| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 03/16/1999 | US5882171 Transport and transfer apparatus |
| 03/16/1999 | US5882168 Semiconductor processing systems |
| 03/11/1999 | WO1999012238A1 Method for treating substrates |
| 03/11/1999 | WO1999012192A2 Transport system |
| 03/11/1999 | WO1999012190A2 Sealed capsule opening and unloading system |
| 03/11/1999 | DE19737839A1 Transportsystem Transport system |
| 03/09/1999 | US5880923 Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system |
| 03/09/1999 | US5879040 Workpiece attracting device |
| 03/09/1999 | US5878866 Device for conveying glass plates |
| 03/04/1999 | WO1999010915A1 Device for intermediate storage of wafers |
| 03/04/1999 | DE3745134C2 Semiconductor wafer transfer between cassette and boat |
| 03/04/1999 | DE19738147A1 Verfahren zum Behandeln von Substraten A method for treating substrates |
| 03/03/1999 | EP0899776A1 Apparatus for the intermediate storage of wafers |
| 03/03/1999 | EP0899222A2 Method and apparatus for taking away a glass plate |
| 02/24/1999 | EP0898299A1 Compartmentalized substrate processing chamber |
| 02/24/1999 | EP0897593A1 Device and process for treating substrates in a fluid container |
| 02/24/1999 | EP0724774B1 Grippers for disc-shaped articles |
| 02/18/1999 | DE19804645C1 Method of mixing of wall tiles |
| 02/17/1999 | CN1042121C Three-dimensional traffic conveying system |
| 02/16/1999 | US5872694 Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage |
| 02/09/1999 | US5868803 Method for mounting a wafer loading device to a process machine |
| 02/03/1999 | EP0895277A2 Carrier apparatus with more than one carrier belts and processing apparatus therewith |
| 02/03/1999 | EP0894773A2 Sampling of hot glassware in a glassware manufacturing system |
| 02/03/1999 | EP0894337A2 Installation for wet-treating substrates |
| 02/02/1999 | US5865588 Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method |
| 01/28/1999 | WO1999004426A1 Wafer carrying fork |
| 01/27/1999 | EP0892985A1 Transport device for flat substrates and substrate transfer process between the device and a treatment apparatus |
| 01/26/1999 | US5863170 Modular process system |
| 01/24/1999 | CA2243411A1 Sampling of hot glassware in a glassware manufacturing system |
| 01/21/1999 | WO1999003129A1 Method for transporting goods and transportation device |
| 01/21/1999 | WO1999002752A1 Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer |
| 01/21/1999 | WO1999002436A1 Smif pod storage, delivery and retrieval system |
| 01/21/1999 | WO1999002435A1 Slippable roller conveyor for clean rooms |
| 01/21/1999 | DE19730582A1 Photolithographic processing of microelectronic components |
| 01/21/1999 | DE19730581A1 Cleaning silicon wafers with fluid media |
| 01/20/1999 | EP0891629A1 Coupling system for the transfer of a confined planar object from a containment pod to an object processing unit |
| 01/20/1999 | CN1205546A Composite transport carrier |
| 01/20/1999 | CN1205299A Transport module with latching door |
| 01/20/1999 | CN1205297A Transport module |
| 01/12/1999 | US5858863 Fabricating various kinds of semiconductor devices for a short period of time. |
| 01/12/1999 | US5857848 Transfer apparatus and vertical heat-processing system using the same |
| 01/12/1999 | US5857827 Cassette chamber |
| 01/07/1999 | WO1999000827A1 Apparatus for processing workpieces |
| 01/07/1999 | WO1998044170A3 Device for surface treatment by immersion |
| 01/07/1999 | EP0889515A1 Method and apparatus for conveying thin sheet-like substrate |
| 01/06/1999 | CN1204295A Pick and place system |
| 01/06/1999 | CN1203885A Part transporting method in abnormal output operation |
| 01/06/1999 | CN1203884A Apparatus for removing and storing semiconductor device trays |
| 01/05/1999 | US5855726 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 01/05/1999 | US5855465 Semiconductor wafer processing carousel |
| 12/30/1998 | EP0886618A1 Vacuum integrated smif system |
| 12/30/1998 | EP0886617A1 Door drive mechanisms for substrate carrier and load lock |
| 12/29/1998 | US5853496 Transfer machine, transfer method, cleaning machine, and cleaning method |
| 12/23/1998 | WO1998058402A1 Apparatus and method for automated cassette handling |
| 12/23/1998 | WO1998057881A1 Overhead conveying device and overhead conveying vehicle |
| 12/23/1998 | EP0886304A2 Gripper for disc substrates |
| 12/23/1998 | EP0886302A2 Reactor with a protective device for handling wafers |
| 12/22/1998 | US5851296 Vacuum processing apparatus and method |
| 12/22/1998 | US5850924 Vertical storage rack system |
| 12/17/1998 | WO1998057371A1 Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system |
| 12/17/1998 | WO1998042008A3 Wafer pod loader and mass transfer system |
| 12/17/1998 | WO1998041676A3 A surface-treatment plant |
| 12/16/1998 | CN1202275A Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors |
| 12/15/1998 | US5849139 Method of sticking semiconductor wafer and its sticking device |
| 12/15/1998 | US5848933 Docking and environmental purging system for integrated circuit wafer transport assemblies |
| 12/15/1998 | US5848868 Wafer conveying apparatus |
| 12/10/1998 | WO1998056034A1 Carousel wafer transfer system |
| 12/10/1998 | WO1998056033A1 Tilt mechanism for wafer cassette |
| 12/09/1998 | EP0784583B1 A plant and a method for temporary storage of items and the use of such a plant |
| 12/09/1998 | CN1201432A Plant for processing containers, transport device and pallet for containers |
| 12/08/1998 | US5847918 Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors |
| 12/08/1998 | US5845765 Plant and a method for temporary storage of items and the use of such a plant |
| 12/03/1998 | WO1998054754A1 Device and method for transporting separate substrates |
| 12/02/1998 | EP0881171A1 Suspended material conveyor system with running cable and double-clamp carriers |
| 12/02/1998 | CN1200706A Panel support mechanism |
| 12/01/1998 | US5842824 Substrate transport apparatus |
| 11/24/1998 | US5841515 Substrate container cassette, interface mechanism, and substrate processing |
| 11/18/1998 | EP0878559A1 Apparatus for transport of plate shaped substrates |
| 11/18/1998 | EP0878555A1 Workpiece guiding device |
| 11/17/1998 | US5838121 Apparatus for transferring wafers |
| 11/17/1998 | US5836736 Semiconductor processing system with wafer container docking and loading station |
| 11/12/1998 | WO1998050946A1 Multiple single-wafer loadlock wafer processing apparatus and loading and unloading method therefor |
| 11/12/1998 | DE19713203C1 Vorrichtung und Verfahren zum Oberflächenbehandeln durch Tauchen Device and method for the surface treatment by dipping |
| 11/11/1998 | CN1198586A Substrate working device and method |
| 11/11/1998 | CN1198534A Picking up and putting on device of mechanic finger system for testing semiconductor device |
| 11/10/1998 | US5833426 Magnetically coupled wafer extraction platform |
| 11/10/1998 | US5833425 Semiconductor device manufacturing apparatus employing vacuum system |
| 11/04/1998 | EP0875921A1 Wafer transfer apparatus |
| 11/04/1998 | CN1040524C Substrate conveyer |
| 11/03/1998 | US5829739 Supporting and distance-changing device |
| 10/29/1998 | WO1998048450A1 Device for conveying substrates through a substrate processing plant |
| 10/29/1998 | WO1998047798A1 Air stream transfer apparatus |
| 10/28/1998 | EP0873952A2 Method for laying spacing ribs between prelaminated glass panels as well as a spacing rib |
| 10/28/1998 | CN2295643Y Railway single suspension cable bill transferring carrier |
| 10/27/1998 | CA2094436C Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment |
| 10/22/1998 | WO1998046503A1 Integrated intrabay buffer, delivery, and stocker system |
| 10/22/1998 | DE19817123A1 Semiconductor tablet handling and storage device for IC testing device |
| 10/22/1998 | DE19716123A1 Vorrichtung zum Bewegen von Substraten durch eine Substrat-Behandlungseinrichtung Device for moving substrates through substrate treatment device |
| 10/20/1998 | US5824186 Method and apparatus for fabricating self-assembling microstructures |
| 10/20/1998 | US5823732 Device for moving insulating glass panes |