Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
11/1999
11/11/1999WO1999057509A1 Instrument for measuring film thickness, and method and apparatus for wafer processing
11/11/1999WO1999057508A1 Device for measuring structures on a transparent substrate
11/11/1999WO1999038033A9 General asphere-conic conformal optical windows
11/11/1999DE19839830A1 Precision optical distance measuring method e.g. for contactless measurement of 3-dimensional objects
11/11/1999DE19822129A1 Precision alignment measuring device and method e.g. for detecting straightness deviation of machine bed
11/11/1999DE19820630A1 Position detection device for rotating object e.g. shaft of electronic copier, recorder, or imagesetter
11/11/1999DE19819755A1 Workpiece surface characteristic detection method, e.g. for measuring surface characteristics of automobile paint finish
11/11/1999DE19819492A1 Meßgerät zur Vermessung von Strukturen auf einem transparenten Substrat Measuring device for measuring structures on a transparent substrate
11/10/1999EP0955621A2 Optical fiber seal verifying system
11/10/1999EP0955605A1 Object position estimation method using digital image processing
11/10/1999EP0955537A2 System for surface inspection
11/10/1999EP0954773A1 Method and device for docking an autonomous mobile unit
11/10/1999EP0830564A4 Spectral bio-imaging methods for biological research, medical diagnostics and therapy
11/10/1999EP0809926B1 Component placement machine
11/10/1999EP0753130B1 Embedded optical sensor capable of strain and temperature measurement using a single diffraction grating
11/10/1999CN1234498A Apparatus for generating origin signal of optical linear scale
11/10/1999CN1234497A Laser detection method and apparatus for lower flexibility of main girder of crane
11/10/1999CN1234364A Protective system of refraining from obstacle and preventing from cracked for support feet of chassis
11/09/1999US5983167 Disc dishing measurement method and apparatus
11/09/1999US5983166 Structure measurement system
11/09/1999US5982922 Pattern inspection apparatus and method
11/09/1999US5982919 Image processor having object recognition ability
11/09/1999US5982496 Thin film thickness and optimal focus measuring using reflectivity
11/09/1999US5982494 Non-contact position sensor
11/09/1999US5982492 Method of and apparatus for determining the center of a generally circular workpiece relative to a rotation axis of the workpiece
11/09/1999US5982491 Method and apparatus measuring edges on a workpiece
11/09/1999US5982490 Apparatus and method for wavefront absolute calibration and method of synthesizing wavefronts
11/09/1999US5982489 Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams
11/09/1999US5982485 Determination of interface adsorption
11/09/1999US5982483 Process and device for high-definition measurement of intervals in the focused image produced by a lens-aperture diaphragm system
11/09/1999US5982481 Alignment system and method for dish concentrators
11/09/1999US5982479 Method for calibrating a tilt inspection system and reference disk assembly for use therein
11/09/1999US5982378 System and method for modeling a three dimensional object
11/09/1999US5981965 Method and apparatus for electro-optically determining the dimension, location and attitude of objects
11/09/1999CA2035114C Light scanning system for measurement of orientation and physical features of a workpiece
11/04/1999WO1999056113A1 A system and method for inspecting semiconductor wafers
11/04/1999WO1999056078A1 Endpoint detection in chemical mechanical polishing (cmp) by substrate holder elevation detection
11/04/1999WO1999056077A1 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure.
11/04/1999WO1999056076A1 Contactless measurement of wall thickness
11/04/1999WO1999056075A1 Inspection system and method for leads of semiconductor devices
11/04/1999WO1999055216A2 Optical tracking device
11/04/1999DE19911896A1 Optical device for testing surface condition
11/04/1999DE19818190A1 Verfahren und Vorrichtung zur berührungslosen Messung der Wanddicke Method and device for contactless measurement of the wall thickness
11/04/1999DE19817714A1 Verfahren zur Messung der Lage von Strukturen auf einer Maskenoberfläche Method for measuring the position of structures on a mask surface
11/04/1999DE19817664A1 Surface roughness measuring method
11/04/1999DE19814056A1 Optical parameter measuring device e.g. for optical layer absolute thickness and refractive index measurement
11/03/1999EP0953836A2 Surface plasmon sensor
11/03/1999EP0953138A1 Device for determining the point of impact of darts on a practice target
11/03/1999EP0883792A4 Optical inspection apparatus and method for articles
11/03/1999EP0879400A4 Multiple field of view calibration plate for use in semiconductor manufacturing
11/03/1999EP0832417A4 Method for simultaneous detection of multiple fluorophores for in situ hybridization and chromosome painting
11/03/1999EP0830566A4 Light beam range finder
11/03/1999EP0775364A4 Fiber optic sensor method and device
11/03/1999EP0578816B1 Method of inspecting articles
11/03/1999CN1233747A Measuring sidewall thickness of glass containers
11/03/1999CN1233745A Measuring device for saw blades
11/02/1999US5978696 Real-time image-guided placement of anchor devices
11/02/1999US5978521 Machine vision methods using feedback to determine calibration locations of multiple cameras that image a common object
11/02/1999US5978504 Fast planar segmentation of range data for mobile robots
11/02/1999US5978503 Method for recognizing corners of an angular component
11/02/1999US5978094 Alignment device and method based on imaging characteristics of the image pickup system
11/02/1999US5978092 Peripheral viewing optical scanner for three dimensional surface measurement
11/02/1999US5978091 Laser-bump sensor method and apparatus
11/02/1999US5978090 Method and arrangement for optical inspection of a weld seam
11/02/1999US5978089 Non-contact method for measuring the shape of an object
11/02/1999US5978088 Flaw highlighting light panel lens
11/02/1999US5978081 Multiple field of view calibration plate for use in semiconductor manufacturing
11/02/1999US5978080 Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view
11/02/1999US5978079 Method of controlling the endfill of tobacco articles
11/02/1999US5978077 Non-contact method and apparatus for determining camber and caster of a vehicle wheel
11/02/1999US5978074 Apparatus for evaluating metalized layers on semiconductors
11/02/1999US5978053 Characterization of collimation and beam alignment
11/02/1999US5977544 Uncooled infrared photon detector and multicolor infrared detection using microoptomechanical sensors
11/02/1999US5976287 Method and apparatus of stud array upstand setting
11/02/1999US5975744 Real-time compensation system and method
11/02/1999US5975700 Device for the topographical measurement of a surface of a human eye
11/02/1999US5974896 Structural deflection measurement
10/1999
10/28/1999WO1999054926A1 Improved endpoint detection for semiconductor processes
10/28/1999WO1999054924A1 Apparatus and method for measuring thickness of thin film and method and apparatus for manufacturing thin film device using the same
10/28/1999WO1999054785A1 Method for measuring the position of structures on a surface of a mask
10/28/1999WO1999054679A1 Non-destructive analysis of a semiconductor using reflectance spectrometry
10/28/1999WO1999054678A1 Position sensor
10/28/1999DE19918404A1 Height sensor for arrangement for adjusting the beam axis of motor vehicle headlamp
10/28/1999DE19818405A1 Method of detecting geometric deviations in at least one axis of co-ordinate measurement arrangement
10/28/1999DE19818341A1 Interferometer for measuring aspherical lenses
10/28/1999DE19817709A1 Crystal diameter determination equipment for Czochralski growth process
10/28/1999DE19812609A1 Verfahren zur Bestimmung der Position und Drehlage eines Objektes A method for determining the position and rotational position of an object
10/28/1999DE19811459C1 Messvorrichtung für Sägeblätter Measuring device for saw blades
10/28/1999CA2328624A1 Non-destructive analysis of a semiconductor using reflectance spectrometry
10/27/1999EP0952548A2 Method and apparatus for multi-level rounding and pattern inspection
10/27/1999EP0952442A2 Visual inspection apparatus and method
10/27/1999EP0951967A1 Test gauge for measuring the positional and track precisionof a moving machine part
10/27/1999EP0951696A1 Method and arrangement for determining the position of an object
10/27/1999CN2345948Y Digit displacement transducer
10/27/1999CN1233323A Method and device for determining the phase-and/or amplitude data of an electromagnetic wave
10/27/1999CN1233093A Displacement self-sensing helium-neon laser system and its embodiment method
10/26/1999US5974365 System for measuring the location and orientation of an object
10/26/1999US5974162 Device for forming and detecting fingerprint images with valley and ridge structure
10/26/1999US5973788 System for point-by-point measuring of spatial coordinates
10/26/1999US5973787 Broadband spectroscopic rotating compensator ellipsometer