Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
09/2008
09/04/2008WO2007047123A3 Shadow moire using non-zero talbot distance
09/04/2008US20080215271 Surface profiling apparatus
09/04/2008US20080212108 Positioning device and positioning method
09/04/2008US20080212107 Apparatus and method for measuring suspension and head assemblies in a stack
09/04/2008US20080212106 System and Method for Processing a Profile of a Solid, Which Profile is Captured, Preferably in a Dynamic Manner, to Determine Its Wear
09/04/2008US20080212098 Method and apparatus for detecting feature
09/04/2008US20080212097 Method of inspection, a method of manufacturing, an inspection apparatus, a substrate, a mask, a lithography apparatus and a lithographic cell
09/04/2008US20080212095 Optical Monitoring Apparatus and Method of Monitoring Optical Coatings
09/04/2008US20080212076 Apparatus and method for testing infrared camera
09/04/2008US20080212057 Substrate comprising a mark
09/04/2008DE19524498B4 Bildverarbeitungssystem Image processing system
09/04/2008DE10354078B4 Spannvorrichtung für Werkstücke zur dreidimensionalen optischen Oberflächenmessung Clamping device for workpieces for three-dimensional optical surface measurement
09/04/2008DE102007010807A1 Method for measuring topography of surface of measuring object, involves guiding sensor head for optical scanning of measuring point across surface, where sensor arrangement of sensor head is arranged on surface
09/04/2008DE102007010225A1 Verfahren zur Aufnahme von hochauflösenden Bildern von Defekten auf der Oberseite des Waferrandes A method for capturing high-resolution images of defects on the upper side of the wafer edge
09/04/2008DE102007009825A1 Device for optical testing of surface of object, has multiple laser light sources, camera and illumination optics, where illumination optics is adjustable and two groups of laser light sources are capable of being activated
09/04/2008DE102005056916B4 Verfahren zum Gestalten einer Überlagerungs-Markierung A method of designing an overlay mark
09/04/2008CA2666059A1 Coke oven wall surface evaluation and repair supporting apparatus and method
09/03/2008EP1965411A2 Stage system and stage driving method for use in exposure apparatus
09/03/2008EP1965220A1 A device and a method for producing information about the properties of an environment
09/03/2008EP1964639A1 Method of and system for controlling tools comprising spot welding electrodes using image obtaining and comparison means
09/03/2008EP1964595A1 Inclination calculation apparatus and inclination calculation program, and game apparatus and game program
09/03/2008EP1963782A1 Optical translation of triangulation position measurement
09/03/2008EP1963781A1 Scanning system for scanning an object surface, in particular for a coordinate measurement machine
09/03/2008EP1963780A1 Apparatus for and a method of determining surface characteristics
09/03/2008EP1483627B1 Scanning exposure apparatus and device manufacturing method using the same
09/03/2008EP1089066B1 Optical micro cantilever, method of manufacture thereof, and micro cantilever holder
09/03/2008CN201110761Y Laser centering and collimating system
09/03/2008CN201110755Y Sliding teeth sleeve anti-loose flute axial direction dimensional measurement chucking appliance
09/03/2008CN201108430Y Three-dimensional degree of movement degree detection device
09/03/2008CN101258510A Apparatus and method for detecting surface defects on a workpiece such as a rolled/drawn metal bar
09/03/2008CN101258448A Exposure apparatus
09/03/2008CN101258379A Optical fiber sensor connected with optical communication line
09/03/2008CN101256242A Apparatus and method for areflexia object in post-direction stimulated brillouin scattering detecting liquid
09/03/2008CN101256156A Precision measurement method for flat crack and antenna crack
09/03/2008CN101256111A System and method for testing concentricity of lens module
09/03/2008CN101256070A Method for lossless measuring shape parameter of atomic force microscope probe
09/03/2008CN101256069A Method for measuring high furnace burden face appearance and material flow track using laser ranging technique
09/03/2008CN101256068A Lead terminal inspection method and lead terminal inspection apparatus
09/03/2008CN101256067A Method for automated optical inspection
09/03/2008CN100417197C Position and orientation detection method and apparatus
09/03/2008CN100416221C Laser calibration apparatus
09/03/2008CN100416220C Cylinder bar three-dimensional measuring apparatus
09/03/2008CN100416219C 3-D measuring mechanism of gearsorting machine
09/03/2008CN100416218C Apparatus for detecting parallelism of two planes of platelike workpiece
09/03/2008CN100416216C Probe for sensing the position of an object
09/03/2008CN100416215C Adjustable probe
09/03/2008CN100415621C Method for determining the effects of fancy yarn
09/02/2008US7421109 Pattern inspection apparatus
09/02/2008US7421108 Method and apparatus for detecting a workpiece, and method and apparatus for inspecting a workpiece
09/02/2008US7420691 Method and apparatus for measuring interfacial positions, method and apparatus for measuring layer thickness, and method and apparatus for manufacturing optical discs
09/02/2008US7420690 End point detection in workpiece processing
09/02/2008US7420689 Method for determining the refractive index during interferometric length measurement and interferometric arrangement therefor
09/02/2008US7420688 Scanning, self-referencing interferometer
09/02/2008US7420676 Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus
09/02/2008US7420670 Measuring instrument and method for operating a measuring instrument for optical inspection of an object
09/02/2008US7420588 Measuring method, measuring system and storage medium
08/2008
08/28/2008WO2008103244A1 Apparatus for measuring defects in a glass sheet
08/28/2008WO2008102485A1 Wavelength selecting method, film thickness measuring method, film thickness measuring apparatus, and thin film silicon device manufacturing system
08/28/2008WO2008101657A1 Optical strain gauge
08/28/2008WO2007103302A3 Weighting function of enhance measured diffraction signals in optical metrology
08/28/2008US20080209386 Method for predicting resist pattern shape, computer readable medium storing program for predicting resist pattern shape, and computer for predicting resist pattern shape
08/28/2008US20080208525 Optical image measurement device
08/28/2008US20080204875 Microlithographic projection exposure apparatus
08/28/2008US20080204766 Method and microscope device for observing a moving specimen
08/28/2008US20080204765 Method for Contactless Dynamic Detection of the Profile of a Solid Body
08/28/2008US20080204764 Lead terminal inspection method and lead terminal inspection apparatus
08/28/2008US20080204763 Measuring Apparatus and Method For Range Inspection
08/28/2008US20080204759 Method for demodulating signals from a dispersive white light interferometric sensor and its application to remote optical sensing
08/28/2008US20080204737 Mask pattern inspection apparatus with koehler illumination system using light source of high spatial coherency
08/28/2008US20080204731 Optical device with tilt and power microlenses
08/28/2008US20080204721 Thin films measurement method and system
08/28/2008US20080204706 System For Distributed Measurement of the Curves of a Structure
08/28/2008US20080204699 Method and System for Determining the Position of a Receiver Unit
08/28/2008US20080203333 Sheet discrimination apparatus and image forming apparatus
08/28/2008US20080202202 Tactile Sensor and Use Thereof
08/28/2008DE102008011057A1 Messvorrichtung für ein Werkstück, das auf einem Einspanntisch gehaltert ist Measuring device for a workpiece, which is held on a chuck
08/28/2008DE102007047924A1 Vorrichtung und Verfahren zur automatischen Detektion von Fehlmessungen mittels Qualitätsfaktoren Apparatus and method for automatic detection of erroneous measurements by means of quality factors
08/28/2008DE102007008768A1 Workpiece surface's periodic microstructures detection method, involves utilizing transformation illustrating accurately line-shaped periodic microstructure on points of transformation area, on local image signal set
08/28/2008DE102007008619A1 Device for simultaneous view of complete periphery of container, particularly bottle, has camera with convex lens arranged in path of rays of camera
08/28/2008DE102007008604A1 Structures i.e. honed structures, evaluation method, involves separating target characteristics and error characteristics for separation of target and error structures, and fragmenting original image into corrugated-and contact area image
08/28/2008DE102007000999A1 Verfahren zur Beseitigung von Fehlerquellen der Systemkorrektur einer Koordinaten-Messmaschine Method of eliminating sources of error correction system of a coordinate measuring machine
08/28/2008DE102007000981A1 Vorrichtung und Verfahren zum Vermessen von Strukturen auf einer Maske und zur Berechnung der aus den Strukturen resultierenden Strukturen in einem Photoresist Apparatus and method for measuring structures on a mask and the calculation of results from the structures structures in a photoresist
08/28/2008DE102006062664B4 Autokollimationsoptik für drei Achsen Autocollimation for three axes
08/27/2008EP1962083A1 Optical image measurement device
08/27/2008EP1960734A2 Method for measuring wear in the refractory lining of a metallurgical melting vessel
08/27/2008EP1611438B1 Method and apparatus for inspecting a tubular
08/27/2008CN201107639Y Large-sized producing workpiece geometric measuring apparatus using machine vision
08/27/2008CN201107035Y Apparatus for measuring deformation
08/27/2008CN201107034Y Double thread guidance virtual guide rails apparatus
08/27/2008CN201107033Y Multifunctional observation target
08/27/2008CN201107032Y Circuitry laser measuring instrument
08/27/2008CN201107031Y Frequency division multiplexing type paralleling laser length measuring instrument
08/27/2008CN201107030Y Digital measuring device of orbital straightness
08/27/2008CN101253385A Distortion evaluating apparatus and distortion evaluating method
08/27/2008CN101253008A Method for the detection of strip edges
08/27/2008CN101252142A Solid-state imaging apparatus, manufacturing method therefor and electronic equipment using the same
08/27/2008CN101252097A Improved system and method for optical key dimension measurement accuracy
08/27/2008CN101251718A Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
08/27/2008CN101251609A Wide spectrum optical film-coating on-line monitoring system having colority monitoring function
08/27/2008CN101251485A Method for measuring semiconductor quantum point dimension distribution using fluorescence spectrum