Patents for C30B 23 - Single-crystal growth by condensing evaporated or sublimed materials (5,192)
10/1988
10/05/1988EP0285358A2 Process for producing compound semiconductor and semiconductor device using compound semiconductor obtained by same
10/05/1988EP0284657A2 Process and apparatus for producing thin multi-component films
09/1988
09/27/1988US4774416 Large cross-sectional area molecular beam source for semiconductor processing
09/27/1988US4773852 Multi-walled
09/20/1988US4772370 Vacuum sputtering, alloy depositing, melt spinning to form crystalline films
09/13/1988US4770895 Control of uniformity of growing alloy film
08/1988
08/31/1988EP0280315A2 Method of forming a diamond film
08/31/1988EP0280198A1 Method of forming diamond film
08/16/1988CA1240482A1 Silicon melting and evaporation method and apparatus for high purity applications
08/03/1988EP0276914A2 Anti-flaking measures in molecular-beam-epitaxy apparatus, and method of manufacture
07/1988
07/19/1988US4758399 Substrate for manufacturing single crystal thin films
07/19/1988US4758267 Ultrafine particle and fiber production in microgravity
07/06/1988EP0273470A2 Method for decontamination of a chamber used in vacuum processes for deposition, etching and/or growth of high purity films, particularly applicable to semiconductor technology
06/1988
06/16/1988WO1988004332A1 Multilayered structures
06/15/1988EP0271351A2 Vacuum evaporating apparatus
06/07/1988US4748932 Crucible for epitaxy from the liquid phase of semiconductor layers having a "controlled" composition
05/1988
05/31/1988US4748315 Molecular beam source
04/1988
04/12/1988US4737232 Laser passes through transparent substrate to polymerize monomer onto surface of substrate
04/05/1988US4735396 Replica pattern of monocrystalline cleavage plane; solar cells
03/1988
03/30/1988EP0261857A2 Large cross-sectional area molecular beam source for semiconductor processing
03/22/1988US4732108 Apparatus for monitoring epitaxial growth
03/09/1988EP0258752A2 Article having surface layer of uniformly oriented, crystalline, organic microstructures
03/01/1988US4728389 Particulate-free epitaxial process
02/1988
02/18/1988DE3627598A1 Radiant heating system for heating a substrate
01/1988
01/26/1988CA1231916A1 Sputtered semiconducting films of catenated phosphorus material and devices formed therefrom
01/20/1988EP0253512A2 Preparation of lead titanate for use in piezoelectric composite transducers
01/13/1988EP0252757A2 Photoelectric conversion device
01/13/1988EP0252536A1 Fabrication method of optical strip transmission line for non-reciprocal optical components
01/13/1988EP0252347A2 Process for the deposition of gallium arsenide layers
01/07/1988EP0251522A2 Process for production of beta-type silicon nitride
01/07/1988EP0250603A1 Process for forming thin film of compound semiconductor
01/05/1988US4717630 Substrate for manufacturing single crystal thin films
01/05/1988US4717443 Mass transport of indium phosphide
12/1987
12/16/1987EP0249516A1 Cell for epitaxial growth by molecular jets, and associated process
11/1987
11/19/1987EP0245688A1 Method of forming diamond film
11/04/1987EP0244081A1 Method for forming crystal and crystal article obtained by said method
10/1987
10/15/1987DE3612340A1 Process for diamond growth
10/13/1987US4699085 For growth on a semiconductor wafer
10/13/1987US4699084 Apparatus for producing high quality epitaxially grown semiconductors
10/13/1987US4699083 Molecular beam generator using thermal decomposition for manufacturing semiconductors by epitaxy
09/1987
09/30/1987EP0239140A2 Process for producing structured epitaxial films on a substrate
09/24/1987WO1987005700A1 Method and apparatus for monitoring surface layer growth
09/22/1987US4695347 Process for the formation of single crystals from the gas phase
09/16/1987EP0143792B1 Method for forming a stream of atoms and utilization thereof in an atomic jet epitaxy process and device (e.j.a.)
09/15/1987US4693207 Apparatus for the growth of semiconductor crystals
09/08/1987US4692203 Process for making beta-zinc diphosphide monocrystals (whiskers)
09/01/1987US4690841 Pyrolytic boron nitride article
09/01/1987US4690098 Vacuum vapor-deposition system
08/1987
08/19/1987EP0232436A1 Generator of molecular beams by thermal decomposition for the production of semiconductors by epitaxial deposition
08/12/1987EP0231658A1 Molecular beam epitaxial apparatus
07/1987
07/22/1987EP0229263A2 Method of growing quaternary or pentanary compound semiconductor by MBE lattice-matched to substrate
07/01/1987EP0227228A2 Substrate holder for wafers during MBE growth
06/1987
06/25/1987DE3545240A1 Vacuum chamber
06/18/1987WO1987003740A1 Process for forming thin film of compound semiconductor
06/04/1987DE3542613A1 Replenishing appliance for an evaporation source in a vacuum chamber
06/03/1987CN86106177A Method of growth of thin film layer for use in a composite semiconductor
06/02/1987US4670241 P4 gas generator using the alkali metal polyphosphide MP15
05/1987
05/26/1987US4668480 Crucibles, vacuum housings
05/20/1987EP0222438A1 Vessel for the liquid-phase epitaxy of semiconductor films with a controlled composition
05/12/1987US4664960 Superlattices; spatial and orientational placement of atoms
05/12/1987US4664940 Process for the formation of a flux of atoms and its use in an atomic beam epitaxy process
05/12/1987US4664063 Molecular beam epitaxial growth apparatus
05/12/1987US4664062 Apparatus for manufacturing semiconductors
05/05/1987US4662981 Method and apparatus for forming crystalline films of compounds
04/1987
04/22/1987EP0218842A2 Method for producing single beta-zinc diphosphide crystals
04/22/1987EP0113983B1 Fabricating a semiconductor device by means of molecular beam epitaxy
03/1987
03/25/1987EP0215436A2 Method of growth of thin film layer for use in a composite semiconductor
03/18/1987EP0214207A1 Method and device for depositing a doped material by epitaxial growth.
03/10/1987US4648917 Mercury cadmium, tellurium intermetallic semiconductor
03/05/1987DE3530999A1 Process for fabricating semiconductor arrangements
03/03/1987US4646680 Crucible for use in molecular beam epitaxial processing
02/1987
02/25/1987EP0211292A2 Molecular beam epitaxy apparatus
02/12/1987WO1987000966A1 Control of uniformity of growing alloy film
02/03/1987US4640720 Method of manufacturing a semiconductor device
01/1987
01/27/1987US4639377 Thin film formation technique and equipment
01/21/1987EP0208851A1 Fabricating a semiconductor device by means of molecular beam epitaxy
01/13/1987US4636268 Chemical beam deposition method utilizing alkyl compounds in a carrier gas
01/06/1987CA1216133A1 Compositionally varied materials and method for synthesizing the materials
12/1986
12/30/1986EP0206603A1 Method for growing crystals
12/30/1986EP0206120A1 Pyrolytic boron nitride crucible and method for producing the same
12/30/1986EP0205963A1 Method and apparatus for molecular beam epitaxial growth
12/23/1986CA1215521A1 Catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them
12/16/1986US4629514 Method of producing II-V compound semiconductors
11/1986
11/11/1986US4622236 Boron nitride film and process for preparing same
11/11/1986US4622093 Group 3 and group 5 ions
11/11/1986US4622083 Group 3 metal and group 3 metal and group 5 metal
11/04/1986US4620968 Monoclinic phosphorus formed from vapor in the presence of an alkali metal
11/04/1986US4620963 Vapor transport reactor with composite metal-glass tube
10/1986
10/15/1986EP0197452A2 Method for producing high quality epitaxial layers by molecular beam epitaxy
10/08/1986EP0196897A1 Thermal etching of a compound semiconductor
09/1986
09/12/1986WO1986005319A1 Method and device for depositing a doped material by epitaxial growth
09/03/1986EP0193192A2 Pyrolytic boron nitride article and method for producing the same
08/1986
08/26/1986US4608272 Laser irradiation while depositing thorium tetrafluoride
08/20/1986EP0191661A1 Coating and crystallisation process of an organic-material film by the use of a beam of energy
08/19/1986US4606296 Evaporation cell for a liquid compound suitable for epitaxy by molecular jets
08/12/1986US4605469 MBE system with in-situ mounting
08/12/1986CA1209452A1 Heterostructure comprising a heteroepitaxial multiconstituent material
07/1986
07/29/1986CA1208806A1 Method of growing an alloy film by a layer-by-layer process on a substrate, and a method of making a semiconductor device
07/08/1986US4599069 Substrate holder for molecular beam epitaxy apparatus
07/08/1986CA1207470A1 Apparatus for molecular beam epitaxy
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