H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2011
08/04/2011	WO2011093959A2 High voltage scrmos in bicmos process technologies
08/04/2011	WO2011093956A2 Protruding tsv tips for enhanced heat dissipation for ic devices
08/04/2011	WO2011093955A2 Dual carrier for joining ic die or wafers to tsv wafers
08/04/2011	WO2011093953A2 High voltage scrmos in bicmos process technologies
08/04/2011	WO2011093934A1 Method for improving plating on non-concuctive substrates
08/04/2011	WO2011093891A1 Memristor with controlled electrode grain size
08/04/2011	WO2011093876A1 Environment sensitive devices
08/04/2011	WO2011093709A1 Dynamic fluid valve and method for establishing the same
08/04/2011	WO2011093617A2 Vacuum deposition apparatus
08/04/2011	WO2011093553A1 Planar 3-dof stage
08/04/2011	WO2011093520A1 Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the composition and pattern forming method
08/04/2011	WO2011093506A1 Amorphous oxide thin film, thin film transistor comprising same, and process for production of the thin film transistor
08/04/2011	WO2011093481A1 Method for producing nitride compound semiconductor substrate, and nitride compound semiconductor free-standing substrate
08/04/2011	WO2011093472A1 Semiconductor device
08/04/2011	WO2011093451A1 Electrostatic chuck apparatus
08/04/2011	WO2011093445A1 Etching liquid for a copper/titanium multilayer thin film
08/04/2011	WO2011093436A1 Apparatus for forming image for pattern matching
08/04/2011	WO2011093363A1 Storage cell and storage method
08/04/2011	WO2011093357A1 Mold for imprinting and production method thereof
08/04/2011	WO2011093356A1 Rotary mold for imprinting and production method thereof
08/04/2011	WO2011093334A1 Film-forming method, film-forming apparatus, and apparatus for controlling the film-forming apparatus
08/04/2011	WO2011093280A1 Radiation-sensitive resin composition
08/04/2011	WO2011093263A1 Dry etching agent and dry etching method using the same
08/04/2011	WO2011093258A1 Dry etching method
08/04/2011	WO2011093252A1 Magnetoresistive effect element, magnetic memory cell using same, and random access memory
08/04/2011	WO2011093223A1 Method for reclaiming semiconductor wafer and polishing composition
08/04/2011	WO2011093203A1 Semiconductor device manufacturing method, substrate processing apparatus, and semiconductor device
08/04/2011	WO2011093195A1 Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing method using same, and kit for preparing aqueous dispersion for chemical mechanical polishing
08/04/2011	WO2011093177A1 Glass for semiconductor coating and material for semiconductor coating using the same
08/04/2011	WO2011093162A1 Conductive connection sheet, method for connecting terminals, method for forming connection terminal, semiconductor device, and electronic device
08/04/2011	WO2011093153A1 Aqueous dispersion for chemical mechanical polishing, and chemical mechanical polishing method using same
08/04/2011	WO2011093150A1 Semiconductor device
08/04/2011	WO2011093148A1 Composition for formation of insulating film, and insulating film
08/04/2011	WO2011093139A1 Sulfonic acid derivative and photoacid generator
08/04/2011	WO2011093113A1 Laser processing method
08/04/2011	WO2011093111A1 Laser processing system
08/04/2011	WO2011093038A1 Semiconductor device
08/04/2011	WO2011093022A1 Defect inspection device and defect inspection method
08/04/2011	WO2011093003A1 Semiconductor memory device
08/04/2011	WO2011092994A1 Method for producing semiconductor light-emitting element, semiconductor light-emitting element, and photosensitive composition used for said method for producing semiconductor light-emitting element
08/04/2011	WO2011092893A1 Process for production of silicon carbide substrate
08/04/2011	WO2011092859A1 Method for manufacturing semiconductor device and semiconductor device
08/04/2011	WO2011092839A1 Production management device, production management system, production management program, and production management method
08/04/2011	WO2011092808A1 Silicon carbide semiconductor device and production method therefor
08/04/2011	WO2011092799A1 Semiconductor wafer storing container
08/04/2011	WO2011092795A1 Bonded wafer production method
08/04/2011	WO2011092788A1 Semiconductor storage device
08/04/2011	WO2011092778A1 Plasma film-forming apparatus
08/04/2011	WO2011092771A1 Observation method and observation device
08/04/2011	WO2011092770A1 Charged particle radiation device
08/04/2011	WO2011092601A2 Bio-inspired nanostructures for implementing vertical pn-junctions
08/04/2011	WO2011092236A2 Bath deposition solution for the wet-chemical deposition of a metal sulfide layer and related production method
08/04/2011	WO2011092214A1 Handling device for substrates using compressed air
08/04/2011	WO2011091709A1 Ferro-resistive random access memory (ferro-rram), operation method and manufacturing mehtod thereof
08/04/2011	WO2011091707A1 Charge capturing non-volatile semiconductor memory and manufacturing method thereof
08/04/2011	WO2011091656A1 Mos structure for restraining the fbe of soi
08/04/2011	WO2011091655A1 Method for suppressing floating-body effect of soi mos device by ion implantation with high angle
08/04/2011	WO2011071568A3 STRUCTURE AND METHOD FOR ACHIEVING SELECTIVE ETCHING IN (Ga,A1,In,B)N LASER DIODES
08/04/2011	WO2011070254A3 Method for heat-treating a silicon substrate for the production of photovoltaic cells, and photovoltaic cell production method
08/04/2011	WO2011063365A9 Gan whiskers and methods of growing them from solution
08/04/2011	WO2011056484A3 Method and apparatus of halogen removal
08/04/2011	WO2011056391A3 High-drive current mosfet
08/04/2011	WO2011053880A3 Semiconductor device
08/04/2011	WO2011050116A3 Super-high density power trench mosfet
08/04/2011	WO2011050062A3 Method for repairing low-k dielectric damage
08/04/2011	WO2011049938A3 Microelectronic processing component having a corrosion-resistant layer, microelectronic workpiece processing apparatus incorporating same, and method of forming an article having the corrosion-resistant layer
08/04/2011	WO2011046655A3 Transfer-free batch fabrication of single layer graphene devices
08/04/2011	WO2011044360A3 Process for manufacturing solar cells including ambient pressure plasma torch step
08/04/2011	WO2011037377A3 Batch-type epitaxial layer forming device and a method for forming the same
08/04/2011	WO2011031092A3 Cleaning solution composition for substrate for preparation of flat panel display
08/04/2011	WO2011028748A3 Method and apparatus for producing and measuring dynamically focussed, steered and shaped oblique laser illumination for spinning wafer inspection system
08/04/2011	US20110190927 Substrate carrying device, substrate carrying method and storage medium
08/04/2011	US20110189862 Silicon oxynitride film and process for production thereof, computer-readable storage medium, and plasma cvd device
08/04/2011	US20110189861 Deposition Method for Passivation of Silicon Wafers
08/04/2011	US20110189860 Methods for nitridation and oxidation
08/04/2011	US20110189859 Method of Etching Oxide Layer and Nitride Layer
08/04/2011	US20110189858 Method for reducing pattern collapse in high aspect ratio nanostructures
08/04/2011	US20110189857 Chemical mechanical polishing apparatus, chemical mechanical polishing method, and control program
08/04/2011	US20110189856 High Sensitivity Real Time Profile Control Eddy Current Monitoring System
08/04/2011	US20110189855 METHOD FOR CLEANING SURFACE CONTAINING Cu
08/04/2011	US20110189854 Chemical mechanical polishing method
08/04/2011	US20110189853 Nonvolatile semiconductor storage apparatus and method for manufacturing the same
08/04/2011	US20110189852 Method for Forming a Via in a Substrate and Substrate with a Via
08/04/2011	US20110189851 Method of fabricating semiconductor device
08/04/2011	US20110189850 Semiconductor device and method of manufacturing the same
08/04/2011	US20110189849 Semiconductor device with a barrier film
08/04/2011	US20110189848 Method to form solder deposits on substrates
08/04/2011	US20110189847 Method for metal gate n/p patterning
08/04/2011	US20110189846 Methods of manufacturing non-volatile memory devices
08/04/2011	US20110189845 Semiconductor device and method of manufacturing semiconductor device
08/04/2011	US20110189844 Method for encapsulating a microcomponent using a mechanically reinforced cap
08/04/2011	US20110189843 Plasma doping method and method for fabricating semiconductor device using the same
08/04/2011	US20110189842 Method For Producing A Semiconductor Wafer Composed Of Silicon With An Epitaxially Deposited Layer
08/04/2011	US20110189841 Fabrication of large grain polycrystalline silicon film by nano aluminum-induced crystallization of amorphous silicon
08/04/2011	US20110189840 Method for reducing dielectric overetch when making contact to conductive features
08/04/2011	US20110189839 Method for producing a semiconductor device with a semiconductor body
08/04/2011	US20110189838 Zirconium and Hafnium Boride Alloy Templates on Silicon for Nitride Integration Applications
08/04/2011	US20110189837 Realizing N-Face III-Nitride Semiconductors by Nitridation Treatment
08/04/2011	US20110189836 Ion/ioff in semiconductor devices by utilizing the body effect
08/04/2011	US20110189835 Film for manufacturing semiconductor device and method of manufacturing semiconductor device

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