| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/09/2006 | US7041563 Semiconductor device having a shallow trench isolation and method of fabricating the same |
| 05/09/2006 | US7041562 Method for forming multiple gate oxide thickness utilizing ashing and cleaning |
| 05/09/2006 | US7041561 Enhanced substrate contact for a semiconductor device |
| 05/09/2006 | US7041560 Method of manufacturing a superjunction device with conventional terminations |
| 05/09/2006 | US7041559 Methods of forming power semiconductor devices having laterally extending base shielding regions |
| 05/09/2006 | US7041558 Floating gate memory device and method of manufacturing the same |
| 05/09/2006 | US7041557 Method of manufacturing a thin dielectric layer using a heat treatment and a semiconductor device formed using the method |
| 05/09/2006 | US7041556 Vertical transistor and method of making |
| 05/09/2006 | US7041555 Method for manufacturing flash memory device |
| 05/09/2006 | US7041554 Methods of fabricating flash memory devices having self aligned shallow trench isolation structures |
| 05/09/2006 | US7041553 Process for forming a buried plate |
| 05/09/2006 | US7041552 Integrated metal-insulator-metal capacitor and metal gate transistor |
| 05/09/2006 | US7041551 Device and a method for forming a capacitor device |
| 05/09/2006 | US7041550 Device and method for protecting against oxidation of a conductive layer in said device |
| 05/09/2006 | US7041549 Method for manufacturing semiconductor device |
| 05/09/2006 | US7041548 Methods of forming a gate stack that is void of silicon clusters within a metallic silicide film thereof |
| 05/09/2006 | US7041547 Methods of forming polished material and methods of forming isolation regions |
| 05/09/2006 | US7041546 Film forming method for depositing a plurality of high-k dielectric films |
| 05/09/2006 | US7041545 Method for producing semiconductor memory devices and integrated memory device |
| 05/09/2006 | US7041544 Semiconductor integrated circuit and method for fabricating the same |
| 05/09/2006 | US7041543 Strained transistor architecture and method |
| 05/09/2006 | US7041542 Damascene tri-gate FinFET |
| 05/09/2006 | US7041541 Method for producing a semiconductor component, and semiconductor component produced by the same |
| 05/09/2006 | US7041540 Thin film transistor and method for fabricating the same |
| 05/09/2006 | US7041539 Method for making an island of material confined between electrodes, and application to transistors |
| 05/09/2006 | US7041538 Method of manufacturing a disposable reversed spacer process for high performance recessed channel CMOS |
| 05/09/2006 | US7041537 Method for fabricating semiconductor component with on board capacitor |
| 05/09/2006 | US7041536 Semiconductor integrated circuit card manufacturing method, and semiconductor integrated circuit card |
| 05/09/2006 | US7041535 Power module and method of manufacturing the same |
| 05/09/2006 | US7041534 Semiconductor chip package and method for making the same |
| 05/09/2006 | US7041533 Stereolithographic method for fabricating stabilizers for semiconductor devices |
| 05/09/2006 | US7041532 Methods for fabricating interposers including upwardly protruding dams |
| 05/09/2006 | US7041531 Method of fabricating flip chip ball grid array package |
| 05/09/2006 | US7041530 Method of production of nano particle dispersed composite material |
| 05/09/2006 | US7041529 Light-emitting device and method of fabricating the same |
| 05/09/2006 | US7041528 Method for forming a micro-mechanical component in a semiconductor wafer, and a semiconductor wafer comprising a micro-mechanical component formed therein |
| 05/09/2006 | US7041527 Charge coupled device package |
| 05/09/2006 | US7041526 Magnetic field detecting element and method for manufacturing the same |
| 05/09/2006 | US7041525 Three-dimensional island pixel photo-sensor |
| 05/09/2006 | US7041524 Semiconductor laser device and method for fabricating the same |
| 05/09/2006 | US7041523 Method of fabricating nitride semiconductor device |
| 05/09/2006 | US7041522 Color liquid crystal display device and manufacturing method of the same |
| 05/09/2006 | US7041521 Array substrate and method thereof for liquid crystal display device |
| 05/09/2006 | US7041520 Method for fabricating liquid crystal displays with plastic film substrate |
| 05/09/2006 | US7041519 Method for producing p-type group III nitride compound semiconductor |
| 05/09/2006 | US7041518 Low-temperature formation method for emitter tip including copper oxide nanowire or copper nanowire and display device or light source having emitter tip manufactured using the same |
| 05/09/2006 | US7041516 Multi chip module assembly |
| 05/09/2006 | US7041515 Balancing planarization of layers and the effect of underlying structure on the metrology signal |
| 05/09/2006 | US7041514 Integrated circuit repair using multiple-photon absorption of laser light |
| 05/09/2006 | US7041513 Methods for forming semiconductor devices so as to stabilize the same when positioned face-down over test substrates |
| 05/09/2006 | US7041512 Electron beam exposure apparatus, electron beam exposing method, semiconductor element manufacturing method, and pattern error detection method |
| 05/09/2006 | US7041511 Pt/PGO etching process for FeRAM applications |
| 05/09/2006 | US7041436 Method for the manufacture of micro structures |
| 05/09/2006 | US7041434 Technique for enhancing accuracy of critical dimensions of a gate electrode by using characteristics of an ARC layer |
| 05/09/2006 | US7041418 Window between pattern layout; projecting laser beams; determination, calibration reflection |
| 05/09/2006 | US7041391 Method for forming thin films |
| 05/09/2006 | US7041342 Thin-film solar cells and method of making |
| 05/09/2006 | US7041335 Titanium tantalum nitride silicide layer |
| 05/09/2006 | US7041331 Electronic device manufacture |
| 05/09/2006 | US7041237 Rigid, hardness adhesive; reliable adhesive; connecting semiconductor chips; heat resistance, waterproofing |
| 05/09/2006 | US7041232 Selective etching of substrates with control of the etch profile |
| 05/09/2006 | US7041230 Method for selectively etching organosilicate glass with respect to a doped silicon carbide |
| 05/09/2006 | US7041229 Patterned product and its manufacturing method |
| 05/09/2006 | US7041228 Substrate for and a process in connection with the product of structures |
| 05/09/2006 | US7041227 Method for revealing crystalline defects and/or stress field defects at the molecular adhesion interface of two solid materials |
| 05/09/2006 | US7041226 microfluidics; reactive ion etching in which an etch stop layer is applied to a side wall in the openings during alternating etching and passivating steps as the openings are etched through the substrate; removing the stop layer to increase surface energy of the treated side wall surfaces |
| 05/09/2006 | US7041201 Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith |
| 05/09/2006 | US7041178 Method for low temperature bonding and bonded structure |
| 05/09/2006 | US7041172 Methods and apparatus for dispensing semiconductor processing solutions with multi-syringe fluid delivery systems |
| 05/09/2006 | US7041170 Method of producing high quality relaxed silicon germanium layers |
| 05/09/2006 | US7040971 Carrier head with a flexible membrane |
| 05/09/2006 | US7040968 Polishing apparatus |
| 05/09/2006 | US7040967 Multi-step, in-situ pad conditioning system and method for chemical mechanical planarization |
| 05/09/2006 | US7040966 Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers |
| 05/09/2006 | US7040964 Polishing media stabilizer |
| 05/09/2006 | US7040961 Methods for resist stripping and cleaning surfaces substantially free of contaminants |
| 05/09/2006 | US7040956 Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life |
| 05/09/2006 | US7040930 Modular sockets using flexible interconnects |
| 05/09/2006 | US7040852 Robot arm mechanism and robot apparatus |
| 05/09/2006 | US7040817 Three-dimensional mounted assembly and optical transmission device |
| 05/09/2006 | US7040679 Vacuum suction device and driving method thereof |
| 05/09/2006 | US7040525 Stage structure in bonding machine and method for controlling the same |
| 05/09/2006 | US7040487 Protective shipper |
| 05/09/2006 | US7040388 Heat sink, method of manufacturing the same and cooling apparatus using the same |
| 05/09/2006 | US7040336 Gas delivery system for supplying gas to semiconductor manufacturing equipment |
| 05/09/2006 | US7040332 Method and apparatus for megasonic cleaning with reflected acoustic waves |
| 05/09/2006 | US7040330 for cleaning a semiconductor substrate; for dislodging a particle and for replenishing the cleaning chemistry into the feature region |
| 05/09/2006 | US7040171 Carrier tape vibrator module |
| 05/09/2006 | US7040017 Methods for making and implementing fluid delivery ring |
| 05/09/2006 | US7040012 Method of electrically and mechanically connecting electronic devices to one another |
| 05/09/2006 | US7040011 Wiring substrate manufacturing method |
| 05/09/2006 | US7040009 Heat sink hand placement tool |
| 05/09/2006 | US7039999 Method for installation of semiconductor fabrication tools |
| 05/09/2006 | CA2420378C Non-volatile passive matrix and method for readout of the same |
| 05/04/2006 | WO2006047770A2 A buffer zone for the prevention of metal migration |
| 05/04/2006 | WO2006047675A1 A method of making a semiconductor structure for high power semiconductor devices |
| 05/04/2006 | WO2006047442A1 Solid phase epitaxy recrystallization by laser annealing |
| 05/04/2006 | WO2006047410A2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
| 05/04/2006 | WO2006047326A1 Sacrificial substrate for etching |
| 05/04/2006 | WO2006047215A2 Method and system for transferring a patterned material |