Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2010
06/16/2010CN101740387A Process for manufacturing surface channel PMOS device with polycide
06/16/2010CN101740386A Method for manufacturing flash memories
06/16/2010CN101740385A Method for forming channel in LDMOS (Laterally Diffused Metal Oxide Semiconductor) transistor
06/16/2010CN101740384A Method for preparing enhanced aluminum-gallium-nitrogen/gallium nitride transistor with high electron mobility
06/16/2010CN101740383A Method for manufacturing integrated PNP differential pair tube
06/16/2010CN101740382A Process for forming semiconductor device
06/16/2010CN101740381A Method for preparing Schottky diode
06/16/2010CN101740380A Method for preparing Schottky diode
06/16/2010CN101740379A Method for eliminating surface defect of semiconductor device and semiconductor device
06/16/2010CN101740378A Copper chemical mechanical polishing method
06/16/2010CN101740377A Filling method of doped interlayer medium with high depth-to-width ratio gap
06/16/2010CN101740376A Method for regulating width of spacer wall and method for etching in construction of spacer wall
06/16/2010CN101740375A Etching method and method for manufacturing contact hole
06/16/2010CN101740374A Method for etching more than 10mu m of dielectric layer
06/16/2010CN101740373A Forming method of shallow trench
06/16/2010CN101740372A Gate structure including modified high-k gate dielectric and metal gate interface
06/16/2010CN101740371A Method for synthesizing metallicity hafnium nitride film by phase transformation induced by high-temperature annealing treatment
06/16/2010CN101740370A Silicon gate etching method and method for improving matching of linewidth chamber of silicon gate
06/16/2010CN101740369A Method for preparing metallic metal nitride film
06/16/2010CN101740368A Methods for forming semiconductor device and grid electrode thereof
06/16/2010CN101740367A Method for manufacturing stepped gate oxide and semiconductor device
06/16/2010CN101740366A Method for eliminating aluminum tip cut of bipolar NPN transistor
06/16/2010CN101740365A Method for manufacturing semiconductor devices
06/16/2010CN101740364A Method for reducing diffusion of phosphorus in polysilicon gate by utilizing in-situ low-temperature oxidation
06/16/2010CN101740363A Method for reducing diffusion of phosphorus in polysilicon gate by rapid thermal oxidation
06/16/2010CN101740362A Gate forming method
06/16/2010CN101740361A Aluminum impurity diffusing and doping method in manufacture process of semiconductor device
06/16/2010CN101740360A Method for improving doping efficiency of magnesium in III-V family nitrides
06/16/2010CN101740359A Nickel stripping method in method for manufacturing low-temperature polysilicon
06/16/2010CN101740358A Method for preparing P type poly-silicon thin film on glass substrate
06/16/2010CN101740357A Method for forming micro-pattern of semiconductor device
06/16/2010CN101740356A Semiconductor device and method of manufacturing the semiconductor device
06/16/2010CN101740355A Transfer device of chip sorting equipment
06/16/2010CN101740354A Processing device for removing liquid on wafer surface
06/16/2010CN101740353A Dicing die-bonding film and process for producing semiconductor device
06/16/2010CN101740352A Dicing die-bonding film and process for producing semiconductor device
06/16/2010CN101740351A Dicing die-bonding film and process for producing semiconductor device
06/16/2010CN101740350A IC (integrated circuit)-packaged wafer expanding device
06/16/2010CN101740349A Die ejector
06/16/2010CN101740348A Vision system for positioning a bonding tool
06/16/2010CN101740347A Apparatus for processing a substrate and method of maintaining the same
06/16/2010CN101740346A Semiconductor wafer processing device
06/16/2010CN101740345A Removal of surface oxides by electron attachment
06/16/2010CN101740344A Method and apparatus for cleaning semiconductor device fabrication equipment
06/16/2010CN101740343A High-accuracy composite disk structure and application thereof
06/16/2010CN101740342A Green carbon dioxide supercritical fluid semiconductor cleaning equipment
06/16/2010CN101740341A Carbon dioxide low temperature aerosol semiconductor cleaning device
06/16/2010CN101740340A Reaction chamber and semiconductor processing device
06/16/2010CN101740339A Etching method
06/16/2010CN101740338A Method for removing film
06/16/2010CN101740337A Semiconductor carbon dioxide supercritical sweeping and cleaning machine
06/16/2010CN101740336A Cavity window and plasma process cavity
06/16/2010CN101740335A manufacturing equipment and method for etching semiconductor structure
06/16/2010CN101740334A Photoetching pretreating method and photoetching method
06/16/2010CN101740333A Incineration treatment method
06/16/2010CN101740332A Etching method of semiconductor element
06/16/2010CN101740331A Method for nondestructively peeling GaN and sapphire substrate by solid laser
06/16/2010CN101740330A Method for chemical mechanical polishing and forming through hole
06/16/2010CN101740329A 等离子处理装置及处理方法 Plasma processing apparatus and processing method
06/16/2010CN101740328A Etching method
06/16/2010CN101740327A Method for manufacturing chip capable of reducing stress
06/16/2010CN101740326A Annealing method
06/16/2010CN101740325A Cleaning device for semiconductor base material
06/16/2010CN101740324A Silicon wafer cleaner and silicon wafer cleaning method
06/16/2010CN101740323A Method for manufacturing alignment mark of semiconductor silicon wafer and semiconductor silicon wafer thereby
06/16/2010CN101740316A Quasi-molecule lamp apparatus
06/16/2010CN101740302A Plasma etching apparatus and etching method
06/16/2010CN101740301A Ion implanter and ion implantation method
06/16/2010CN101740183A Ceramics member with embedded electric conductor and manufacturing method thereof
06/16/2010CN101739735A Implementation method of potential adjusting programmable storage record
06/16/2010CN101739044A Temperature control method applied to rapid temperature rise and drop process of photoelectrical semiconductor
06/16/2010CN101738950A Control device and control method for wafer box scanning
06/16/2010CN101738881A Two-stage image precise contraposition method for upper plate and lower plate and device thereof
06/16/2010CN101738870A Proximity exposure apparatus, method of delivering a mask of a proximity exposure apparatus and method of manufacturing a display panel substrate
06/16/2010CN101738854A Preparation method of pattern
06/16/2010CN101738853A Method for forming a micro-lens of an image sensor, and manufacturing the image sensor
06/16/2010CN101738851A Method of manufacturing photomask, lithography apparatus, method and apparatus for inspecting photomask
06/16/2010CN101738847A Method of manufacturing photomask and pattren transfer method using the smae
06/16/2010CN101738846A Mask plate and manufacture method thereof
06/16/2010CN101738845A Mask and design method thereof
06/16/2010CN101738813A Electrophoretic display device and method for fabricating the same
06/16/2010CN101738799A TFT-LCD (thin film transistor-liquid crystal display) array substrate and manufacture method thereof
06/16/2010CN101738798A Wide viewing angle LCD (Liquid Crystal Display) array substrate and manufacturing method thereof
06/16/2010CN101738797A Wide viewing angle LCD (Liquid Crystal Display) array substrate and manufacturing method thereof
06/16/2010CN101738778A Semi-reflecting semitransparent liquid crystal display device and method for manufacturing upper base plate thereof
06/16/2010CN101738529A High-voltage power supply output sampling device and plasma device
06/16/2010CN101738505A Test pallet
06/16/2010CN101738504A Medium optical sensing apparatus and high-precision semiconductor component detecting machine platform
06/16/2010CN101738400A Method and device for judging repeated defects on surface of wafer
06/16/2010CN101738398A Wafer defect detection system with traveling lens multi-beam scanner
06/16/2010CN101738177A Level measuring device and method for detecting levelness of wafer box in semiconductor transmission system
06/16/2010CN101736405A Method for improving key size evenness of polysilicon film
06/16/2010CN101736375A Plating method
06/16/2010CN101736374A Method for manufacturing LED metal substrate with gallium nitride-based vertical structure
06/16/2010CN101736320A Film deposition apparatus and cleaning method for the same
06/16/2010CN101736319A Gas injector and film deposition apparatus
06/16/2010CN101736318A Film deposition apparatus
06/16/2010CN101736314A Formation method of silicon oxide film and metal-insulator-metal capacitor
06/16/2010CN101736290A Method for improving die bonding in process of deposition of aluminum metallic film
06/16/2010CN101735730A Composition and method for chemical mechanical polishing