Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2009
10/27/2009US7608162 Plasma processing apparatus and method
10/27/2009US7608152 Substrate processing apparatus and method
10/27/2009US7608151 Method and system for coating sections of internal surfaces
10/27/2009US7608148 Crystallization apparatus and crystallization method
10/27/2009US7608144 Pulse sequencing lateral growth method
10/27/2009US7607967 Substrate processing method and substrate processing apparatus
10/27/2009US7607880 Wafer processing apparatus having dust proof function
10/27/2009US7607560 Semiconductor die attachment for high vacuum tubes
10/27/2009US7607222 Method of manufacturing an electronic component package
10/27/2009US7607217 Device for processing a wire
10/27/2009CA2439010C Separating of optical integrated modules and structures formed thereby
10/27/2009CA2372172C Lead frame moisture barrier for molded plastic electronic packages
10/25/2009CA2663779A1 Freestanding iii-nitride single-crystal substrate and method of manufacturing semiconductor device utilizing the substrate
10/22/2009WO2009129441A2 Symmetric thermocentric flexure with minimal yaw error motion
10/22/2009WO2009129430A2 Methods for forming metal-polymer hybrid tooling for forming parts having micro features
10/22/2009WO2009129334A2 Three-dimensional semiconductor device structures and methods
10/22/2009WO2009129332A2 Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds
10/22/2009WO2009129194A2 Large-area single- and few-layer graphene on arbitrary substrates
10/22/2009WO2009129105A2 Methods and systems for determining a defect criticality index for defects on wafers
10/22/2009WO2009129065A2 Methods and apparatuses for determining thickness of a conductive layer
10/22/2009WO2009129049A2 Methods of making lateral junction field effect transistors using selective epitaxial growth
10/22/2009WO2009129030A2 Solar parametric testing module and processes
10/22/2009WO2009128880A1 Multi-junction silicon thin film solar cell using plasma inside vapor deposition
10/22/2009WO2009128828A1 Selective functionalization of doped group iv surfaces using lewis acid / lewis base interaction
10/22/2009WO2009128800A1 Silicon nanowire and composite formation and highly pure and uniform length silicon nanowires
10/22/2009WO2009128790A2 Component handler
10/22/2009WO2009128786A2 A system and process for dicing integrated circuits
10/22/2009WO2009128776A1 Hybrid wafers with hybrid-oriented layer
10/22/2009WO2009128698A1 Semiconductor die sorter for wafer level packaging
10/22/2009WO2009128655A2 Method of forming chalcogenide thin film
10/22/2009WO2009128646A2 Semiconductor substrate and method for manufacturing the same
10/22/2009WO2009128575A1 Low temperature polycrystalline growth
10/22/2009WO2009128560A1 Tio2-containing silica glass for optical member for euv lithography
10/22/2009WO2009128553A1 Thin film transistor and method for manufacturing the same
10/22/2009WO2009128542A1 Wiring structure, thin film transistor substrate, method for manufacturing thin film transistor substrate, and display device
10/22/2009WO2009128530A1 Adhesive composition, adhesive for circuit connection, connected structure, and semiconductor device
10/22/2009WO2009128522A1 Thin film transistor and method for manufacturing the same
10/22/2009WO2009128513A1 Resist underlayer film-forming composition for lithography containing aromatic fused ring-containing resin
10/22/2009WO2009128494A1 Polishing solution for cmp and polishing method
10/22/2009WO2009128488A1 Illumination device, exposure device, and device manufacturing method
10/22/2009WO2009128486A1 Method of making record on magnetic memory device
10/22/2009WO2009128485A1 Method of making record in magnetic memory device
10/22/2009WO2009128462A1 Method of manufacturing a heat exchanger
10/22/2009WO2009128450A1 Semiconductor memory device
10/22/2009WO2009128439A1 Exposure method and device, and method for manufacturing device
10/22/2009WO2009128431A1 Atmosphere cleaning device
10/22/2009WO2009128430A1 Polishing solution for metal films and polishing method using the same
10/22/2009WO2009128424A1 Thin film transistor type substrate, thin film transistor type liquid crystal display device and method for manufacturing thin film transistor type substrate
10/22/2009WO2009128419A1 Semiconductor device
10/22/2009WO2009128392A1 Method for manufacturing semiconductor device and method for cleaning semiconductor substrate
10/22/2009WO2009128382A1 Semiconductor device and method for manufacturing the same
10/22/2009WO2009128376A1 Substrate bonding device
10/22/2009WO2009128372A1 Thin film transistor and method for manufacturing thin film transistor
10/22/2009WO2009128337A1 Semiconductor device and method for manufacturing the same
10/22/2009WO2009128327A1 Cleaning water for electronic material, method of cleaning electronic material, and system for supplying water containing dissolved gases
10/22/2009WO2009128324A1 Method for roughening substrate surface and method for manufacturing photovoltaic device
10/22/2009WO2009128321A1 Multi-degree-of-freedom actuator and stage device
10/22/2009WO2009128301A1 Diamond semiconductor device and method for manufacturing the same
10/22/2009WO2009128293A1 Spatial light modulation unit, lighting optical system, exposure apparatus and method for manufacturing device
10/22/2009WO2009128225A1 Vertical heat treatment boat and silicon wafer heat treatment method using the same
10/22/2009WO2009128206A1 Flip-chip mounting method, flip-chip mounting apparatus and tool protection sheet used in flip-chip mounting apparatus
10/22/2009WO2009128186A1 Semiconductor device and method for manufacturing the same
10/22/2009WO2009128133A1 Antiferroelectric gate transistor and manufacturing method thereof, and non-volatile memory element
10/22/2009WO2009128048A1 Tunable capacitor and switch using mems with phase change material
10/22/2009WO2009128039A2 Clean transfer robot
10/22/2009WO2009127932A2 Wire saw device and method for operating same
10/22/2009WO2009127914A1 Method of sealing an air gap in a layer of a semiconductor structure and semiconductor structure
10/22/2009WO2009127740A1 A method of dicing wafers to give high die strength
10/22/2009WO2009127738A1 A method of dicing wafers to give high die strength
10/22/2009WO2009127572A1 Inspection system and method for the optical analysis of the surfaces of objects, especially wafer surfaces
10/22/2009WO2009127369A1 Method for the selective doping of silicon and silicon substrate treated therewith
10/22/2009WO2009127119A1 Detergent for removing plasma etching residues
10/22/2009WO2009108781A3 Method of forming an embedded silicon carbon epitaxial layer
10/22/2009WO2009108771A3 Methods of patterning a conductor on a substrate
10/22/2009WO2009108311A3 Isolated transistors and diodes and isolation and termination structures for semiconductor die
10/22/2009WO2009105497A3 Apparatus and method for adjusting thermally induced movement of electro-mechanical assemblies
10/22/2009WO2009105045A8 Patterning of nanostructures
10/22/2009WO2009104910A3 Joining structure and a substrate-joining method using the same
10/22/2009WO2009104886A3 Laser-processing device
10/22/2009WO2009103907A3 Method for local etching of the surface of a substrate
10/22/2009WO2009102963A3 Field effect transistor
10/22/2009WO2009102615A3 Ceria material and method of forming same
10/22/2009WO2009099775A3 Modified sputtering target and deposition components, methods of production and uses thereof
10/22/2009WO2009099661A3 A protective coating for a plasma processing chamber part and a method of use
10/22/2009WO2009099294A3 Method of recycling chemical
10/22/2009WO2009096685A3 Led package, and a production method therefor, and a device using the led package
10/22/2009WO2009091189A3 Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the same
10/22/2009WO2009089552A3 Methods and apparatuses for large diameter wafer handling
10/22/2009WO2009089122A3 Controlled deflection of large area semiconductor substrates for shipping & manufacturing containers
10/22/2009WO2009085703A3 Method for treating semiconductor processing components and components formed thereby
10/22/2009WO2009075944A3 Improved solution deposition assembly
10/22/2009WO2009055572A3 Semiconductor structure and method of manufacture
10/22/2009WO2008108663A8 Fabrication of reinforced nanoporous membranes
10/22/2009US20090265680 Method and system for correcting a mask pattern design
10/22/2009US20090265027 Server device and program
10/22/2009US20090264052 Polishing method and polishing apparatus, and program for controlling polishing apparatus
10/22/2009US20090263991 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Compsites and Conductive Elastomer Interconnects in Microelectronic Packaging
10/22/2009US20090263986 Spring interconnect structures
10/22/2009US20090263978 Laser mask and crystallization method using the same
10/22/2009US20090263977 Selective functionalization of doped group iv surfaces using lewis acid/lewis base interaction
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