Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
---|
06/16/2004 | EP1427656A1 Belt apparatus for carrying elements during treatment |
06/16/2004 | EP1343709B1 Facility for processing, especially painting objects, especially vehicle bodies |
06/16/2004 | EP1342311B1 Electrostatic device for holding an electronic component wafer |
06/16/2004 | EP1320874B1 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool |
06/16/2004 | EP1097252A4 Multi-position load lock chamber |
06/16/2004 | EP0970510B1 System for transferring wafers from cassettes to furnaces and method |
06/16/2004 | CN1505108A Substrate processing device and substrate delivery device in the same |
06/16/2004 | CN1504398A Mobile lifting device |
06/16/2004 | CN1504396A Chip delivery device , method of taking out chip and holding chip |
06/15/2004 | US6750946 Processing apparatus for processing sample in predetermined atmosphere |
06/15/2004 | US6750155 Methods to minimize moisture condensation over a substrate in a rapid cycle chamber |
06/15/2004 | US6749390 Integrated tools with transfer devices for handling microelectronic workpieces |
06/10/2004 | WO2004048284A1 Device and method for displacing glass plates during the machining of the same |
06/10/2004 | WO2004048057A1 Substrate-cutting system, substrate-producing apparatus, substrate-scribing method, and substrate-cutting method |
06/10/2004 | WO2004048052A1 Device for machining material plates |
06/10/2004 | WO2003085704A3 Device for accommodating substrates |
06/10/2004 | US20040109982 Preventing damage with separators |
06/10/2004 | US20040109751 Substrate processing system |
06/10/2004 | US20040109748 Removable semiconductor wafer susceptor |
06/10/2004 | CA2506692A1 Device for working material plates |
06/09/2004 | EP1426314A1 Device and method for treating the surfaces of workpieces |
06/09/2004 | EP1426275A1 Mobile lifting device |
06/09/2004 | CN1503759A Conveyor device for transporting workpieces through a processing area for surface treatment of said workpieces |
06/09/2004 | CN1503758A Substrate processing apparatus of transfer type |
06/09/2004 | CN1502535A Electricity discharge and goods taking, stripping charge suppressing method and device, goods taking and receiving device |
06/09/2004 | CA2435717A1 Operating mechanism for a clamping cartridge for panel type products |
06/08/2004 | US6747230 Method and device for sorting wafers |
06/08/2004 | US6746720 Conveyance apparatus and conveyance method |
06/08/2004 | US6746239 Substrate feed chamber and substrate processing apparatus |
06/08/2004 | US6746198 Substrate transfer shuttle |
06/08/2004 | US6746197 Substrate processing apparatus and substrate processing method |
06/08/2004 | US6746196 Vacuum treatment device |
06/08/2004 | US6746195 Semiconductor transfer and manufacturing apparatus |
06/08/2004 | US6745888 Conveyance apparatus |
06/03/2004 | WO2004010476A3 Substrate processing apparatus |
06/03/2004 | US20040107021 Method for providing distributed material management and flow control in an integrated circuit factory |
06/03/2004 | US20040107020 Fabrication system and fabrication method |
06/03/2004 | US20040107014 Apparatus for processing wafers |
06/03/2004 | US20040105798 Sterilizing tunnel for pharmaceutical containers |
06/03/2004 | US20040105742 Semiconductor manufacturing system |
06/03/2004 | US20040105738 Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module |
06/03/2004 | US20040105737 Vacuum process system |
06/03/2004 | US20040104139 Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate |
06/03/2004 | DE10215283B4 Vorrichtung zur Aufnahme von Substraten A device for accommodating substrates |
06/02/2004 | EP0865395B1 Panel support mechanism |
06/02/2004 | CN2619365Y Transplanter of integrated circuit material disc |
06/02/2004 | CN1501445A Semiconductor device manufacturing apparatus employing vacuum system |
06/02/2004 | CN1500710A Plate delivery device and slot limiting part |
06/02/2004 | CN1151910C Workpiece handling robot |
06/01/2004 | US6743329 Sealing mechanism of multi-chamber load-locking device |
06/01/2004 | US6742980 Method for aligning conveying position of object processing system, and object processing system |
05/27/2004 | US20040101385 Semiconductor process apparatus and SMIF pod used therein |
05/27/2004 | US20040099512 Workpiece carrier |
05/27/2004 | DE10348779A1 Transportanlage für Keramikformteile Transport system for ceramic moldings |
05/26/2004 | CN1500285A Consecutive deposition system |
05/26/2004 | CN1500057A Belt appts. for carrying elements during treatment |
05/26/2004 | CN1498789A Automatic guide vehicle, prodn. system of semiconductor device, and prodn. management method of semiconductor device |
05/25/2004 | US6739208 Method of delivering target object to be processed, table mechanism of target object and probe apparatus |
05/21/2004 | WO2004041628A1 Installation for sequentially transporting objects in a goods handling line, in particular for the automotive industry |
05/21/2004 | WO2004041627A1 Aerial conveyor with pendular arms driven along a closed loop circuit |
05/21/2004 | CA2503615A1 Installation for sequentially transporting objects in a goods handling line, in particular for the automotive industry |
05/20/2004 | US20040096300 Loadlock chamber |
05/19/2004 | EP1420437A1 METHOD OF PRODUCING SEMICONDUCTOR THIN FILM, METHOD OF PRODUCING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, INTEGRATED CIRCUIT, ELECTROOPTICAL DEVICE AND ELECTRONIC APPARATUS |
05/19/2004 | CN1496801A Device for transporting ceramic moulded pieces |
05/19/2004 | CN1150608C Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage |
05/19/2004 | CN1150120C Method and device for transport of solid material block in liquid phase |
05/19/2004 | CN1150119C Waffer transport device |
05/19/2004 | CN1150118C Roller arragngement for product to be coated in molten metal bath |
05/18/2004 | US6736588 Integrated large glass handling system |
05/18/2004 | US6736582 Device for manipulating an object for loading and unloading a clean room |
05/18/2004 | US6736148 Utilizing robot which carries semiconductor wafers to processing bays; clean rooms; compact |
05/18/2004 | US6735982 Processing relatively thin glass sheets |
05/13/2004 | WO2004019387A9 Substrate processing system |
05/13/2004 | US20040093108 Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device |
05/13/2004 | US20040091349 Methods for transporting wafers for vacuum processing |
05/13/2004 | US20040091343 Method and device for changing a semiconductor wafer position |
05/13/2004 | US20040091341 Reticle manipulating device |
05/13/2004 | US20040091338 Transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same |
05/13/2004 | US20040091337 Foup loading apparatus for foup opener |
05/12/2004 | EP1417150A2 Edge gripping pre-aligner |
05/12/2004 | CN2615098Y Conveying device for vertical thin plate etching machine |
05/12/2004 | CN1495887A Thin-layer base plate production method, thin-layer base plate transplanting equipment and adsorption and for thin-layer base plate transplantation |
05/12/2004 | CN1495871A Rubber belt transporting roller control method and semiconductor mounting device |
05/12/2004 | CN1495850A Substrate carrier moving device capable of unloading substrate carrier directly from moving transportation equipment |
05/12/2004 | CN1495118A System for transporting chip carrier |
05/12/2004 | CN1495117A Funnel body equipment for transporting cathode-ray tube |
05/12/2004 | CN1495113A Display base tray and device and method for taking-out said display base |
05/11/2004 | US6734950 Load-lock chamber and exposure apparatus using the same |
05/11/2004 | US6733243 Method of interbay transportation |
05/11/2004 | US6732442 Precise mechanism for load port adjustment |
05/06/2004 | US20040083955 Vacuum chamber load lock structure and article transport mechanism |
05/06/2004 | EP1416522A1 THIN−FILM SEMICONDUCTOR DEVICE AND ITS PRODUCTION METHOD |
05/06/2004 | EP1415013A1 Rapid cycle chamber having a top vent with nitrogen purge |
05/06/2004 | DE10248204A1 Device for gripping and clamping object, especially for micro-manufacturing, has electrorheological or magnetorheological liquid container through which controllable electric or magnetic field passes |
05/05/2004 | CN1493511A Automatic material transfer system and method |
05/05/2004 | CN1148471C Electroplating machine |
05/04/2004 | US6729824 Dual robot processing system |
05/04/2004 | US6729823 Processing system for object to be processed |
05/04/2004 | US6729462 Edge grip aligner with buffering capabilities |
04/29/2004 | WO2004035493A1 Method and device for moving and positioning glass plates |