| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 01/15/1986 | EP0167703A2 A method of homogeneous chemical vapour deposition |
| 01/14/1986 | US4564509 Method and apparatus for improved gettering for reactant gases |
| 01/08/1986 | EP0090817B1 Thin films of compounds and alloy compounds of group iii and group v elements |
| 01/02/1986 | EP0166032A2 Carrier rack of quartz glass for substrate wafers |
| 12/31/1985 | US4561915 Process for epitaxial growth on a corrugated wafer |
| 12/18/1985 | EP0164928A2 Vertical hot wall CVD reactor |
| 12/17/1985 | US4558660 Semiconductor fabricating apparatus |
| 12/10/1985 | US4557794 Method for forming a void-free monocrystalline epitaxial layer on a mask |
| 12/03/1985 | US4556436 Method of preparing single crystalline cubic silicon carbide layers |
| 11/21/1985 | EP0161829A2 Process for preparing diamond thin film |
| 11/21/1985 | EP0161747A1 Semiconductor production method |
| 11/19/1985 | US4554078 Methods of and apparatus for effluent disposal |
| 11/12/1985 | US4552740 Process for producing amorphous and crystalline silicon nitride |
| 11/05/1985 | US4550684 Cooled optical window for semiconductor wafer heating |
| 10/23/1985 | EP0158698A2 Method of manufacturing B type silicon nitride whiskers |
| 10/22/1985 | US4548658 Growth of lattice-graded epilayers |
| 09/24/1985 | US4543267 Method of making a non-single-crystalline semi-conductor layer on a substrate |
| 09/24/1985 | CA1194196A1 Masking techniques in chemical vapor deposition |
| 09/11/1985 | EP0154561A2 Improved apparatus and method for laser-induced chemical vapor deposition |
| 09/10/1985 | US4540876 Furnace suitable for heat-treating semiconductor bodies |
| 09/03/1985 | US4539068 Vapor deposition, crystallization |
| 08/29/1985 | WO1985003727A1 Deposition technique |
| 08/27/1985 | CA1192475A1 Manufacture of cadmium mercury telluride |
| 08/20/1985 | US4536379 Production of silicon carbide |
| 08/06/1985 | US4533820 Radiant heating apparatus |
| 08/06/1985 | US4533410 Process of vapor phase epitaxy of compound semiconductors |
| 07/23/1985 | US4530818 Wall welded to flange; maintaining gas flow through bell |
| 07/16/1985 | US4529617 Continuously depositing amorphous element on support; radiation with electromagnetic waves |
| 07/10/1985 | EP0147967A2 Induction heated reactor system for chemical vapor deposition |
| 07/09/1985 | CA1190126A1 High mobility amorphous silicon displaying non- dispersive transport properties |
| 07/09/1985 | CA1190043A1 Conductive silicon carbide |
| 07/03/1985 | EP0146985A2 Process for making thin ferrimagnetic monocrystalline garnet films by cathodic sputtering |
| 06/25/1985 | US4525335 Whiskers from rice husks or cellulose and sand or glass; carbonizi |
| 06/04/1985 | US4521393 Method of manufacturing β type silicon nitride whiskers |
| 05/29/1985 | EP0143053A2 Apparatus for providing depletion-free uniform thickness cvd thin-film on semiconductor wafers |
| 05/29/1985 | EP0142495A1 Inverted positive vertical flow chemical vapor deposition reactor chamber. |
| 05/21/1985 | US4518846 Heater assembly for molecular beam epitaxy furnace |
| 05/21/1985 | US4518455 CVD Process |
| 05/15/1985 | EP0141561A2 A process for producing devices having semi-insulating indium phosphide based compositions |
| 05/14/1985 | US4517220 Deposition and diffusion source control means and method |
| 05/14/1985 | US4517047 Gallium arsenide molecular beam epitaxial semiconductors |
| 05/08/1985 | EP0140625A1 Tellurides |
| 05/07/1985 | US4515104 Contiguous wafer boat |
| 05/07/1985 | CA1186599A1 Epitaxial crystals and fabrication thereof |
| 05/02/1985 | EP0139134A2 Deposition and diffusion source control means and method |
| 05/02/1985 | EP0138963A1 Diethylberyllium dopant source for mocvd grown epitaxial semiconductor layers. |
| 04/23/1985 | US4512391 Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet |
| 04/09/1985 | US4510177 Method and apparatus for vapor phase deposition |
| 04/09/1985 | US4509456 Apparatus for guiding gas for LP CVD processes in a tube reactor |
| 04/02/1985 | US4508931 Catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them |
| 04/02/1985 | US4508590 Method for the deposition of high-quality crystal epitaxial films of iron |
| 03/27/1985 | EP0135308A1 Cooled optical window for semiconductor wafer heating |
| 03/27/1985 | EP0134947A1 Method and apparatus for improved gettering for reactant gases |
| 03/26/1985 | US4507169 Method and apparatus for vapor phase growth of a semiconductor |
| 03/26/1985 | US4506815 Bubbler cylinder and dip tube device |
| 03/19/1985 | US4505950 Method of manufacturing a multiple-layer, non-single-crystalline semiconductor on a substrate |
| 03/12/1985 | US4504453 Method of manufacturing crystalline silicon carbide |
| 03/12/1985 | US4504329 Process for the epitaxial deposition of III-V compounds utilizing a binary alloy as the metallic source |
| 02/26/1985 | CA1183102A1 Low temperature process for depositing oxide layers by photochemical vapor deposition |
| 02/19/1985 | US4500504 Reacting silica gel containing iron, nickel, or cobalt compound with carbon black |
| 02/19/1985 | US4499853 Distributor tube for CVD reactor |
| 02/12/1985 | US4499354 Susceptor for radiant absorption heater system |
| 02/05/1985 | US4497683 Process for producing dielectrically isolated silicon devices |
| 01/30/1985 | EP0132408A2 Method and apparatus for growing layers or producing coatings on a substrate |
| 01/29/1985 | US4496828 Susceptor assembly |
| 01/23/1985 | EP0132037A1 A process for the production of a compound crystal |
| 01/16/1985 | EP0131208A1 Susceptor assembly |
| 01/15/1985 | US4493977 Method for heating semiconductor wafers by a light-radiant heating furnace |
| 01/08/1985 | US4492716 Method of making non-crystalline semiconductor layer |
| 01/08/1985 | US4492681 Method for the preparation of silicon carbide fibers |
| 12/18/1984 | US4489128 Structure containing epitaxial crystals on a substrate |
| 12/18/1984 | US4488507 Susceptors for organometallic vapor-phase epitaxial (OMVPE) method |
| 12/11/1984 | US4487640 Method for the preparation of epitaxial films of mercury cadmium telluride |
| 12/05/1984 | EP0127499A1 Process for the amorphous growth of a material with irradiation crystallisation |
| 11/27/1984 | US4484538 Apparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafers |
| 11/20/1984 | CA1178180A1 Method for producing semiconductor grade silicon |
| 11/20/1984 | CA1178179A1 Combination gas curtains for continuous chemical vapor deposition production of silicon bodies |
| 11/20/1984 | CA1178178A1 Gas curtain continuous chemical vapor deposition production of semiconductor bodies |
| 11/20/1984 | CA1178177A1 Process for increasing silicon thermal decomposition deposition rates from silicon halide-hydrogen reaction gases |
| 11/13/1984 | US4482423 Protection of semiconductor substrates during epitaxial growth processes |
| 11/13/1984 | US4482422 Method for growing a low defect monocrystalline layer on a mask |
| 11/08/1984 | WO1984004334A1 Inverted positive vertical flow chemical vapor deposition reactor chamber |
| 11/06/1984 | US4481229 Method for growing silicon-including film by employing plasma deposition |
| 10/31/1984 | EP0123318A2 Acicular particulate material containing iron carbide |
| 10/30/1984 | US4479845 Vapor growth with monitoring |
| 10/16/1984 | US4477308 Controlling molecular orientation and crystallization by heating a disorded low-temperature metal to react with the substrate |
| 10/11/1984 | WO1984003995A1 Diethylberyllium dopant source for mocvd grown epitaxial semiconductor layers |
| 10/11/1984 | WO1984003905A1 Tetramethyltin dopant source for mocvd grown epitaxial semiconductor layers |
| 09/26/1984 | EP0119654A1 A furnace suitable for heat-treating semiconductor bodies |
| 09/19/1984 | EP0119130A1 Transparent heating apparatus having at least two zones at different temperatures |
| 08/29/1984 | EP0117051A1 Growth of semiconductors |
| 08/28/1984 | US4468283 Method for etching and controlled chemical vapor deposition |
| 08/28/1984 | US4468278 Process for mono-crystal growth in a closed tubular chamber |
| 08/21/1984 | US4466381 Coating of semiconductor wafers and apparatus therefor |
| 08/14/1984 | CA1172524A1 Manufacture of group iii-v compounds |
| 08/08/1984 | EP0114876A1 Ultra-pure epitaxial silicon and process for its manufacture. |
| 08/07/1984 | US4464222 Process for increasing silicon thermal decomposition deposition rates from silicon halide-hydrogen reaction gases |
| 07/31/1984 | CA1171940A1 Vapor mass flow controller system |
| 07/25/1984 | EP0113954A1 A substrate for manufacturing single crystal thin films |
| 07/24/1984 | US4461783 Non-single-crystalline semiconductor layer on a substrate and method of making same |