| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
|---|
| 03/19/2009 | DE10262286B4 Leistungsversorgungsvorrichtung zum Erzeugen von Hochfrequenzleistung für eine Plasmaerzeugungsvorrichtung The power supply apparatus for generating high-frequency power to a plasma generating device |
| 03/19/2009 | DE102004049783B4 Vorrichtung zur Bearbeitung von Gütern unter Zuhilfenahme einer elektrischen Entladung Device for treatment of objects with the aid of an electric discharge |
| 03/19/2009 | CA2695649A1 Portable autonomous material processing system |
| 03/18/2009 | EP2037721A1 Plasma processing apparatus, plasma processing method and photoelectric conversion element |
| 03/18/2009 | EP1781836A4 Plasma enhanced chemical vapor deposition system for forming carbon nanotubes |
| 03/18/2009 | EP1704575A4 Method of and apparatus for electrostatic fluid acceleration control of a fluid flow |
| 03/18/2009 | CN101390454A Transferred-arc plasma torch |
| 03/18/2009 | CN101389573A Plasma torch for making synthetic silica |
| 03/18/2009 | CN101389179A Plasmer processing device, plasmer processing method and storage medium |
| 03/18/2009 | CN101389178A Substrate processing apparatus having electrode member |
| 03/17/2009 | US7504643 Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
| 03/17/2009 | US7504136 Method and system for forming a film of material using plasmon assisted chemical reactions |
| 03/17/2009 | US7504040 Plasma processing apparatus and plasma processing method |
| 03/17/2009 | US7503188 Vitrification furnace with dual heating means |
| 03/12/2009 | WO2009010792A3 Plasma reactor |
| 03/12/2009 | US20090068532 Solid oxide type fuel cell and method for manufacturing the same |
| 03/12/2009 | US20090068375 Atmospheric Pressure Plasma |
| 03/12/2009 | US20090068082 Synthesis and characterization of a highly stable amorphous silicon hydride as the product of a catalytic hydrogen plasma reaction |
| 03/12/2009 | US20090065485 Plasma System |
| 03/12/2009 | DE102007039758A1 Einrichtung und Verfahren zur Erzeugung eines Plasmas durch niederfrequente induktive Anregung Apparatus and method for generating a plasma by low-frequency inductive excitation |
| 03/11/2009 | EP2034805A2 Hybrid shield device for a plasma arc torch |
| 03/11/2009 | EP2034490A1 High efficiency collector for laser plasma EUV source |
| 03/11/2009 | EP2032724A1 Method and device for introducing dust into a molten both of a pyrometallurgical installation |
| 03/11/2009 | EP1661171A4 Multiple frequency plasma etch reactor |
| 03/11/2009 | EP1402560B1 Configurable plasma volume etch chamber |
| 03/11/2009 | EP1090159B1 Deposition of coatings using an atmospheric pressure plasma jet |
| 03/11/2009 | CN101385129A Microwave plasma source and plasma processing apparatus |
| 03/11/2009 | CN101384128A Lower electrode assembly for processing substrates |
| 03/11/2009 | CN101383272A Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection |
| 03/11/2009 | CN101383266A Reaction cavity |
| 03/11/2009 | CN100468632C Water-cooling plasma shower |
| 03/11/2009 | CN100468613C Method and apparatus for removing material from a substrate surface |
| 03/10/2009 | US7501161 Placing a substrate on a substrate holder of a plasma chamber; positioning a cover frame adjacent and below a perimeter of the substrate; employing the cover frame to reduce arcing during plasma processing within the plasma chamber; display and/or semiconductor device manufacturing |
| 03/10/2009 | US7500350 Elimination of lifetime limiting mechanism of hall thrusters |
| 03/05/2009 | WO2009028376A1 Top panel and plasma processing apparatus |
| 03/05/2009 | WO2009028314A1 Semiconductor device manufacturing method |
| 03/05/2009 | WO2009028191A1 Apparatus and method for plasma doping treatment |
| 03/05/2009 | WO2009027156A1 System for analysing a low pressure gas by optical emission spectroscopy |
| 03/05/2009 | WO2008009559A3 Device and method for producing and/ or confining a plasma |
| 03/05/2009 | US20090062505 Endless belt, production method thereof and image forming apparatus |
| 03/05/2009 | US20090061170 Anisotropic film and method of manufacturing anisotropic film |
| 03/05/2009 | US20090061109 Process for producing electrophotographic roller member |
| 03/05/2009 | US20090061108 Combinatorial process system |
| 03/05/2009 | US20090057277 Drag tip for a plasma cutting torch |
| 03/05/2009 | US20090057276 Hybrid shield device for a plasma arc torch |
| 03/05/2009 | US20090056628 Process and apparatus for forming nanoparticles using radiofrequency plasmas |
| 03/05/2009 | DE102007041329A1 Plasma torch, has ring anodes, where one ring anode is located at distance for temporary distribution of partial light arc per cathode of ring anode, and ignition anode arranged adjacent to two ring anodes in respective light arc channel |
| 03/04/2009 | EP2030490A1 Method and apparatus for generating a plasma and use of the same |
| 03/04/2009 | EP2029309A2 Plasma arc torch cutting component with optimized water cooling |
| 03/04/2009 | CN101379594A Plasma treatment apparatus |
| 03/04/2009 | CN101378616A Atmosphere plasma cylindrical microwave excitation cavity |
| 03/04/2009 | CN101378615A Microwave plasma flare waveguide excitation cavity |
| 03/04/2009 | CN101378031A Substrate carrier plateform and substrate processing device |
| 03/04/2009 | CN101378007A Plasma processing apparatus |
| 03/04/2009 | CN101376980A Process for improving strip steel wetting property |
| 03/04/2009 | CN101376968A Normal atmosphere plasma strip steel film coating process |
| 03/04/2009 | CN100466161C Gas distribution apparatus used for semiconductor processing |
| 03/04/2009 | CN100466153C Method and apparatus for an improved deposition shield in a plasma processing system |
| 03/04/2009 | CN100466152C Electrode for plasma processes and method for manufacture and application method thereof |
| 03/03/2009 | US7498066 Plasma-assisted enhanced coating |
| 03/03/2009 | US7497922 Plasma-assisted gas production |
| 02/26/2009 | US20090053428 Programmed high speed deposition of amorphous, nanocrystalline, microcrystalline, or polycrystalline materials having low intrinsic defect density |
| 02/26/2009 | DE10119766B4 RF Plasma Reaktor RF plasma reactor |
| 02/25/2009 | EP1187187B1 Plasma processing apparatus |
| 02/25/2009 | CN101374381A Method and system for matching radio frequency impedance |
| 02/25/2009 | CN101373702A Cavity inner lining and reaction cavity |
| 02/24/2009 | US7495239 Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
| 02/24/2009 | US7494574 Methods for natural gas and heavy hydrocarbon co-conversion |
| 02/24/2009 | US7494561 Plasma processing apparatus and method, and electrode plate for plasma processing apparatus |
| 02/19/2009 | WO2009023003A1 Method for automatically controlling a plasmotron operation mode and a plant for carrying out said method |
| 02/19/2009 | WO2009005624A3 Inductively coupled dual zone processing chamber with single planar antenna |
| 02/19/2009 | US20090047446 delivering a processing gas into a chemical vapor deposition chamber through a first gas pathway that includes flow through a first apertures in a blocker plate, reacting the gases to deposit a layer on a substrate, now a etching gas ( F2, CHCL3) is delivered through second aperture to etch the deposit |
| 02/19/2009 | US20090045174 Device for exchanging a nozzle of a vapor plasma burner and nozzle and guard ring |
| 02/19/2009 | US20090045168 Surface Treater for Elongated Articles |
| 02/19/2009 | US20090044910 Plasma Processing Apparatus |
| 02/19/2009 | US20090044909 Plasma processing apparatus |
| 02/19/2009 | US20090044806 Forehead Pad for a Breathing Mask and Method for Making the Same |
| 02/19/2009 | US20090044661 Methods and apparatus for the production of group iv nanoparticles in a flow-through plasma reactor |
| 02/19/2009 | DE102007036592A1 Hochfrequenzgenerator für Ionen- und Elektronenquellen High-frequency generator for ion and electron sources |
| 02/18/2009 | EP2024533A1 Method and apparatus for deposition using pulsed atmospheric pressure glow discharge |
| 02/18/2009 | CN101370959A Sputtering method and sputtering system |
| 02/18/2009 | CN101370958A Sputtering apparatus |
| 02/18/2009 | CN101370350A Plasma processing system, antenna, and use of plasma processing system |
| 02/18/2009 | CN101370349A Plasma processing apparatus, plasma processing method and storage medium |
| 02/18/2009 | CN101370348A Inductance coupling plasma apparatus |
| 02/18/2009 | CN101369518A Plasma species and uniformity control through pulsed VHF operation |
| 02/18/2009 | CN101369515A Reaction cavity |
| 02/17/2009 | US7491955 EUV light source, EUV exposure system, and production method for semiconductor device |
| 02/17/2009 | US7491656 Semiconductor device, method for forming silicon oxide film, and apparatus for forming silicon oxide film |
| 02/17/2009 | US7491430 Deposition method for forming a film including metal, nitrogen and carbon |
| 02/17/2009 | US7491429 Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG) |
| 02/17/2009 | US7491344 Method for etching an object using a plasma and an object etched by a plasma |
| 02/17/2009 | CA2397515C Electrode component thermal bonding |
| 02/12/2009 | WO2009021024A2 Articulated thermal processing torch |
| 02/12/2009 | WO2009019998A1 Electrode for plasma generation |
| 02/12/2009 | WO2009018838A1 Cathode assembly and method for pulsed plasma generation |
| 02/12/2009 | WO2009018837A1 Pulsed plasma device and method for generating pulsed plasma |
| 02/12/2009 | US20090041953 Method for depositing a metallic substrate on a wall |
| 02/12/2009 | US20090041952 Method of depositing silicon oxide films |
| 02/12/2009 | US20090041951 gas flows through gap adjacent to confinement ring to provide physical confinement of plasma |