Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
10/1994
10/05/1994EP0618425A1 Sensor head and method for its manufacture
10/04/1994US5353116 Defect inspection system for phase shift masks
10/04/1994US5353115 System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer
09/1994
09/29/1994DE4410134A1 Interferometric strain sensor
09/28/1994EP0489847B1 Interferometer utilizing superfluorescent optical source
09/27/1994US5351125 Gaging finger for precision measuring instruments
09/27/1994US5351124 Birefringent component axis alignment detector
09/22/1994DE4322687C1 Interferometer, after Michelson
09/22/1994DE4309056A1 Method for determining the distance and intensity of scattering of the scattering points
09/20/1994US5349442 Hand held phase-shifting diffraction moire interferometer
09/20/1994US5349440 Interferometric laser profilometer including a multimode laser diode emitting a range of stable wavelengths
09/20/1994US5349439 Opto-electronic measuring device with optical air wedge spectral analysis arrangement
09/20/1994US5349438 Structure for the dynamic support of a reflective element and interferometer comprising the same
09/15/1994DE4308411A1 Interferometer of integrated-optical construction
09/14/1994EP0427797B1 Polarization interferometer
09/13/1994US5347356 Substrate aligning device using interference light generated by two beams irradiating diffraction grating
09/13/1994US5347328 Apparatus for measuring an intraocular length between anterior and posterior portions of an eye
09/08/1994DE4306653A1 Measuring head for a combined speckle and speckle/shear interferometer
09/07/1994EP0614067A1 Phase modulation interferometer
09/01/1994DE4306090A1 Device for length-modulation of a laser beam
08/1994
08/31/1994EP0612976A2 Phase modulated interferometer
08/31/1994EP0493169B1 Analysis device for interferometric microdisplacement sensors
08/30/1994US5343290 Surface particle detection using heterodyne interferometer
08/25/1994DE4305458A1 Phase modulated interferometer, e.g. for length measurement
08/24/1994EP0611946A1 Minute step height measuring method and apparatus therefor
08/24/1994EP0611438A1 Measuring instruments.
08/23/1994US5341212 Wave front interferometer
08/23/1994US5341211 Apparatus for making absolute two-demensional position measurements
08/23/1994US5341205 Method for characterization of optical waveguide devices using partial coherence interferometry
08/18/1994WO1994018523A1 Method and apparatus for the rapid acquisition of data in coherence scanning interferometry
08/18/1994WO1994018521A1 Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms
08/10/1994EP0609419A1 Interferometric probe for distance measurement
08/09/1994US5337145 Two component straightness interferometer apparatus for measuring movements of parts of a machine
08/02/1994EP0619032A4 Optical interferometer with squeezed vacuum and reduced guided-acoustic-wave brillouin scattering noise.
07/1994
07/27/1994CN1090037A Holographic focus-tracing optical contact-tag micrometer
07/26/1994US5333048 Polarizing interferometric displacement measuring arrangement
07/21/1994WO1994016294A1 Nanometer metrology
07/20/1994EP0606677A2 Laser interferometer
07/20/1994EP0505366B1 Interferometer arrangement
07/19/1994US5331400 Heterodyne interferometer arrangement
07/19/1994CA1330716C Device and method for measuring in a wide band the non-reciprocal phase-shift generated in a ring interferometer
07/13/1994EP0574565A4 Bearing for a moving mirror of a michelson interferometer
07/13/1994EP0448751B1 Integrated acoustooptic heterodyne interferometer
07/12/1994US5329356 Interferometer head and interferometer arrangement with rigid support structure
07/07/1994WO1994015195A1 Dispersion interferometer
07/06/1994EP0605391A2 Polarisation interferometer
07/06/1994EP0468019B1 Interferometer
07/06/1994CN2171105Y Precision wide range scanning tunnel microtechnic air tyre shockproof device
07/05/1994US5327219 Method and apparatus for removing unwanted reflections from an interferometer
07/05/1994US5327216 Apparatus for remote seismic sensing of array signals using side-by-side retroreflectors
06/1994
06/28/1994US5325177 Gauge for measuring an internal dimension of a work piece hole
06/28/1994US5325175 Solid-block homodyne interferometer
06/23/1994WO1994014028A1 Interferometric measurement device
06/21/1994US5323229 Measurement system using optical coherence shifting interferometry
06/21/1994CA1330366C 3-dimensional vision system utilizing coherent optical detection
06/14/1994US5321502 Measuring method and measuring apparatus
06/14/1994US5321501 Method and apparatus for optical imaging with means for controlling the longitudinal range of the sample
06/14/1994US5321497 Interferometric integration technique and apparatus to confine 2π discontinuity
06/01/1994EP0491749B1 Device for absolute two-dimensional position measurement
05/1994
05/31/1994US5317389 Method and apparatus for white-light dispersed-fringe interferometric measurement of corneal topography
05/31/1994US5317383 Array retroreflector apparatus for remote seismic sensing
05/24/1994US5315373 Method of measuring a minute displacement
05/18/1994CN1024593C Measurement method for phase and integer of phase of heterodyne interferometer signal processing and its apparatus
05/17/1994US5313271 Absolute gas refractometer wherein the optical path difference of said refractometer is fixed
05/17/1994US5313269 Three-dimensional refractively scanning interferometer having removable optical cartridge
05/17/1994US5313266 Demodulators for optical fiber interferometers with [3×3] outputs
05/17/1994US5313265 Non-contact non-destructive latent image scanner
05/11/1994EP0595835A1 Step scanning technique for interferometer
05/11/1994CN1024476C Locater for measuring leangth by microscope
05/03/1994US5309277 High intensity illuminator
04/1994
04/26/1994US5307098 Projection inspecting machine
04/19/1994US5305330 System comprising a laser diode and means for stabilizing the wavelength of light emitted by said laser diode, and laser interferometer
04/19/1994US5305089 Laser interferometer including an optical unit having a corner cube prism, a parallelogram prism, a triangle prism, and a polarizing plate intergrated to form one body
04/19/1994US5305088 Laser interferometric measuring machine
04/19/1994US5305084 Heterodyne interferometer
04/19/1994US5305074 Achromatic self-referencing interferometer
04/15/1994CA2080557A1 Sensitive interferometric parallel thermal-wave imager
04/13/1994EP0591912A2 Interferometer, comprising an intergrated arrangement and a mirror, which are seperated from each other by a measurement zone
04/13/1994EP0591911A2 Interferometer comprising an integrated arrangement and a reflecting part which are separated from each other by a measurement zone
04/13/1994CN1085315A Heterodyne frequency-shifting-type twin laser interferometer with common-mode suppressed frequency shift interference
04/12/1994US5303031 All optical phase sensitive detector and image demultiplexer
04/07/1994DE4233336A1 Focussing error detection using Michelson interferometer - evaluating periodic frequency or phase of interference pattern formed at detector by two reflected sub-beams
04/05/1994US5301010 Interferometer having a short coherence length light source and means for identifying interference fringes
03/1994
03/31/1994WO1994007109A1 Interferometric measurement process and laser interferometer therefor
03/30/1994EP0357695B1 Optical apparatus for use with interferometric measuring devices
03/29/1994US5299049 Beam shifting device
03/29/1994US5298971 Lateral shear interferometer for testing aspheric surfaces
03/23/1994CN1084283A Full optical fibre top with polarizing passive automatic stabilizing and its prepn. method
03/22/1994US5296700 Fluorescent confocal microscope with chromatic aberration compensation
03/17/1994WO1994005967A1 Optical interferometer with squeezed vacuum and reduced guided-acoustic-wave brillouin scattering noise
03/17/1994WO1994005966A1 Interferometric probe for distance measurement
03/17/1994DE4230748A1 Interferometrisches Meßverfahren sowie für seine Durchführung geeignete Laserinterferometeranordnung Interferometric measurement method and suitable for implementation in laser interferometer
03/16/1994EP0586454A1 Positional measurement.
03/15/1994US5294790 Probe unit for near-field optical scanning microscope
03/09/1994EP0586054A1 Spectroscopic imaging system using a pulsed electromagnetic radiation source and an interferometer
03/09/1994EP0586053A1 Dual interferometer spectroscopic imaging system
03/09/1994EP0585333A1 Interferometric measuring device in integrated optics.
03/08/1994US5293272 High finesse holographic fabry-perot etalon and method of fabricating
03/08/1994US5293215 Device for interferometric detection of surface structures
03/08/1994US5293213 Utilization of a modulated laser beam in heterodyne interferometry