Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2010
07/08/2010WO2010078414A2 Method of producing a component of a device, and the resulting components and devices
07/08/2010WO2010078343A2 Resist feature and removable spacer pitch doubling patterning method for pillar structures
07/08/2010WO2010078340A2 Semiconductor devices including dual gate structures and methods of forming such semiconductor devices
07/08/2010WO2010078264A2 Methods and systems of transferring, docking and processing substrates
07/08/2010WO2010078204A2 Quantum well mosfet channels having uni-axial strain caused by metal source/drains, and conformal regrowth source/drains
07/08/2010WO2010078189A2 Flash cell with integrated high-k dielectric and metal-based control gate
07/08/2010WO2010078160A2 Dry cleaning of silicon surface for solar cell applications
07/08/2010WO2010078120A2 Monolithic stage positioning system and method
07/08/2010WO2010078074A1 Local silicidation of via bottoms in metallization systems of semiconductor devices
07/08/2010WO2010078058A2 Method of forming a pattern on a work piece, method of shaping a beam of electromagnetic radiation for use in said method, and aperture for shaping a beam of electromagnetic radiation
07/08/2010WO2010078054A2 Tunnel field effect transistor and method of manufacturing same
07/08/2010WO2010078051A2 Embedded memory cell and method of manufacturing same
07/08/2010WO2010078022A2 Tape-based epitaxial lift off apparatuses and methods
07/08/2010WO2010077998A1 Method of fabricating an integrated device
07/08/2010WO2010077875A2 Method for improving electromigration lifetime of copper interconnection by extended post anneal
07/08/2010WO2010077865A2 Defect detection and response
07/08/2010WO2010077847A2 Method of depositing tungsten film with reduced resistivity and improved surface morphology
07/08/2010WO2010077802A1 Enhancement of dry etch of high aspect ratio features using fluorine
07/08/2010WO2010077801A2 Methods for simultaneously forming doped regions having different conductivity-determining type element profiles
07/08/2010WO2010077750A2 Substrate support in a reactive sputter chamber
07/08/2010WO2010077728A2 Densification process for titanium nitride layer for submicron applications
07/08/2010WO2010077622A1 Electrical devices including dendritic metal electrodes
07/08/2010WO2010077616A2 Multiple stack deposition for epitaxial lift off
07/08/2010WO2010077597A2 Wafer taping
07/08/2010WO2010077590A2 Light emitting diode with a dielectric mirror having a lateral configuration
07/08/2010WO2010077533A2 Thermocouple
07/08/2010WO2010077510A2 Trench-based power semiconductor devices with increased breakdown voltage characteristics
07/08/2010WO2010077503A2 Trench-based power semiconductor devices with increased breakdown voltage characteristics
07/08/2010WO2010077502A2 Trench-based power semiconductor devices with increased breakdown voltage characteristics
07/08/2010WO2010077500A1 Trench-based power semiconductor devices with increased breakdown voltage characteristics
07/08/2010WO2010077482A1 Process for manufacturing contact elements for probe card assemblies
07/08/2010WO2010077467A1 Method of forming gate stack and structure thereof
07/08/2010WO2010077418A1 Techniques for independently controlling deflection, deceleration, and focus of an ion beam
07/08/2010WO2010077371A1 Memristive device based on current modulation by trapped charges
07/08/2010WO2010077299A2 High pressure bevel etch process
07/08/2010WO2010077247A1 Electrically and/or thermally actuated device
07/08/2010WO2010077245A1 Mutliplexer/de-multiplexer memristive device
07/08/2010WO2010077226A1 Methods for encapsulating nanocrystals and resulting compositions
07/08/2010WO2010076974A2 Polysilicon deposition apparatus
07/08/2010WO2010076973A2 Polysilicon deposition apparatus
07/08/2010WO2010076960A2 Solder ball attaching method and soldering method using same
07/08/2010WO2010076924A1 Apparatus for haze accelerating detection and detecting method thereof
07/08/2010WO2010076882A1 Image classification standard update method, program, and image classification device
07/08/2010WO2010076864A1 Piezoelectric element
07/08/2010WO2010076863A1 Substrate treating system and substrate treating device
07/08/2010WO2010076862A1 Magnetic field control for uniform film thickness distribution in sputtering apparatus
07/08/2010WO2010076855A1 Probe, probe card with probe mounted thereon, method for mounting probe on probe card and method for removing probe mounted on probe card
07/08/2010WO2010076824A1 Integration of resistors and capacitors in charge trap memory device fabrication
07/08/2010WO2010076601A1 Memory device and method of fabricating thereof
07/08/2010WO2010076187A2 Integrated electronic device with transceiving antenna and magnetic interconnection
07/08/2010WO2010076074A1 Interconnect structure with improved dielectric line to via electromigration resistant interfacial layer and method of fabricating same
07/08/2010WO2010076056A1 Structures and methods for improving solder bump connections in semiconductor devices
07/08/2010WO2010076019A1 A metallization system of a semiconductor device comprising extra-tapered transition vias
07/08/2010WO2010076018A1 Reduction of threshold voltage variation in transistors comprising a channel semiconductor alloy by reducing deposition non-uniformities
07/08/2010WO2010076017A1 A transistor with an embedded strain inducing material having a gradually shaped configuration
07/08/2010WO2010075841A1 Modular carrier
07/08/2010WO2010075831A1 Method for producing lamps
07/08/2010WO2010075815A1 Method, apparatus and system for testing integrated circuits
07/08/2010WO2010075684A1 Memory
07/08/2010WO2010075606A1 Improved photo-voltaic device
07/08/2010WO2010053720A3 Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions
07/08/2010WO2010051212A3 Cyclic olefin compositions for temporary wafer bonding
07/08/2010WO2010048554A3 Spectrographic metrology of patterned wafers
07/08/2010WO2010048001A3 In/out door for a vacuum chamber
07/08/2010WO2010047977A3 Same layer microelectronic circuit patterning using hybrid laser projection patterning (lpp) and semi-additive patterning (sap)
07/08/2010WO2010047275A3 Semiconductor test system and relay driving test method therefor
07/08/2010WO2010042931A3 Mesa etch method and composition for epitaxial lift off
07/08/2010WO2010042732A3 Silicon-based nanoscale resistive device with adjustable resistance
07/08/2010WO2010042724A3 Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
07/08/2010WO2010042528A3 A flow control module for a fluid delivery system
07/08/2010WO2010039883A3 Multi-electrode pecvd source
07/08/2010WO2010039695A3 Platen cooling mechanism for cryogenic ion implanting
07/08/2010WO2010035998A3 Apparatus and method for supplying slurry for a semiconductor
07/08/2010WO2010033420A3 Methods for electron-beam induced deposition of material inside energetic-beam microscopes
07/08/2010WO2010030101A3 Electrostatic chuck comprising a double buffer layer (dbl) to reduce thermal stress
07/08/2010WO2010005246A9 Substrate-conveying device
07/08/2010WO2009135800A3 A method of assembling wafers by molecular bonding
07/08/2010WO2009130416A3 Method for forming porous material in microcavity or micropassage by mechanochemical polishing
07/08/2010WO2009113874A3 Method for texturing silicon surfaces and wafers thereof
07/08/2010WO2009076155A3 Particle trap
07/08/2010WO2009075959A9 Method for forming high density patterns
07/08/2010WO2009062882A3 Method for manufacturing a solar cell with a surface-passivating dielectric double layer, and corresponding solar cell
07/08/2010US20100174405 Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists
07/08/2010US20100173792 Self-addressable self-assembling microelectronic systems and devices for molecular biological analysis and diagnostics
07/08/2010US20100173503 Trap charge equalizing method and threshold voltage distribution reducing method
07/08/2010US20100173502 LOW k1 HOLE PRINTING USING TWO INTERSECTING FEATURES
07/08/2010US20100173501 Semiconductor device producing method
07/08/2010US20100173500 Semiconductor wafer structure with balanced reflectance and absorption characteristics for rapid thermal anneal uniformity
07/08/2010US20100173499 Low k dielectric surface damage control
07/08/2010US20100173498 Trim process for critical dimension control for integrated circuits
07/08/2010US20100173497 Method of fabricating semiconductor integrated circuit device
07/08/2010US20100173496 Profile and cd uniformity control by plasma oxidation treatment
07/08/2010US20100173495 Substrate processing apparatus using a batch processing chamber
07/08/2010US20100173494 Method and apparatus for anisotropic etching
07/08/2010US20100173493 Substrate processing method
07/08/2010US20100173492 Method of forming semiconductor device patterns
07/08/2010US20100173491 Method of manufacturing a semiconductor device
07/08/2010US20100173490 High density plasma chemical vapor deposition process
07/08/2010US20100173489 Method for manufacturing lower substrate of liquid crystal display device
07/08/2010US20100173488 Non-volatile memory with erase gate on isolation zones
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