Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2008
07/08/2008US7396718 Technique for creating different mechanical strain in different channel regions by forming an etch stop layer stack having differently modified intrinsic stress
07/08/2008US7396717 Method of forming a MOS transistor
07/08/2008US7396716 Method to obtain fully silicided poly gate
07/08/2008US7396714 Method of making strained semiconductor transistors having lattice-mismatched semiconductor regions underlying source and drain regions
07/08/2008US7396713 Structure and method for forming asymmetrical overlap capacitance in field effect transistors
07/08/2008US7396712 Thin film processing method and thin processing apparatus
07/08/2008US7396711 Method of fabricating a multi-cornered film
07/08/2008US7396710 Fin-type semiconductor device with low contact resistance and its manufacture method
07/08/2008US7396709 Semiconductor device and method for manufacturing the same
07/08/2008US7396708 Etching method for metal layer of display panel
07/08/2008US7396707 Fabrication method of a semiconductor device
07/08/2008US7396706 Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks
07/08/2008US7396705 Method for manufacturing a thin film transistor
07/08/2008US7396704 Lid made of resin for case for accommodating solid-state imaging device and solid-state imaging apparatus
07/08/2008US7396703 Method of making a semiconductor chip assembly with a bumped terminal and a filler
07/08/2008US7396702 Module assembly and method for stacked BGA packages
07/08/2008US7396701 Electronic device and manufacturing method of the same
07/08/2008US7396700 Method for fabricating thermally enhanced semiconductor device
07/08/2008US7396699 Method of forming non-volatile resistance variable devices and method of forming a programmable memory cell of memory circuitry
07/08/2008US7396698 Methods and systems for providing MEMS devices with a top cap and upper sense plate
07/08/2008US7396697 Semiconductor light-emitting device and method for manufacturing the same
07/08/2008US7396696 Method for manufacturing super bright light emitting diode of nanorod array having InGaN quantum well
07/08/2008US7396695 Wire structure, a thin film transistor substrate of using the wire structure and a method of manufacturing the same
07/08/2008US7396694 Structure for monitoring semiconductor polysilicon gate profile
07/08/2008US7396693 Multiple point gate oxide integrity test method and system for the manufacture of semiconductor integrated circuits
07/08/2008US7396692 Method for increasing ferroelectric characteristics of polymer memory cells
07/08/2008US7396633 Damascene process; forming connectors; exposure; development; using acid generator, quencher and buffer
07/08/2008US7396621 Exposure control method and method of manufacturing a semiconductor device
07/08/2008US7396620 For photolithography; optimizing an exposure dose and focus in an exposure apparatus; controlling the optical constants (e.g. refractive index and/or the absorption coefficient) and/or coating thickness of the resist applied commonly to the test wafer and the mass-produced wafer
07/08/2008US7396570 Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers
07/08/2008US7396569 Improved permittivity, permeability, electroconductivity, thermoconductivity, and nonlinear optic properties; electrical resistance
07/08/2008US7396484 Methods of fabricating complex blade geometries from silicon wafers and strengthening blade geometries
07/08/2008US7396483 Uniform chemical etching method
07/08/2008US7396481 Etching method of organic insulating film
07/08/2008US7396480 Method for front end of line fabrication
07/08/2008US7396479 Method for manufacturing porous silicon
07/08/2008US7396478 Multiple internal seal ring micro-electro-mechanical system vacuum packaging method
07/08/2008US7396475 Method of forming stepped structures employing imprint lithography
07/08/2008US7396447 Through-hole conductors for semiconductor substrates and system for making same
07/08/2008US7396432 Composite shadow ring assembled with dowel pins and method of using
07/08/2008US7396431 Plasma processing system for treating a substrate
07/08/2008US7396430 Apparatus and method for confined area planarization
07/08/2008US7396416 Substrate cleaning device
07/08/2008US7396415 Apparatus and methods for isolating chemical vapor reactions at a substrate surface
07/08/2008US7396410 Featuring forming methods to reduce stacking fault nucleation sites
07/08/2008US7396408 Monocrystalline diamond layer and method for the production thereof
07/08/2008US7396405 Single crystal, single crystal wafer, epitaxial wafer, and method of growing single crystal
07/08/2008US7396199 Substrate processing apparatus and substrate processing method
07/08/2008US7395847 Jig for a semiconductor substrate
07/08/2008US7395779 Plasma processing apparatus
07/08/2008US7395611 System processing a substrate using dynamic liquid meniscus
07/08/2008CA2377329C Gas purification system with an integrated hydrogen sorption and filter assembly
07/08/2008CA2305106C Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particles
07/03/2008WO2008080096A2 Compositions and methods for the selective removal of silicon nitride
07/03/2008WO2008080087A2 Recessed active trench for wide transistors
07/03/2008WO2008080018A1 Flash memory devices and methods for fabricating the same
07/03/2008WO2008080004A1 X-ray assisted etching of insulators
07/03/2008WO2008079938A2 Light emitting diodes (leds) with improved light extraction by roughening
07/03/2008WO2008079913A1 Methods, apparatuses, and systems for fabricating three dimensional integrated circuits
07/03/2008WO2008079795A1 Annealing to improve edge roughness in semiconductor technology
07/03/2008WO2008079794A1 Semiconductor device with metal feature and method of preparation
07/03/2008WO2008079792A1 Semiconductor wafer sawing system and method
07/03/2008WO2008079775A1 A semiconductor memory comprising dual charge storage nodes and methods for its fabrication
07/03/2008WO2008079691A2 Semiconductor die with separation trench etch and passivation
07/03/2008WO2008079684A2 Electron blocking layers for electronic devices
07/03/2008WO2008079665A1 Slim spacer implementation to improve drive current
07/03/2008WO2008079582A1 Contact planarization apparatus
07/03/2008WO2008079516A2 Clean chemistry composition, method of manufacturing same, and system making use of same
07/03/2008WO2008079389A1 Proximity head with configurable delivery
07/03/2008WO2008079310A1 Microelectronic assemblies having compliancy and methods therefor
07/03/2008WO2008079239A2 Methods and apparatus for sensing substrates in carriers
07/03/2008WO2008079221A1 Polysilicon dummy wafers and process used therewith
07/03/2008WO2008079201A1 Method and apparatus for drying substrates using a surface tensions reducing gas
07/03/2008WO2008079134A1 Method of transferring a thin crystalline semiconductor layer
07/03/2008WO2008079098A1 Method and apparatus for supporting a workpiece to be cut
07/03/2008WO2008079077A2 Nanoelectronic structure and method of producing such
07/03/2008WO2008078992A1 Lithographic apparatus, substrate table, and method for enhancing substrate release properties
07/03/2008WO2008078970A1 In situ preparation of substrates with di spersed gold nanoparticles
07/03/2008WO2008078939A1 Probe station, and testing method of wafer using the same
07/03/2008WO2008078886A1 Carrying apparatus for probe card
07/03/2008WO2008078882A1 Method for building map data for probing tester, and method for testing semiconductor chip using the same
07/03/2008WO2008078746A1 Semiconductor element mounting structure and semiconductor element mounting method
07/03/2008WO2008078731A1 Semiconductor device and its manufacturing method
07/03/2008WO2008078688A1 Stage apparatus, exposure apparatus and device manufacturing method
07/03/2008WO2008078677A1 Composition for formation of antireflection film and pattern formation method using the same
07/03/2008WO2008078666A1 Water-based polishing slurry for polishing silicon carbide single crystal substrate, and polishing method for the same
07/03/2008WO2008078661A1 Semiconductor device
07/03/2008WO2008078660A1 Method for synthesis of hyperbranched polymer, hyperbranched polymer, resist composition, semiconductor integrated circuit, and method for production of semiconductor integrated circuit
07/03/2008WO2008078655A1 Semiconductor device
07/03/2008WO2008078652A1 Dielectric element and method for producing the dielectric element
07/03/2008WO2008078651A1 Gas treatment apparatus, gas treatment method and storage medium
07/03/2008WO2008078649A1 Semiconductor device and method for manufacturing the same
07/03/2008WO2008078637A1 Pattern forming method and method for manufacturing semiconductor device
07/03/2008WO2008078636A1 Ion injecting device, and ion injecting method
07/03/2008WO2008078631A1 Method for mounting semiconductor component on circuit board
07/03/2008WO2008078549A1 Cmos circuit and semiconductor device
07/03/2008WO2008078518A1 Semiconductor layer manufacturing method, semiconductor layer manufacturing apparatus and semiconductor device manufactured by using such method and apparatus
07/03/2008WO2008078516A1 Apparatus for manufacturing silicon oxide thin film and method for forming the silicon oxide thin film
07/03/2008WO2008078503A1 Film forming apparatus and method of forming film
07/03/2008WO2008078502A1 Film deposition apparatus and film deposition method