Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
05/1991
05/28/1991US5018862 Successive fringe detection position interferometry
05/28/1991US5018861 Methods and means for full-surface interferometric testing of grazing incidence mirrors
05/23/1991DE3938317A1 Interferometric distance measurement method - using selectable period of interferometer output signal using Echelle filter to derive spectrally filtered light
05/22/1991EP0427797A1 Polarization interferometer.
05/21/1991US5017010 High sensitivity position sensor and method
05/15/1991EP0426866A1 Projection/exposure device and projection/exposure method
05/08/1991EP0426263A2 Successive fringe detection position interferometry
05/08/1991EP0426011A1 Two-beam interferometer for use in fourier transform spectrometer and driving device for movable flat mirror of same
05/07/1991US5013152 Interchangeable interferometric optical mounting elements
04/1991
04/30/1991US5011287 Interferometer object position measuring system and device
04/18/1991WO1991005218A1 Correlation microscope
04/18/1991DE4022601A1 Optical measurer for lengths using sensor and movable reflector - has two partial mirrors on opposing surfaces of sensor with laser behind one
04/18/1991DE3932663A1 Standing wave sensor with partially transparent mirrors - has semiconducting laser with adjustable supply current and/or temp.
04/17/1991EP0422155A1 Wavelength stabilization, in particular for interferometric measurement of length.
04/17/1991EP0422143A1 Interferometer arrangement in particular for determinig the distance or the displacement path of a mobile component
04/16/1991US5007738 Interferometric test standard
04/10/1991EP0421645A2 Apparatus for and method of optical inspection in a total internal reflection holographic imaging system
04/10/1991EP0420852A1 Interferometer.
04/04/1991WO1991004460A1 Device for absolute two-dimensional position measurement
04/03/1991EP0419936A1 Process and apparatus for the phase indication of radiation, especially light radiation
04/02/1991US5004345 Dual-lens shearing interferometer
03/1991
03/27/1991EP0418344A1 Light-generation device.
03/26/1991US5002394 Fabricating interferometers having reduced misalignment problems
03/21/1991WO1991003703A1 Interferometer utilizing superfluorescent optical source
03/21/1991WO1991003702A1 Optical measuring instruments
03/21/1991DE3930554A1 Vorrichtung zur absoluten zweidimensionalen positions-messung Apparatus for absolute two-dimensional position-measurement
03/20/1991EP0417934A2 Position measuring system and positioning machine
03/19/1991US5001337 Fiber optic geophysical sensors
03/14/1991DE3930273A1 Measurement interferometer supplied with light from laser - is stimulated by laser diodes and has reference interferometer in control loop for frequency stabilisation
03/13/1991EP0416459A2 Electronic evaluation circuit for a laser interferometer
03/12/1991US4999681 Real-time halographic interferometry with a pulsed laser and flicker-free viewing
03/06/1991EP0415143A2 Interferometric measuring system
02/1991
02/28/1991DE3928001A1 Determining direction of motion during distance measurement - has single interferometer containing mirror with reflection films of different reflectivities and stepped profile
02/26/1991US4996416 Optical detection system with means for equalizing ambient light levels at multiple detectors
02/26/1991US4995726 Surface profile measuring device utilizing optical heterodyne interference
02/21/1991WO1991002214A1 Interferometry device for measuring movement
02/20/1991CN1049410A Projective type measuring instrument for measuring clearance of die set and working theory
02/12/1991US4991961 Moving mirror tilt adjust mechanism in an interferometer
02/06/1991CN1011557B Method of identifying objects
01/1991
01/23/1991EP0408747A1 Length measuring method by using laser beams
01/17/1991DE3921816A1 Dual beam interferometer with rotary mirror system - has beam splitter(s) for amplitude splitting of incident measuring beam and detectors evaluating partial beams mixed by reflectors
01/16/1991EP0407454A1 Optical measuring apparatus.
01/15/1991US4984898 Laser interferometer for interferometric length measurements including an automatic-compensating circuit
01/15/1991US4984891 Laser gauge interferometer and locating method using the same
01/10/1991WO1991000464A1 Semiconductor microactuator
01/08/1991US4983042 Monochromatic light beam
01/02/1991EP0405176A1 Caliper with an optical touch sensor
12/1990
12/25/1990US4979828 Optical
12/12/1990EP0401799A2 Length measuring apparatus
12/12/1990EP0401694A1 Interferometer device
12/12/1990EP0401576A2 Interferometric device
12/05/1990EP0400649A2 Unit conversion device for laser interferometic measuring machine
12/05/1990EP0366756A4 Broadband optical fiber laser
12/05/1990CN1047569A Self-scanning photorectifier array single-frequency laser interference length-measuring instrument
12/04/1990US4974961 Optical fibre measuring system
11/1990
11/28/1990EP0399683A2 Moving mirror tilt adjust mechanism in an interferometer
11/28/1990EP0399004A1 Interferometry.
11/28/1990EP0244470A4 Ruggedized compact interferometer requiring minimum isolation from mechanical vibrations
11/28/1990EP0241512A4 A common optical path interferometric gauge
11/27/1990US4973153 Method and apparatus for finding range
11/22/1990EP0398781A2 Method and apparatus for low angle, high resolution surface inspection
11/22/1990EP0398144A2 Fiber optic gyro
11/22/1990EP0398085A1 High sensitivity position-sensing method
11/22/1990EP0398062A2 Device with a measuring glass
11/20/1990US4972077 Wavelength multiplexed optical transducer with a swept wavelength optical source
11/20/1990US4971445 Fine surface profile measuring apparatus
11/14/1990EP0397289A2 Straightness interferometer system
11/06/1990US4969017 Measuring device for the measurement, in a wide range, of a non-reciprocal phase shift generated in a ring interferometer, and measuring method
11/06/1990US4968118 Straight guide driving device
11/01/1990WO1990013000A1 Projection/exposure device and projection/exposure method
10/1990
10/31/1990EP0394219A1 Optical modulation and measurement process.
10/30/1990US4966459 Broadband optical detection of transient motion from a scattering surface
10/25/1990DE3911474A1 Interferometer using waveguide technologies
10/18/1990WO1990012279A1 Wavelength stabilization, in particular for interferometric measurement of length
10/18/1990DE4012503A1 Two=beam interferometer for measuring ultra precision surfaces - has mutually inclined partially mirrored surfaces bounding output vol, lens and aperture matched to partial beam pair for separation
10/17/1990CN1010055B Schlieren inteference method using pasted film for measuring substance surface displacement
10/16/1990US4963724 Apparatus for producing an optical image contrast
10/11/1990DE3911473A1 Wellenlaengenstabilisierung Wellenlaengenstabilisierung
10/10/1990EP0222907A4 A laser based gaging system and method of using same
10/04/1990WO1990011492A1 Interferometer
10/04/1990WO1990011486A1 Device for counting and measuring the real length of elements
10/04/1990WO1990011485A1 Light-generation device
10/04/1990WO1990011484A1 Interferometer arrangement for determining the distance or the displacement path of a mobile component
10/03/1990EP0390615A2 Opto-electronic measuring device
09/1990
09/26/1990EP0388594A2 Linear-and-angular measuring plane mirror interferometer
09/26/1990EP0301048B1 Improvements relating to optical interferometers
09/25/1990US4958929 Optical fiber sensor
09/12/1990EP0387115A1 Procedure and device to detect and measure a physical entity
09/11/1990US4955719 Interferometer with thin absorbing beam equalizing pellicle
09/07/1990WO1990010195A1 Device for interferometric measurement of surface structures
09/07/1990WO1990010191A1 Polarization interferometer
09/04/1990US4953982 Method and apparatus for endpoint detection in a semiconductor wafer etching system
08/1990
08/23/1990WO1990009564A1 Process and device for detecting and measuring a physical quantity
08/21/1990US4950079 Combined scale and interferometer
08/21/1990US4950078 High accuracy differential plane mirror interferometer
08/19/1990WO1990009557A1 Interferometry
08/19/1990CA2046902A1 Interferometry
08/14/1990US4948254 Light wave interference length-measuring apparatus
08/14/1990US4948251 Optical heterodyne measuring apparatus
07/1990
07/26/1990DE3901592A1 Interference refractometer