Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2008
03/27/2008US20080072823 Self aligning non contact shadow ring process kit
03/27/2008US20080072818 Growing a desired portion of the nanowire, growing a sacrificial portion of the nanowire that is doped differently than the desired portion, differentially removing the sacrificial portion, and removing a growth stub from the desired portion, especially by etching
03/27/2008US20080072792 Good film forming properties and step coverage is obtained by using 1,3-dioxolane; hardly freezes even in cold regions
03/27/2008US20080072690 Penetrable cap
03/27/2008US20080072585 Exhaust system
03/27/2008US20080072421 Molded Substrate for Topography Based Lithography
03/27/2008US20080072407 Methods for fabrication of improved electrolytic capacitor anode
03/27/2008DE112004002377T5 Doppel-Damaszierungsprozess unter Verwendung von kohlenstoffdotierten und kohlenstofffreien Oxidschichten Double-Damaszierungsprozess using carbon-doped oxide and carbon-free
03/27/2008DE10349933B4 Auswerteschaltung und Verfahren zum Feststellen und/oder zum Lokalisieren fehlerhafter Datenworte in einem Datenstrom Evaluation circuit and method for detecting and / or locating faulty data words in a data stream
03/27/2008DE10318847B4 Verfahren zur Herstellung einer integrierten Schaltung mit zwei Schaltungsteilen A method of fabricating an integrated circuit having two circuit parts
03/27/2008DE10248373B4 Teststruktur zum Bestimmen eines Kurzschlusses zwischen Grabenkondensatoren in einem Speicherzellenfeld Test structure for determining a short circuit between grave capacitors in a memory cell array
03/27/2008DE102007047245A1 Metallic intermediate connection manufacturing method for semiconductor memory components, involves forming germ layer on surface of recess and electro polishing germ layer before filling recess with metal material
03/27/2008DE102007043840A1 Wafer bearbeitende Hardware für das epitaktische Abscheiden mit reduzierter Autodotierung und weniger Störstellen auf der Rückseite Wafer machined hardware for the epitaxial deposition of reduced autodoping and less rough spots on the back
03/27/2008DE102007043710A1 Tiefe Durchkontaktierungskonstruktion für eine Halbleitereinrichtung und ein Verfahren zu Ihrer Herstellung Depth Durchkontaktierungskonstruktion for a semiconductor device and a method for their preparation
03/27/2008DE102007042149A1 Substrate attachment unit for comprehensive evaporation, has susceptor with hollow deepened region for carrying substrate and liquid metal formed on top side of susceptor, which fills gap between substrate and susceptor
03/27/2008DE102007042089A1 Thin film-transistor device manufacturing method, involves irradiating semiconductor thin film with energy ray in presence of n-type and p-type foreign substances to form flat diffusion layer for diffusing substances into layer of film
03/27/2008DE102007041082A1 Verfahren und Vorrichtung zur Verringerung von Funkelrauschen in einer Halbleitereinrichtung Method and apparatus for reducing flicker noise in a semiconductor device
03/27/2008DE102007039911A1 Polierzusammensetzung und Polierverfahren Polishing composition and polishing method
03/27/2008DE102007039910A1 Polierzusammensetzung und Polierverfahren Polishing composition and polishing method
03/27/2008DE102007038384A1 Halbleitervorrichtung und zugehöriges Herstellungsverfahren A semiconductor device and manufacturing method thereof
03/27/2008DE102007038343A1 Laser beam machining method of wafer for manufacture of semiconductor device e.g. integrated circuit, involves aligning centers of wafer and chuck table by moving them relatively corresponding to shift of outer periphery of wafer
03/27/2008DE102007038169A1 Verfahren zum Verpacken auf Waferebene unter Verwendung von Waferdurchgangslöchern mit geringem Aspektverhältnis A method of packaging at the wafer level using wafer through holes with a low aspect ratio
03/27/2008DE102007033866A1 Verfahren zur Bildung einer Feinstruktur für eine Halbleitervorrichtung A method of forming a fine structure for a semiconductor device
03/27/2008DE102007025112A1 Verfahren zum Herstellen eines Dünnfilmmusters, Flüssigkristalldisplay sowie Verfahren zu dessen Herstellung A method of manufacturing a thin film pattern, the liquid crystal display and method for its production
03/27/2008DE102007020342A1 Polierverfahren und Poliervorrichtung Polishing method and polishing apparatus
03/27/2008DE102007018854A1 Halbleitervorrichtungs-Herstellungsverfahren, Halbleiterwafer und Halbleitervorrichtung A semiconductor device manufacturing method, semiconductor wafers and semiconductor device
03/27/2008DE102006056812A1 Heater for regulating/controlling surface temperature of substrate e.g. mold for glass lens, comprises a thermal pyrolytic layer in base support for providing specific maximum temperature variation, and having specific thermal conductivity
03/27/2008DE102006056614A1 Vorrichtung mit verbesserter thermischer Leitfähigkeit und Verfahren zum Herstellen derselben Device with improved thermal conductivity and method of making same
03/27/2008DE102006045094A1 Chip-to-chip connections manufacturing method for three dimensional-integration of individual chip-to-chip stack, involves attaching adhesive material on joint contacts, where adhesive material has recesses in pattern of connection model
03/27/2008DE102006043389A1 Verfahren zum Plasmaätzen zur Erzeugung positiver Ätzprofile in Siliziumsubstraten A method for plasma etching for generating positive etching profiles in silicon substrates
03/27/2008DE102006043215A1 Chip i.e. semiconductor chip, coplanar installing method, involves connecting adhesive surfaces with each other by chip and support under adjusting of intermediate area between chip and support
03/27/2008DE102006043163A1 Verfahren zur Herstellung eines Verbundwerkstoffs, zugehöriger Verbundwerkstoff sowie zugehörige Halbleiterschaltungsanordnungen A process for producing a composite material, associated composite material and associated semiconductor circuitry
03/27/2008DE102006042775B3 Schaltungsmodul und Verfahren zur Herstellung eines Schaltungsmoduls A circuit module and method of manufacturing a circuit module
03/27/2008DE102006042774A1 Verfahren zur Herstellung einer elektrischen Ankontaktierung A method for producing an electrical contacting of
03/27/2008DE102006042032A1 Halbleiterbauelement Semiconductor device
03/27/2008DE102006041983A1 Verfahren zum elektrischen Verbinden eines ersten Substrat mit einem zweiten Substrat A method of electrically connecting a first substrate to a second substrate
03/27/2008DE102006038001B3 Procedure for drying and/or dry holding of workpiece during fluid jet guidance processing of the workpiece, comprises supplying dry inert gas at a process head, which is conveyed nearly at the workpiece, whose processed area is dried
03/27/2008DE102006037162A1 Verfahren und Vorrichtung und deren Verwendung zur Prüfung des Layouts einer elektronischen Schaltung Method and apparatus and their use for the examination of the layout of an electronic circuit
03/27/2008DE102006035646B3 Verfahren zur Herstellung verformter Transistoren durch Verspannungskonservierung auf der Grundlage einer verspannten Implantationsmaske A process for producing transistors deformed by tension conservation on the basis of a strained implantation mask
03/27/2008DE102005045863B4 Nichtflüchtiges Speicherbauelement und Verfahren zu seiner Herstellung A non-volatile memory device and method for its preparation
03/27/2008DE102005033254B4 Verfahren zur Herstellung eines Chip-Trägersubstrats aus Silizium mit durchgehenden Kontakten A method of manufacturing a chip carrier substrate of silicon with through contacts
03/27/2008DE102005029136B4 Verfahren und Einrichtung für die Montage von Halbleiterchips Method and device for the assembly of semiconductor chips
03/27/2008DE10200399B4 Verfahren zur Erzeugung einer dreidimensional integrierten Halbleitervorrichtung und dreidimensional integrierte Halbleitervorrichtung Method for producing a three-dimensional integrated semiconductor device and three-dimensionally integrated semiconductor device
03/27/2008DE10120295B4 Gerät und Prozess zur Gasphasenbeschichtung Device and process for gas-phase coating
03/26/2008EP1903611A2 Semiconductor device and manufacturing method thereof
03/26/2008EP1903606A2 Stackable tier structure comprising an IC die and a high density feedthrough structure
03/26/2008EP1903604A2 Organic electro-luminescent display and method of frabricating the same
03/26/2008EP1903603A2 Substrate holder assembly device
03/26/2008EP1903602A2 Non-volatile memory transistor
03/26/2008EP1903601A2 Electronic timer comprising floating-gate transistors and method of initialising thereof
03/26/2008EP1903600A2 Method for producing P-type group III nitride semiconductor and method for producing electrode for P-type group III nitride semiconductor
03/26/2008EP1903599A2 Adhesive tape cutting method and adhesive tape joining apparatus using the same
03/26/2008EP1903596A2 Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
03/26/2008EP1903392A2 Fine mold and method for regenerating fine mold
03/26/2008EP1903389A1 Mask data generation program, mask data generation method, mask fabrication method, exposure method, and device manufacturing method
03/26/2008EP1903370A1 An optical reduction system for use in photolithography
03/26/2008EP1903120A2 Nickel based alloy comprising cobalt and rhenium disulfide and method of applying it as a coating
03/26/2008EP1903119A1 Ultrahigh-purity copper and process for producing the same, and bonding wire comprising ultrahigh-purity copper
03/26/2008EP1902473A2 Semiconductor device including a superlattice having at least one group of substantially undoped layer
03/26/2008EP1902472A2 Semiconductor device comprising a superlattice dielectric interface layer
03/26/2008EP1902469A2 Flat display active plate
03/26/2008EP1902465A2 Workpiece support structures and apparatus for accessing same
03/26/2008EP1902464A2 Device for storing substrates
03/26/2008EP1902463A1 Method for reducing roughness of a thick insulating layer
03/26/2008EP1902462A2 Fluid deposition cluster tool
03/26/2008EP1902460A2 High speed substrate aligner apparatus
03/26/2008EP1902456A1 Reactor for carrying out an etching method for a stack of masked wafers and an etching method
03/26/2008EP1902003A2 Localized surface annealing of components for substrate processing chambers
03/26/2008EP1901983A2 Load port module
03/26/2008EP1901897A1 Device and method for positioning and blocking thin substrates on a cut substrate block
03/26/2008EP1756627A4 Lens array and method for making same
03/26/2008EP1756244A4 Cerium oxide abrasive and slurry containing the same
03/26/2008EP1733424A4 A semiconductor apparatus
03/26/2008EP1697991A4 Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same
03/26/2008EP1620878A4 Method for treating semiconductor processing components and components formed thereby
03/26/2008EP1576668A4 Multi-level memory cell with lateral floating spacers
03/26/2008EP1421609B1 Process and apparatus for treating a workpiece such as a semiconductor wafer
03/26/2008EP1330875B1 Digitally controlled impedance for i/o of an integrated circuit device
03/26/2008EP1307906B1 Structuring of ferroelectric layers
03/26/2008EP1275135B1 Apparatus for thermally processing wafers
03/26/2008EP1258034B1 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC
03/26/2008EP1245050B1 Controllable semiconductor switching element with bidirectional blocking capability
03/26/2008EP1234340A4 Formation of contacts on thin films
03/26/2008EP1190487B1 High voltage protection circuit on standard cmos process
03/26/2008EP1105920B1 Pattern formation method using light-induced suppression of etching
03/26/2008EP1097471B1 Integrated circuit with at least one transistor and a capacitor and corresponding production method
03/26/2008EP1044474B1 Trench-gate semiconductor device
03/26/2008EP0938741B1 Vacuum plasma processor having coil with intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coil
03/26/2008CN101151947A Ball capturing device, solder ball arrangement device, ball capturing method, and solder ball arranging method
03/26/2008CN101151891A Drive method for driving element having capacity impedance, drive device, and imaging device
03/26/2008CN101151734A Split gate multi-bit memory cell
03/26/2008CN101151731A Manufacturing method of solid-state imaging device
03/26/2008CN101151727A 集成电路芯片封装和方法 An integrated circuit chip package and method
03/26/2008CN101151725A Building fully-depleted and partially-depleted transistors on same chip
03/26/2008CN101151724A Metal carbide gate structure and method of fabrication
03/26/2008CN101151723A Flip chip mounting body, flip chip mounting method and flip chip mounting apparatus
03/26/2008CN101151722A Treatment of items
03/26/2008CN101151721A Method of fabricating insulating layer and method of fabricating semiconductor device
03/26/2008CN101151720A Integrated circuit fabrication
03/26/2008CN101151719A Etch with photoresist mask