Patents for C30B 23 - Single-crystal growth by condensing evaporated or sublimed materials (5,192) |
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07/02/1986 | CA1207090A Substrate heating apparatus for molecular beam epitaxy |
06/24/1986 | US4596721 Vacuum evaporating films of alkali metal polyphosphide |
06/11/1986 | EP0183962A1 Process for doping a semiconductor material |
06/05/1986 | WO1986003231A1 Chemical beam deposition method |
06/03/1986 | US4592308 Solderless MBE system |
04/15/1986 | US4582559 Method of making thin free standing single crystal films |
04/08/1986 | US4580522 Rotary substrate holder of molecular beam epitaxy apparatus |
03/26/1986 | EP0175436A2 Semiconductor processing |
03/11/1986 | US4575462 Determination of atomic ratio of constituents |
03/05/1986 | EP0173448A2 Method of forming a III-V semiconductor layer |
02/12/1986 | EP0170800A1 Heater assembly for molecular beam epitaxy furnace |
02/11/1986 | US4569829 MBE Source bakeout system |
02/11/1986 | US4569307 Silicon melting and evaporation apparatus for high purity applications |
01/21/1986 | US4565741 Boron nitride film and process for preparing same |
01/15/1986 | EP0168071A1 Semiconductor device manufacture using molecular beam epitaxy with source temperature control |
01/14/1986 | US4564416 Method for producing a semiconductor device |
01/08/1986 | EP0090817B1 Thin films of compounds and alloy compounds of group iii and group v elements |
12/24/1985 | US4560576 Vacuum, cleaning |
12/11/1985 | EP0164132A2 Vapour deposition apparatus |
12/03/1985 | US4556436 Method of preparing single crystalline cubic silicon carbide layers |
11/26/1985 | US4555301 Formation of heterostructures by pulsed melting of precursor material |
11/21/1985 | EP0161747A1 Semiconductor production method |
11/19/1985 | US4554150 Detector grade mercuric iodide |
11/12/1985 | US4553022 Effusion cell assembly |
11/06/1985 | EP0160479A2 Method and apparatus for forming a thin film |
10/29/1985 | US4550411 Sources used in molecular beam epitaxy |
10/29/1985 | US4550047 Silicon source component for use in molecular beam epitaxial growth apparatus |
10/29/1985 | US4550031 Control of Si doping in GaAs, (Al,Ga)As and other compound semiconductors during MBE growth |
10/22/1985 | US4548670 Electric arcs |
09/24/1985 | US4542712 Apparatus for molecular beam epitaxy |
08/13/1985 | US4534840 Removing impurities by reacting with ionized hydrogen |
07/16/1985 | US4529617 Continuously depositing amorphous element on support; radiation with electromagnetic waves |
07/16/1985 | US4529455 Method for epitaxially growing Gex Si1-x layers on Si utilizing molecular beam epitaxy |
07/03/1985 | EP0146985A2 Process for making thin ferrimagnetic monocrystalline garnet films by cathodic sputtering |
06/19/1985 | EP0145285A2 Solderless mbe system |
06/12/1985 | EP0143792A1 Method for forming a stream of atoms and utilization thereof in an atomic jet epitaxy process and device (e.j.a.). |
05/28/1985 | US4520039 Designing pattern in matrix of atoms of different physical propert |
05/21/1985 | US4518846 Heater assembly for molecular beam epitaxy furnace |
05/14/1985 | US4517047 Gallium arsenide molecular beam epitaxial semiconductors |
04/30/1985 | US4514636 Ion treatment apparatus |
04/30/1985 | US4514250 Method of substrate heating for deposition processes |
04/02/1985 | US4509066 Sputtered semiconducting films of catenated phosphorus material and devices formed therefrom |
04/02/1985 | US4508931 Catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them |
02/13/1985 | EP0132538A1 An apparatus for molecular beam epitaxy |
02/12/1985 | US4498416 Installation for treatment of materials for the production of semi-conductors |
01/30/1985 | EP0132323A2 Sputtered semiconducting films of catenated phosphorus material |
01/15/1985 | US4493142 III-V Based semiconductor devices and a process for fabrication |
01/09/1985 | EP0130803A2 Graphite intercalated alkali metal vapour sources |
01/08/1985 | US4492852 In an evacuable chamber |
12/12/1984 | EP0127838A2 Silicon sources suitable for use in molecular beam epitaxy deposition |
12/05/1984 | EP0127499A1 Process for the amorphous growth of a material with irradiation crystallisation |
11/13/1984 | US4482833 Method for obtaining oriented gold and piezoelectric films |
10/24/1984 | EP0122446A1 Method and apparatus for coating a substrate |
10/17/1984 | EP0122088A1 Improvements in or relating to sources used in molecular beam epitaxy |
10/16/1984 | US4477311 Hydrogen-plasma etching, molecular beam epitaxy and forming a protective layer all under unbroken vacuum |
10/16/1984 | US4477308 Controlling molecular orientation and crystallization by heating a disorded low-temperature metal to react with the substrate |
09/19/1984 | EP0119130A1 Transparent heating apparatus having at least two zones at different temperatures |
09/13/1984 | WO1984003524A1 Method for forming a stream of atoms and utilization thereof in an atomic jet epitaxy process and device (e.j.a.) |
08/28/1984 | US4468278 Process for mono-crystal growth in a closed tubular chamber |
08/07/1984 | US4464342 Ovens; cryogenics; chambers; outgassing |
07/25/1984 | EP0113983A1 Fabricating a semiconductor device by means of molecular beam epitaxy |
07/25/1984 | EP0113954A1 A substrate for manufacturing single crystal thin films |
06/13/1984 | EP0110468A1 Method of growing an alloy film by a layer-by-layer process on a substrate, and a method of making a semiconductor device |
05/15/1984 | US4448854 Coherent multilayer crystals and method of making |
05/15/1984 | CA1167358A1 Molecular beam epitaxy electrolytic dopant source |
05/08/1984 | US4447276 Using controlled energy levels where dopant material is sulfur, selenium, or tellurium |
05/08/1984 | CA1166937A1 Method and apparatus for performing growth of compound thin films |
05/02/1984 | EP0107356A2 Compositionally varied materials and method and system for synthesizing the materials |
05/01/1984 | US4445965 Method for making thin film cadmium telluride and related semiconductors for solar cells |
03/27/1984 | US4439266 Vapor transport process for growing selected compound semiconductors of high purity |
03/06/1984 | US4435224 Process for preparing homogeneous layers of composition Hg1-x Cdx |
03/06/1984 | US4434742 Installation for depositing thin layers in the reactive vapor phase |
02/28/1984 | US4434025 Controlling crystallinity and thickness of monocrystalline layer by use of an elliptically polarized beam of light |
02/07/1984 | US4430183 Alternation, lamination, metals, sputtering, beams, crystallization |
01/31/1984 | US4428808 Sputtering layer of glass before deposition of gold |
01/17/1984 | US4426237 Volatile metal oxide suppression in molecular beam epitaxy systems |
12/20/1983 | CA1159161A1 Method and apparatus for conducting heat to or from an article being treated under vacuum |
12/06/1983 | US4419178 Endless belts, monocrystals |
11/29/1983 | CA1157962A1 Method of growing a doped iii-v alloy layer by molecular beam epitaxy |
11/01/1983 | US4413022 Vapor reactions |
11/01/1983 | US4412771 Sample transport system |
10/25/1983 | US4411728 Method for manufacture of interdigital periodic structure device |
10/12/1983 | EP0090817A1 Thin films of compounds and alloy compounds of group iii and group v elements. |
08/23/1983 | CA1152622A1 Growth technique for preparing graded gap semiconductors and devices |
08/23/1983 | CA1152620A1 Equilibrium growth technique for preparing pbs.sub.xse in1-x xx epilayers |
07/26/1983 | CA1150602A1 Method of growing n-type gaas layers by molecular beam epitaxy |
07/19/1983 | US4394210 Process for forming a lead film |
07/12/1983 | US4392453 Molecular beam converters for vacuum coating systems |
05/17/1983 | US4383872 Method of growing a doped III-V alloy layer by molecular beam epitaxy utilizing a supplemental molecular beam of lead |
05/11/1983 | EP0018397B1 Layer of crystalline silicon having (iii) orientation on (iii) surface of lithium aluminium |
04/28/1983 | WO1983001466A1 Thin films of compounds and alloy compounds of group iii and group v elements |
04/27/1983 | EP0077405A1 Method and device for manufacturing product by utilizing holography technique |
04/12/1983 | CA1144453A1 Prevention of decomposition of phosphorous containing substrates |
02/01/1983 | US4371232 Leac-cadmium-chalcogenide alloys |
11/16/1982 | CA1135601A1 Method for forming a crystalline film for a paramagnetic sodium thallium type intermetallic compound |
11/11/1982 | WO1982003798A1 Method and device for manufacturing product by utilizing holography technique |
10/19/1982 | CA1133807A1 Layer of crystalline silicon having (iii) orientation on (iii) surface of lithium aluminum |
09/28/1982 | US4351695 Method of producing low-resistant, monocrystalline metallic layers by implanting ions into a polycrystalline metal layer and heating to produce a monocrystalline layer |
09/15/1982 | EP0060151A1 Material treatment apparatus for producing semiconductors |
07/13/1982 | US4339764 PbSx Se1-x semiconductor |