Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
09/2001
09/06/2001US20010019103 Optical fiber sensor
09/06/2001DE19955268C2 Verfahren und Vorrichtung zur interferometrischen Untersuchung streuender Objekte Method and apparatus for interferometric investigation of scattering objects
09/06/2001DE10106565A1 Point diffraction interferometer is used in the manufacture of very high tolerance reflex mirrors and as an aid in projection alignment, with a pinhole mirror for beam bundling and splitting off a reference beam
09/06/2001DE10033189C1 Low-coherence interferometry device has short coherence interferometer with scanning objective and beam splitter moved in synchronism during depth scanning of object
09/06/2001DE10010791A1 Electronic speckle shearing interferometry based on use of fine-structured refracting optical elements for splitting the wave from the test object into two phase shifted waves, with only minimal adjustment required
09/06/2001DE10010655A1 Process to determine elongation condition of elastic fabric or partially transparent film uses radiation
09/05/2001EP1130626A2 Method and apparatus for manufacturing semiconductor device
09/05/2001EP1130384A1 Inspecting machine
09/05/2001EP1129944A1 State of a moving body ( docking, rendezvous ) with three retro reflectors and state observer ( Luenberger )
09/05/2001EP1129478A1 Method and apparatus for improving accuracy of plasma etching process
09/05/2001EP1129383A1 Method and apparatus for determining optical distance
09/05/2001EP1129338A1 Method and apparatus for mapping surface topography of a substrate
09/05/2001EP1129322A1 Method for determining the thickness of a multi-thin-layer structure
09/05/2001EP1128761A1 A method and an apparatus for the simultaneous determination of surface topometry and biometry of the eye
09/05/2001CN1070607C Position sensor set with light-beam generator capable of covering wide detecting range
09/05/2001CN1070444C Method and device for monitoring blanks or revenue seals for cigarette packages
09/04/2001US6285959 Method and apparatus for calibrating a non-contact gauging sensor with respect to an external coordinate system
09/04/2001US6285787 Image pickup and processing device and method thereof
09/04/2001US6285783 Pattern data generating apparatus and method for inspecting defects in fine patterns in a photomask or semiconductor wafer
09/04/2001US6285782 Mounting apparatus, recognition device and recognition method for electronic component
09/04/2001US6285457 Exposure apparatus and device manufacturing method including measuring position and/or displacement of each of a base and a stage with respect to a support
09/04/2001US6285456 Dimension measurement using both coherent and white light interferometers
09/04/2001US6285451 Noncontacting optical method for determining thickness and related apparatus
09/04/2001US6285447 Method for increasing the signal-to-noise ratio in non-destructive testing
09/04/2001US6285446 Distributed sensing system
09/04/2001US6285444 Positioning system and position measuring method for use in exposure apparatus
09/04/2001US6285034 Inspection system for flanged bolts
09/04/2001US6285033 Positional deviation detecting method and device manufacturing method using the same
09/04/2001US6285023 Apparatus for generating origin signal of optical linear scale
09/04/2001US6284552 Method and apparatus for evaluating surface roughness of an epitaxial growth layer, method and apparatus for measuring reflectance of an epitaxial growth layer, and manufacturing method of semiconductor device
08/2001
08/30/2001WO2001063201A2 Optical endpoint detection system for chemical mechanical polishing
08/30/2001WO2001062525A1 Method and system for monitoring the deformations of a tyre in motion
08/30/2001US20010017939 Position detecting method, position detecting apparatus, exposure method, exposure apparatus and making method thereof, computer readable recording medium and device manufacturing method
08/30/2001US20010017699 Method and measuring device for measuring a rotary tool
08/30/2001US20010017698 Reflectance method for evaluating the surface characteristics of opaque materials
08/30/2001US20010017696 Rangefinder
08/30/2001US20010017695 Method and apparatus for evaluating semiconductor film, and method for producing the semiconductor film
08/30/2001US20010017349 Position measuring system
08/30/2001US20010017346 Device and method for automatically milking cows
08/30/2001DE10060974A1 Vorrichtung und Verfahren zum Vermessen von Parallelität und fluchtender Lage von Walzen Apparatus and method for measuring parallelism and aligned position of rollers
08/30/2001DE10031410A1 Verfahren zur Mengenermittlung von Industrieholzsortimenten A method for determining amount of industrial wood assortments
08/30/2001DE10008202A1 Flexural strength testing unit for mast, includes two laser sources mounted on mast and focused towards light receiver at top end of mast
08/29/2001EP1128666A2 Object monitoring apparatus
08/29/2001EP1128377A1 A method and apparatus for measuring the cartridge magazine insertion distance with a barcode reader
08/29/2001EP1128179A2 Method of identifying substantially defect-free workpieces
08/29/2001EP1128160A1 Device controlling the state of a surface
08/29/2001EP1127633A1 Method and apparatus for measuring angle of bend, method of bending, and apparatus for controlling angle of bend
08/29/2001EP1127329A1 System and method for arithmetic operations for electronic package inspection
08/29/2001EP1127251A1 Method and device for the colorimetric measurement of a coloured surface
08/29/2001EP1127246A1 Optical measuring device
08/29/2001EP1127245A1 Device for determining the spatial co-ordinates of objects
08/29/2001EP1127244A1 Inspection system for flanged bolts
08/29/2001EP0808410B1 Apparatus for determining the curvature of an elongated hole, such as a drill hole, in rock for instance
08/29/2001EP0533891B1 Method for identifying individuals from analysis of elemental shapes derived from biosensor data
08/29/2001CN1310333A Electronic holographic measurement method without direct transmission light and conjugate image
08/28/2001US6282317 Method for automatic determination of main subjects in photographic images
08/28/2001US6282011 Grating based phase control optical delay line
08/28/2001US6281974 Method and apparatus for measurements of patterned structures
08/28/2001US6281968 Laser distance-measuring instrument for large measuring ranges
08/28/2001US6281679 Web thickness measurement system
08/28/2001US6281027 Spatial averaging technique for ellipsometry and reflectometry
08/28/2001US6280290 Method of forming a transparent window in a polishing pad
08/28/2001US6280289 Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
08/28/2001US6279579 Method and system for positioning patients for medical treatment procedures
08/28/2001US6279404 Device and method for measuring deformation of a mechanical test specimen
08/28/2001US6279246 Device and method for determining the position of a point
08/23/2001WO2001061371A2 Device for detecting the presence of objects
08/23/2001WO2001061323A1 Instrument for measuring physical property of sample
08/23/2001WO2001061322A1 Instrument for measuring physical property of sample
08/23/2001WO2001061321A1 Instrument for measuring physical property of sample
08/23/2001WO2001061318A1 Optical interference tomographic image observing apparatus
08/23/2001WO2001061280A1 Coded disc for an optoelectronic displacement or angle measuring device
08/23/2001WO2001061278A1 Telemetric equipment for two-dimensional or three-dimensional cartography of a volume
08/23/2001WO2001061275A1 Method and system for automatically generating reference height data for use in a three-dimensional inspection system
08/23/2001WO2001060718A2 Bulk materials management apparatus and method
08/23/2001WO2001060695A1 System and method for check-weighing the content of a blister
08/23/2001WO2001060662A1 Method and device for detecting seat occupancy by means of a video sensor system and foot room system
08/23/2001US20010016786 Tool position measurement method, offset measurement method, reference member and bonding apparatus
08/23/2001US20010016363 Method for monitoring the shape of the processed surfaces of semiconductor devices and equipment for manufacturing the semiconductor devices
08/23/2001US20010016293 Method for positioning substrate
08/23/2001US20010016070 Object extraction device, object extraction method, and recording media for storing an object extraction program
08/23/2001US20010016062 Bonding apparatus and bonding method
08/23/2001US20010015801 Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device
08/23/2001US20010015763 Object monitoring apparatus
08/23/2001US20010015414 Method and arrangement for inspection of surfaces
08/23/2001US20010015410 Inspection apparatus and method
08/23/2001US20010015142 Method for measuring engraving cups
08/23/2001DE10006663A1 Surface structure recognition involves irradiating infrared pattern to test item, and analyzing reflection of infrared pattern received from test item by infrared camera
08/23/2001DE10006083A1 Detecting layer thicknesses involves setting angle of incidence/frequency of electromagnetic radiation to produce surface plasmon resonance in metal layer
08/23/2001DE10005852A1 Verfahren und Vorrichtung zur Herstellung von Höhenbildern technischer Oberflächen in mikroskopischer Auflösung Method and apparatus for producing height images of technical surfaces with microscopic resolution
08/23/2001CA2402379A1 Bulk materials management apparatus and method
08/23/2001CA2400676A1 Telemetric equipment for two-dimensional or three-dimensional cartography of a volume
08/22/2001EP1126278A2 Devices and methods for detection of an analyte based upon light interference
08/22/2001EP1125249A2 Improved methods and apparatus for 3-d imaging
08/22/2001EP1125155A1 Telescope system having an intelligent motor controller
08/22/2001EP1125114A1 Glass inspection system
08/22/2001EP1125113A1 Method and apparatus for improved defect detection
08/22/2001EP1125096A1 Method of and device for determining the warpage of a wafer
08/22/2001EP1125095A1 Interferometers for optical coherence domain reflectometry and optical coherence tomography using nonreciprocal optical elements
08/22/2001EP1053448A4 Method and apparatus for making absolute range measurements