Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2010
07/14/2010CN101257031B Thin-film transistor array substrate and manufacturing method thereof
07/14/2010CN101221967B CMOS image sensor and method for manufacturing the same
07/14/2010CN101221918B Substrate transporting apparatus, substrate platform shelf and substrate processing apparatus
07/14/2010CN101211976B CMOS image sensor and method of manufacturing thereof
07/14/2010CN101211975B Semiconductor device having EDMOS transistor and method for manufacturing the same
07/14/2010CN101211815B Method for fabricating image sensor
07/14/2010CN101178502B Lift pin driving device and a flat panel display manufacturing apparatus having same
07/14/2010CN101114617B Flash memory and method for manufacturing the same
07/14/2010CN101103438B Method of making a vertical light emitting diode
07/14/2010CN101097852B Method for fabricating a cylindrical capacitor using amorphous carbon-based layer
07/14/2010CN101052615B Metal compound, thin film-forming material, and method for producing thin film
07/14/2010CN101051634B Silicon lining bottom plane LED integrated chip and producing method
07/14/2010CN101049597B Cleaning device and cleaning method
07/14/2010CN101030586B Thin-film transistor array base-plate structure and its production
07/13/2010USRE41426 Manufacturing methods of liquid crystal displays
07/13/2010US7757195 Methods and systems for implementing dummy fill for integrated circuits
07/13/2010US7756687 Method for predicting contributions of silicon interstitials to n-type dopant transient enhanced diffusion during a pn junction formation
07/13/2010US7756653 Storage medium storing thereon power consumption analysis program, and power consumption analysis method
07/13/2010US7756599 Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program
07/13/2010US7756597 Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program
07/13/2010US7755929 Spin-injection device and magnetic device using spin-injection device
07/13/2010US7755877 Conveying method, conveyance apparatus, exposure apparatus, and device manufacturing method
07/13/2010US7755768 Apparatus for and a method of determining a characteristic of a layer or layers
07/13/2010US7755751 Optical inspection method and optical inspection apparatus
07/13/2010US7755680 Image signal processor and deficient pixel detection method
07/13/2010US7755280 Active matrix electroluminescence device having a metallic protective layer and method for fabricating the same
07/13/2010US7755274 Organic EL panel
07/13/2010US7755205 Electronic component, semiconductor device, methods of manufacturing the same, circuit board, and electronic instrument
07/13/2010US7755204 Stacked die module including multiple adhesives that cure at different temperatures
07/13/2010US7755175 Multi-stack chip package with wired bonded chips
07/13/2010US7755169 Semiconductor device, method of manufacturing the same, and phase shift mask
07/13/2010US7755160 Plasma excited chemical vapor deposition method silicon/oxygen/nitrogen-containing-material and layered assembly
07/13/2010US7755152 Semiconductor component configured as a diaphragm sensor
07/13/2010US7755151 Wafer level package for surface acoustic wave device and fabrication method thereof
07/13/2010US7755149 Photo mask and semiconductor device fabricated using the same
07/13/2010US7755146 Formation of standard voltage threshold and low voltage threshold MOSFET devices
07/13/2010US7755145 Semiconductor device and manufacturing method thereof
07/13/2010US7755141 Complementary MISFET formed in a linear body
07/13/2010US7755139 Power device with high switching speed and manufacturing method thereof
07/13/2010US7755132 Nonvolatile memories with shaped floating gates
07/13/2010US7755124 Tantalum/titanium/tungsten/molybdenum nitride layers; electrodeposition; dynamic random access memory; electrical resistance; magnetic resistance
07/13/2010US7755115 Field effect transistor using carbon nanotube of two or more walls having the outer walls at the gate and source/drain regions removed
07/13/2010US7755110 Architecture of function blocks and wirings in a structured ASIC and configurable driver cell of a logic cell zone
07/13/2010US7755109 Bonded semiconductor substrate
07/13/2010US7755108 Nitride-based semiconductor device
07/13/2010US7755104 FinFET pMOS double gate semiconductor device with uniaxial tensile strain applied to channel by shrinkable gate electrode material, current flow in <110> crystal orientation, and source and drain Schottky contacts with channel and manufacturing method thereof
07/13/2010US7755102 High breakdown voltage diode and method of forming same
07/13/2010US7755101 Semiconductor light emitting device
07/13/2010US7755094 Semiconductor light emitting device and method of manufacturing the same
07/13/2010US7755091 Solid state image pickup device
07/13/2010US7755090 Solid state image pickup device and method of producing solid state image pickup device
07/13/2010US7755082 Forming self-aligned nano-electrodes
07/13/2010US7755080 Method for forming quantum dot, and quantum semiconductor device and method for fabricating the same
07/13/2010US7755070 Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source
07/13/2010US7755067 Ion implantation apparatus and method of converging/shaping ion beam used therefor
07/13/2010US7755064 Resist pattern processing equipment and resist pattern processing method
07/13/2010US7755063 Superresolution in microlithography and fluorescence microscopy
07/13/2010US7755030 Optical device including a wiring having a reentrant cavity
07/13/2010US7754997 Apparatus and method to confine plasma and reduce flow resistance in a plasma
07/13/2010US7754995 Plasma processing apparatus and plasma processing method
07/13/2010US7754978 Multilayer printed wiring board and method of manufacturing the same
07/13/2010US7754780 Resist for forming pattern and method for forming pattern using the same
07/13/2010US7754623 Apparatus for forming film hole
07/13/2010US7754622 Patterning method utilizing SiBN and photolithography
07/13/2010US7754621 yttrium source material and zirconium source material are alternately used as metal source materials so as to form a yttrium-stabilized zirconium oxide (YSZ) thin film on a substrate by atomic layer deposition
07/13/2010US7754620 Film formation method and recording medium
07/13/2010US7754619 Method for forming a coating with a liquid, and method for manufacturing a semiconductor device
07/13/2010US7754618 Method of forming an apparatus having a dielectric containing cerium oxide and aluminum oxide
07/13/2010US7754617 Polysilicon deposition and anneal process enabling thick polysilicon films for MEMS applications
07/13/2010US7754616 Semiconductor device and method of manufacturing the same
07/13/2010US7754615 Method and apparatus for detecting endpoint in a dry etching system by monitoring a superimposed DC current
07/13/2010US7754614 Nonvolatile memory device and method for fabricating the same
07/13/2010US7754613 Etching method and etching apparatus
07/13/2010US7754612 Methods and apparatuses for removing polysilicon from semiconductor workpieces
07/13/2010US7754611 Chemical mechanical polishing process
07/13/2010US7754610 Process for etching tungsten silicide overlying polysilicon particularly in a flash memory
07/13/2010US7754608 Manufacturing method for the integration of nanostructures into microchips
07/13/2010US7754607 Method for manufacturing a liquid crystal display
07/13/2010US7754606 Shielded capacitor structure
07/13/2010US7754605 Ultrashallow semiconductor contact by outdiffusion from a solid source
07/13/2010US7754604 Reducing silicon attack and improving resistivity of tungsten nitride film
07/13/2010US7754602 Semiconductor device and method for fabricating the same
07/13/2010US7754601 Semiconductor interconnect air gap formation process
07/13/2010US7754600 Methods of forming nanostructures on metal-silicide crystallites, and resulting structures and devices
07/13/2010US7754599 Structure for reducing stress for vias and fabricating method thereof
07/13/2010US7754598 Method for manufacturing coreless packaging substrate
07/13/2010US7754597 Bonding pad fabrication method, method for fabricating a bonding pad and an electronic device, and electronic device
07/13/2010US7754596 Semiconductor device preventing electrical short and method of manufacturing the same
07/13/2010US7754595 Method for manufacturing semiconductor device
07/13/2010US7754594 Method for tuning the threshold voltage of a metal gate and high-k device
07/13/2010US7754593 Semiconductor device and manufacturing method therefor
07/13/2010US7754592 Method for fabricating semiconductor device
07/13/2010US7754591 Method for forming fine pattern of semiconductor device
07/13/2010US7754590 Method of manufacturing a semiconductor device comprising a field stop zone at a specific depth
07/13/2010US7754589 Method for improving the quality of a SiC crystal
07/13/2010US7754588 Method to improve a copper/dielectric interface in semiconductor devices
07/13/2010US7754587 Silicon deposition over dual surface orientation substrates to promote uniform polishing
07/13/2010US7754586 Method of surface treating a phase change layer and method of manufacturing a phase change memory device using the same
07/13/2010US7754585 Method of heat treatment of silicon wafer doped with boron
07/13/2010US7754584 Semiconductor substrate, and semiconductor device and method of manufacturing the semiconductor device
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