Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
07/2001
07/12/2001WO2001050111A1 Method and apparatus for measuring diameter and distribution of micro bubble and micro liquid drop and optical system for measuring diameter and distribution of micro bubble and micro liquid drop
07/12/2001WO2001050085A1 Method and system for optical distance and angle measurement
07/12/2001WO2001050084A1 Specimen topography reconstruction
07/12/2001WO2001050082A1 Device and method for alignment of components
07/12/2001WO2001008547A3 Hydration and topography measurements for laser sculpting
07/12/2001WO1999022199A3 Fabricating optical waveguide gratings and/or characterising optical waveguides
07/12/2001US20010007734 Position detecting method, position detecting unit, exposure method, exposure apparatus, a computer readable recording medium, and device manufacturing method
07/12/2001US20010007502 Optical system for oblique incidence interferometer and apparatus using the same
07/12/2001US20010007498 Semiconductor wafer inspection machine
07/12/2001US20010007347 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe
07/12/2001DE19963333A1 Verfahren zur Ermittlung von dreidimensionalen Oberflächenkoordinaten Method for determining three-dimensional surface coordinates
07/12/2001DE19942477C2 Lenkwinkelsensor Steering angle sensor
07/12/2001DE19913872C2 Sensor mit Ausfallüberwachungssystem Sensor failure monitoring system
07/12/2001DE10064037A1 Interference fringe pattern analyzing procedure involves applying Fourier transformation to polar coordinate converted image data for shape analysis and converting analyzed result to rectangular coordinate
07/12/2001DE10055030A1 Method to measure cups when engraving printing form of electronic engraving machine, involves taking video image of engraved cup, smoothing image and measuring cup contour
07/12/2001DE10032226A1 Device for contactless measurement of internal dimensions of workpiece employs light beam system
07/12/2001DE10000491A1 Tool edge contour measuring method e.g. for rotary cutting tool, involves selecting one frame of image using computer by frame grabbing with regard to image parameter and evaluating selected image
07/12/2001CA2395982A1 Method and system for optical distance and angle measurement
07/11/2001EP1115107A2 Optical information recording medium and method of manufacturing same
07/11/2001EP1114993A2 Method and arrangement for inspection of surfaces
07/11/2001EP1114979A1 Uncoupled wafer inclination measurement with an ellipsometer with spectral photometer and measurement of focus by a reflecting objective
07/11/2001EP1114393A1 Spectral bio-imaging data for cell classification using internal reference
07/11/2001EP1114294A1 System for measuring the surface geometry and surface evenness of flat products
07/11/2001EP1113930A1 Engraving system and method comprising improved imaging
07/11/2001CN2439014Y Non-contact three-dimensional measuring instrument
07/11/2001CN1302999A Method for reconstructing 3D contour of digital projection based on phase-shifting method
07/11/2001CN1302740A Corner sensor for rotor, especially for motor vehicle wheel ready to balance
07/11/2001CN1068433C Improved position coder
07/10/2001US6260001 Process and apparatus for measuring the volume of an object by means of a laser scanner
07/10/2001US6259531 Displacement information measuring apparatus with hyperbolic diffraction grating
07/10/2001US6259530 Method and device for measuring the depths of bottoms of craters in a physico-chemical analyzer
07/10/2001US6259519 Method of determining the planar inclination of a surface
07/10/2001US6259518 Wetcell device for inspection
07/10/2001US6259359 Rear monitoring system for vehicle
07/10/2001US6259247 Method of transferring IC devices on test handler
07/10/2001US6259111 System for tracking movement of an object
07/10/2001US6259110 Apparatus and method for aligning a horizontal metal extrusion press
07/10/2001CA2168920C Apparatus and method for aligning machine platens
07/05/2001WO2001048894A1 Optical measuring device in a pressed-in conducting bar of an electrical machine
07/05/2001WO2001048801A1 Method and apparatus for monitoring polishing state, polishing device, process wafer, semiconductor device, and method of manufacturing semiconductor device
07/05/2001WO2001048438A1 Method for determining three-dimensional surface coordinates
07/05/2001WO2001047646A1 System for automatic control of the wall bombardment to control wall deposition
07/05/2001WO2001047427A2 Reflector system for determining position
07/05/2001WO2001040864A8 Photoresist dispense method by compensation for substrate reflectivity
07/05/2001WO2001020252A8 Method and apparatus for performing optical measurements of layers and surface properties
07/05/2001WO2001001064A3 Topographer for real time ablation feedback
07/05/2001US20010006571 Method and apparatus for aligning target object
07/05/2001US20010006422 Stage system in projection exposure apparatus
07/05/2001US20010006421 Device for measuring translation, rotation or velocity via light beam interference
07/05/2001US20010006420 Laser measuring device and laser measuring method
07/05/2001US20010006419 Optical measurement arrangement and method for inclination measurement
07/05/2001US20010006413 Interferometric alignment system for use in vacuum-based lithographic apparatus
07/05/2001DE19963345A1 Optische Messanordnung und Verfahren zur Neigungsmessung Optical device and method for inclination measurement
07/05/2001DE19961955A1 Measuring method for gap between measurement device and measurement surface, involves computing gap between detector and radiation point of laser through trigonometrical calculation
07/05/2001DE19961830A1 Verfahren zur Erzeugung von Zeitmarken beliebiger Punkte beweglicher Bauteile und optische Triggereinrichtung zur Durchführung des Verfahrens A method for generating time stamps of any points of movable components and optical triggering device for performing the method
07/05/2001DE10065568A1 Verschiebungsmesseinrichtung Displacement measuring device
07/05/2001DE10053447A1 Endoscope system for intracorporeal diagnosis, has processor which forms tomogram for target based on signal from photodetector that detects interference light
07/04/2001EP1113262A2 Inspection apparatus and method
07/04/2001EP1113243A2 Optical interference apparatus and position detection apparatus
07/04/2001EP1112550A1 An automated wafer defect inspection system and a process of performing such inspection
07/04/2001EP1112484A2 Device for measuring work pieces using an image processing system
07/04/2001EP1112474A1 Belt drive alignment detection device and method
07/04/2001EP1112473A1 Apparatus for surface image sensing and surface inspection of three-dimensional structures
07/04/2001EP1112472A1 Measuring method for recording and evaluating photograms of moving surfaces
07/04/2001EP0866943B1 Process and device for high-definition measurement of intervals in the focused image produced by a lens-aperture diaphragm system
07/04/2001CN1302187A Cigarette making machine including band inspection
07/03/2001US6256100 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure
07/03/2001US6256099 Methods and system for measuring three dimensional spatial coordinates and for external camera calibration necessary for that measurement
07/03/2001US6256098 Method for determining and designing optical elements
07/03/2001US6256090 Method and apparatus for determining the shape of a flexible body
07/03/2001US6255678 Apparatus for measuring physical and chemical phenomena
07/03/2001US6255664 Sensor for measuring degree of flatness
07/03/2001US6255646 Scanning optical microscope
07/03/2001US6255645 Method and apparatus for optically measuring drive train backlash
07/03/2001US6255643 Method and apparatus for generating a control signal
07/03/2001US6255127 Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same
07/03/2001US6253697 Ship provided with a distortion sensor and distortion sensor arrangement for measuring the distortion of a ship
06/2001
06/28/2001WO2001046909A1 Method and apparatus of automatically identifying faults in a machine vision measuring system
06/28/2001WO2001046684A1 In-situ metalization monitoring using eddy current measurements and optical measurements
06/28/2001WO2001046654A1 Method for producing time marks at any points on moving components
06/28/2001WO2001046645A1 Method and device for aligning bodies
06/28/2001WO2001046644A1 Position and movement meter
06/28/2001WO2001045968A1 Method and system for monitoring the deformations of a tyre in motion
06/28/2001WO2000071969A3 Dust removal and anti-shock protection device for optical gauges
06/28/2001US20010005536 Optical information recording medium and method of manufacturing same
06/28/2001US20010005265 Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
06/28/2001US20010005263 Photosensitive charge-accumulating device and a lidar incorporating such a device
06/28/2001US20010005139 Displacement measuring device
06/28/2001US20010005004 Irregular pattern detector
06/28/2001DE19962701A1 Verfahren zur Ermittlung der Position eines Lichtspots auf einer Fotodioden-Zeile Method for determining the position of a light spot on a photodiode row
06/28/2001DE19962166A1 Alignment of parallel bodies with rotational symmetry, such as rollers or axles, by use of reference lines tensioned with a tensioning device to provide perpendicular reference lines for use with a target device fitted to a roller
06/28/2001DE19962067A1 Untersetzungsgetriebe für Dreh- und Schwenkbewegungen, insbesondere für Meß- und Antriebszwecke Reduction gear for rotating and pivoting movements, especially for measuring and propulsion purposes
06/28/2001DE19960873A1 Geometric self-calibration method involves calculating and removing calibration factor for any measurement plane which is parallel to calibration plane automatically from known spacing
06/28/2001DE19960197A1 Optical sensor system for measuring immersion depth of object e.g. ship, includes light guide with sensitive wall attached to object such that emitted light is reflected by sensitive wall to receiver
06/28/2001DE19959623A1 Verfahren und Anordnung zum Lokalisieren von zylinderförmigen Objekten Method and apparatus for locating cylindrical objects
06/28/2001DE19958993A1 Monitor to register the geometry and/or thickness of spun filaments has a light beam aligned at right angles to the filament axis and a detection system to evaluate the diffracted light from the filament
06/28/2001DE19958641A1 Verfahren zur Qualitätskontrolle von Materialschichten Method for quality control of material layers
06/28/2001DE10029529A1 Reflector system for position determination in navigation system, has spherical reflectors whose refraction index is determined with respect to desired incident angle of light beam
06/27/2001EP1111908A1 Charge coupled photosensitive device with charge accumulation and Lidar incorporating such a device
06/27/2001EP1111472A2 Position detection system for a lithographic apparatus