Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
06/2004
06/16/2004EP1427656A1 Belt apparatus for carrying elements during treatment
06/16/2004EP1343709B1 Facility for processing, especially painting objects, especially vehicle bodies
06/16/2004EP1342311B1 Electrostatic device for holding an electronic component wafer
06/16/2004EP1320874B1 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool
06/16/2004EP1097252A4 Multi-position load lock chamber
06/16/2004EP0970510B1 System for transferring wafers from cassettes to furnaces and method
06/16/2004CN1505108A Substrate processing device and substrate delivery device in the same
06/16/2004CN1504398A Mobile lifting device
06/16/2004CN1504396A Chip delivery device , method of taking out chip and holding chip
06/15/2004US6750946 Processing apparatus for processing sample in predetermined atmosphere
06/15/2004US6750155 Methods to minimize moisture condensation over a substrate in a rapid cycle chamber
06/15/2004US6749390 Integrated tools with transfer devices for handling microelectronic workpieces
06/10/2004WO2004048284A1 Device and method for displacing glass plates during the machining of the same
06/10/2004WO2004048057A1 Substrate-cutting system, substrate-producing apparatus, substrate-scribing method, and substrate-cutting method
06/10/2004WO2004048052A1 Device for machining material plates
06/10/2004WO2003085704A3 Device for accommodating substrates
06/10/2004US20040109982 Preventing damage with separators
06/10/2004US20040109751 Substrate processing system
06/10/2004US20040109748 Removable semiconductor wafer susceptor
06/10/2004CA2506692A1 Device for working material plates
06/09/2004EP1426314A1 Device and method for treating the surfaces of workpieces
06/09/2004EP1426275A1 Mobile lifting device
06/09/2004CN1503759A Conveyor device for transporting workpieces through a processing area for surface treatment of said workpieces
06/09/2004CN1503758A Substrate processing apparatus of transfer type
06/09/2004CN1502535A Electricity discharge and goods taking, stripping charge suppressing method and device, goods taking and receiving device
06/09/2004CA2435717A1 Operating mechanism for a clamping cartridge for panel type products
06/08/2004US6747230 Method and device for sorting wafers
06/08/2004US6746720 Conveyance apparatus and conveyance method
06/08/2004US6746239 Substrate feed chamber and substrate processing apparatus
06/08/2004US6746198 Substrate transfer shuttle
06/08/2004US6746197 Substrate processing apparatus and substrate processing method
06/08/2004US6746196 Vacuum treatment device
06/08/2004US6746195 Semiconductor transfer and manufacturing apparatus
06/08/2004US6745888 Conveyance apparatus
06/03/2004WO2004010476A3 Substrate processing apparatus
06/03/2004US20040107021 Method for providing distributed material management and flow control in an integrated circuit factory
06/03/2004US20040107020 Fabrication system and fabrication method
06/03/2004US20040107014 Apparatus for processing wafers
06/03/2004US20040105798 Sterilizing tunnel for pharmaceutical containers
06/03/2004US20040105742 Semiconductor manufacturing system
06/03/2004US20040105738 Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module
06/03/2004US20040105737 Vacuum process system
06/03/2004US20040104139 Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate
06/03/2004DE10215283B4 Vorrichtung zur Aufnahme von Substraten A device for accommodating substrates
06/02/2004EP0865395B1 Panel support mechanism
06/02/2004CN2619365Y Transplanter of integrated circuit material disc
06/02/2004CN1501445A Semiconductor device manufacturing apparatus employing vacuum system
06/02/2004CN1500710A Plate delivery device and slot limiting part
06/02/2004CN1151910C Workpiece handling robot
06/01/2004US6743329 Sealing mechanism of multi-chamber load-locking device
06/01/2004US6742980 Method for aligning conveying position of object processing system, and object processing system
05/2004
05/27/2004US20040101385 Semiconductor process apparatus and SMIF pod used therein
05/27/2004US20040099512 Workpiece carrier
05/27/2004DE10348779A1 Transportanlage für Keramikformteile Transport system for ceramic moldings
05/26/2004CN1500285A Consecutive deposition system
05/26/2004CN1500057A Belt appts. for carrying elements during treatment
05/26/2004CN1498789A Automatic guide vehicle, prodn. system of semiconductor device, and prodn. management method of semiconductor device
05/25/2004US6739208 Method of delivering target object to be processed, table mechanism of target object and probe apparatus
05/21/2004WO2004041628A1 Installation for sequentially transporting objects in a goods handling line, in particular for the automotive industry
05/21/2004WO2004041627A1 Aerial conveyor with pendular arms driven along a closed loop circuit
05/21/2004CA2503615A1 Installation for sequentially transporting objects in a goods handling line, in particular for the automotive industry
05/20/2004US20040096300 Loadlock chamber
05/19/2004EP1420437A1 METHOD OF PRODUCING SEMICONDUCTOR THIN FILM, METHOD OF PRODUCING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, INTEGRATED CIRCUIT, ELECTROOPTICAL DEVICE AND ELECTRONIC APPARATUS
05/19/2004CN1496801A Device for transporting ceramic moulded pieces
05/19/2004CN1150608C Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage
05/19/2004CN1150120C Method and device for transport of solid material block in liquid phase
05/19/2004CN1150119C Waffer transport device
05/19/2004CN1150118C Roller arragngement for product to be coated in molten metal bath
05/18/2004US6736588 Integrated large glass handling system
05/18/2004US6736582 Device for manipulating an object for loading and unloading a clean room
05/18/2004US6736148 Utilizing robot which carries semiconductor wafers to processing bays; clean rooms; compact
05/18/2004US6735982 Processing relatively thin glass sheets
05/13/2004WO2004019387A9 Substrate processing system
05/13/2004US20040093108 Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device
05/13/2004US20040091349 Methods for transporting wafers for vacuum processing
05/13/2004US20040091343 Method and device for changing a semiconductor wafer position
05/13/2004US20040091341 Reticle manipulating device
05/13/2004US20040091338 Transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same
05/13/2004US20040091337 Foup loading apparatus for foup opener
05/12/2004EP1417150A2 Edge gripping pre-aligner
05/12/2004CN2615098Y Conveying device for vertical thin plate etching machine
05/12/2004CN1495887A Thin-layer base plate production method, thin-layer base plate transplanting equipment and adsorption and for thin-layer base plate transplantation
05/12/2004CN1495871A Rubber belt transporting roller control method and semiconductor mounting device
05/12/2004CN1495850A Substrate carrier moving device capable of unloading substrate carrier directly from moving transportation equipment
05/12/2004CN1495118A System for transporting chip carrier
05/12/2004CN1495117A Funnel body equipment for transporting cathode-ray tube
05/12/2004CN1495113A Display base tray and device and method for taking-out said display base
05/11/2004US6734950 Load-lock chamber and exposure apparatus using the same
05/11/2004US6733243 Method of interbay transportation
05/11/2004US6732442 Precise mechanism for load port adjustment
05/06/2004US20040083955 Vacuum chamber load lock structure and article transport mechanism
05/06/2004EP1416522A1 THIN−FILM SEMICONDUCTOR DEVICE AND ITS PRODUCTION METHOD
05/06/2004EP1415013A1 Rapid cycle chamber having a top vent with nitrogen purge
05/06/2004DE10248204A1 Device for gripping and clamping object, especially for micro-manufacturing, has electrorheological or magnetorheological liquid container through which controllable electric or magnetic field passes
05/05/2004CN1493511A Automatic material transfer system and method
05/05/2004CN1148471C Electroplating machine
05/04/2004US6729824 Dual robot processing system
05/04/2004US6729823 Processing system for object to be processed
05/04/2004US6729462 Edge grip aligner with buffering capabilities
04/2004
04/29/2004WO2004035493A1 Method and device for moving and positioning glass plates
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