Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2010
07/15/2010WO2010078907A1 Functional material for printed electronic components
07/15/2010WO2010078860A1 Vacuum coating system and method for operating a vacuum coating system
07/15/2010WO2010078743A1 Structure of image element of thin film transistors
07/15/2010WO2010059357A3 Extended chamber liner for improved mean time between cleanings of process chambers
07/15/2010WO2010059310A3 Laser ablation tooling via sparse patterned masks
07/15/2010WO2010059252A3 Front end of line plasma mediated ashing processes and apparatus
07/15/2010WO2010056433A3 OPTIMIZED COMPRESSIVE SiGe CHANNEL PMOS TRANSISTOR WITH ENGINEERED Ge PROFILE AND OPTIMIZED SILICON CAP LAYER
07/15/2010WO2010056211A3 System for encapsulation of semiconductor dies
07/15/2010WO2010055374A8 An antireflective coating composition comprising fused aromatic rings
07/15/2010WO2010055373A8 An antireflective coating composition comprising fused aromatic rings
07/15/2010WO2010054073A3 Vertical junction field effect transistors having sloped sidewalls and methods of making
07/15/2010WO2010053648A3 Substrate holder with varying density
07/15/2010WO2010048379A3 Remote access gateway for semiconductor processing equipment
07/15/2010WO2010048237A3 Ultraviolet reflector with coolant gas holes and method
07/15/2010WO2010048227A3 Ultraviolet-transmitting microwave reflector comprising a micromesh screen
07/15/2010WO2010048127A3 A silicon based nanoscale crossbar memory
07/15/2010WO2010048032A3 Pad conditioner auto disk change
07/15/2010WO2010045538A3 Methods and apparatus for rapidly responsive heat control in plasma processing devices
07/15/2010WO2010045513A3 Pre-coating and wafer-less auto-cleaning system and method
07/15/2010WO2010045468A3 Methods and apparatus for recovering heat from processing systems
07/15/2010WO2010045162A3 Eddy current gain compensation
07/15/2010WO2010045151A3 Textured platen
07/15/2010WO2010045087A3 Oc dram cell with increased sense margin
07/15/2010WO2010042908A3 System and method for testing an electrostatic chuck
07/15/2010WO2010042907A3 Method of refurbishing bipolar electrostatic chuck
07/15/2010WO2010042860A3 Rf return path for large plasma processing chamber
07/15/2010WO2010042577A3 Advanced platform for processing crystalline silicon solar cells
07/15/2010WO2010039807A3 Thermal modulation of implant process
07/15/2010WO2010039672A3 Platen cooling mechanism for cryogenic ion implanting
07/15/2010WO2010038949A3 Space transformer comprising an isolation resistor for a probe card, and method for manufacturing same
07/15/2010WO2010002071A3 Cylindrical magnetic levitation stage
07/15/2010WO2009086820A3 Method for producing a photoactive layered composite and use thereof
07/15/2010US20100180252 Computer readable storage medium storing program for generating reticle data, and method of generating reticle data
07/15/2010US20100179683 Methods, systems and apparatus for rapid exchange of work material
07/15/2010US20100179681 Device for storing substrates
07/15/2010US20100178776 Heat treatment apparatus and method for heating substrate by light-irradiation
07/15/2010US20100178775 Shower plate sintered integrally with gas release hole member and method for manufacturing the same
07/15/2010US20100178774 Plasma confinement rings including rf absorbing material for reducing polymer deposition
07/15/2010US20100178773 Method of forming semiconductor devices employing double patterning
07/15/2010US20100178772 Method of fabricating high-k metal gate devices
07/15/2010US20100178771 Methods of Forming Dual-Damascene Metal Interconnect Structures Using Multi-Layer Hard Masks
07/15/2010US20100178770 Method of etching a thin film using pressure modulation
07/15/2010US20100178769 Spacer formation for array double patterning
07/15/2010US20100178768 Controlling passivating film properties using colloidal particles, polyelectrolytes, and ionic additives for copper chemical mechanical planarization
07/15/2010US20100178767 Chemical-mechanical polishing composition comprising metal-organic framework materials
07/15/2010US20100178766 High-yield method of exposing and contacting through-silicon vias
07/15/2010US20100178765 Metal Polishing Slurry and Method of Polishing a Film to be Polished
07/15/2010US20100178764 Method for fabricating semiconductor device
07/15/2010US20100178763 Method and apparatus for fabricating semiconductor device
07/15/2010US20100178762 Manufacture method for semiconductor device suitable for forming wirings by damascene method and semiconductor device
07/15/2010US20100178761 Stacked Integrated Chips and Methods of Fabrication Thereof
07/15/2010US20100178760 Semiconductor device and fabrication method for the same
07/15/2010US20100178759 Method of fabricating semiconductor device
07/15/2010US20100178758 Methods for fabricating dielectric layer and non-volatile memory
07/15/2010US20100178757 Process simulation method, semiconductor device manufacturing method, and process simulator
07/15/2010US20100178756 Nitride semiconductor device and method for manufacturing the same
07/15/2010US20100178755 Method of fabricating nonvolatile memory device
07/15/2010US20100178754 Method of manufacturing cmos transistor
07/15/2010US20100178753 Silicon wafer and method for manufacturing the same
07/15/2010US20100178752 Semiconductor device and fuse blowout method
07/15/2010US20100178751 Laser processing method and semiconductor chip
07/15/2010US20100178750 Method for producing bonded wafer
07/15/2010US20100178749 Method of fabricating epitaxially grown layers on a composite structure
07/15/2010US20100178748 Methods of Etching Trenches Into Silicon of a Semiconductor Substrate, Methods of Forming Trench Isolation in Silicon of a Semiconductor Substrate, and Methods of Forming a Plurality of Diodes
07/15/2010US20100178747 Minimum Cost Method for Forming High Density Passive Capacitors for Replacement of Discrete Board Capacitors Using a Minimum Cost 3D Wafer-to-Wafer Modular Integration Scheme
07/15/2010US20100178746 Method of fabricating hetero-junction bipolar transistor (hbt)
07/15/2010US20100178745 Flash Memory Device and Fabrication Method Thereof
07/15/2010US20100178744 MANUFACTURE METHOD FOR SEMICONDUCTOR DEVICE WHOSE GATE INSULATING FILM CONTAINS Hf AND O
07/15/2010US20100178743 Method for making asymmetric double-gate transistors
07/15/2010US20100178742 Methods of forming nand flash memory with fixed charge
07/15/2010US20100178741 Access transistor for memory device
07/15/2010US20100178740 Bipolar transistors with resistors
07/15/2010US20100178739 Integration scheme for an nmos metal gate
07/15/2010US20100178738 Transistor, method of fabricating the same and organic light emitting display including the transistor
07/15/2010US20100178737 Semiconductor IC and Its Manufacturing Method, and Module with Embedded Semiconductor IC and Its Manufacturing Method
07/15/2010US20100178736 Method of fabricating a semiconductor device
07/15/2010US20100178735 Fusible I/O Interconnection Systems and Methods for Flip-Chip Packaging Involving Substrate-Mounted Stud Bumps
07/15/2010US20100178734 Leadless Semiconductor Package with Electroplated Layer Embedded in Encapsulant and the Method for Manufacturing the Same
07/15/2010US20100178733 Thin Quad Flat Package with No Leads (QFN) Fabrication Methods
07/15/2010US20100178732 Laser Bonding for Stacking Semiconductor Substrates
07/15/2010US20100178731 Semiconductor device having a plurality of semiconductor constructs
07/15/2010US20100178730 Direct-current plasma CVD apparatus and method for producing diamond using the same
07/15/2010US20100178729 Resistance-Type Random Access Memory Device Having Three-Dimensional Bit Line and Word Line Patterning
07/15/2010US20100178726 Conductive Paste, Solar Cell Manufactured Using Conductive Paste, Screen Printing Method and Solar Cell Formed Using Screen Printing Method
07/15/2010US20100178723 Method and Structure for Fabricating Solar Cells Using a Thick Layer Transfer Process
07/15/2010US20100178722 Methods and applications of non-planar imaging arrays
07/15/2010US20100178721 Semiconductor device, method for fabricating an electrode, and method for manufacturing a semiconductor device
07/15/2010US20100178720 Method of manufacturing semiconductor light emitting device
07/15/2010US20100178718 Methods for improving performance variation of a solar cell manufacturing process
07/15/2010US20100178717 Method of manufacturing mems device
07/15/2010US20100178715 MRAM with storage layer and super-paramagnetic sensing layer
07/15/2010US20100178714 Method of forming magnetic memory device
07/15/2010US20100178618 Patterning process
07/15/2010US20100178597 Mask fabrication supporting method, mask blank providing method, and mask blank dealing system
07/15/2010US20100178147 Robot systems, apparatus and methods for transporting substrates
07/15/2010US20100178139 Electrostatic end effector apparatus, systems and methods
07/15/2010US20100178137 Systems, apparatus and methods for moving substrates
07/15/2010US20100178136 Substrate transfer robot and vacuum processing apparatus
07/15/2010US20100178135 Systems, apparatus and methods for making an electrical connection
07/15/2010US20100177796 Laser device and heat sink with core to manage stress due to thermal expansion