991967 Apparatus and method for die attachment
01/31/2006US6991966 Method for embedding a component in a base and forming a contact
01/31/2006US6991965 Production method for manufacturing a plurality of chip-size packages
01/31/2006US6991964 Stacked type semiconductor device
01/31/2006US6991963 Electronic unit integrated into a flexible polymer body
01/31/2006US6991961 Method of forming a high-voltage/high-power die package
01/31/2006US6991960 Method of semiconductor device package alignment and method of testing
01/31/2006US6991959 Method of manufacturing silicon carbide film
01/31/2006US6991958 Solid-state electric device
01/31/2006US6991957 Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
01/31/2006US6991956 Methods for transferring a thin layer from a wafer having a buffer layer
01/31/2006US6991955 Compound semiconductor, method for producing the same, semiconductor light-emitting device and method for fabricating the same
01/31/2006US6991954 Method of manufacturing organic electroluminescence display device
01/31/2006US6991953 Microelectronic mechanical system and methods
01/31/2006US6991952 Method of manufacturing semiconductor device
01/31/2006US6991951 Solid-state imaging device production method and solid-state imaging device
01/31/2006US6991950 Method for fabricating semiconductor laser element and the same laser element
01/31/2006US6991949 Manufacturing method of an electron emitting apparatus
01/31/2006US6991948 Method of electrical characterization of a silicon-on-insulator (SOI) wafer
01/31/2006US6991947 Hybrid semiconductor circuit with programmable intraconnectivity