Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2010
07/06/2010US7749398 Selective-redeposition sources for calibrating a plasma process
07/06/2010US7749353 High aspect ratio etch using modulation of RF powers of various frequencies
07/06/2010US7749351 Method of producing solar cell module
07/06/2010US7749349 Methods and systems for releasably attaching support members to microfeature workpieces
07/06/2010US7749326 Chemical vapor deposition apparatus
07/06/2010US7749325 Method of producing gallium nitride (GaN) independent substrate, method of producing GaN crystal body, and method of producing GaN substrate
07/06/2010US7748944 Method and apparatus for semiconductor processing
07/06/2010US7748344 Segmented resonant antenna for radio frequency inductively coupled plasmas
07/06/2010US7748138 Particle removal method for a substrate transfer mechanism and apparatus
07/01/2010WO2010075283A2 Method and apparatus for plasma dose measurement
07/01/2010WO2010075281A2 Plasma ion process uniformity monitor
07/01/2010WO2010075234A2 Method of patterning conductive layer and devices made thereby
07/01/2010WO2010075125A1 Fabricating a gallium nitride device with a diamond layer
07/01/2010WO2010075124A1 Fabricating a gallium nitride layer with diamond layers
07/01/2010WO2010074973A2 Trigate static random-access memory with indepenent source and drain engineering, and devices made therefrom
07/01/2010WO2010074964A2 Group iii-v mosfet having metal diffusion regions
07/01/2010WO2010074956A2 Doping of lead-free solder alloys and structures formed thereby
07/01/2010WO2010074948A2 Integrated circuit, 1t-1c embedded memory cell containing same, and method of manufacturing 1t-1c memory cell for embedded memory application
07/01/2010WO2010074734A2 Color correction for wafer level white leds
07/01/2010WO2010074689A1 Memristive device and methods of making and using the same
07/01/2010WO2010074688A1 Electrically actuated devices
07/01/2010WO2010074685A1 Memristive device having a porous dopant diffusion element
07/01/2010WO2010074649A1 Via structure and method thereof
07/01/2010WO2010074514A2 Method for growing group iii nitride semiconductor layer
07/01/2010WO2010074481A2 Half tone mask and fabricating method
07/01/2010WO2010074416A2 Selecting and supplying apparatus for molding tablet
07/01/2010WO2010074366A1 Wafer transporting system, semiconductor fabrication plant structure using same, and wafer transporting method
07/01/2010WO2010074346A1 Iii-nitride semiconductor growth substrate, iii-nitride semiconductor epitaxial substrate, iii-nitride semiconductor element, iii-nitride semiconductor freestanding substrate, and method for fabricating these
07/01/2010WO2010074276A1 Photoelectric conversion module
07/01/2010WO2010074275A1 High electron mobility transistor, method for producing high electron mobility transistor, and electronic device
07/01/2010WO2010074168A1 Polishing pad and method for producing same
07/01/2010WO2010074134A1 Cleaning agent for silicon wafer
07/01/2010WO2010074132A1 Magnetic memory element and magnetic random access memory
07/01/2010WO2010074130A1 Magnetic memory element and magnetic random access memory
07/01/2010WO2010074125A1 Reflective mask blank and reflective mask manufacturing method
07/01/2010WO2010074076A1 Substrate processing method and substrate processing apparatus
07/01/2010WO2010074075A1 Additive for composition for forming resist underlayer film and composition for forming resist underlayer film comprising the same
07/01/2010WO2010074060A1 Thermosetting die-bonding film
07/01/2010WO2010074037A1 Ruthenium compound, process for producing same, process for producing ruthenium-containing thin film using same, and ruthenium-containing thin film
07/01/2010WO2010073991A1 Semiconductor device and method for producing the same
07/01/2010WO2010073955A1 Flexible substrate processing device
07/01/2010WO2010073948A1 Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device
07/01/2010WO2010073947A1 Semiconductor device and method for manufacturing same
07/01/2010WO2010073935A1 Method for measuring thickness of metal film, and method and apparatus for processing substrate
07/01/2010WO2010073934A1 Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same
07/01/2010WO2010073904A1 Semiconductor storage element manufacturing method and sputter device
07/01/2010WO2010073891A1 Acf attachment device and display device manufacturing method
07/01/2010WO2010073887A1 Photoresist remover composition, method for removing photoresist of multilayer metal circuit board, and method for producing multilayer metal circuit board
07/01/2010WO2010073885A1 Film adhesive and anisotropic conductive adhesive
07/01/2010WO2010073884A1 Electronic circuit
07/01/2010WO2010073844A1 Wire bonding method, electronic component, light emitting electronic component, composite light emitting electornic component, and light emitting device
07/01/2010WO2010073817A1 Substrate positioning system, substrate processing apparatus, substrate positioning program, and electronic device manufacturing method
07/01/2010WO2010073801A1 Illumination optical system, exposure apparatus, and device manufacturing method
07/01/2010WO2010073795A1 Illumination optical system, exposure apparatus, and device manufacturing method
07/01/2010WO2010073794A1 Illumination optical system, exposure apparatus, and device manufacturing method
07/01/2010WO2010073790A1 Magnetoresistive element and memory device using same
07/01/2010WO2010073768A1 Light-receiving element, light-receiving element array, method for manufacturing light-receiving element and method for manufacturing light-receiving element array
07/01/2010WO2010073660A1 Lead, wiring member, package part, metal part provided with resin and resin-sealed semiconductor device, and methods for producing same
07/01/2010WO2010073640A1 Cleaving device and cleaving method for manufacturing electronic components
07/01/2010WO2010073624A1 Semiconductor device and method for testing the same
07/01/2010WO2010073610A1 Standard cell library and semiconductor integrated circuit
07/01/2010WO2010073583A1 Adhesive film, multilayer circuit substrate, component for semiconductor, and semiconductor device
07/01/2010WO2010073578A1 Plasma generating apparatus and plasma processing apparatus
07/01/2010WO2010073559A1 Liquid resin composition and semiconductor device
07/01/2010WO2010073532A1 Plasma processing device
07/01/2010WO2010073527A1 Inspection method and inspection apparatus
07/01/2010WO2010073523A1 Semiconductor integrated circuit
07/01/2010WO2010073514A1 Method for manufacturing chuck plate for electrostatic chuck
07/01/2010WO2010073487A1 Apparatus for managing holding members, apparatus for manufacturing semiconductor, method for managing holding members, and method for manufacturing semiconductor device
07/01/2010WO2010073478A1 Charged particle radiation device and image capturing condition determining method using charged particle radiation device
07/01/2010WO2010073469A1 Method for producing silicon carbide semiconductor device
07/01/2010WO2010073455A1 Method for manufacturing silicon carbide semiconductor element
07/01/2010WO2010073453A1 Defect inspection method and device thereof
07/01/2010WO2010073448A1 Method for manufacturing bonded wafer
07/01/2010WO2010073434A1 Semiconductor device and method for manufacturing same
07/01/2010WO2010073433A1 Semiconductor device and method for manufacturing same
07/01/2010WO2010073425A1 Semiconductor device and method for manufacturing the same
07/01/2010WO2010073424A1 Semiconductor integrated circuit device
07/01/2010WO2010073413A1 Apparatus for manufacturing spherical semiconductor
07/01/2010WO2010073399A1 Semiconductor integrated circuit design method and software
07/01/2010WO2010073360A1 Pattern measuring apparatus and pattern measuring method
07/01/2010WO2010073359A1 Prober, testing apparatus, and method for inspecting semiconductor chip
07/01/2010WO2010073358A1 Method and device for measuring temperature during deposition of semiconductor
07/01/2010WO2010073322A1 Data collection system for vacuum processing device
07/01/2010WO2010072956A1 Semiconductor structure
07/01/2010WO2010072861A1 Procedure for manufacturing nanochannels
07/01/2010WO2010072826A2 Method for separating a layer system comprising a wafer
07/01/2010WO2010072666A1 Method for forming thin film resistor and terminal bond pad simultaneously
07/01/2010WO2010072534A1 High-temperature-resistant component structure free of soldering agent, and method for electrical contact-connection
07/01/2010WO2010072273A1 Manufacturing of low defect density free-standing gallium nitride substrates and devices fabricated thereof
07/01/2010WO2010072246A1 Method for resist development in narrow high aspect ratio vias
07/01/2010WO2010047978A3 Silicon etch with passivation using chemical vapor deposition
07/01/2010WO2010047976A3 Silicon etch with passivation using plasma enhanced oxidation
07/01/2010WO2010045037A3 Physical vapor deposition reactor with circularly symmetric rf feed and dc feed to the sputter target
07/01/2010WO2010045026A3 Control of erosion profile on a dielectric rf sputter target
07/01/2010WO2010045021A3 Gapfill improvement with low etch rate dielectric liners
07/01/2010WO2010042660A3 Method and apparatus for detecting an idle mode of processing equipment
07/01/2010WO2010042552A3 Selective etching of silicon nitride
07/01/2010WO2010042479A3 Enhancement-mode nitride transistor
07/01/2010WO2010040100A3 Methods for preparing nanocrystals using electron transfer agents
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