Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2009
06/10/2009CN101454871A Manufacturing method of laminated wafer
06/10/2009CN101454870A Variable overlap of dummy shapes for improved rapid thermal anneal uniformity
06/10/2009CN101452961A Thin film transistor, display device, and method for manufacturing the same
06/10/2009CN101452931A Integrated circuit device
06/10/2009CN101452899A Nitride semiconductor device and method of manufacturing the same
06/10/2009CN101452894A Gaas semiconductor substrate , group III-v compound semiconductor device and method of manufacturing the same
06/10/2009CN101452893A Display device and manufacturing method of the same
06/10/2009CN101452892A Method of making a finfet device structure having dual metal and high-k gates
06/10/2009CN101452891A Method for manufacturing resistance variant memory crossover array
06/10/2009CN101452890A Semiconductor device and method of fabricating the same
06/10/2009CN101452889A Manufacturing method for non-volatile memory
06/10/2009CN101452888A Method for forming tunnel oxidation layer window in EEPROM
06/10/2009CN101452887A Capacitor layer manufacturing method in DRAM
06/10/2009CN101452886A Semiconductor device and method for forming the same
06/10/2009CN101452885A Method and structure for forming multiple self-aligned gate stacks for logic devices
06/10/2009CN101452884A Multi device and method of manufacturing the same
06/10/2009CN101452883A Semiconductor device and its making method and liquid spraying apparatus
06/10/2009CN101452882A Method for manufacturing semiconductor element
06/10/2009CN101452881A Methods for adjusting critical dimension uniformity in an etch process
06/10/2009CN101452880A Method of forming interlayer dielectric for semiconductor device
06/10/2009CN101452879A Cleaning method after opening etching
06/10/2009CN101452878A Method for forming blocking layer of semiconductor device
06/10/2009CN101452877A Through-hole preparation process
06/10/2009CN101452876A Manufacturing process for metal interconnecting construction
06/10/2009CN101452875A Method of forming isolation layer in semiconductor device
06/10/2009CN101452874A Chemical mechanical grinding process for shallow trench isolation structure
06/10/2009CN101452873A Shallow trench isolation process
06/10/2009CN101452872A High-voltage region shallow trench top angle rounding method
06/10/2009CN101452871A Manufacturing method for STI isolation structure
06/10/2009CN101452870A Electrostatic chuck and apparatus having the same
06/10/2009CN101452869A Epitaxial film thickness test method
06/10/2009CN101452868A Wafer auxiliary lighting detection device and wafer detection method
06/10/2009CN101452867A Process for automatically detecting silicon chip edge
06/10/2009CN101452866A Method for titanium lacking detection
06/10/2009CN101452865A Dispensing solder for mounting semiconductor chips
06/10/2009CN101452864A LED sub-adhesion substrate packaging method and packaging construction thereof
06/10/2009CN101452863A Manufacturing method for using compliant layer in grain reconfigured encapsulation construction
06/10/2009CN101452862A Stack encapsulation method with grains reconfigured and stack construction thereof
06/10/2009CN101452861A Multi-chip stacking structure and preparation thereof
06/10/2009CN101452860A Multi-chip stacking structure and preparation thereof
06/10/2009CN101452859A Method of fabricating high voltage device
06/10/2009CN101452858A Method of producing thin film transistor and method of exposure using attenuated type mask
06/10/2009CN101452857A Trench dmos transistor structure having a low resistance path to a drain contact located on an upper surface
06/10/2009CN101452856A Non-volatile memory unit, NAND non-volatile memory and manufacturing method thereof
06/10/2009CN101452855A Construction and production process for thin-film transistor of image display system
06/10/2009CN101452854A Method for producing MOS device
06/10/2009CN101452853A MOS transistor forming method
06/10/2009CN101452852A Dual bit charge trapping device manufacturing process
06/10/2009CN101452851A Manufacturing method for ESD gate grounding NMOS transistor
06/10/2009CN101452850A Production method for high voltage transistor
06/10/2009CN101452849A Production method for high voltage transistor
06/10/2009CN101452848A MOS transistor production method and structure
06/10/2009CN101452847A Manufacturing method for ESD gate grounding NMOS transistor
06/10/2009CN101452846A Thick aluminum film forming process
06/10/2009CN101452845A Wet method corrosion process for silicon nitride film
06/10/2009CN101452844A Method for preparing high dielectric coefficient grid medium of embedded silicon nanocrystalline
06/10/2009CN101452843A Process for preparing p type gallium arsenide ohmic contact
06/10/2009CN101452842A Production method for metal electrode capable of reducing leakage current of device
06/10/2009CN101452841A Selective grid, non-volatile semi-conductor memory device and manufacturing method thereof
06/10/2009CN101452840A Metal gate forming method in semiconductor device
06/10/2009CN101452839A Production method for high voltage transistor
06/10/2009CN101452838A Process for silicon nano crystal preparation by electron-beam evaporation mode
06/10/2009CN101452837A Semiconductor element and its manufacture
06/10/2009CN101452836A Method for reducing substrate current in semiconductor device
06/10/2009CN101452835A Method for preparing semiconductor conductive film by doping hydrogen on the surface of diamond
06/10/2009CN101452834A Method of manufacturing GaN substrate, method of manufacturing epitaxialwafer, method of manufacturing semiconductor device and epitaxialwafer
06/10/2009CN101452833A Split device front metal producing method
06/10/2009CN101452832A Method of forming a germanium silicide layer, semiconductor device including the germanium silicide layer, and method of manufacturing the semiconductor device
06/10/2009CN101452831A First wafer controlling method in wafer production
06/10/2009CN101452830A Capacitor manufacturing method capable of improving electrical behavior
06/10/2009CN101452829A Preparing method for semiconductor device special structure
06/10/2009CN101452828A Method of dividing wafer
06/10/2009CN101452827A Treatment apparatus, treatment method, and storage medium
06/10/2009CN101452826A Chemical treatment to reduce machining-induced sub-surface damage in semiconductor processing components comprising silicon carbide
06/10/2009CN101452825A Process for manufacturing semiconductor device
06/10/2009CN101452824A Wet-chemistry semiconductor-chip treatment method
06/10/2009CN101452823A Ozonated water mixture supply apparatus and method, and substrate treating facility with the apparatus
06/10/2009CN101452822A Wafer cleaning apparatus and correcting method of the same
06/10/2009CN101452821A Plasma treatment apparatus and shield ring thereof
06/10/2009CN101452820A Semiconductor cleaning equipment using green carbon monoxide super fluid
06/10/2009CN101452819A Method for preparing alignment mark used for ion injection
06/10/2009CN101452818A Measuring method capable of enhancing sintering temperature measurement accuracy for electrode sintering platform
06/10/2009CN101452817A Method for monitoring obliteration of wafer support platform and corresponding system
06/10/2009CN101452816A Ion injection monitoring method
06/10/2009CN101452815A Novel method for IGBT ultrathin wafer back process
06/10/2009CN101452814A Method for enhancing self-aligning contact hole breakdown voltage and polysilicon gate construction
06/10/2009CN101452813A Method for establishing non-wafer measuring system
06/10/2009CN101451963A Method and system for defect detection
06/10/2009CN101451265A Gaas single crystal substrate and epitaxial wafer using the same
06/10/2009CN101451054A Adhesive bonding sheet, semiconductor device using same, and method for manufacturing such semiconductor device
06/10/2009CN101451053A Adhesive bonding sheet, semiconductor device using same, and method for manufacturing such semiconductor device
06/10/2009CN101450457A Polishing apparatus and polishing method
06/10/2009CN100499364C Piezoelectric vibration device
06/10/2009CN100499186C P-n heterojunction structure of zinc oxide-based nanorod and semiconductor thin film, preparation thereof, and nano-device comprising same
06/10/2009CN100499177C Solar cell module connector and method of producing solar cell module panel
06/10/2009CN100499175C Semiconductor device and method for manufacturing the same
06/10/2009CN100499169C Structure of thin-film transistor and method of manufacturing same
06/10/2009CN100499168C Semiconductor device
06/10/2009CN100499164C Trench semiconductor device and method of manufacturing it
06/10/2009CN100499159C IGBT cathode design with improved safe operating area capability