Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2010
05/19/2010CN101711429A Substrate transport apparatus with multiple independently movable articulated arms
05/19/2010CN101711428A Technique for patterning differently stressed layers formed above transistors by enhanced etch control strategies
05/19/2010CN101711427A Strain enhanced semiconductor devices and methods for their fabrication
05/19/2010CN101711426A Finfet with two independent gates and method for fabricating the same
05/19/2010CN101711425A Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking
05/19/2010CN101711424A Plasma processing system ESC high voltage control
05/19/2010CN101711423A Method for cleaning semiconductor wafer surfaces by applying periodic shear stress to the cleaning solution
05/19/2010CN101711422A System, method and apparatus for maintaining separation of liquids in a controlled meniscus
05/19/2010CN101711421A Method and system for printing aligned nanowires and other electrical devices
05/19/2010CN101711354A Method for detecting surface defects on a substrate and device using said method
05/19/2010CN101711219A Levitation transportation device
05/19/2010CN101711217A Levitation device and levitation transportation device
05/19/2010CN101710592A Thin film transistor and method of manufacturing thin film transistor
05/19/2010CN101710590A AlGaN/GaN insulated gate high electron mobility transistor (HEMT) and manufacturing method thereof
05/19/2010CN101710589A Base region structure of triode
05/19/2010CN101710588A Top gate medium for carbon-based field-effect transistors, and preparation method thereof
05/19/2010CN101710587A Organic light emitting display
05/19/2010CN101710586A Storage capacitor for improving aperture opening ratio and manufacturing method thereof
05/19/2010CN101710581A Encapsulating structure of semiconductor chip and manufacturing technology thereof
05/19/2010CN101710580A Multi-layer compound passivation layer structure of Bipolar circuit and manufacturing process thereof
05/19/2010CN101710579A Manufacturing method of thin film transistor array substrate
05/19/2010CN101710578A Method for polishing back face of crystal wafer
05/19/2010CN101710577A Method for inhibiting oxidization of copper in copper interconnect structure
05/19/2010CN101710576A Method for preparing germanium material on insulator through oxygen ion implantation annealing
05/19/2010CN101710575A Method for preventing cavities from generating in deep groove insulation technology
05/19/2010CN101710574A COG glass substrate positioning device
05/19/2010CN101710573A Clamping device for precalibration of COG chip
05/19/2010CN101710572A Method for reinforcing transconductance of AlGaN/GaN transistor with high electron mobility by dielectric material
05/19/2010CN101710571A Forward and reverse corrosion technology of Schottky diode metal structure
05/19/2010CN101710570A Gluing front surface processing technology of semiconductor silicon chip after phosphorous diffusion
05/19/2010CN101710569A Method for adulterating n-type and p-type III-V group nitrides
05/19/2010CN101710568A Method for inducing crystallization of amorphous silicon thin film by use of nickel acetate solution
05/19/2010CN101710567A Gallium nitride-based semiconductor device with composite carbon-based substrate and manufacturing method thereof
05/19/2010CN101710566A Method for production of silicon wafer for epitaxial substrate and method for production of epitaxial substrate
05/19/2010CN101710565A Device for realizing picking-up and turning-over of chip
05/19/2010CN101710564A Substrate processing system
05/19/2010CN101710228A Imprint lithography processes and systems
05/19/2010CN101710212A Combined para-position structure of reinforcing panel and method thereof
05/19/2010CN101708593A Chemical-mechanical polishing mandrel driving device
05/19/2010CN101425463B TVS diode device construction with low voltage/low leakage current and production method thereof
05/19/2010CN101419942B Groove isolation construction manufacturing method capable of enhancing performance of semiconductor device
05/19/2010CN101416283B Method of removing conductive metal oxide thin-film and apparatus thereof
05/19/2010CN101388353B Method for monitoring stability of water breakdown voltage
05/19/2010CN101373724B Method for determining whether semiconductor device grid undercut dimension being satisfactory or not
05/19/2010CN101364544B Light doping section, source/drain section forming method and membrane graphic method
05/19/2010CN101359578B Wafer cleaning method and apparatus
05/19/2010CN101355047B Method for forming through hole in low dielectric coefficient medium layer
05/19/2010CN101352834B Grinding pad collating unit and grinding pad collating method
05/19/2010CN101350288B Method for testing automatic material-feeding/discharging machine
05/19/2010CN101341584B Method for modifying highly dielectric thin film and semiconductor device
05/19/2010CN101336468B Method and apparatus for activating compound semiconductor
05/19/2010CN101335199B Manufacturing process of input/output device
05/19/2010CN101330056B Method and apparatus for forming self-aligning common source electrode in a memory structure
05/19/2010CN101330041B Interconnecting hole of metal front medium layer and method for forming the same
05/19/2010CN101330035B Isolation structure of shallow plough groove and manufacturing method thereof
05/19/2010CN101330020B Method for repairing defect of crystal round
05/19/2010CN101329989B Method for detecting ion injection equipment
05/19/2010CN101329988B Method for avoiding rapid heat-treatment from oxygen gas pollution
05/19/2010CN101329987B Method for removing welding gold ball
05/19/2010CN101313404B Apparatus and methods for solar energy conversion using nanoscale cometal structures
05/19/2010CN101313400B Sheet adhering apparatus and sheet adhering method
05/19/2010CN101310385B Substrate structure and method for wideband power decoupling
05/19/2010CN101310375B Probe card and method of fabricating the same
05/19/2010CN101305454B Method for forming photovoltaic contact and wiring
05/19/2010CN101303964B Method for etching chip
05/19/2010CN101300685B Semiconductor device and fabrication method thereof
05/19/2010CN101297403B Method for cutting solid-state image pickup device
05/19/2010CN101295730B Semiconductor device and its grid production method
05/19/2010CN101295643B Through hole etching method and through hole mask
05/19/2010CN101295635B Method and device for improving capacity of MIM capacitance
05/19/2010CN101290865B Method for preventing generating surface blemish in etching process
05/19/2010CN101288150B Magnetic devices and techniques for formation thereof
05/19/2010CN101285189B Process for decreasing deposit at reaction chamber in metal etching process
05/19/2010CN101283452B Electrostatic discharge protection device
05/19/2010CN101281898B Test method of test structure for testing integrality of grid medium layer
05/19/2010CN101273439B Apparatus for the removal of an edge polymer from a substrate
05/19/2010CN101273437B Integrated circuit devices with trenches having different depth
05/19/2010CN101271866B Isolation structure for MOS transistor and method for forming same
05/19/2010CN101271142B Peak detection circuit integrated on CMOS single chip
05/19/2010CN101266999B GaN dual heterogeneity node field effect transistor structure and its making method
05/19/2010CN101263590B A transfer container
05/19/2010CN101258608B Semiconductor device and method of fabricating semiconductor device
05/19/2010CN101258580B Semiconductor device, method for manufacturing same, and display
05/19/2010CN101248529B Dual port gain cell with side and top gated read transistor
05/19/2010CN101248520B Method for manufacturing semiconductor device
05/19/2010CN101246849B Integrated circuit with antenna conductor and process for manufacturing the same
05/19/2010CN101246841B Method for reducing cornet shaped particles in STI HDP production
05/19/2010CN101246354B Wafer dry etching device and control method
05/19/2010CN101242175B Monopole single throw microwave switch circuit based on PIN diode and its making method
05/19/2010CN101238558B Method of fabricating a bipolar transistor
05/19/2010CN101231317B Method for recognizing interface characteristics through two-side electricity property change of heterogeneity interface
05/19/2010CN101226889B Reconfiguration line structure and manufacturing method thereof
05/19/2010CN101223635B Modular terminal for high-throughput AMHS
05/19/2010CN101221916B Wire bonding machine table
05/19/2010CN101221893B Method for promoting electrostatic charge dissipation on semiconductor chip
05/19/2010CN101217114B A method for semiconductor silicon etching technique migration
05/19/2010CN101217102B A method to remove surface contaminations on surfaces of semiconductor accessories
05/19/2010CN101211843B Small size contact hole two polar-type fabrication process
05/19/2010CN101211779B Method for forming fuse window on semiconductor substrate web by two-stage etching mode
05/19/2010CN101211773B Method for preventing chip back metal peeling