| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 03/17/2010 | EP2164309A1 Method and device for operating a hollow cathode arc discharge |
| 03/17/2010 | EP2163143A1 Device for the treatment of surfaces with a plasma generated by an electrode over a solid dielectric via a dielectrically impeded gas discharge |
| 03/17/2010 | CN101674703A Cascade source and a method for controlling the cascade source |
| 03/17/2010 | CN101669416A Method for treating plant seeds by plasmas and device for realizing method |
| 03/17/2010 | CN100594428C Radiation source, photoetching device and manufacturing method of device |
| 03/16/2010 | US7679025 Dense plasma focus apparatus |
| 03/16/2010 | US7678430 Method and device for microwave plasma deposition of a coating on a thermoplastic container surface |
| 03/16/2010 | US7678429 Protective coating composition |
| 03/16/2010 | US7678428 Plasma spraying method |
| 03/16/2010 | US7678238 Method and apparatus for underwater decomposition of organic content of electrically conductive aqueous waste solutions |
| 03/16/2010 | US7678225 Focus ring for semiconductor treatment and plasma treatment device |
| 03/16/2010 | CA2405081C Plasma arc torch and method for improved life of plasma arc torch consumable parts |
| 03/11/2010 | WO2010027098A1 Process for producing zinc oxide nanoparticles, and zinc oxide nanoparticles |
| 03/11/2010 | WO2010027013A1 Plasma temperature control apparatus and plasma temperature control method |
| 03/11/2010 | WO2010025904A2 Method for treating a biological material comprising living cells |
| 03/11/2010 | WO2010008711A3 Cathode with inner and outer electrodes at different heights |
| 03/11/2010 | WO2009158192A3 Rf power delivery system in a semiconductor apparatus |
| 03/11/2010 | WO2009151270A3 Plasma source |
| 03/11/2010 | WO2009131374A3 Plasma generating device |
| 03/11/2010 | US20100062183 Method of producing gas barrier film |
| 03/11/2010 | US20100059369 Plasma generating apparatus rendered electrically neutral on the periphery of plasma gun |
| 03/10/2010 | EP1396554B1 Plasma cvd apparatus |
| 03/10/2010 | EP1090407B1 Semiconductor process chamber electrode |
| 03/10/2010 | CN201422194Y Water inlet and return device of plasma generator |
| 03/10/2010 | CN101668378A Discharge equipment |
| 03/09/2010 | US7674504 Article with lubricated surface and method |
| 03/09/2010 | US7674339 Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method |
| 03/04/2010 | WO2010025099A2 High density helicon plasma source for wide ribbon ion beam generation |
| 03/04/2010 | WO2010024216A1 Method and apparatus for processing exhaust gas |
| 03/04/2010 | WO2010024128A1 Plasma surface processing method and plasma surface processing apparatus |
| 03/04/2010 | WO2010023878A1 Thin film-forming sputtering device |
| 03/04/2010 | WO2010022871A1 Non-thermal plasma for wound treatment and associated apparatus and method |
| 03/04/2010 | WO2009137272A3 Flowable dielectric equipment and processes |
| 03/04/2010 | US20100056652 Processes for forming hydrophilic membranes and porous membranes thereof |
| 03/04/2010 | US20100055533 Barrier coatings for interconnects; related devices, and methods of forming |
| 03/04/2010 | US20100055441 Microwave plasma cvd of nano structured tin/carbon composites |
| 03/04/2010 | US20100055347 Activated gas injector, film deposition apparatus, and film deposition method |
| 03/04/2010 | US20100055346 PECVD RELEASE LAYER FOR Ni TEMPLATE |
| 03/04/2010 | US20100055345 High density helicon plasma source for wide ribbon ion beam generation |
| 03/04/2010 | US20100053576 Radiation source, lithographic apparatus and device manufacturing method |
| 03/04/2010 | US20100052539 Portable microwave plasma generator capable of generating plasma with low electric power |
| 03/04/2010 | US20100051577 Copper layer processing |
| 03/04/2010 | DE202008013560U1 Vorrichtung zur Erzeugung eines Plasmastrahls An apparatus for generating a plasma beam |
| 03/04/2010 | DE10296978B4 Elektrodenteil für eine Plasmabehandlungsvorrichtung, Plasmabehandlungsvorrichtung und Plasmabehandlungsverfahren Electrode member for a plasma processing apparatus, plasma processing apparatus and plasma processing method |
| 03/04/2010 | DE102008045501A1 Verfahren zum Regeln eines Energieeintrags eines Pulslichtbogenplasmas bei einem Fügeprozess und Vorrichtung A method of controlling an energy input of a pulse arc plasma during a joining process and apparatus |
| 03/04/2010 | DE102008044781A1 Ions accelerating method for e.g. ion beam- and tumor therapy, involves accelerating ions penetrating titanium foils, at high energy, and decelerating ions that are not penetrating titanium foils, at smaller energy at front side of foils |
| 03/04/2010 | DE102008044661A1 Elektronenabsauger Elektronenabsauger |
| 03/03/2010 | EP2160081A1 Non-thermal plasma for wound treatment and associated apparatus and method |
| 03/03/2010 | EP1540695B1 A method and apparatus for the compensation of edge ring wear in a plasma processing chamber |
| 03/03/2010 | EP1110237B1 Device and method for the high-frequency etching of a substrate using a plasma etching installation and device and method for igniting a plasma and for pulsing the plasma output or adjusting the same upwards |
| 03/03/2010 | CN101662880A Portable microwave plasma generator capable of generating plasma with low electric power |
| 03/03/2010 | CN100593361C Plasma processing apparatus and method |
| 03/02/2010 | US7670454 Plasma processing apparatus |
| 02/26/2010 | CA2638667A1 Method and apparatus for spacecraft propulsion with a field shield protection |
| 02/25/2010 | WO2010021938A2 Showerhead and shadow frame |
| 02/25/2010 | WO2010021890A2 Edge rings for electrostatic chucks |
| 02/25/2010 | WO2010021539A1 Device for generating a plasma discharge for patterning the surface of a substrate |
| 02/25/2010 | WO2010021382A1 Microwave introduction mechanism, microwave plasma source and microwave plasma processing device |
| 02/25/2010 | WO2010020345A1 Catalytic oxidation of hydrogen chloride with oxygen in non-thermal plasma |
| 02/25/2010 | WO2010001036A3 Electron cyclotron resonance ion generator |
| 02/25/2010 | WO2009143271A3 Skull reactor |
| 02/25/2010 | WO2009137669A3 Apparatus, system and method for controlling a matching network |
| 02/25/2010 | US20100048975 Large-volume elimination of airborne chemical and biological warfare agents by making use of a microwave plasma burner |
| 02/25/2010 | US20100048076 Deposition of particles on a substrate |
| 02/25/2010 | US20100048029 Surface Preparation for Thin Film Growth by Enhanced Nucleation |
| 02/25/2010 | US20100046688 Magnetic confinement device |
| 02/25/2010 | US20100046687 Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
| 02/25/2010 | US20100044352 Apparatus for uniformly generating atmospheric pressure plasma |
| 02/25/2010 | US20100043974 Plasma processing method and apparatus |
| 02/24/2010 | EP2157837A1 Control device and method for a steam cutting apparatus |
| 02/24/2010 | EP1377138B1 Device and control method for micro wave plasma processing |
| 02/24/2010 | EP1371271B1 Plasma installation and method for producing a functional coating |
| 02/24/2010 | CN201414256Y Large-area planar normal-pressure radio frequency cold plasma system |
| 02/24/2010 | CN101658076A Plasma processing apparatus |
| 02/24/2010 | CN100591455C Plasma arc torch consumables cartridge with body and plasma arc cutting system |
| 02/23/2010 | US7666480 plasma enhanced chemical vapor deposition (PECVD); batch processing; uniform thickness |
| 02/23/2010 | US7666479 pressurization; cyclic flow |
| 02/23/2010 | US7666478 Applying alternative voltage difference between electrodes, generating and maintaining cold atmospheric pressure plasma in volumetric space between, and depositing coating on surface to immobilize |
| 02/23/2010 | US7666474 Plasma enhanced atomic layer deposition by alternately and sequentially pulsing a carbon-containing precursor (methane, CH4), a metal precursor (tantalum fluoride, TaF5), and plasma-excited argon gas into a reaction chamber accommodating the substrate; thin films; transistor electrodes |
| 02/23/2010 | US7666471 Polyimide substrate and method of manufacturing printed wiring board using the same |
| 02/23/2010 | US7665416 Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles |
| 02/18/2010 | WO2010019197A2 A composite showerhead electrode assembly for a plasma processing apparatus |
| 02/18/2010 | WO2010019196A2 Temperature controlled hot edge ring assembly |
| 02/18/2010 | WO2010018786A1 Plasma control device |
| 02/18/2010 | WO2010018783A1 Gas reforming device |
| 02/18/2010 | WO2009137405A3 Plasma reactor electrostatic chuck having a coaxial rf feed and multizone ac heater power transmission through the coaxial feed |
| 02/18/2010 | WO2009003613A8 Device for the treatment of surfaces with a plasma generated by an electrode over a solid dielectric via a dielectrically impeded gas discharge |
| 02/18/2010 | US20100041829 Polymer string |
| 02/18/2010 | US20100041238 Tunable multi-zone gas injection system |
| 02/18/2010 | US20100040802 Method and apparatus for production of metal film or the like |
| 02/18/2010 | US20100040516 High-voltage plasma producing apparatus |
| 02/18/2010 | US20100039707 Si-o containing hydrogenated carbon film, optical device including the same, and method for manufacturing the si-o containing hydrogenated carbon film and the optical device |
| 02/18/2010 | US20100039036 Initiation method for abnormal glow plasma discharge in a liquid-phase medium and apparatus for its implementation |
| 02/18/2010 | DE102008038032A1 Katalytische Oxidation von Chlorwasserstoff mit Sauerstoff im nichtthermischen Plasma Catalytic oxidation of hydrogen chloride with oxygen in the non-thermal plasma |
| 02/18/2010 | DE102008037655A1 High-pressure discharge lamp, has electrode arranged inside bulb, manufactured from copper and fitting into water basin, where air atmosphere or inert gas atmosphere is formed above electrode |
| 02/17/2010 | EP2154937A2 Plasma system |
| 02/17/2010 | EP2153851A1 Method for treating water and aqueous solutions by means of a gas-discharge plasma and a device for carrying out said method |
| 02/17/2010 | EP2153705A1 Enhancing gas-phase reaction in a plasma using high intensity and high power ultrasonic acoustic waves |
| 02/17/2010 | EP2153704A1 Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves |
| 02/17/2010 | CN201409253Y Anode-layer-linear ion source |