Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2006
05/04/2006WO2006047117A2 Method for reducing semiconductor die warpage
05/04/2006WO2006047116A1 Nonplanar device with thinned lower body portion and method of fabrication
05/04/2006WO2006047088A1 Methods and compositions for chemical mechanical polishing substrates
05/04/2006WO2006047061A2 Use of defined compounds for the manufacture of a medicament for preventing/ treating diseases resulting from somatic mutation
05/04/2006WO2006047052A1 Method for plasma enhanced bonding and bonded structures formed by plasma enhanced bonding
05/04/2006WO2006047024A1 Method of forming a transistor having a dual layer dielectric
05/04/2006WO2006047023A1 Method of forming a solution processed transistor having a multilayer dielectric
05/04/2006WO2006046821A1 Vertical-type electric contactor and manufacture method thereof
05/04/2006WO2006046806A1 Method of supplying flux to semiconductor device
05/04/2006WO2006046796A1 Valve of gas exhaust system
05/04/2006WO2006046768A1 Laser irradiation apparatus and laser irradiation method
05/04/2006WO2006046687A1 Positive photosensitive insulating resin composition and cured product thereof
05/04/2006WO2006046682A1 Reticle protective member, reticle carrying apparatus, exposure device, and reticle carrying method
05/04/2006WO2006046676A1 Electronic circuit board and its manufacturing method
05/04/2006WO2006046657A1 Liquid processing apparatus
05/04/2006WO2006046650A1 Probe member for wafer inspection, probe card for wafer inspection and wafer inspection equipment
05/04/2006WO2006046649A1 Substrate treating device and substrate rotating device
05/04/2006WO2006046641A1 Polishing composition for silicon wafer
05/04/2006WO2006046640A1 Fiber soi substrate, semiconductor device using same and method for manufacturing same
05/04/2006WO2006046634A1 Method for forming gate insulating film, semiconductor device and computer recording medium
05/04/2006WO2006046601A1 Process for producing semiconductor substrate, semiconductor substrate for solar application and etching solution
05/04/2006WO2006046591A1 Magnetoresistive element and magnetic memory device
05/04/2006WO2006046580A1 Carrying system, substrate treating device, and carrying method
05/04/2006WO2006046562A1 Substrate processing method, exposure apparatus and method for manufacturing device
05/04/2006WO2006046531A1 Film-forming apparatus, film-forming method, program and recording medium
05/04/2006WO2006046507A1 Optical system, lens barrel, exposure system, and production method for device
05/04/2006WO2006046495A1 Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same
05/04/2006WO2006046488A1 Substrate transfer apparatus, substrate transfer method and exposure apparatus
05/04/2006WO2006046487A1 Semiconductor device and semiconductor device manufacturing method
05/04/2006WO2006046475A1 High resolution pattern transfer method
05/04/2006WO2006046442A1 Semiconductor device and its manufacturing method
05/04/2006WO2006046430A1 Focal point detection device
05/04/2006WO2006046429A1 Overlay inspection system
05/04/2006WO2006046428A1 Mark position detection device, design method, and evaluation method
05/04/2006WO2006046427A1 Overlay inspection system
05/04/2006WO2006046403A1 Production method of semiconductor wafer, and semiconductor wafer
05/04/2006WO2006046388A1 Insulated gate semiconductor device and method for producing the same
05/04/2006WO2006046386A1 Film forming method, semiconductor device manufacturing method, semiconductor device, program and recording medium
05/04/2006WO2006046385A1 Solid-state image pickup device
05/04/2006WO2006046383A1 Resist composition, method for forming resist pattern, and compound
05/04/2006WO2006046348A1 Vertical boat for heat treatment and heat treatment method
05/04/2006WO2006046240A2 System, method and device of generating a random value
05/04/2006WO2006045920A1 Method for growing thin layers of low curvature silicon carbide on a silicon substrate
05/04/2006WO2006045885A1 Method of depositing lead containing oxides films
05/04/2006WO2006045722A1 Semi-conductor element and associated production method
05/04/2006WO2006045278A1 Semiconductor circuit arrangement and method for producing a semiconductor circuit arrangement
05/04/2006WO2006045266A1 Method and apparatus for transferring a solder depot arrangement
05/04/2006WO2006034189A3 High-mobility bulk silicon pfet
05/04/2006WO2006026370A3 Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber
05/04/2006WO2006026339A3 Process for fabricating a self-aligned deposited source/drain insulated gate field-effect transistor
05/04/2006WO2006014894A3 Method and apparatus for producing co-planar bonding pads on a substrate
05/04/2006WO2006014317A3 Method, system, and software for evaluating characteristics of a surface with reference to its edge
05/04/2006WO2006011790A3 Mould part and method for encapsulating electronic components
05/04/2006WO2006004693A3 Method for bilayer resist plasma etch
05/04/2006WO2006004671A3 Microelectronic package structure with spherical contact pins
05/04/2006WO2005124856A3 Method and system for improved wire bonding
05/04/2006WO2005106943A3 Level realignment following an epitaxy step
05/04/2006WO2005104814B1 Composite ground shield for passive components in a semiconductor die
05/04/2006WO2005098086A3 Remote chamber methods for removing surface deposits
05/04/2006WO2005095670A3 Remote chamber methods for removing surface deposits
05/04/2006WO2005092070A3 Vertically stacked semiconductor device
05/04/2006WO2005090447A3 Use of n-ethyl-2-pyrrolidone
05/04/2006WO2005089165A3 Nano-enabled memory devices and anisotropic charge carrying arrays
05/04/2006WO2005081283A3 Substrate support system for reduced autodoping and backside deposition
05/04/2006WO2005065127A3 A method for forming thick dielectric regions using etched trenches
05/04/2006WO2004079496A3 System for fabricating electrical circuits employing a fluid flow supporter
05/04/2006US20060095886 Architecture and interconnect scheme for programmable logic circuits
05/04/2006US20060095228 Apparatus and method for investigating semiconductor wafers
05/04/2006US20060095227 Alignment method, alignment apparatus, exposure apparatus using the same, and device manufactured by using the same
05/04/2006US20060094614 Non-corrosive cleaning composition for removing plasma etching residues
05/04/2006US20060094345 Polishing pad, polishing apparatus having the same, and bonding apparatus
05/04/2006US20060094343 Polishing machine
05/04/2006US20060094261 Method for in-situ uniformity optimization in a rapid thermal processing system
05/04/2006US20060094260 Method for laser processing of wafer
05/04/2006US20060094259 Forming gas anneal process for high dielectric constant gate dielectrics in a semiconductor fabrication process
05/04/2006US20060094258 Cyclic olefin polymers and catalyst for semiconductor applications
05/04/2006US20060094257 Low thermal budget dielectric stack for SONOS nonvolatile memories
05/04/2006US20060094256 Using polydentate ligands for sealing pores in low-K dielectrics
05/04/2006US20060094255 Semiconductor device and method of fabricating the same
05/04/2006US20060094254 Method for forming field oxide
05/04/2006US20060094253 Semiconductor memory devices and methods for making the same
05/04/2006US20060094252 Methods to form electronic devices and methods to form a material over a semiconductive substrate
05/04/2006US20060094251 Multi-layer film stack for extinction of substrate reflections during patterning
05/04/2006US20060094250 Method for fabricating semiconductor device
05/04/2006US20060094249 Semiconductor structure having a metallic buffer layer and method for forming
05/04/2006US20060094248 Method of oxidizing member to be treated
05/04/2006US20060094247 Method for producing a stepped edge profile comprised of a layered construction
05/04/2006US20060094246 Method of wafer patterning for reducing edge exclusion zone
05/04/2006US20060094245 Methods of fabricating metal wiring in semiconductor devices
05/04/2006US20060094244 Nitride semiconductor device and fabrication method thereof
05/04/2006US20060094243 Compositions including perhydro-polysilazane used in a semiconductor manufacturing process and methods of manufacturing semiconductor devices using the same
05/04/2006US20060094242 Chemical mechanical polishing method, and washing/rinsing method associated therewith
05/04/2006US20060094241 Etchant for conductive materials and method of manufacturing a thin film transistor array panel using the same
05/04/2006US20060094240 Neo-wafer device comprised of multiple singulated integrated circuit die
05/04/2006US20060094239 Dense seed layer and method of formation
05/04/2006US20060094238 Deposition of tungsten nitride
05/04/2006US20060094237 Methods to completely eliminate or significantly reduce defects in copper metallization in IC manufacturing
05/04/2006US20060094236 Electroless plating of metal caps for chalcogenide-based memory devices
05/04/2006US20060094235 Method for fabricating gate electrode in semiconductor device
05/04/2006US20060094234 Method for manufacturing electonic device