Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862) |
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11/11/1999 | WO1999057509A1 Instrument for measuring film thickness, and method and apparatus for wafer processing |
11/11/1999 | WO1999057508A1 Device for measuring structures on a transparent substrate |
11/11/1999 | WO1999038033A9 General asphere-conic conformal optical windows |
11/11/1999 | DE19839830A1 Precision optical distance measuring method e.g. for contactless measurement of 3-dimensional objects |
11/11/1999 | DE19822129A1 Precision alignment measuring device and method e.g. for detecting straightness deviation of machine bed |
11/11/1999 | DE19820630A1 Position detection device for rotating object e.g. shaft of electronic copier, recorder, or imagesetter |
11/11/1999 | DE19819755A1 Workpiece surface characteristic detection method, e.g. for measuring surface characteristics of automobile paint finish |
11/11/1999 | DE19819492A1 Meßgerät zur Vermessung von Strukturen auf einem transparenten Substrat Measuring device for measuring structures on a transparent substrate |
11/10/1999 | EP0955621A2 Optical fiber seal verifying system |
11/10/1999 | EP0955605A1 Object position estimation method using digital image processing |
11/10/1999 | EP0955537A2 System for surface inspection |
11/10/1999 | EP0954773A1 Method and device for docking an autonomous mobile unit |
11/10/1999 | EP0830564A4 Spectral bio-imaging methods for biological research, medical diagnostics and therapy |
11/10/1999 | EP0809926B1 Component placement machine |
11/10/1999 | EP0753130B1 Embedded optical sensor capable of strain and temperature measurement using a single diffraction grating |
11/10/1999 | CN1234498A Apparatus for generating origin signal of optical linear scale |
11/10/1999 | CN1234497A Laser detection method and apparatus for lower flexibility of main girder of crane |
11/10/1999 | CN1234364A Protective system of refraining from obstacle and preventing from cracked for support feet of chassis |
11/09/1999 | US5983167 Disc dishing measurement method and apparatus |
11/09/1999 | US5983166 Structure measurement system |
11/09/1999 | US5982922 Pattern inspection apparatus and method |
11/09/1999 | US5982919 Image processor having object recognition ability |
11/09/1999 | US5982496 Thin film thickness and optimal focus measuring using reflectivity |
11/09/1999 | US5982494 Non-contact position sensor |
11/09/1999 | US5982492 Method of and apparatus for determining the center of a generally circular workpiece relative to a rotation axis of the workpiece |
11/09/1999 | US5982491 Method and apparatus measuring edges on a workpiece |
11/09/1999 | US5982490 Apparatus and method for wavefront absolute calibration and method of synthesizing wavefronts |
11/09/1999 | US5982489 Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams |
11/09/1999 | US5982485 Determination of interface adsorption |
11/09/1999 | US5982483 Process and device for high-definition measurement of intervals in the focused image produced by a lens-aperture diaphragm system |
11/09/1999 | US5982481 Alignment system and method for dish concentrators |
11/09/1999 | US5982479 Method for calibrating a tilt inspection system and reference disk assembly for use therein |
11/09/1999 | US5982378 System and method for modeling a three dimensional object |
11/09/1999 | US5981965 Method and apparatus for electro-optically determining the dimension, location and attitude of objects |
11/09/1999 | CA2035114C Light scanning system for measurement of orientation and physical features of a workpiece |
11/04/1999 | WO1999056113A1 A system and method for inspecting semiconductor wafers |
11/04/1999 | WO1999056078A1 Endpoint detection in chemical mechanical polishing (cmp) by substrate holder elevation detection |
11/04/1999 | WO1999056077A1 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure. |
11/04/1999 | WO1999056076A1 Contactless measurement of wall thickness |
11/04/1999 | WO1999056075A1 Inspection system and method for leads of semiconductor devices |
11/04/1999 | WO1999055216A2 Optical tracking device |
11/04/1999 | DE19911896A1 Optical device for testing surface condition |
11/04/1999 | DE19818190A1 Verfahren und Vorrichtung zur berührungslosen Messung der Wanddicke Method and device for contactless measurement of the wall thickness |
11/04/1999 | DE19817714A1 Verfahren zur Messung der Lage von Strukturen auf einer Maskenoberfläche Method for measuring the position of structures on a mask surface |
11/04/1999 | DE19817664A1 Surface roughness measuring method |
11/04/1999 | DE19814056A1 Optical parameter measuring device e.g. for optical layer absolute thickness and refractive index measurement |
11/03/1999 | EP0953836A2 Surface plasmon sensor |
11/03/1999 | EP0953138A1 Device for determining the point of impact of darts on a practice target |
11/03/1999 | EP0883792A4 Optical inspection apparatus and method for articles |
11/03/1999 | EP0879400A4 Multiple field of view calibration plate for use in semiconductor manufacturing |
11/03/1999 | EP0832417A4 Method for simultaneous detection of multiple fluorophores for in situ hybridization and chromosome painting |
11/03/1999 | EP0830566A4 Light beam range finder |
11/03/1999 | EP0775364A4 Fiber optic sensor method and device |
11/03/1999 | EP0578816B1 Method of inspecting articles |
11/03/1999 | CN1233747A Measuring sidewall thickness of glass containers |
11/03/1999 | CN1233745A Measuring device for saw blades |
11/02/1999 | US5978696 Real-time image-guided placement of anchor devices |
11/02/1999 | US5978521 Machine vision methods using feedback to determine calibration locations of multiple cameras that image a common object |
11/02/1999 | US5978504 Fast planar segmentation of range data for mobile robots |
11/02/1999 | US5978503 Method for recognizing corners of an angular component |
11/02/1999 | US5978094 Alignment device and method based on imaging characteristics of the image pickup system |
11/02/1999 | US5978092 Peripheral viewing optical scanner for three dimensional surface measurement |
11/02/1999 | US5978091 Laser-bump sensor method and apparatus |
11/02/1999 | US5978090 Method and arrangement for optical inspection of a weld seam |
11/02/1999 | US5978089 Non-contact method for measuring the shape of an object |
11/02/1999 | US5978088 Flaw highlighting light panel lens |
11/02/1999 | US5978081 Multiple field of view calibration plate for use in semiconductor manufacturing |
11/02/1999 | US5978080 Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view |
11/02/1999 | US5978079 Method of controlling the endfill of tobacco articles |
11/02/1999 | US5978077 Non-contact method and apparatus for determining camber and caster of a vehicle wheel |
11/02/1999 | US5978074 Apparatus for evaluating metalized layers on semiconductors |
11/02/1999 | US5978053 Characterization of collimation and beam alignment |
11/02/1999 | US5977544 Uncooled infrared photon detector and multicolor infrared detection using microoptomechanical sensors |
11/02/1999 | US5976287 Method and apparatus of stud array upstand setting |
11/02/1999 | US5975744 Real-time compensation system and method |
11/02/1999 | US5975700 Device for the topographical measurement of a surface of a human eye |
11/02/1999 | US5974896 Structural deflection measurement |
10/28/1999 | WO1999054926A1 Improved endpoint detection for semiconductor processes |
10/28/1999 | WO1999054924A1 Apparatus and method for measuring thickness of thin film and method and apparatus for manufacturing thin film device using the same |
10/28/1999 | WO1999054785A1 Method for measuring the position of structures on a surface of a mask |
10/28/1999 | WO1999054679A1 Non-destructive analysis of a semiconductor using reflectance spectrometry |
10/28/1999 | WO1999054678A1 Position sensor |
10/28/1999 | DE19918404A1 Height sensor for arrangement for adjusting the beam axis of motor vehicle headlamp |
10/28/1999 | DE19818405A1 Method of detecting geometric deviations in at least one axis of co-ordinate measurement arrangement |
10/28/1999 | DE19818341A1 Interferometer for measuring aspherical lenses |
10/28/1999 | DE19817709A1 Crystal diameter determination equipment for Czochralski growth process |
10/28/1999 | DE19812609A1 Verfahren zur Bestimmung der Position und Drehlage eines Objektes A method for determining the position and rotational position of an object |
10/28/1999 | DE19811459C1 Messvorrichtung für Sägeblätter Measuring device for saw blades |
10/28/1999 | CA2328624A1 Non-destructive analysis of a semiconductor using reflectance spectrometry |
10/27/1999 | EP0952548A2 Method and apparatus for multi-level rounding and pattern inspection |
10/27/1999 | EP0952442A2 Visual inspection apparatus and method |
10/27/1999 | EP0951967A1 Test gauge for measuring the positional and track precisionof a moving machine part |
10/27/1999 | EP0951696A1 Method and arrangement for determining the position of an object |
10/27/1999 | CN2345948Y Digit displacement transducer |
10/27/1999 | CN1233323A Method and device for determining the phase-and/or amplitude data of an electromagnetic wave |
10/27/1999 | CN1233093A Displacement self-sensing helium-neon laser system and its embodiment method |
10/26/1999 | US5974365 System for measuring the location and orientation of an object |
10/26/1999 | US5974162 Device for forming and detecting fingerprint images with valley and ridge structure |
10/26/1999 | US5973788 System for point-by-point measuring of spatial coordinates |
10/26/1999 | US5973787 Broadband spectroscopic rotating compensator ellipsometer |