Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
06/1993
06/16/1993EP0546067A1 Interferometer.
06/15/1993US5220406 Sample point interferometer having separate rigid body and figure measurement channels
06/15/1993US5220405 Interferometer for in situ measurement of thin film thickness changes
06/09/1993EP0545519A2 Non-contact measuring method for step difference and device therefor
06/09/1993EP0545405A2 Rotary detector
06/09/1993EP0526547A4 Interferometry systems and methods
06/09/1993EP0489847A4 Interferometer utilizing superfluorescent optical source
06/09/1993DE4139839A1 Measuring beat frequency variations between two single mode lasers for distance measurement - sweeping wavelength of at least one laser and measuring and evaluating resulting phase angle change
06/08/1993US5218424 Flying height and topography measuring interferometer
06/08/1993US5218423 Method and apparatus for generating a plurality of radiation beams from incident radiation in a multiple wavelength interferometer
06/08/1993US5218418 Differential fiber optic sensor and method
06/03/1993DE4139654A1 Contactless determination of centre dimensions of gauge block - using interferometer and calculating offset between light intensities of interference fringes of gauge block and slide plate
06/01/1993US5216527 Holographic collation
05/1993
05/26/1993EP0420852B1 Interferometer
05/18/1993US5212748 Fiber optic mixer and spectrometer
05/13/1993WO1993009395A1 Process for measuring the inclination of boundary areas in an optical system
05/13/1993WO1993009394A1 Measuring instruments
05/12/1993EP0439534A4 Photon scanning tunneling microscopy
05/11/1993US5210591 Interferometric ball bearing test station
05/06/1993DE4135959A1 Verfahren zur messung der neigungen von grenzflaechen in einem optischen system A method for measuring the inclinations of boundary surfaces in an optical system
05/05/1993EP0539877A1 Optical fiber having internal partial mirrors
05/05/1993EP0539757A1 Optical type encoder
05/05/1993EP0539609A1 Projection inspecting machine
05/05/1993EP0539571A1 Dynamic shearing interferometer
05/05/1993CN1020504C Holographic measuring material testing machine
05/04/1993US5208451 Method and apparatus for automated focusing of an interferometric optical system
04/1993
04/29/1993WO1993008445A1 Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
04/27/1993US5206924 Fiber optic Michelson sensor and arrays with passive elimination of polarization fading and source feedback isolation
04/22/1993DE4134481A1 Operation microscope for computerised, stereo-tactile microsurgery - contains optical system data detectors, integral position detection system and process controller
04/20/1993CA1316367C Interferometer for measuring optical phase differences
04/15/1993WO1993007442A1 Two-beam interferometer apparatus and method and spectrometer utilizing the same
04/14/1993EP0536655A1 Measuring method and measuring apparatus
04/13/1993US5202939 Fabry-perot optical sensing device for measuring a physical parameter
04/13/1993US5202745 For measuring an optical parameter of a device under test
04/08/1993DE4208189A1 Laser interferometer calibration system using direct comparison - using laser interferometer used as standard and arrangement of triple reflectors including displaceable common triple reflector
04/06/1993US5200797 Device for measuring the angle of rotation or of the angular position of a rotating object
04/06/1993US5200796 Method and apparatus for detecting and measuring a physical magnitude
04/01/1993DE4132113A1 Strain measurement pick=up for weighing appts. - operates on interferometer principle, and amplifies change in optical guide length by multiple reflections of beam
03/1993
03/31/1993EP0534795A2 Method and apparatus for producing multiple light beams in a multiple wavelength interferometer
03/31/1993EP0534613A1 Device for supporting and linearly moving an object
03/23/1993US5196903 Pulsed light source spectrometer with interferometer
03/23/1993US5196902 Two-beam interferometer apparatus and method, and spectrometer utilizing the same
03/16/1993US5194918 Method of providing images of surfaces with a correlation microscope by transforming interference signals
03/16/1993US5194907 Displacement detecting apparatus
03/09/1993US5192982 Coded-fringe interferometric method and device for wavefront detection in optics
03/03/1993CN1069569A Positional measurement
03/02/1993US5191391 High resolution plane mirror interferometer
02/1993
02/23/1993US5189489 Interferometric measurement device with non stabilized light source
02/17/1993EP0527128A1 Two axis plane mirror interferometer
02/16/1993US5187545 Integrated optical position measuring device and method with reference and measurement signals
02/16/1993US5187543 Differential displacement measuring interferometer
02/11/1993DE4126381A1 Mobile land mine identification equipment - transmits vibrations to ground and has photographing appts. working with holographic interferometry
02/10/1993EP0526547A1 Interferometry systems and methods.
02/10/1993EP0333822B1 Optical devices for interferometric measuring systems
02/09/1993US5185749 Large signal three-level superfluorescent fiber sources
02/03/1993EP0526292A1 System for the recording of a series of holograms
02/03/1993EP0526291A1 Three-dimensional displacement measurement by means of holography
02/03/1993EP0526075A2 Interferometric ball bearing test station
02/03/1993EP0407454B1 Optical measuring apparatus
02/02/1993US5184313 Conversion device for laser interferometic measuring apparatus
02/02/1993US5184021 Method and apparatus for measuring the dimensions of patterned features on a lithographic photomask
02/02/1993CA1313404C Broadband optical fiber laser
01/1993
01/28/1993DE4124223A1 Interferogram evaluation method with coherent noise effect suppression - producing phase plot from interferogram, shifting components, taking further plot and recording using coherent light
01/26/1993US5182612 Method of measurement of an angle of incidence of a luminous beam, measuring device for carrying out the method and use of the device for the measurement of distances
01/13/1993EP0522557A1 Optical heterodyne measuring method and apparatus
01/07/1993EP0422155B1 Wavelength stabilization, in particular for interferometric measurement of length
01/05/1993US5177566 Interferometer with environment sensitive static etalon
01/05/1993US5177562 Stability compensated broadband source and fiber interferometer
12/1992
12/30/1992EP0520395A1 Optical heterodyne interference apparatus
12/22/1992US5173744 Refractively scanned interferometer
12/16/1992EP0517781A1 Interferometer to determine the position of or distance travelled by a movable measuring mirror or the like.
12/15/1992US5172186 Laser interferometry length measuring an apparatus employing a beam slitter
12/15/1992US5172185 Device for determining or stabilizing the wavelength of laser light in a gaseous ambient medium
12/10/1992WO1992021934A1 Positional measurement
12/09/1992CN1019416B Self-scanning photorectiifier array single-frequency laser interference length measuring method and measuring instrument
12/08/1992US5170219 Optical heterodyne interference detecting apparatus for measuring displacement characteristic of workpiece
12/08/1992US5170217 Object measuring apparatus using lightwave interference
11/1992
11/26/1992WO1992021057A1 Projection inspecting machine
11/26/1992WO1992020991A1 Dynamic shearing interferometer
11/25/1992EP0514579A1 A heterodyne interferometer arrangement
11/24/1992US5166751 For measuring distance changes
11/24/1992US5166749 Step scanning technique for interferometer
11/24/1992US5166742 Optical deformation measuring apparatus by double-writing speckle images into a spatial light modulator
11/23/1992WO1992021072A1 Step scanning technique for interferometer
11/22/1992WO1992020990A1 Interferometric measuring device in integrated optics
11/22/1992CA2102593A1 Interferometric device for determining the characteristics of an integrated optics object
11/19/1992EP0513305A1 Apparatus for the measurement of surface shape.
11/18/1992CN1019145B Multi-way reused laser frequency modulation heterodyne interference optical fiber measuring instrument
11/17/1992US5164794 Optical reticle inspection system and method
11/17/1992US5164792 Movement measuring interferometer and driving system
11/17/1992US5164791 Minute displacement detector using optical interferometry
11/17/1992US5164789 Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference
11/12/1992WO1992019930A1 Method and apparatus for optical imaging and measurement
11/11/1992EP0512918A1 Device for measuring the refractive index of a fluid
11/11/1992EP0512450A2 Wavelength variation measuring apparatus
11/10/1992US5162872 Tilt/shear immune tunable fabry-perot interferometer
11/10/1992US5162869 Apparatus and method having at least one waveguide coupler to create at least two signals having a mutual phase shift not equal to 180 degrees
11/10/1992US5162648 Confocal scanning interference microscope using reference beam
11/08/1992CA2068112A1 Measuring instrument of the index of refraction of a fluid
11/05/1992DE4114407A1 Determining and fixing wavelength in air of light source - using control loop with many-valued characteristic with defined steps and evaluating thermodynamic parameters to eliminate ambiguity