| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 11/23/2004 | US6820752 Foldable transport rack and methods of use thereof |
| 11/18/2004 | WO2004100254A1 Substrate suction device |
| 11/18/2004 | US20040228719 Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces |
| 11/18/2004 | US20040228708 Storage system for glass offcuts |
| 11/18/2004 | US20040228707 System and method for moving substrates in and out of a manufacturing process |
| 11/18/2004 | US20040227221 Method and apparatus for electrostatically aligning integrated circuits |
| 11/18/2004 | US20040226845 Method and apparatus for transporting articles |
| 11/18/2004 | US20040226510 Semiconductor processing apparatus having lift and tilt mechanism |
| 11/17/2004 | EP1476380A2 Local store for a wafer processing station |
| 11/17/2004 | EP1313540A4 Fluid media particle isolating system |
| 11/17/2004 | CN2656367Y Circuit board clamping and transfering mechanism |
| 11/17/2004 | CN2656366Y Plate bottom screen lifting drive device |
| 11/17/2004 | CN1547520A Apparatus for processing sheet material |
| 11/17/2004 | CN1546739A 双导轨传动装置 Dual-rail gear |
| 11/16/2004 | US6817823 Method, device and system for semiconductor wafer transfer |
| 11/16/2004 | US6817822 Load port, wafer processing apparatus, and method of replacing atmosphere |
| 11/16/2004 | US6817821 Wafer handling for a reflow tool |
| 11/16/2004 | US6817145 Glasshouse strut |
| 11/11/2004 | WO2004097912A1 Substrate transfer device of thin-film forming apparatus |
| 11/11/2004 | WO2004096679A1 Substrate-levitating device |
| 11/11/2004 | WO2004096678A1 Device for transporting a flat substrate in a vacuum chamber |
| 11/11/2004 | US20040225408 Substrate end effector |
| 11/11/2004 | US20040222323 Nozzle device and substrate treating apparatus having using the device |
| 11/11/2004 | US20040221616 Continuous-treatment apparatus and continuous-treatment method |
| 11/10/2004 | EP1475357A1 Fragile material substrate scriber, fragile material substrate processing machine, fragile material substrate polishing device, and fragile material substrate parting system |
| 11/10/2004 | CN1175470C Method and apparatus for supercritical processing of multiple workpieces |
| 11/09/2004 | US6815661 Specimen scanning mechanism adapted for implementation in a FIMS system |
| 11/09/2004 | US6814507 Substrate treating apparatus |
| 11/04/2004 | US20040219006 Lift pin assembly for substrate processing |
| 11/04/2004 | US20040219001 Method and apparatus for transferring a semiconductor substrate |
| 11/03/2004 | EP1473261A1 Assembly for testing portions of glass sheets of any size, and sheet processing unit equipped with such an assembly |
| 11/03/2004 | CN1543673A Robot hand |
| 11/03/2004 | CN1543663A Smif load port interface including smart port door |
| 11/03/2004 | CN1541917A Conveying appliance for plates |
| 11/03/2004 | CN1541913A Transport module |
| 10/28/2004 | US20040213659 Process and device for transferring plate-shaped articles, especially panes of glass |
| 10/28/2004 | US20040213648 Substrate cassette mapper |
| 10/28/2004 | US20040211219 Method of and apparatus for working a glass plate |
| 10/27/2004 | EP1471017A1 Machine for loading and unloading plate-like products accommodated in a storage unit |
| 10/27/2004 | CN2651758Y Holding frame of flexible and hard circuit board |
| 10/27/2004 | CN2651205Y Conductive alarming device of circuit board holdering conveying structure |
| 10/27/2004 | CN2651204Y Sliding-board galvanized hanging tools |
| 10/27/2004 | CN1540737A Substrate retaining tool, mfg. method of electronic instrument, and mfg. method of light mask |
| 10/27/2004 | CN1173387C Substrate processing apparatus |
| 10/26/2004 | US6810297 System and methods for imaging employing a levitating conveyor |
| 10/26/2004 | US6809799 Processing system and device manufacturing method using the same |
| 10/26/2004 | US6809510 Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell |
| 10/26/2004 | US6808352 Method for transporting boards, load port apparatus, and board transport system |
| 10/21/2004 | WO2004090948A1 Methods and apparatus for vertical transfer of semiconductor substrates between cleaning modules |
| 10/21/2004 | WO2004089792A1 Conveyor for plate-shaped members |
| 10/20/2004 | EP1467935A1 Device and method for the surface treatment of parts |
| 10/20/2004 | CN1539027A Rapid cycle chamber having top vent with nitrogen purge |
| 10/20/2004 | CN1537797A Method and appartus for transporting substrate carriers |
| 10/20/2004 | CN1171767C SMIF-compatible open cassette enclosure |
| 10/19/2004 | US6805616 Wafer planarization apparatus and planarization method thereof |
| 10/14/2004 | WO2004008505A3 Semiconductor substrate damage protection system |
| 10/14/2004 | US20040203178 Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry |
| 10/14/2004 | US20040202362 Wafer carrying robot teaching method and teaching plate |
| 10/14/2004 | DE102004008900A1 Vorrichtung und Verfahren zum Verarbeiten von Wafern Apparatus and method for processing of wafers |
| 10/14/2004 | DE102004001350A1 Förder-bzw. Funding respectively. Transportvorrichtung für ein plattenartiges Werkstück Transport device for a plate-like workpiece |
| 10/13/2004 | EP1466847A1 Process and apparatus for laying down glass sheets |
| 10/13/2004 | EP1049641A4 Semiconductor wafer cassette positioning and detection mechanism |
| 10/13/2004 | CN1536617A Manufacturing device and mfg. method |
| 10/13/2004 | CN1171302C Device for loading and unloading substrates |
| 10/13/2004 | CN1170962C Transverse conveyor for electrodes |
| 10/13/2004 | CN1170751C Feeder for integrated circuit chip elements |
| 10/13/2004 | CN1170750C 芯片元件进给器 Chip component feeder |
| 10/13/2004 | CN1170747C Delivery system for stored materials |
| 10/12/2004 | US6802935 Semiconductor chamber process apparatus and method |
| 10/12/2004 | US6802934 Processing apparatus |
| 10/07/2004 | US20040197184 Workpiece transport apparatus |
| 10/07/2004 | US20040197179 Method and apparatus for vertical transfer of semiconductor substrates between cleaning modules |
| 10/07/2004 | US20040197174 Method and apparatus for loading a batch of wafers into a wafer boat |
| 10/07/2004 | US20040197169 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 10/07/2004 | US20040195850 Substrate transfer apparatus and substrate transfer method |
| 10/07/2004 | US20040194268 Rapid cycle chamber having a top vent with nitrogen purge |
| 10/07/2004 | DE10314383A1 Schnelle Wechselstation für den Wafertransport Fast changing station for the wafer transport |
| 10/06/2004 | EP1464598A1 Device for manipulating panels |
| 10/06/2004 | EP1464455A1 Scalar type robot for carrying flat plate-like object; and flat plate-like object processing system |
| 10/06/2004 | EP1463677A1 Substrate processing apparatus with independently configurable integral load locks |
| 10/06/2004 | CN1534728A Device and method for transporting products |
| 10/06/2004 | CN1534726A Substrate processor |
| 10/06/2004 | CN1534386A Supporting structure used for photoetching equipment |
| 10/06/2004 | CN1533970A Conveying belt driving mechanism |
| 10/06/2004 | CN1170400C Automatic guiding transporting apparatus system and its controlling method |
| 10/06/2004 | CN1170303C Wafer loader with locating structure and its installation method |
| 10/06/2004 | CN1170106C Gas-floating device, gas-floating conveying device and heat-treatment device thereof |
| 10/05/2004 | US6799940 Removable semiconductor wafer susceptor |
| 10/05/2004 | US6799939 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers |
| 10/05/2004 | US6799932 Semiconductor wafer processing apparatus |
| 09/30/2004 | WO2004084297A1 Method of conveyance positioning for workpiece processing systems and, workpiece processing system |
| 09/30/2004 | WO2004025713A9 Substrate end effector |
| 09/30/2004 | US20040191046 Substrate processing apparatus |
| 09/30/2004 | US20040191042 Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system |
| 09/30/2004 | US20040191030 Methods and apparatus for transporting substrate carriers |
| 09/30/2004 | US20040191029 Tool for handling wafers and epitaxial growth station |
| 09/30/2004 | US20040191028 Vacuum processing system being able to carry process object into and out of vacuum chamber |
| 09/30/2004 | US20040191027 Device for loading and unloading silicon wafers in an oven from a multiple-cassette station |
| 09/30/2004 | US20040188386 Substrate treating method and apparatus |
| 09/30/2004 | US20040187793 Wafer processing apparatus having dust proof function |