Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810) |
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05/28/1991 | US5018862 Successive fringe detection position interferometry |
05/28/1991 | US5018861 Methods and means for full-surface interferometric testing of grazing incidence mirrors |
05/23/1991 | DE3938317A1 Interferometric distance measurement method - using selectable period of interferometer output signal using Echelle filter to derive spectrally filtered light |
05/22/1991 | EP0427797A1 Polarization interferometer. |
05/21/1991 | US5017010 High sensitivity position sensor and method |
05/15/1991 | EP0426866A1 Projection/exposure device and projection/exposure method |
05/08/1991 | EP0426263A2 Successive fringe detection position interferometry |
05/08/1991 | EP0426011A1 Two-beam interferometer for use in fourier transform spectrometer and driving device for movable flat mirror of same |
05/07/1991 | US5013152 Interchangeable interferometric optical mounting elements |
04/30/1991 | US5011287 Interferometer object position measuring system and device |
04/18/1991 | WO1991005218A1 Correlation microscope |
04/18/1991 | DE4022601A1 Optical measurer for lengths using sensor and movable reflector - has two partial mirrors on opposing surfaces of sensor with laser behind one |
04/18/1991 | DE3932663A1 Standing wave sensor with partially transparent mirrors - has semiconducting laser with adjustable supply current and/or temp. |
04/17/1991 | EP0422155A1 Wavelength stabilization, in particular for interferometric measurement of length. |
04/17/1991 | EP0422143A1 Interferometer arrangement in particular for determinig the distance or the displacement path of a mobile component |
04/16/1991 | US5007738 Interferometric test standard |
04/10/1991 | EP0421645A2 Apparatus for and method of optical inspection in a total internal reflection holographic imaging system |
04/10/1991 | EP0420852A1 Interferometer. |
04/04/1991 | WO1991004460A1 Device for absolute two-dimensional position measurement |
04/03/1991 | EP0419936A1 Process and apparatus for the phase indication of radiation, especially light radiation |
04/02/1991 | US5004345 Dual-lens shearing interferometer |
03/27/1991 | EP0418344A1 Light-generation device. |
03/26/1991 | US5002394 Fabricating interferometers having reduced misalignment problems |
03/21/1991 | WO1991003703A1 Interferometer utilizing superfluorescent optical source |
03/21/1991 | WO1991003702A1 Optical measuring instruments |
03/21/1991 | DE3930554A1 Vorrichtung zur absoluten zweidimensionalen positions-messung Apparatus for absolute two-dimensional position-measurement |
03/20/1991 | EP0417934A2 Position measuring system and positioning machine |
03/19/1991 | US5001337 Fiber optic geophysical sensors |
03/14/1991 | DE3930273A1 Measurement interferometer supplied with light from laser - is stimulated by laser diodes and has reference interferometer in control loop for frequency stabilisation |
03/13/1991 | EP0416459A2 Electronic evaluation circuit for a laser interferometer |
03/12/1991 | US4999681 Real-time halographic interferometry with a pulsed laser and flicker-free viewing |
03/06/1991 | EP0415143A2 Interferometric measuring system |
02/28/1991 | DE3928001A1 Determining direction of motion during distance measurement - has single interferometer containing mirror with reflection films of different reflectivities and stepped profile |
02/26/1991 | US4996416 Optical detection system with means for equalizing ambient light levels at multiple detectors |
02/26/1991 | US4995726 Surface profile measuring device utilizing optical heterodyne interference |
02/21/1991 | WO1991002214A1 Interferometry device for measuring movement |
02/20/1991 | CN1049410A Projective type measuring instrument for measuring clearance of die set and working theory |
02/12/1991 | US4991961 Moving mirror tilt adjust mechanism in an interferometer |
02/06/1991 | CN1011557B Method of identifying objects |
01/23/1991 | EP0408747A1 Length measuring method by using laser beams |
01/17/1991 | DE3921816A1 Dual beam interferometer with rotary mirror system - has beam splitter(s) for amplitude splitting of incident measuring beam and detectors evaluating partial beams mixed by reflectors |
01/16/1991 | EP0407454A1 Optical measuring apparatus. |
01/15/1991 | US4984898 Laser interferometer for interferometric length measurements including an automatic-compensating circuit |
01/15/1991 | US4984891 Laser gauge interferometer and locating method using the same |
01/10/1991 | WO1991000464A1 Semiconductor microactuator |
01/08/1991 | US4983042 Monochromatic light beam |
01/02/1991 | EP0405176A1 Caliper with an optical touch sensor |
12/25/1990 | US4979828 Optical |
12/12/1990 | EP0401799A2 Length measuring apparatus |
12/12/1990 | EP0401694A1 Interferometer device |
12/12/1990 | EP0401576A2 Interferometric device |
12/05/1990 | EP0400649A2 Unit conversion device for laser interferometic measuring machine |
12/05/1990 | EP0366756A4 Broadband optical fiber laser |
12/05/1990 | CN1047569A Self-scanning photorectifier array single-frequency laser interference length-measuring instrument |
12/04/1990 | US4974961 Optical fibre measuring system |
11/28/1990 | EP0399683A2 Moving mirror tilt adjust mechanism in an interferometer |
11/28/1990 | EP0399004A1 Interferometry. |
11/28/1990 | EP0244470A4 Ruggedized compact interferometer requiring minimum isolation from mechanical vibrations |
11/28/1990 | EP0241512A4 A common optical path interferometric gauge |
11/27/1990 | US4973153 Method and apparatus for finding range |
11/22/1990 | EP0398781A2 Method and apparatus for low angle, high resolution surface inspection |
11/22/1990 | EP0398144A2 Fiber optic gyro |
11/22/1990 | EP0398085A1 High sensitivity position-sensing method |
11/22/1990 | EP0398062A2 Device with a measuring glass |
11/20/1990 | US4972077 Wavelength multiplexed optical transducer with a swept wavelength optical source |
11/20/1990 | US4971445 Fine surface profile measuring apparatus |
11/14/1990 | EP0397289A2 Straightness interferometer system |
11/06/1990 | US4969017 Measuring device for the measurement, in a wide range, of a non-reciprocal phase shift generated in a ring interferometer, and measuring method |
11/06/1990 | US4968118 Straight guide driving device |
11/01/1990 | WO1990013000A1 Projection/exposure device and projection/exposure method |
10/31/1990 | EP0394219A1 Optical modulation and measurement process. |
10/30/1990 | US4966459 Broadband optical detection of transient motion from a scattering surface |
10/25/1990 | DE3911474A1 Interferometer using waveguide technologies |
10/18/1990 | WO1990012279A1 Wavelength stabilization, in particular for interferometric measurement of length |
10/18/1990 | DE4012503A1 Two=beam interferometer for measuring ultra precision surfaces - has mutually inclined partially mirrored surfaces bounding output vol, lens and aperture matched to partial beam pair for separation |
10/17/1990 | CN1010055B Schlieren inteference method using pasted film for measuring substance surface displacement |
10/16/1990 | US4963724 Apparatus for producing an optical image contrast |
10/11/1990 | DE3911473A1 Wellenlaengenstabilisierung Wellenlaengenstabilisierung |
10/10/1990 | EP0222907A4 A laser based gaging system and method of using same |
10/04/1990 | WO1990011492A1 Interferometer |
10/04/1990 | WO1990011486A1 Device for counting and measuring the real length of elements |
10/04/1990 | WO1990011485A1 Light-generation device |
10/04/1990 | WO1990011484A1 Interferometer arrangement for determining the distance or the displacement path of a mobile component |
10/03/1990 | EP0390615A2 Opto-electronic measuring device |
09/26/1990 | EP0388594A2 Linear-and-angular measuring plane mirror interferometer |
09/26/1990 | EP0301048B1 Improvements relating to optical interferometers |
09/25/1990 | US4958929 Optical fiber sensor |
09/12/1990 | EP0387115A1 Procedure and device to detect and measure a physical entity |
09/11/1990 | US4955719 Interferometer with thin absorbing beam equalizing pellicle |
09/07/1990 | WO1990010195A1 Device for interferometric measurement of surface structures |
09/07/1990 | WO1990010191A1 Polarization interferometer |
09/04/1990 | US4953982 Method and apparatus for endpoint detection in a semiconductor wafer etching system |
08/23/1990 | WO1990009564A1 Process and device for detecting and measuring a physical quantity |
08/21/1990 | US4950079 Combined scale and interferometer |
08/21/1990 | US4950078 High accuracy differential plane mirror interferometer |
08/19/1990 | WO1990009557A1 Interferometry |
08/19/1990 | CA2046902A1 Interferometry |
08/14/1990 | US4948254 Light wave interference length-measuring apparatus |
08/14/1990 | US4948251 Optical heterodyne measuring apparatus |
07/26/1990 | DE3901592A1 Interference refractometer |