Patents
Sitemap › B65 - Conveying; Packing; Storing; Handling thin or filamentary material › B65G - Transport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors › B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for
Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
11/2003
11/20/2003WO2003095341A1 Conveying device
11/20/2003WO2003019630A3 Unified frame for semiconductor material handling system
11/20/2003WO2003009347A3 Integrated system for tool front-end workpiece handling
11/20/2003US20030215311 Mobile adjustment device for standard mechanical interface (SMIF) arm
11/20/2003US20030214614 Panel receiving device
11/20/2003US20030213429 Device and method for the surface treatment of workpieces
11/19/2003EP1362363A2 Apparatus and methods for manipulating semiconductor wafers
11/19/2003CN1456938A System and method for protecting templates by two-piece cover
11/19/2003CN1128083C Automatic medicine weighing and feeding device according to prescription
11/18/2003US6648588 Multiple sided robot blade for semiconductor processing equipment
11/18/2003US6648587 Material delivery system for clean room-like environments
11/18/2003US6648128 Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor device
11/18/2003US6647665 Door systems for low contamination, high throughput handling of workpieces for vacuum processing
11/18/2003US6647641 Device and method for the treatment of substrates in a fluid container
11/13/2003WO2003094211A1 Robot for handling semiconductor wafers
11/13/2003WO2003093144A2 Conveyor with heat transfer arrangement
11/13/2003WO2003030222A3 Tool for handling wafers and epitaxial growth station
11/13/2003WO2003007129A3 Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
11/13/2003US20030211812 Substrate delivery method, a substrate delivery mechanism and a substrate polishing apparatus
11/13/2003US20030209404 Automated processing system
11/12/2003CN1455951A Lift type substrate treatment device, and substrate treatment system with the substrate treatment device
11/12/2003CN1455444A Transmission device having clamp for transferring substrate
11/11/2003US6645355 Semiconductor processing apparatus having lift and tilt mechanism
11/06/2003WO2003092050A2 Substrate transfer apparatus
11/06/2003US20030206795 Loading and unloading station for semiconductor processing installations
11/05/2003CN1453197A Conveying positioning method and its equipment for conveyed articles
11/04/2003US6643563 Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
11/04/2003US6643558 Installation for processing wafers
11/04/2003US6642997 Substrate conveying system in exposure apparatus
11/04/2003US6642533 Substrate detecting method and device
11/04/2003US6641350 Dual loading port semiconductor processing equipment
11/04/2003US6641349 Clean box, clean transfer method and system
11/04/2003US6641348 Docking station for substrate transport containers
10/2003
10/30/2003WO2003089345A1 Foldable transport rack and methods of use thereof
10/30/2003US20030202871 Semiconductor processing system with wafer container docking and loading station
10/30/2003US20030202868 Actuatable loadport system
10/30/2003US20030202867 Pod transfer system having retractable mast and rotatable and vertically movable hoist
10/30/2003US20030202865 Substrate transfer apparatus
10/30/2003US20030201304 Transport apparatus with a gripper for the transport of substrates
10/30/2003US20030201148 Conveyance apparatus
10/30/2003US20030200735 Fluid media particle isolating system
10/29/2003EP1356500A2 Pod load interface equipment adapted for implementation in a fims system
10/29/2003CN1451998A Substrate floating device and method for mfg. liquid crystal display device
10/29/2003CN1451594A Turning device for tabular body transported on conveying line
10/28/2003US6638672 Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatus
10/28/2003US6637998 Self evacuating micro environment system
10/23/2003WO2003088350A1 Closed container conveying system
10/23/2003WO2003088326A2 Method of loading a wafer onto a wafer holder to reduce thermal shock
10/23/2003WO2003086917A1 Substrate conveying device
10/23/2003WO2003086914A1 Holding-down device and transport system for flat products to be transported
10/23/2003WO2003086913A1 Transport rolls and transport system for flat products to be transported
10/23/2003WO2003005413A3 Fast swap dual substrate transport for load lock
10/23/2003WO2002088007A8 Conveyor device for transporting workpieces through a processing area for surface treatment of said workpieces
10/23/2003US20030199173 Load port, semiconductor manufacturing apparatus, semiconductor manufacturing method, and method of detecting wafer adapter
10/23/2003US20030198553 Method for aligning a loadport to an overhead hoist transport system
10/23/2003US20030198547 Apparatus and methods for manipulating semiconductor wafers
10/23/2003US20030198541 Semiconductor wafer processing apparatus
10/23/2003US20030198540 Interbay transfer interface between an automated material handling system and a stocker
10/23/2003US20030196971 Foldable transport rack and methods of use thereof
10/23/2003US20030196870 Edge grip aligner with buffering capabilities
10/23/2003US20030196605 Substrate floating apparatus and method of manufacturing liquid crystal display apparatus using the same
10/22/2003EP1354830A1 Conveyor roller, retainer device and conveying system for flat pieces
10/22/2003CN1449980A Sustrate olelivery mechanism
10/22/2003CN1449976A Material feeding platform and relative apparatus
10/21/2003US6635516 Substrate dropping prevention mechanism and substrate inspection device provided therewith
10/21/2003US6635225 Automatic stainer for staining objects for microscopic examination
10/21/2003US6634851 Workpiece handling robot
10/21/2003US6634847 Method and an apparatus for picking up a module IC in a customer tray of a module IC handler
10/21/2003US6634845 Transfer module and cluster system for semiconductor manufacturing process
10/21/2003US6634686 End effector assembly
10/16/2003WO2003085704A2 Device for accommodating substrates
10/16/2003WO2003058679A3 System and method of processing composite substrate within a high throughput reactor
10/16/2003WO2003028954A3 Vacuum holding device and method for handling fragile objects, and manufacturing method thereof
10/16/2003WO2003014000A3 Edge gripping pre-aligner
10/16/2003US20030194309 Transporting roller, holding-down means and transporting system for flat articles
10/16/2003US20030194299 Processing system for semiconductor wafers
10/16/2003US20030194298 Transfer chamber with integral loadlock and staging station
10/16/2003US20030194297 Local store for a wafer processing station
10/15/2003CN2579837Y Groove stick for support base plate and base plate carrier for said groove stick
10/15/2003CN1448686A Fire-resisting locater and method of manufacture
10/14/2003US6632065 Substrate handling robot with a batch loader and individual vacuum control at batch loader paddles
10/09/2003WO2003084043A2 Device for handling flat panels in a vacuum
10/09/2003WO2003070610A3 Local store for a wafer processing station
10/09/2003US20030191551 Substrate processing system and method
10/09/2003US20030190823 Method of loading a wafer onto a wafer holder to reduce thermal shock
10/09/2003US20030190223 Configuration for transporting a semiconductor wafer carrier
10/09/2003US20030190220 Substrate transfer shuttle
10/08/2003EP1350574A2 Surface coating apparatus for small pieces
10/08/2003CN2578243Y Chip holder
10/08/2003CN1447175A Conveyer for LCD panel
10/08/2003CN1446743A Parts conveyer and parts conveying method
10/08/2003CN1446742A Conveying method and appts. for substrate
10/08/2003CN1123868C Appts. for laser texturing disks
10/08/2003CN1123519C Integrated intra-bag transfer delivery appts.
10/02/2003US20030187537 Installation for processing a semiconductor wafer and method for operating the installation
10/02/2003US20030185655 Method and apparatus for transferring substrate
10/02/2003US20030185561 Substrate treating apparatus
10/01/2003EP1348229A2 Consecutive deposition system
10/01/2003EP1347926A1 Treatment plant, in particular for painting objects, in particular vehicle bodies
09/2003
09/25/2003WO2002092480A3 Device and method for moving substrates with motion coupling
1 ... 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 ... 124