Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2008
10/07/2008US7432195 Method for integrating a conformal ruthenium layer into copper metallization of high aspect ratio features
10/07/2008US7432194 Etching method and method for forming contact opening
10/07/2008US7432193 Method for fabricating a thin film and a metal line of a semiconductor device
10/07/2008US7432192 Post ECP multi-step anneal/H2 treatment to reduce film impurity
10/07/2008US7432190 Semiconductor device and manufacturing method thereof to prevent a notch
10/07/2008US7432189 Device with self aligned gaps for capacitance reduction
10/07/2008US7432188 Structure of bumps forming on an under metallurgy layer and method for making the same
10/07/2008US7432187 Method for improving current distribution of a transparent electrode
10/07/2008US7432186 Method of surface treating substrates and method of manufacturing III-V compound semiconductors
10/07/2008US7432185 Method of forming semiconductor device having stacked transistors
10/07/2008US7432184 Integrated PVD system using designated PVD chambers
10/07/2008US7432183 Methods of manufacturing a thin film including zirconium titanium oxide and methods of manufacturing a gate structure, a capacitor and a flash memory device including the same
10/07/2008US7432182 Semiconductor device and method for manufacturing the same
10/07/2008US7432181 Method of forming self-aligned silicides
10/07/2008US7432180 Method of fabricating a nickel silicide layer by conducting a thermal annealing process in a silane gas
10/07/2008US7432179 Controlling gate formation by removing dummy gate structures
10/07/2008US7432178 Bit line implant
10/07/2008US7432177 Post-ion implant cleaning for silicon on insulator substrate preparation
10/07/2008US7432176 Method of three-dimensional microfabrication and high-density three-dimentional fine structure
10/07/2008US7432175 Quantum dots nucleation layer of lattice mismatched epitaxy
10/07/2008US7432174 Methods for fabricating semiconductor substrates with silicon regions having differential crystallographic orientations
10/07/2008US7432173 Methods of fabricating silicon-on-insulator substrates having a laser-formed single crystalline film
10/07/2008US7432172 Plasma etching method
10/07/2008US7432171 Silicon carbide and related wide-bandgap transistors on semi-insulating epitaxy for high-speed, high-power applications
10/07/2008US7432170 Semiconductor device and fabrication method thereof
10/07/2008US7432169 Method for manufacturing semiconductor device
10/07/2008US7432168 Method for fabricating semiconductor device with thin gate spacer
10/07/2008US7432167 Method of fabricating a strained silicon channel metal oxide semiconductor transistor
10/07/2008US7432166 Methods of forming a nitrogen enriched region
10/07/2008US7432165 Semiconductor memory device, semiconductor device, and method for production thereof
10/07/2008US7432164 Semiconductor device comprising a transistor having a counter-doped channel region and method for forming the same
10/07/2008US7432163 Method of manufacturing semiconductor device that includes forming adjacent field regions with a separating region therebetween
10/07/2008US7432162 Semiconductor device with substantial driving current and decreased junction leakage current
10/07/2008US7432161 Fabrication of optical-quality facets vertical to a (001) orientation substrate by selective epitaxial growth
10/07/2008US7432160 Semiconductor devices including transistors having three dimensional channels and methods of fabricating the same
10/07/2008US7432159 Electrically erasable programmable read-only memory (EEPROM) device and methods of fabricating the same
10/07/2008US7432158 Method for retaining nanocluster size and electrical characteristics during processing
10/07/2008US7432157 Method of fabricating flash memory
10/07/2008US7432156 Memory device and methods for its fabrication
10/07/2008US7432155 Methods of forming a recessed gate
10/07/2008US7432154 Non-volatile semiconductor memory device and method of manufacturing the same
10/07/2008US7432153 Direct tunneling semiconductor memory device and fabrication process thereof
10/07/2008US7432152 Methods of forming HSG layers and devices
10/07/2008US7432151 Semiconductor device and method for fabricating the same
10/07/2008US7432150 Method of manufacturing a magnetoelectronic device
10/07/2008US7432149 CMOS on SOI substrates with hybrid crystal orientations
10/07/2008US7432148 Shallow trench isolation by atomic-level silicon reconstruction
10/07/2008US7432147 Method of manufacturing semiconductor device
10/07/2008US7432146 Semiconductor device and manufacturing method thereof
10/07/2008US7432145 Power semiconductor device with a base region and method of manufacturing same
10/07/2008US7432144 Method for forming a transistor for reducing a channel length
10/07/2008US7432143 Method for forming gate of semiconductor device
10/07/2008US7432142 Methods of fabricating nitride-based transistors having regrown ohmic contact regions
10/07/2008US7432141 Large-grain p-doped polysilicon films for use in thin film transistors
10/07/2008US7432140 Thin film transistor, thin film transistor substrate, and methods for manufacturing the same
10/07/2008US7432139 Methods for forming dielectrics and metal electrodes
10/07/2008US7432138 Thin film transistor substrate and manufacturing method for the same
10/07/2008US7432137 Method of manufacturing thin film transistor
10/07/2008US7432136 Transistors with controllable threshold voltages, and various methods of making and operating same
10/07/2008US7432135 Semiconductor device and method of manufacturing the same
10/07/2008US7432134 Semiconductor device and method of fabricating the same
10/07/2008US7432133 Plastic packaged device with die interface layer
10/07/2008US7432130 Method of packaging semiconductor die without lead frame or substrate
10/07/2008US7432129 Bonding apparatus and method of bonding for a semiconductor chip
10/07/2008US7432128 Method of making semiconductor device
10/07/2008US7432127 Chip package and package process thereof
10/07/2008US7432126 Substrate with semiconductor layer, electronic component, electronic circuit, printable composition and method for production thereof
10/07/2008US7432125 CMOS image sensor and manufacturing method thereof
10/07/2008US7432124 Method of making an organic light emitting device
10/07/2008US7432123 Methods of manufacturing high temperature thermistors
10/07/2008US7432122 Electronic device and a process for forming the electronic device
10/07/2008US7432121 Isolation process and structure for CMOS imagers
10/07/2008US7432120 Method for realizing a hosting structure of nanometric elements
10/07/2008US7432119 Light emitting diode with conducting metal substrate
10/07/2008US7432117 Light-emitting diode and manufacturing method thereof
10/07/2008US7432116 Method and apparatus for film deposition
10/07/2008US7432115 Test circuit, semiconductor product wafer having the test circuit, and method of monitoring manufacturing process using the test circuit
10/07/2008US7432114 Semiconductor device manufacturing method
10/07/2008US7432043 Distortions of the developed photosensitive film pattern are compensated for; more accurate target photosensitive film pattern; the depth of focus of the photolithography process is increased; uniformity
10/07/2008US7432034 Acid generator; alkali-soluble resin; two crosslinking agents, one a phenolic compound containing hydroxy-, alkoxy- or acyloxy- methyl groups and the other containing oxymethyl-substituted nitrogen groups, e.g., amino resins
10/07/2008US7432023 Method for producing a pellicle for lithography
10/07/2008US7432022 Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same
10/07/2008US7432021 a test pattern established on the mask substrate having an asymmetrical diffraction grating so as to generate positive first order diffracting light and negative first order diffracting light in different diffraction efficiencies
10/07/2008US7431990 Epoxyphenylphenolic resin, phenolic resin, inorganic filler, curing accelerator, silane coupling agent, and compound containing naphthalene ring in which at least two adjacent carbon atoms are coupled to hydroxyl groups; flowability, moldability, crack resistance during soldering, flame retardance
10/07/2008US7431967 Limited thermal budget formation of PMD layers
10/07/2008US7431859 Plasma etch process using polymerizing etch gases with different etch and polymer-deposition rates in different radial gas injection zones with time modulation
10/07/2008US7431858 For microstructuring electronic components, which yields high resolutions ( <== 200 nm) at a good aspect ratio while being significantly less expensive than photolithographic methods; semiconductors
10/07/2008US7431857 Plasma generation and control using a dual frequency RF source
10/07/2008US7431855 Apparatus and method for removing photoresist from a substrate
10/07/2008US7431813 Multi-chambered substrate processing equipment having sealing structure between chambers thereof, and method of assembling such equipment
10/07/2008US7431797 Plasma reactor with a dynamically adjustable plasma source power applicator
10/07/2008US7431796 Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment
10/07/2008US7431795 Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor
10/07/2008US7431792 Method and apparatus for placing conductive balls
10/07/2008US7431773 Atomic layer deposition apparatus and method
10/07/2008US7431772 Gas distributor having directed gas flow and cleaning method
10/07/2008US7431770 Table device, film-forming apparatus, optical element, semiconductor element, and electric apparatus
10/07/2008US7431767 Apparatus and method for growth of a thin film
10/07/2008US7431766 Crystal-structure-processed devices, methods and systems for making
10/07/2008US7431765 Process for preparing single crystal silicon having improved gate oxide integrity
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