Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2010
05/14/2010WO2010052945A1 Aspherical silica sol, process for producing the same, and composition for polishing
05/14/2010WO2010052933A1 Semiconductor device and semiconductor device manufacturing method
05/14/2010WO2010052871A1 Electronic device manufacturing method and electronic device
05/14/2010WO2010052856A1 Lead, wiring member, package component, metal component with resin, resin-encapsulated semiconductor device, and methods for producing same
05/14/2010WO2010052855A1 Pattern dimension measuring method and scanning electron microscope using same
05/14/2010WO2010052854A1 Charged particle beam apparatus
05/14/2010WO2010052839A1 Semiconductor device
05/14/2010WO2010052827A1 Ingot cutting apparatus and cutting method
05/14/2010WO2010052816A1 Semiconductor device
05/14/2010WO2010052773A1 Palletized conveyance mechanism and substrate inspection apparatus
05/14/2010WO2010052760A1 Chip peeling method, semiconductor device manufacturing method and chip peeling apparatus
05/14/2010WO2010052759A1 Chip peeling method, chip peeling apparatus and semiconductor device manufacturing method
05/14/2010WO2010052758A1 Chip peeling method, chip peeling apparatus and semiconductor device manufacturing method
05/14/2010WO2010052561A1 Semiconductor device and method of producing the same
05/14/2010WO2010052545A1 Additive for alkaline etching solutions, in particular for texture etching solutions, and process for producing it
05/14/2010WO2010052541A2 Oxidation and cleaning process for silicon wafers
05/14/2010WO2010052529A1 Electric component and pin header for such a component
05/14/2010WO2010052408A1 Method and device for heating a layer of a plate by priming and light flow
05/14/2010WO2010052245A2 Reverse-conducting semiconductor device
05/14/2010WO2010051831A1 New organo-metallic wet coating method to enhance electro-migration resistance
05/14/2010WO2010051689A1 Rinse solution for removing thick film resist
05/14/2010WO2010051677A1 METHOD FOR STRIPPING GaN FROM SAPPHIRE SUBSTRATE WITHOUT DAMAGE BY USING SOLID-STATE LASER
05/14/2010WO2010030162A3 Improved capacitive sensor and method for making the same
05/14/2010WO2010027712A3 Laser material removal methods and apparatus
05/14/2010WO2010027669A3 In-situ chamber treatment and deposition process
05/14/2010WO2010027643A3 Carrier having integral detection and measurement of environmental parameters
05/14/2010WO2010027406A3 Copper layer processing
05/14/2010WO2010025068A3 Cobalt deposition on barrier surfaces
05/14/2010WO2010025061A3 Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithography
05/14/2010WO2010022824A3 Device and method for the wet processing of different substrates
05/14/2010WO2010022212A3 Surface treated aluminum nitride baffle
05/14/2010WO2010022065A3 Memory devices and methods of forming the same
05/14/2010WO2010022009A3 Process for through silicon via filling
05/14/2010WO2010021890A3 Edge rings for electrostatic chucks
05/14/2010WO2010019430A3 Electrostatic chuck assembly
05/14/2010WO2010019343A3 Methods of making capacitors, dram arrays and electronic systems
05/14/2010WO2010019283A3 Method for measuring dopant concentration during plasma ion implantation
05/14/2010WO2010019197A3 A composite showerhead electrode assembly for a plasma processing apparatus
05/14/2010WO2010018933A3 Method for manufacturing a high‑concentration n-type nitride semiconductor and nitride light‑emitting device based on same
05/14/2010WO2010017340A3 Magnetic pad for end-effectors
05/14/2010WO2010017207A3 Roll-to-roll continuous thin film pv manufacturing process and equipment with real time online iv measurement
05/14/2010WO2010015401A3 Relaxation of strained layers
05/14/2010WO2010015302A3 Relaxation and transfer of strained layers
05/14/2010WO2010014657A3 Passivation of aluminum nitride substrates
05/14/2010WO2010014380A3 Within-sequence metrology based process tuning for adaptive self-aligned double patterning
05/14/2010WO2010011114A3 Apparatus for forming ceramic coating film
05/14/2010WO2010006589A4 Laser scribing system for structuring substrates for thin-layer solar modules
05/14/2010CA2740223A1 Vertical junction field effect transistors having sloped sidewalls and methods of making
05/13/2010US20100122132 Method and system for debugging using replicated logic and trigger logic
05/13/2010US20100121487 Substrate transfer apparatus
05/13/2010US20100120336 Polishing method and polishing apparatus
05/13/2010US20100120333 In-Line Wafer Thickness Sensing
05/13/2010US20100120263 Microwave activation annealing process
05/13/2010US20100120262 Amino Vinylsilane Precursors for Stressed SiN Films
05/13/2010US20100120261 Method of Nonstoichiometric CVD Dielectric Film Surface Passivation for Film Roughness Control
05/13/2010US20100120260 Multi-Step Process for Forming High-Aspect-Ratio Holes for MEMS Devices
05/13/2010US20100120259 Method and apparatus to enhance process gas temperature in a cvd reactor
05/13/2010US20100120258 Method for forming micro-pattern in semiconductor device
05/13/2010US20100120257 Method for making micro-electro-mechanical system device
05/13/2010US20100120256 Method for removing etching residues from semiconductor components
05/13/2010US20100120255 Semiconductor device manufacturing method
05/13/2010US20100120254 Passivation Layer for a Circuit Device and Method of Manufacture
05/13/2010US20100120253 Post Etch Dielectric Film Re-Capping Layer
05/13/2010US20100120252 Method of Positioning Patterns from Block Copolymer Self-Assembly
05/13/2010US20100120251 Large Area Patterning of Nano-Sized Shapes
05/13/2010US20100120250 Metal polishing slurry and polishing method
05/13/2010US20100120249 Process for producing polyurethane foam
05/13/2010US20100120248 Etching solution and etching method
05/13/2010US20100120247 Method of forming fine patterns using multiple spacer patterns
05/13/2010US20100120246 Methods Of Forming Electrically Insulative Materials, Methods Of Forming Low k Dielectric Regions, And Methods Of Forming Semiconductor Constructions
05/13/2010US20100120245 Plasma and thermal anneal treatment to improve oxidation resistance of metal-containing films
05/13/2010US20100120244 Integrated circuit shield structure and method of fabrication thereof
05/13/2010US20100120243 Formation of a reliable diffusion-barrier cap on a cu-containing interconnect element having grains with different crystal orientations
05/13/2010US20100120242 Method to prevent localized electrical open cu leads in vlsi cu interconnects
05/13/2010US20100120241 Method of manufacturing semiconductor device
05/13/2010US20100120240 Method for fabricating pmos transistor and method for forming dual gate using the same
05/13/2010US20100120239 Memory device etch methods
05/13/2010US20100120238 Semiconductor manufacturing apparatus and method
05/13/2010US20100120237 Method of manufacturing semiconductor devices
05/13/2010US20100120236 Fabrication of ultra long necklace of nanoparticles
05/13/2010US20100120234 METHOD FOR GROWTH OF GaN SINGLE CRYSTAL, METHOD FOR PREPARATION OF GaN SUBSTRATE, PROCESS FOR PRODUCING GaN-BASED ELEMENT, AND GaN-BASED ELEMENT
05/13/2010US20100120233 Continuous Feed Chemical Vapor Deposition
05/13/2010US20100120232 Method of fabricating thin film device
05/13/2010US20100120231 Method for manufacturing semiconductor device
05/13/2010US20100120230 Semiconductor die singulation method
05/13/2010US20100120229 Method for manufacturing semiconductor chip, adhesive film for semiconductor, and composite sheet using the film
05/13/2010US20100120228 Semicondutor manufacturing method
05/13/2010US20100120227 Semiconductor die singulation method
05/13/2010US20100120226 Method for manufacturing semiconductor device
05/13/2010US20100120225 Method for manufacturing soi substrate
05/13/2010US20100120224 Method for manufacturing semiconductor device
05/13/2010US20100120223 Method for manufacturing bonded wafer
05/13/2010US20100120222 Methods and apparatus for bonding wafers
05/13/2010US20100120221 Method for fabricating semiconductor device including vertical channel transistor
05/13/2010US20100120220 Method for fabricating semiconductor device with vertical gate
05/13/2010US20100120219 Method for Fabricating Semiconductor Device
05/13/2010US20100120218 Method for fabricating partial soi substrate
05/13/2010US20100120217 Methods of Forming SRAM Devices having Buried Layer Patterns
05/13/2010US20100120216 Transistor fabrication method
05/13/2010US20100120215 Nitrogen Based Implants for Defect Reduction in Strained Silicon
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